CN217019144U

CN217019144U - High-frequency die bonding welding head movement mechanism

Info

Publication number: CN217019144U
Application number: CN202220770814.3U
Authority: CN
Inventors: 李金龙
Original assignee: Youguang Intelligent Semiconductor Technology Shenzhen Co ltd
Current assignee: Youguang Intelligent Semiconductor Technology Shenzhen Co ltd
Priority date: 2022-04-02
Filing date: 2022-04-02
Publication date: 2022-07-22
Anticipated expiration: 2032-04-02

Abstract

The application relates to a high-frequency die bonding welding head movement mechanism which comprises a motor mounting seat, a welding head, a theta-axis movement assembly and a Z-axis movement assembly. The theta-axis movement assembly comprises a theta-axis movement motor, a Z-axis fixing block, a theta-axis linear guide rail and a Z-axis sliding block, the theta-axis movement motor is provided with a first output shaft, and the welding head is installed on the Z-axis sliding block. A first output shaft of the theta axis movement motor drives a Z axis fixing block to rotate in the theta axis direction, a Z axis sliding block slides on a theta axis linear guide rail of the Z axis fixing block, a welding head on the Z axis sliding block is controlled by a Z axis movement assembly to reciprocate on the theta axis linear guide rail in the vertical direction, the theta axis movement assembly and the Z axis movement assembly are both installed on a motor installation seat and operate independently, so that the movement inertia of a theta axis is reduced, the operation stability of the theta axis linear guide rail is improved, the maintenance cost of the welding head movement mechanism is reduced, the high precision and high frequency transfer of the welding head to a chip are realized.

Description

High-frequency die bonding welding head movement mechanism

Technical Field

The application relates to the field of semiconductor die bonding, in particular to a high-frequency die bonding welding head movement mechanism.

Background

The welding head movement mechanism of the die bonder is required to realize high-speed reciprocating swing, the vibration of the swing arm is reduced as much as possible, and the requirements on the structural strength and the vibration performance of the welding head movement mechanism, the swing arm and the working base plate are high. The welding head moving mechanism is one of important parts of the die bonder, and the welding head moving mechanism has the function of peeling off granular chips on the WAFER ring one by matching with the thimble mechanism and the vacuum mechanism, and placing and fixing the chips on a designated position of a semiconductor support, wherein the chips are coated with glue or have viscosity or are directly placed on the semiconductor support. The welding head movement mechanism has the characteristics of high speed, high repetition precision and large inertia force, and simultaneously, the requirements of high positioning precision, small vibration displacement and small pressure are required to be met. The welding head movement mechanism needs to accurately and rapidly move to and fro between a crystal taking position and a crystal fixing position to complete actions such as absorption, transmission, fixation and the like of a chip.

In the related technical means, the welding head movement mechanism completes the process of moving at two positions, namely a crystal taking position and a crystal fixing position, and two motors are generally adopted for driving respectively, wherein one motor is arranged on the movement mechanism driven by the other motor to move along. The chip transfer is completed mainly by adopting a theta-axis linear guide rail slide block and four-bar mechanism form and using a cross roller guide rail, a precision bearing and the like. The high precision requirement of the welding head movement mechanism is mainly ensured by the precision of a precision bearing and a crossed roller guide rail. In the process that a motor drives a swing arm shaft to vertically move so that a welding head moves up and down on a Z shaft, a cross roller guide rail is generally used for carrying out precision control on the welding head, and in the process that a roller in the cross roller guide rail reciprocates at a high speed, because the mass of a moving part in the transmission mode is large, the motion inertia of the welding head is correspondingly increased, and the cross roller guide rail is very easy to wear after short-distance high-frequency motion after the speed reaches a certain height, the motion precision of a welding head motion mechanism in the Z shaft direction is gradually reduced, so that the welding head motion mechanism needs to be frequently maintained and replaced to meet the precision requirement of the welding head motion mechanism, and the welding head motion mechanism has the problem of high maintenance cost.

SUMMERY OF THE UTILITY MODEL

In order to reduce the maintenance cost of the welding head movement mechanism, the application provides the high-frequency die bonding welding head movement mechanism.

The application provides a high frequency solid brilliant bonding tool motion, adopts following technical scheme.

A high frequency die bond bonding tool motion mechanism, comprising:

a motor mount;

the welding head is used for transferring the chip from the chip taking position to the chip fixing position;

the theta-axis motion assembly is used for controlling the welding head to swing back and forth between a crystal taking position and a crystal fixing position and is mounted on the motor mounting seat, the theta-axis motion assembly comprises a theta-axis motion motor, the theta-axis motion motor is provided with a first output shaft, a Z-axis fixing block is coaxially fixed on the first output shaft, the Z-axis fixing block is provided with a theta-axis linear guide rail, a Z-axis sliding block is arranged on the theta-axis linear guide rail in a sliding manner, and the welding head is mounted on the Z-axis sliding block;

and the Z-axis motion assembly is used for controlling the Z-axis sliding block to reciprocate along the vertical direction on the theta-axis linear guide rail and is arranged on the motor mounting seat.

Through adopting above-mentioned technical scheme, the first output shaft of theta axle motion motor drives Z axle fixed block and rotates at theta axle direction, and Z axle motion subassembly control Z axle sliding block is along vertical direction reciprocating motion on theta axle linear guide, and Z axle motion subassembly and theta axle motion subassembly are all installed in the motor mount pad, compare in a motor and install and do the follow motion on another motor drive's motion, lead to the quality of moving part big, the motion inertia of bonding tool also corresponding increase. The cross roller guide rail is used for guiding the operation of the welding head in the Z-axis direction, and because the roller in the cross roller guide rail is abraded due to inertia extrusion in the process of high-speed reciprocating motion, the roller is subjected to elastic fatigue in the periodic torque change process, the roundness of the roller is reduced, meanwhile, the guide rail surface in contact with the roller is easily abraded, and the motion precision of the welding head in the Z-axis direction is gradually reduced. When the welding head performs high-frequency reciprocating motion in the theta axis direction, the precision of the welding head is reduced particularly obviously. In this technical scheme, theta axle motion subassembly and Z axle motion subassembly are all installed in the motor mount pad, and the two independent operation. A first output shaft of the theta axis movement motor drives a Z axis fixing block to rotate in the theta axis direction, a welding head is installed on a Z axis sliding block of the theta axis movement assembly, the Z axis sliding block slides on a theta axis linear guide rail of the Z axis fixing block, the Z axis movement assembly controls the welding head on the Z axis sliding block to reciprocate on the theta axis linear guide rail in the vertical direction, therefore, the movement inertia of the theta axis is reduced, the operation stability of the theta axis linear guide rail is improved, the maintenance cost of a welding head movement mechanism is reduced, and high-precision and high-frequency transfer of the welding head to a chip is achieved.

Optionally, the motor mounting seat includes a θ -axis mounting plate and a Z-axis mounting plate detachably connected to the θ -axis mounting plate, a length direction of the θ -axis mounting plate is perpendicular to a length direction of the Z-axis mounting plate, and the θ -axis movement motor is mounted at a top end of the θ -axis mounting plate; the Z-axis motion assembly comprises a Z-axis motion motor, the Z-axis motion motor is provided with a second output shaft, a Z-axis eccentric rod is coaxially fixed on the second output shaft, one end of the Z-axis eccentric rod is rotatably provided with a Z-axis connecting rod, one end of the Z-axis connecting rod, which is far away from the Z-axis eccentric rod, is rotatably provided with a Z-axis driving block, and the Z-axis driving block is connected with the Z-axis mounting plate in a sliding manner along the vertical direction; one side of the Z-axis driving block, which is far away from the Z-axis mounting plate, is a driving part, the driving part is rotatably provided with a driving rod, and one end of the driving rod, which is far away from the driving part, is fixedly connected with the Z-axis sliding block.

Through adopting above-mentioned technical scheme, the motor mount pad divide into two and mutually perpendicular to make theta axle motion motor and Z axle motion motor can install in equidirectional not, improve space utilization. The second output shaft of Z axle motion motor drives Z axle eccentric bar rotatory to make Z axle eccentric bar drive Z axle connecting rod drive Z axle drive block and slide on Z axle mounting plate along vertical direction, the drive division of Z axle drive block passes through the actuating lever and drives Z axle sliding block along vertical direction motion, thereby realizes the function of bonding tool at Z axle reciprocating motion.

Optionally, the central axis of the driving rod and the central axis of the first output shaft are located on the same vertical line.

Through adopting above-mentioned technical scheme, the central axis of actuating lever and the central axis of first output shaft are located same vertical line to guarantee that the rotatory in-process of Z axle sliding block by the drive of theta axle motion motor, the center of rotation of Z axle sliding block and the central axis coincidence of actuating lever. Compared with the rotating center of the Z-axis sliding block and the central axis of the driving rod, the central axis of the driving rod can incline when the theta-axis movement motor drives the Z-axis sliding block to rotate, so that the stroke of the driving rod driving the Z-axis sliding block is difficult to control, and the control precision of the welding head is influenced. In the technical scheme, the rotation center of the Z-axis sliding block coincides with the central axis of the driving rod, so that the Z-axis sliding block can rotate around the central axis of the driving rod, the stroke of the driving rod for driving the Z-axis sliding block cannot be influenced, and the stability of the welding head in the motion process is improved.

Optionally, the Z axle fixed block has and is close to the installation department of theta axle motion motor and is used for compressing tightly the portion that compresses tightly of first output shaft, compress tightly the portion with the connection can be dismantled to the installation department, the installation department is provided with the owner and embraces the groove tightly, the portion that compresses tightly is provided with vice groove of holding tightly, the owner hold tightly the groove with vice groove of holding tightly encloses to form and embraces the space of holding tightly, first output shaft is located in the space of holding tightly, vice groove lateral wall of holding tightly the groove with the main groove lateral wall of holding tightly all support press in the outer peripheral face of first output shaft.

Through adopting above-mentioned technical scheme, first output shaft is located and embraces the space tightly, and the groove lateral wall in the groove is all supported and is pressed in the outer peripheral face of first output shaft with the groove lateral wall in the main groove of embracing tightly to vice groove of embracing tightly, and the portion that compresses tightly first output shaft in the installation department, and the portion that compresses tightly can dismantle with the installation department and be connected to make installing in dismantling of Z axle fixed block simpler.

Optionally, the outer circumferential surface of the first output shaft is provided with a coaxial anti-slip groove for increasing the static friction factor.

By adopting the technical scheme, the outer peripheral surface of the first output shaft is provided with the coaxial anti-skidding groove, so that the groove side wall of the auxiliary holding groove and the groove side wall of the main holding groove have larger friction force in the process of abutting against the outer peripheral surface of the first output shaft, and the generation of skidding is reduced in the process of driving the Z-axis fixing block by the theta-axis movement motor.

Optionally, the Z-axis driving block is connected with the Z-axis mounting plate in a sliding manner through a Z-axis linear guide rail along the vertical direction, and the Z-axis linear guide rail is parallel to the θ -axis linear guide rail.

Through adopting above-mentioned technical scheme, Z axle drive block slides along vertical direction and Z axle mounting plate through Z axle linear guide and is connected to make the operation of Z axle drive block on Z axle mounting plate more stable, Z axle linear guide is parallel with theta axle linear guide, thereby guarantees that Z axle motion motor drive Z axle eccentric bar moves more stably.

Optionally, the Z-axis eccentric rod has a counterweight segment, a connecting segment, and a Z-axis mounting hole, and the Z-axis mounting hole is located between the counterweight segment and the connecting segment; the connecting section is rotationally connected with the Z-axis connecting rod, and the second output shaft penetrates through the Z-axis mounting hole and is coaxially and fixedly connected with the Z-axis eccentric rod.

Through adopting above-mentioned technical scheme, Z axle mounting hole is located between counter weight section and the linkage segment, and the second output shaft drives Z axle eccentric bar pivoted in-process, and the rotatory eccentric moment of linkage segment and Z axle eccentric bar can be balanced to the counter weight section to guarantee the vibration and the noise of the operation in-process of Z axle motion subassembly, improve the operating stability of Z axle motion subassembly.

Optionally, the welding head has a fixed section and a clamping section, the clamping section is detachably connected with the fixed section, one end of the fixed section, away from the clamping section, is installed on the Z-axis sliding block, and one end of the clamping section, away from the fixed section, is installed with the crystal-taking probe.

Through adopting above-mentioned technical scheme, get brilliant probe and can absorb the function to the chip, because the centre gripping section can be dismantled with the canned paragraph and be connected, at the in-process that needs to change get brilliant probe, can directly take off the centre gripping section from the canned paragraph, and needn't dismantle whole bonding tool, improve the maintenance efficiency of bonding tool.

Optionally, the clamping section is made of carbon fiber, and the fixing section is made of aluminum alloy.

By adopting the technical scheme, the fixed section and the Z-axis sliding block have better rigidity compared with the fixed section made of the aluminum alloy material. The centre gripping section is kept away from the rotation center of bonding tool, and the centre gripping section is made by carbon fiber material so that the centre gripping section has less moment of inertia in the wobbling in-process in comparison with the aluminum alloy material, and the centre gripping section is more stable at the operation in-process, consequently can improve the operation precision of bonding tool.

Optionally, the mounting portion is provided with an angle shielding plate, and an end face of the θ -axis mounting plate, which is far away from the θ -axis motion motor, is provided with an angle sensor for sensing a rotation angle of the angle shielding plate.

By adopting the technical scheme, the angle sensor can sense the rotation angle of the angle shielding plate, so that the angle change of the welding head in the swing process is fed back in real time, and the position accuracy of the welding head in the operation process is improved.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the theta axis motion assembly and the Z axis motion assembly are both arranged on the motor mounting seat and operate independently. A first output shaft of the theta-axis motion motor drives a Z-axis fixed block to rotate in the theta-axis direction, a welding head is mounted on a Z-axis sliding block of the theta-axis motion assembly, the Z-axis sliding block slides on a theta-axis linear guide rail of the Z-axis fixed block, and the Z-axis motion assembly controls the welding head on the Z-axis sliding block to reciprocate on the theta-axis linear guide rail in the vertical direction, so that the motion inertia of the theta axis is reduced, the running stability of the theta-axis linear guide rail is improved, the maintenance cost of a welding head motion mechanism is reduced, and the high-precision and high-frequency transfer of the welding head to a chip is realized;

a second output shaft of the Z-axis movement motor drives the Z-axis eccentric rod to rotate, so that the Z-axis eccentric rod drives the Z-axis connecting rod to drive the Z-axis driving block to slide on the Z-axis mounting plate along the vertical direction, and a driving part of the Z-axis driving block drives the Z-axis sliding block to move along the vertical direction through the driving rod, so that the function of reciprocating movement of the welding head on the Z axis is realized;

and 3, the rotation center of the Z-axis sliding block coincides with the central axis of the driving rod, so that the Z-axis sliding block can rotate around the central axis of the driving rod, the stroke of the driving rod for driving the Z-axis sliding block cannot be influenced, and the stability of the welding head in the motion process is improved.

Drawings

FIG. 1 is a schematic view of the overall mechanism of a horn movement mechanism in an embodiment of the present application;

FIG. 2 is a schematic view of the installation structure of the Z-axis fixing block in the embodiment of the present application;

fig. 3 is a schematic view of the structure of a bonding tool in an embodiment of the present application.

Description of the reference numerals:

100. a motor mount; 110. a theta axis mounting plate; 111. an angle sensor; 120. a Z-axis mounting plate;

200. a welding head; 210. a fixed section; 220. a clamping section; 230. taking a crystal probe;

300. a theta axis motion assembly; 310. a theta axis motion motor; 311. a first output shaft; 3111. a coaxial anti-slip groove; 320. a Z-axis fixing block; 321. an installation part; 3211. a main enclasping groove; 322. a pressing part; 3221. an auxiliary holding groove; 323. an angle shielding plate; 330. a theta axis linear guide rail; 340. a Z-axis sliding block;

400. a Z-axis motion assembly; 410. a Z-axis motion motor; 411. a second output shaft; 420. a Z-axis eccentric rod; 421. a counterweight segment; 422. a connection section; 423. a Z-axis mounting hole; 430. a Z-axis link; 440. a Z-axis drive block; 441. a drive section; 442. a drive rod; 450. and a Z-axis linear guide rail.

Detailed Description

The present application is described in further detail below with reference to figures 1-3.

The embodiment of the application discloses a high-frequency die bonding welding head movement mechanism.

Referring to fig. 1, a high-frequency die bonding welding head 200 movement mechanism includes a motor mounting base 100, a θ -axis movement assembly 300 and a Z-axis movement assembly 400 are mounted on the motor mounting base 100, a welding head 200 for transferring a chip from a die taking position to a die bonding position is mounted on the θ -axis movement assembly 300, the θ -axis movement assembly 300 is used for controlling the welding head 200 to swing back and forth between the die taking position and the die bonding position, and the Z-axis movement assembly 400 is used for controlling the welding head 200 to move back and forth in a vertical direction. The motor mounting base 100 comprises a theta axis mounting plate 110 and a Z axis mounting plate 120, the theta axis mounting plate 110 is detachably connected with the Z axis mounting plate 120, and the length direction of the theta axis mounting plate 110 is perpendicular to the length direction of the Z axis mounting plate 120, so that the theta axis movement motor 310 and the Z axis movement motor 410 can be mounted in different directions, and the space utilization rate is improved. In the present embodiment, the θ -axis mounting plate 110 is disposed horizontally, and the Z-axis mounting plate 120 is disposed vertically.

Referring to fig. 1, the theta motion assembly 300 includes a theta motion motor 310, a Z fixation block 320, a theta linear guide 330, and a Z sliding block 340. The theta axis movement motor 310 is mounted on the top end of the theta axis mounting plate 110, and the theta axis movement motor 310 has a first output shaft 311 directed vertically downward. The upper surface of the theta axis mounting plate 110 is provided with an avoidance hole which penetrates through the theta axis mounting plate from top to bottom, and the first output shaft 311 penetrates through the avoidance hole at the top end of the theta axis mounting plate 110 and is coaxially and fixedly connected with the Z axis fixing block 320. The Z-axis fixing block 320 is substantially rectangular, and the θ -axis linear guide 330 is fixed to a side of the Z-axis fixing block 320 away from the first output shaft 311 by bolts. In the present embodiment, the θ -axis linear guides 330 are provided in two sets arranged parallel and vertically to each other. The Z-axis sliding block 340 is slidably mounted on the θ -axis linear guide rail 330 so that the Z-axis sliding block 340 can perform sliding movement in the vertical direction along the θ -axis linear guide rail 330, and the welding head 200 is detachably fixed on the side of the Z-axis sliding block 340 away from the θ -axis linear guide rail 330 through a bolt.

Referring to fig. 1, the Z-axis moving assembly 400 includes a Z-axis moving motor 410, a Z-axis eccentric rod 420, a Z-axis link rod 430, and a Z-axis driving block 440, the Z-axis moving motor 410 being mounted to a side of the Z-axis mounting plate 120 away from the theta-axis moving assembly 300, the Z-axis moving motor 410 having a second output shaft 411 horizontally facing the side of the theta-axis moving assembly 300. The side of the Z-axis mounting plate 120 is provided with a yielding hole with two sides penetrating through, and the second output shaft 411 passes through the yielding hole on the side of the Z-axis mounting plate 120 and is coaxially and fixedly connected with the Z-axis eccentric rod 420.

Referring to fig. 1, the Z-axis eccentric rod 420 is generally disposed in a long bar shape, and the Z-axis eccentric rod 420 has a weight section 421, a connection section 422, and a Z-axis mounting hole 423 between the weight section 421 and the connection section 422. The second output shaft 411 passes through the Z-axis mounting hole 423 and is coaxially and fixedly connected with the Z-axis eccentric rod 420, so that the Z-axis motion motor 410 can drive the Z-axis eccentric rod 420 to rotate. The weight section 421 can balance the rotating eccentric moment of the Z-axis eccentric rod 420, thereby ensuring vibration and noise during the operation of the Z-axis moving assembly 400 and improving the operation stability of the Z-axis moving assembly 400.

Referring to fig. 1, one end of the Z-axis link 430 is rotatably connected to the connection section 422 of the Z-axis eccentric rod 420, and the other end of the Z-axis link 430 is rotatably connected to the Z-axis drive block 440. The Z-axis driving block 440 is slidably connected to the Z-axis mounting plate 120 through a Z-axis linear guide 450 along the vertical direction, and the Z-axis linear guide 450 is parallel to the θ -axis linear guide 330, so that the Z-axis motion motor 410 can drive the Z-axis eccentric rod 420 to move more stably. The side of the Z-axis driving block 440 away from the Z-axis mounting plate 120 is a driving portion 441, the driving portion 441 is provided with a driving rod 442, and the central axis of the driving rod 442 and the central axis of the first output shaft 311 are located on the same vertical line, so that the rotation center of the Z-axis sliding block 340 coincides with the central axis of the driving rod 442 in the process that the Z-axis sliding block 340 is driven to rotate by the θ -axis movement motor 310. One end of the driving rod 442 is rotatably disposed with the driving portion 441, and the other end of the driving rod 442 is fixedly connected with the Z-axis sliding block 340.

Referring to fig. 1, a first output shaft 311 of the θ -axis movement motor 310 drives a Z-axis fixing block 320 to rotate in the θ -axis direction, and the Z-axis fixing block 320 drives a welding head 200 located on a Z-axis sliding block 340 to rotate in the θ -axis direction; the second output shaft 411 of the Z-axis movement motor 410 drives the Z-axis eccentric rod 420 to rotate, so that the Z-axis eccentric rod 420 drives the Z-axis connecting rod 430 to drive the Z-axis driving block 440 to slide on the Z-axis mounting plate 120 along the vertical direction, and the driving portion 441 of the Z-axis driving block 440 drives the Z-axis sliding block 340 to move along the vertical direction through the driving rod 442, thereby realizing the function of the welding head 200 reciprocating in the Z-axis. The theta axis motion assembly 300 and the Z axis motion assembly 400 are both mounted on the motor mounting base 100 and operate independently, so that the motion inertia of the theta axis is reduced, the operation stability of the theta axis linear guide rail 330 is improved, the maintenance cost of the motion mechanism of the welding head 200 is reduced, and the high-precision and high-frequency transfer of the welding head 200 to the chip is realized.

Referring to fig. 2, the Z-axis fixing block 320 has a mounting portion 321 and a pressing portion 322, the pressing portion 322 being detachably connected to the mounting portion 321, the mounting portion 321 being located at a side close to the θ -axis movement motor 310. The upper end surface of the mounting portion 321 is provided with a main clasping groove 3211, the pressing portion 322 is substantially rectangular, and the pressing portion 322 is substantially rectangular. The horizontal cross sections of the main clasping groove 3211 and the auxiliary clasping groove 3221 are semicircular. The main clasping groove 3211 and the auxiliary clasping groove 3221 are enclosed to form a clasping space, the first output shaft 311 is located in the clasping space, and the outer circumferential surface of the first output shaft 311 is provided with a coaxial anti-slip groove 3111, so that the groove side wall of the auxiliary clasping groove 3221 and the groove side wall of the main clasping groove 3211 are pressed against the outer circumferential surface of the first output shaft 311, and the friction force is larger. By locking the pressing portion 322 to the mounting portion 321, the groove sidewall of the secondary clasping groove 3221 and the groove sidewall of the primary clasping groove 3211 both abut against the outer peripheral surface of the first output shaft 311, so that the pressing portion 322 presses the first output shaft 311 against the mounting portion 321.

Referring to fig. 3, the horn 200 is hollow, thereby reducing the self-weight of the horn 200 and thus reducing the moment of inertia of the horn 200 during movement. The welding head 200 is provided with a fixed section 210 and a clamping section 220 detachably connected with the fixed section 210, in the embodiment, the clamping section 220 is made of carbon fiber, and the fixed section 210 is made of aluminum alloy, so that the clamping section 220 has smaller inertia moment compared with aluminum alloy in the swinging process, and the clamping section 220 is more stable in the operation process, and therefore, the operation precision of the welding head 200 can be improved. The end of the fixed section 210 away from the clamping section 220 is mounted on the Z-axis sliding block 340, the end of the clamping section 220 away from the fixed section 210 is mounted with the crystal taking probe 230, and the crystal taking probe 230 can suck the chip. In the process of replacing the crystal taking probe 230, the clamping section 220 is detachably connected with the fixed section 210, so that the clamping section 220 can be directly taken down from the fixed section 210 without disassembling the whole welding head 200, and the maintenance efficiency of the welding head 200 is improved.

Referring to fig. 1, an angle shielding plate 323 is fixedly mounted on the mounting portion 321 through bolts, the angle shielding plate 323 is generally in a fan-shaped ring shape, an angle sensor 111 for sensing a rotation angle of the angle shielding plate 323 is disposed on an end surface of the θ -axis mounting plate 110 away from the θ -axis movement motor 310, and the angle sensor 111 can sense the rotation angle of the angle shielding plate 323, so that an angle change of the welding head 200 in a swing process is fed back in real time, and position accuracy of the welding head 200 in an operation process is improved.

The implementation principle of the high-frequency die bonding welding head 200 movement mechanism in the embodiment of the application is as follows: the first output shaft 311 of the θ -axis movement motor 310 drives the Z-axis fixing block 320 to rotate in the θ -axis direction, and the Z-axis fixing block 320 drives the welding head 200 on the Z-axis sliding block 340 to rotate in the θ -axis direction. The second output shaft 411 of the Z-axis movement motor 410 drives the Z-axis eccentric rod 420 to rotate, so that the Z-axis eccentric rod 420 drives the Z-axis connecting rod 430 to drive the Z-axis driving block 440 to slide on the Z-axis mounting plate 120 along the vertical direction, and the driving portion 441 of the Z-axis driving block 440 drives the Z-axis sliding block 340 to move along the vertical direction through the driving rod 442, thereby realizing the function of the welding head 200 reciprocating in the Z-axis. The theta axis motion assembly 300 and the Z axis motion assembly 400 are both mounted on the motor mounting base 100 and operate independently, so that the motion inertia of the theta axis is reduced, the operation stability of the theta axis linear guide rail 330 is improved, the maintenance cost of the motion mechanism of the welding head 200 is reduced, and the high-precision and high-frequency transfer of the welding head 200 to the chip is realized.

The above are preferred embodiments of the present application, and the scope of protection of the present application is not limited thereby. Wherein like parts are designated by like reference numerals. It should be noted that as used in the foregoing description, the terms "front," "back," "left," "right," "upper" and "lower" refer to directions in the drawings, and the terms "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component. Therefore: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. A high-frequency die bonding welding head movement mechanism is characterized by comprising:

a motor mount (100);

the welding head (200) is used for transferring the chip from the crystal taking position to the crystal fixing position;

the theta axis movement assembly (300) is used for controlling the welding head (200) to swing back and forth between a crystal taking position and a crystal fixing position, the theta axis movement assembly (300) is installed on the motor installation seat (100), the theta axis movement assembly (300) comprises a theta axis movement motor (310), the theta axis movement motor (310) is provided with a first output shaft (311), a Z axis fixing block (320) is coaxially fixed on the first output shaft (311), the Z axis fixing block (320) is provided with a theta axis linear guide rail (330), the theta axis linear guide rail (330) is provided with a Z axis sliding block (340) in a sliding manner, and the welding head (200) is installed on the Z axis sliding block (340);

and the Z-axis motion assembly (400) is used for controlling the Z-axis sliding block (340) to reciprocate on the theta-axis linear guide rail (330) along the vertical direction, and the Z-axis motion assembly (400) is installed on the motor installation seat (100).

2. The high-frequency die bonding welding head movement mechanism according to claim 1, wherein the motor mounting seat (100) comprises a theta axis mounting plate (110) and a Z axis mounting plate (120) detachably connected with the theta axis mounting plate (110), the length direction of the theta axis mounting plate (110) is perpendicular to the length direction of the Z axis mounting plate (120), and the theta axis movement motor (310) is mounted at the top end of the theta axis mounting plate (110); the Z-axis movement assembly (400) comprises a Z-axis movement motor (410), the Z-axis movement motor (410) is provided with a second output shaft (411), a Z-axis eccentric rod (420) is coaxially fixed on the second output shaft (411), one end of the Z-axis eccentric rod (420) is rotatably provided with a Z-axis connecting rod (430), one end, far away from the Z-axis eccentric rod (420), of the Z-axis connecting rod (430) is rotatably provided with a Z-axis driving block (440), and the Z-axis driving block (440) is connected with the Z-axis mounting plate (120) in a sliding mode along the vertical direction; z axle drive piece (440) are kept away from one side that Z axle mounting panel (120) place is drive division (441), drive division (441) rotate and are provided with actuating lever (442), actuating lever (442) keep away from the one end that drive division (441) place with Z axle sliding block (340) fixed connection.

3. The high-frequency die bonding welding head movement mechanism according to claim 2, wherein the central axis of the driving rod (442) and the central axis of the first output shaft (311) are located on the same vertical line.

4. The high-frequency die bonding welding head moving mechanism according to claim 2, wherein the Z-axis fixing block (320) is provided with an installation part (321) close to the θ -axis moving motor (310) and a pressing part (322) for pressing the first output shaft (311), the pressing part (322) is detachably connected with the installation part (321), the installation part (321) is provided with a main holding groove (3211), the pressing part (322) is provided with an auxiliary holding groove (3221), the main holding groove (3211) and the auxiliary holding groove (3221) are enclosed to form a holding space, the first output shaft (311) is located in the holding space, and a groove side wall of the auxiliary holding groove (3221) and a groove side wall of the main holding groove (3211) are abutted against the outer peripheral surface of the first output shaft (311).

5. The high-frequency die bonding welding head movement mechanism according to claim 4, wherein the outer peripheral surface of the first output shaft (311) is provided with a coaxial anti-slip groove (3111) for increasing the static friction factor.

6. The high-frequency die bonding welding head movement mechanism according to claim 2, wherein the Z-axis driving block (440) is connected with the Z-axis mounting plate (120) in a sliding manner along a vertical direction through a Z-axis linear guide rail (450), and the Z-axis linear guide rail (450) is parallel to the theta-axis linear guide rail (330).

7. The high-frequency die bonding welding head movement mechanism according to claim 2, wherein the Z-axis eccentric rod (420) is provided with a counterweight section (421), a connecting section (422) and a Z-axis mounting hole (423), and the Z-axis mounting hole (423) is located between the counterweight section (421) and the connecting section (422); the connecting section (422) is rotationally connected with the Z-axis connecting rod (430), and the second output shaft (411) penetrates through the Z-axis mounting hole (423) and is coaxially and fixedly connected with the Z-axis eccentric rod (420).

8. The high-frequency die bonding welding head movement mechanism according to claim 1, wherein the welding head (200) is provided with a fixing section (210) and a clamping section (220), the clamping section (220) is detachably connected with the fixing section (210), one end, away from the clamping section (220), of the fixing section (210) is installed on the Z-axis sliding block (340), and one end, away from the fixing section (210), of the clamping section (220) is installed on the die taking probe (230).

9. The high-frequency die bonding welding head movement mechanism according to claim 8, wherein the clamping section (220) is made of carbon fiber, and the fixing section (210) is made of aluminum alloy.

10. The moving mechanism of the high-frequency die bonding welding head according to claim 4, wherein the mounting portion (321) is provided with an angle shielding plate (323), and an end face of the theta axis mounting plate (110) far away from the theta axis moving motor (310) is provided with an angle sensor (111) for sensing a rotation angle of the angle shielding plate (323).