CN216900717U - Magnetoelectric measuring device - Google Patents
Magnetoelectric measuring device Download PDFInfo
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- CN216900717U CN216900717U CN202220290092.1U CN202220290092U CN216900717U CN 216900717 U CN216900717 U CN 216900717U CN 202220290092 U CN202220290092 U CN 202220290092U CN 216900717 U CN216900717 U CN 216900717U
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Abstract
The utility model provides a magnetoelectric measuring device, comprising: a rotary base rotatable about a center thereof; a conductive post having one end disposed on the center; the sample seat is used for placing a sensor and is respectively and electrically connected with the other end of the conductive column and the magnetic sensor; the test instrument is used for performing Hall test, three-dimensional magnetic resistance test and three-dimensional second harmonic test on the magnetic sensor; the current source is used for providing current, and the current flows through the magnetic sensor, the sample seat, the conductive column and the test instrument in sequence; and the two electromagnets are symmetrically arranged on two sides of the rotating shaft of the conductive column. The utility model realizes the three-dimensional test of the magnetic sensor by improving the in-plane magnetic field probe station, designing and processing the rotating station and the in-plane and vertical rotating sample holders. The magnetic field sensor can realize Hall test, three-dimensional magnetic resistance test and three-dimensional second harmonic test, has the advantages of low cost, simple process and high integration level, and can realize multifunctional magnetic test.
Description
Technical Field
The utility model relates to magnetic electronic test equipment, in particular to a magnetoelectric measuring device.
Background
Magnetic sensors are widely used in modern industry and electronic products, in particular for measuring physical parameters such as current, position, direction, etc. by sensing magnetic field strength. It has wide application in many fields, such as electromechanical automatic control, biological detection, aerospace industry, etc. In the prior art, there are many different types of sensors for measuring magnetic fields and other parameters, such as magnetic sensors that use Hall (Hall) elements, anisotropic magneto-resistive (AMR) elements, giant magneto-resistive (GMR) elements as sensitive elements. The newly developed Second Harmonic (Second Harmonic) method also has the potential to become a new type of magnetic sensor element.
Currently, these devices are tested using magnetic field probe stations or integrated physical systems (PPMS). The magnetic field probe station has the advantages of simplicity, convenience and quickness, but the magnetic field probe station cannot realize continuous rotation angle testing, three-dimensional testing is difficult to realize, and particularly, the latest rotation angle Second Harmonic (Second Harmonic) method cannot be realized. In this case, a physical property integration system (PPMS) can realize a rotation angle, but is not compatible with a probe station, and is difficult to perform a plurality of microfabrication tests.
SUMMERY OF THE UTILITY MODEL
Aiming at the problems in the prior art, the magnetoelectric measuring device provided by the utility model improves a magnetic field probe station, designs a rotating station and in-plane and vertical rotating sample holders, and realizes the three-dimensional test of a magnetic sensor.
In order to solve the technical problems, the utility model provides the following technical scheme:
in a first aspect, the present invention provides a magnetoelectric measuring apparatus including:
a rotary base rotatable around the center thereof;
a conductive post having one end disposed on the center;
the sample seat is used for placing a magnetic sensor and is respectively and electrically connected with the other end of the conductive column and the magnetic sensor;
the test instrument is used for carrying out Hall test, three-dimensional magnetic resistance test and three-dimensional second harmonic test on the magnetic sensor;
the current source is used for providing current, and the current flows through the magnetic sensor, the sample seat, the conductive column and the test instrument in sequence;
and the two electromagnets are symmetrically arranged on two sides of the rotating shaft of the conductive column.
In one embodiment, the magnetoelectric measuring apparatus further includes: and the motor is used for driving the rotating seat to rotate.
In one embodiment, the sample holder comprises:
an in-plane sample holder for horizontally placing the magnetic sensor;
and the vertical sample seat is used for vertically placing the magnetic sensor.
In one embodiment, the electromagnet is a one-dimensional electromagnet.
In one embodiment, the magnetoelectric measuring apparatus further includes: and the power supply is electrically connected with the one-dimensional electromagnet.
In one embodiment, the test meter comprises: a voltmeter and a phase-locked amplifier.
In one embodiment, the sample holder is provided with 4 to 12 pins.
In one embodiment, the conductive pillar is provided with 4 to 12 pinholes.
In one embodiment, the pins are disposed in the pin holes.
In one embodiment, the magnetoelectric measuring apparatus further includes:
and the fixing device is used for fixing the electromagnet.
As can be seen from the above description, the magnetoelectric measuring apparatus provided in the embodiment of the present invention includes: a rotary base rotatable around the center thereof; a conductive post having one end disposed on the center; the sample seat is used for placing a magnetic sensor and is respectively and electrically connected with the other end of the conductive column and the magnetic sensor; the test instrument is used for carrying out Hall test, three-dimensional magnetic resistance test and three-dimensional second harmonic test on the magnetic sensor; the current source is used for providing current, and the current flows through the magnetic sensor, the sample seat, the conductive column and the test instrument in sequence; and the two electromagnets are symmetrically arranged on two sides of the rotating shaft of the conductive column. The utility model realizes the three-dimensional test of the magnetic sensor by improving the in-plane magnetic field probe station, designing and processing the rotating station and the in-plane and vertical rotating sample holders. The magnetic field sensor can realize Hall test, three-dimensional magnetic resistance test and three-dimensional second harmonic test, has the advantages of low cost, simple process and high integration level, and can realize multifunctional magnetic test.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a magnetoelectric measuring apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an in-plane sample holder according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a vertical sample holder according to an embodiment of the present invention.
Reference numerals:
1: a rotating base;
2: a conductive post;
3: a sample holder;
3-1: an in-plane sample holder;
3-2: vertical sample holder;
4: a magnetic sensor;
5: testing the instrument;
6: a current source;
7: an electromagnet;
8: a stitch;
9: a pinhole.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the embodiments of the present invention are further described in detail below with reference to the accompanying drawings. The exemplary embodiments and descriptions of the present invention are provided to explain the present invention, but not to limit the present invention.
In the prior art, a magnetic field probe table is generally used for testing a magnetic sensor, and the magnetic sensor is only provided with a probe and cannot realize the rotation angle function; and if a two-dimensional or three-dimensional test is needed, a two-dimensional or three-dimensional magnet is needed, and the continuous corner turning function cannot be realized. For example: if survey the hall, need perpendicular magnet, if survey magnetic resistance, need the in-plane magnet, if all survey, need the magnet integration, the cost is extremely high, and is unstable. If the second harmonic test is carried out, the three-dimensional continuous rotation angle is the biggest difficulty.
In addition, a physical property integration system (PPMS) can realize a three-dimensional corner, but the cost is high. For a single device test, Hall, magneto-resistance and second harmonic can be realized, but for a plurality of device tests, the test is time-consuming and labor-consuming.
Based on the pain point in the prior art, referring to fig. 1, an embodiment of the present invention provides a magnetoelectric measurement device, including:
a rotary base 1 rotatable around the center thereof; the rotating base 1 may be circular, square or other shapes, and may rotate around its rotation point (clockwise rotation or counterclockwise rotation, the direction of the dotted line in fig. 1 is only schematic, and the present invention is not limited thereto), and a conductive pillar is disposed thereon.
A conductive post 2, one end of which is disposed on the center;
the sample holder 3 is used for placing a magnetic sensor 4 and is respectively and electrically connected with the other end of the conductive column 2 and the magnetic sensor 4;
the test instrument 5 is used for performing a Hall test, a three-dimensional magnetic resistance test and a three-dimensional second harmonic test on the magnetic sensor 4;
a current source 6 for supplying a current, which flows through the magnetic sensor, the sample holder, the conductive column and the test meter in sequence (in the direction of the dotted line in the figure);
a current source, i.e. an ideal current source, is a model abstracted from an actual power source, and a terminal of the current source can always provide a certain current to the outside regardless of the voltage at the two ends of the current source, and the current source has two basic properties: first, it provides a constant current I or a time function I (t) independent of the voltage across it. Second, the current source itself is current-determining, while the voltage across it is arbitrary. Because the current of the current source is fixed, the current source can not be disconnected, and the effect of the current source and the resistor which are connected in series on an external circuit is the same as that of a single current source. In addition, the current source and the voltage source can be equivalently converted, and one current source and the resistor are connected in parallel to be equivalently connected with one voltage source and the resistor in series.
And the two electromagnets 7 are symmetrically arranged on two sides of the rotating shaft of the conductive column 2.
In one embodiment, the magnetoelectric measuring apparatus further includes: and the motor is used for driving the rotating seat to rotate.
It will be appreciated that a power source may also be provided to provide the power required by the motor.
In one embodiment, referring to fig. 2 and 3, the sample holder 3 comprises:
an in-plane sample holder 3-1 for horizontally placing the magnetic sensor 4;
a vertical sample holder 3-2 for vertically placing the magnetic sensor 4. Referring to fig. 3, the vertical sample holder 3-2 is provided with a semicircular mechanism (which is electrically connected to the magnetic sensor 4) in the vertical direction on the basis of the in-plane sample holder 3-1, and the semicircular mechanism can make the magnetic sensor 4 stand upright when a test is performed.
It will be appreciated that the in-plane sample holder 3-1 and the vertical sample holder 3-2 may be provided with pins or pin holes (depending on the magnetic sensor arrangement) for electrical connection with the magnetic sensor 4.
In one embodiment, referring to fig. 1, the electromagnet 7 is a one-dimensional electromagnet which is a pair of magnetic poles and generates an electromagnetic field in only one direction.
An electromagnet is a device that is energized to produce an electromagnet. The core is wound with an electrically conductive winding of a power matching the core, and the current-carrying coil is magnetic like a magnet, and is usually made in a bar or shoe shape to make the core easier to magnetize. In addition, in order to demagnetize the electromagnet immediately after power failure, the electromagnet is usually made of soft iron or silicon steel material with fast demagnetization. When the electromagnet is electrified, the electromagnet has magnetism, and the magnetism disappears along with the electrification after the electromagnet is powered off.
In one embodiment, the magnetoelectric measuring apparatus further includes: and the power supply is electrically connected with the one-dimensional electromagnet.
In one embodiment, the test meter comprises: a voltmeter and a phase-locked amplifier.
When a Hall test or a three-dimensional magnetic resistance test needs to be carried out on the magnetic sensor, a voltmeter needs to be used as a test instrument at the moment;
when a three-dimensional second harmonic signal test needs to be performed on the magnetic sensor, the lock-in amplifier needs to be used as a test instrument.
Specifically, the rotating seat 1 is combined with the in-plane sample seat 3-1, and is matched with different test instruments, so that in-plane corner tests, such as in-plane anisotropic magnetic resistance and in-plane second harmonic wave tests (variable field and corner), can be realized. The method specifically comprises the following steps: current is applied by the current source to pass through the sample, the electromagnet adds a magnetic field, and the test instrument can obtain the magnetoresistance of a corner through the corner of 360 degrees, namely the anisotropic magnetoresistance. If the current is alternating current, the test instrument locks the second-order signal, and an in-plane second harmonic signal can be obtained.
The rotating seat 1 is combined with the vertical sample seat 3-2 and matched with different instruments, and out-of-plane corner tests such as Hall tests, out-of-plane two-dimensional anisotropic magnetic resistance and out-of-plane second harmonic tests (variable field and corner) can be realized. The method specifically comprises the following steps: the current source applies current to pass through the sample, the electromagnet adds a magnetic field, the test instrument can obtain the magnetoresistance of the corner through the corner of 360 degrees, then the sample is rotated by 90 degrees, and the two-dimensional anisotropic magnetoresistance is obtained by testing once again. If the current is alternating current, the test instrument locks the second-order signal, and a two-dimensional second harmonic signal can be obtained. And the Hall signal of the sample can be measured by changing the magnitude of the magnetic field.
In one embodiment, referring to fig. 1, the sample holder 3 is provided with 4 to 12 pins 8.
In one embodiment, referring to fig. 1, the conductive pillar 2 is provided with 4 to 12 pinholes 9.
In one embodiment, the pin 8 is disposed in the pin hole 9.
In one embodiment, the magnetoelectric measuring apparatus further includes: and the fixing device is used for fixing the electromagnet.
As can be seen from the above description, the magnetoelectric measuring apparatus provided in the embodiment of the present invention includes: a rotary base rotatable about a center thereof; a conductive post having one end disposed on the center; the sample seat is used for placing a magnetic sensor and is respectively and electrically connected with the other end of the conductive column and the magnetic sensor; the test instrument is used for performing Hall test, three-dimensional magnetic resistance test and three-dimensional second harmonic test on the magnetic sensor; the current source is used for providing current, and the current flows through the magnetic sensor, the sample seat, the conductive column and the test instrument in sequence; and the two electromagnets are symmetrically arranged on two sides of the rotating shaft of the conductive column. The magnetoelectric measuring device provided by the utility model realizes the three-dimensional test of the magnetic sensor by improving the magnetic field probe station, designing and processing the rotating platform and rotating the sample holders in the plane and vertically. And can realize the following functions:
1) hall test: the vertical sample support and the rotary table realize Hall test through a wire binding machine.
2) Three-dimensional magnetic resistance test: the vertical sample support, the in-plane sample support and the rotary table are realized by binding wires through a wire binding machine.
3) And (3) three-dimensional second harmonic testing: the vertical sample support, the in-plane sample support and the rotary table are realized by binding wires through a wire binding machine.
In the description of the present specification, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
Reference to the description of the terms "one embodiment," "a particular embodiment," "some embodiments," "for example," "an example," "a particular example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. The sequence of steps involved in the various embodiments is provided to schematically illustrate the practice of the utility model, and the sequence of steps is not limited and can be suitably adjusted as desired.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. A magnetoelectric measuring apparatus characterized by comprising:
a rotary base rotatable around the center thereof;
a conductive post having one end disposed on the center;
the sample seat is used for placing a magnetic sensor and is respectively and electrically connected with the other end of the conductive column and the magnetic sensor;
the test instrument is used for carrying out Hall test, three-dimensional magnetic resistance test and three-dimensional second harmonic test on the magnetic sensor;
the current source is used for providing current, and the current flows through the magnetic sensor, the sample seat, the conductive column and the test instrument in sequence;
and the two electromagnets are symmetrically arranged on two sides of the rotating shaft of the conductive column.
2. The magnetoelectric measuring apparatus according to claim 1, characterized by further comprising: and the motor is used for driving the rotating seat to rotate.
3. The magnetoelectric measurement apparatus according to claim 1, wherein the sample holder includes:
an in-plane sample holder for horizontally placing the magnetic sensor;
and the vertical sample seat is used for vertically placing the magnetic sensor.
4. The magnetoelectric measuring apparatus according to claim 1, wherein the electromagnet is a one-dimensional electromagnet.
5. The magnetoelectric measuring apparatus according to claim 4, characterized by further comprising: and the power supply is electrically connected with the one-dimensional electromagnet.
6. The magnetoelectric measuring apparatus according to claim 1, wherein the test meter includes: a voltmeter and a phase-locked amplifier.
7. The magnetoelectric measurement device according to claim 1, wherein the sample holder is provided with 4 to 12 pins.
8. The magnetoelectric measurement device according to claim 7, wherein the conductive pillar is provided with 4 to 12 pin holes.
9. The magnetoelectric measurement device according to claim 8, wherein the pin is disposed in the pin hole.
10. The magnetoelectric measuring apparatus according to claim 1, characterized by further comprising: and the fixing device is used for fixing the electromagnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220290092.1U CN216900717U (en) | 2022-02-14 | 2022-02-14 | Magnetoelectric measuring device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220290092.1U CN216900717U (en) | 2022-02-14 | 2022-02-14 | Magnetoelectric measuring device |
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| Publication Number | Publication Date |
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| CN216900717U true CN216900717U (en) | 2022-07-05 |
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| CN202220290092.1U Active CN216900717U (en) | 2022-02-14 | 2022-02-14 | Magnetoelectric measuring device |
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