CN216590016U - Gate valve for vacuum sintering - Google Patents
Gate valve for vacuum sintering Download PDFInfo
- Publication number
- CN216590016U CN216590016U CN202121978045.8U CN202121978045U CN216590016U CN 216590016 U CN216590016 U CN 216590016U CN 202121978045 U CN202121978045 U CN 202121978045U CN 216590016 U CN216590016 U CN 216590016U
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- 238000005245 sintering Methods 0.000 title claims abstract description 37
- 238000007789 sealing Methods 0.000 claims abstract description 48
- 238000001816 cooling Methods 0.000 claims description 70
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 27
- 238000009434 installation Methods 0.000 claims description 8
- 239000000428 dust Substances 0.000 claims description 4
- 229920001973 fluoroelastomer Polymers 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 230000003014 reinforcing effect Effects 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 4
- 230000002035 prolonged effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
The utility model discloses a gate valve for vacuum sintering, which comprises a valve body, a valve core and a driving unit, wherein the driving unit is connected with a first end of the valve core and drives the valve core to move along the interior of the valve body, a valve port is arranged at the first end of the valve body, a collision block is arranged on the inner wall of the first end of the valve body, the valve core comprises a valve plate, a valve frame, a top wheel, a mounting block and a plurality of tension springs, a rotating shaft is mounted on the valve frame, the rotating shaft is rotatably connected with the mounting block through a rotating connecting rod, two ends of the rotating shaft are slidably connected with the valve body, the upper ends of the tension springs are connected with the valve frame, a first annular sealing ring is mounted at the bottom of the valve plate, when the top wheel abuts against the collision block driving unit to drive the valve frame to move forwards, the connecting rod rotates around the rotating shaft to enable the valve plate to move downwards to seal the valve port and stretch the tension springs, and when the driving unit drives the valve frame to move backwards, the tension springs reset to enable the valve plate to move upwards to be separated from the valve port. The utility model has the advantages that the valve core and the valve body adopt a vertical movement sealing mode, the friction effect of the valve plate and the valve body is reduced, the service life is prolonged, and the like.
Description
[ technical field ] A method for producing a semiconductor device
The utility model belongs to the technical field of gate valves, and particularly relates to a gate valve for vacuum sintering.
[ background of the utility model ]
In the production process of the optical fiber preform, vacuum sintering furnace equipment is needed when sintering the cladding loose body. The vacuum sintering furnace mainly comprises a lower sintering furnace, a gate valve, an upper cooling chamber and the like, wherein the lower sintering furnace is mainly used for sintering, the temperature in the furnace is about 1500 ℃ during sintering, and the cavity is in a vacuum state. The lower sintering furnace is located on the platform, the lower flange of the gate valve is arranged on the lower sintering furnace, the upper cooling chamber is arranged on the upper flange of the gate valve, and the requirement on the bearing capacity of the gate valve is high due to the fact that the weight of the upper cooling chamber is about 6 tons.
In the sintering process, firstly, the loose bodies are placed into a lower sintering furnace for sintering, at the moment, the gate valve is in an open state, and at the moment, the upper cavity and the lower cavity are in a vacuum state; after sintering, the glass body is lifted into the upper cooling chamber, the gate valve is closed, and the lower sintering furnace is still in a vacuum state; and opening the furnace door of the upper cooling chamber, and cooling the product when the upper cooling chamber is in an atmospheric pressure state. The gate valve mainly plays two roles in vacuum sintering equipment: firstly, an upper furnace body and a lower furnace body are connected; and on-off of the valve is controlled, so that the sintering process requirement is met.
The existing gate valve has the problems that a sliding friction sealing mode is adopted between a valve core and a valve body for sealing, a sealing element on the valve core is easy to damage, the valve core is easy to deform under the action of high temperature to influence the service life of the gate valve, and the gate valve cannot bear large axial bearing capacity.
[ Utility model ] content
The utility model aims to solve the problems in the background art, and provides a gate valve for vacuum sintering, which can ensure that a valve core and a valve body are sealed in an up-and-down motion sealing mode, reduce the friction effect between a valve plate and the valve body and prolong the service life of the gate valve.
In order to achieve the purpose, the utility model provides a gate valve for vacuum sintering, which comprises a valve body, a valve core and a driving unit, wherein the driving unit is connected with a first end of the valve core and drives the valve core to move along the interior of the valve body, a valve port is arranged at the first end of the valve body in the vertical direction, the inner wall of the first end of the valve body is provided with a collision block, the valve core comprises a valve plate, a valve frame, a top wheel arranged on the valve plate, an installation block and a plurality of tension springs, a rotating shaft is arranged on the valve frame, the rotating shaft is rotatably connected with the installation block through a rotating connecting rod, two ends of the rotating shaft are slidably connected with the valve body, the upper end of the tension spring is connected with the valve frame, the bottom of the valve plate is provided with a first annular sealing ring, when the top wheel props against the collision block and the driving unit continues to drive the valve frame to move forwards, the rotating connecting rod rotates around the rotating shaft to enable the valve plate to move downwards to seal the valve port and stretch the tension spring, when the driving unit drives the valve frame to move backwards, the tension spring is reset, so that the valve plate moves upwards to be separated from the valve port.
Preferably, the valve body is of a double-layer structure, a cooling channel is arranged in the middle of the valve body, and a water inlet and a water outlet which are communicated with the cooling channel are formed in the valve body.
Preferably, the valve plate further comprises two water-cooling shafts, the first ends of the water-cooling shafts penetrate through the first ends of the valve frame in a matched mode, the second ends of the water-cooling shafts extend out of the valve body, a water nozzle is arranged at the second end of each water-cooling shaft, the edge position of the first end of each water-cooling shaft is connected with a water-cooling interface, a cooling cavity is arranged inside the valve plate, and the water-cooling interfaces are connected with the cooling cavity on the valve plate through metal corrugated pipes.
Preferably, the driving unit is a cylinder, a cylinder shaft of the cylinder is connected with the first end of the valve frame, and the cylinder shaft, the water-cooling shaft and the valve body are connected through a sealing seat.
Preferably, the seal seat comprises a mounting seat and an oil nozzle arranged on the mounting seat, an oil duct communicated with the oil nozzle is arranged on the mounting seat, the mounting seat is installed on the valve body in a matched mode, guide sleeves, oil rings, dust rings and second annular seal rings are installed between the cylinder shaft and the mounting seat and between the water cooling shaft and the mounting seat, and the oil duct is connected with the corresponding oil rings.
Preferably, one end of the mounting seat, which is close to the valve body, is provided with a right-angle mounting surface, the vertical surface of the right-angle mounting surface is provided with a sealing ring mounting groove, and a sealing ring is mounted in the sealing ring mounting groove.
Preferably, the valve frame comprises a front plate, a rear plate and a plurality of sliding plates, two ends of each sliding plate are connected with the front plate and the rear plate, the sliding plates are connected through a rotating shaft, two sides of each rotating shaft and two sides of each mounting block are connected through rotating connecting rods, tension spring mounting portions are extended out of the outer walls of the upper ends of the front plate and the rear plate, the upper ends of the tension springs are connected with the tension spring mounting portions, and the top wheels are located in front of the front plate.
Preferably, the inner wall of the valve body is provided with a guide groove, two ends of the rotating shaft are provided with track bearings in a matching manner, and the track bearings are arranged in the guide groove and move linearly along the guide groove.
Preferably, the bottom of the valve plate is provided with a sealing groove, the first annular sealing ring is installed in the sealing groove in a matched mode, and the first annular sealing ring is a fluororubber sealing ring.
Preferably, a plurality of staggered reinforcing ribs are arranged on the valve body.
The utility model has the beneficial effects that: the valve core is arranged in the valve body in a sliding mode, the valve core is provided with the top wheel, the rotating connecting rod mechanism and the tension spring structure, the inner wall of the valve body is provided with the collision block, the top wheel abuts against the collision block, the driving unit continues to drive the valve frame to move forwards, the rotating connecting rod rotates around the rotating shaft, the valve plate moves downwards to seal the valve port and stretches the tension spring, when the driving unit drives the valve frame to move backwards, the tension spring resets to enable the valve plate to move upwards to be separated from the valve port, the valve core and the valve body are sealed in an up-and-down movement sealing mode, the friction effect between the valve plate and the valve body is reduced, and the service life of the gate valve is prolonged; the valve plate is cooled through the water cooling shaft, and the integral cooling capacity of the gate valve is improved through the valve body cooling structure; the whole sealing performance is good.
The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.
[ description of the drawings ]
FIG. 1 is a schematic structural diagram of an embodiment;
FIG. 2 is a front sectional view of an embodiment;
FIG. 3 is a top sectional view of an embodiment;
FIG. 4 is a left side sectional view of one embodiment;
FIG. 5 is a schematic view of a valve body of an embodiment;
FIG. 6 is a schematic view of a water cooled shaft of an embodiment;
FIG. 7 is a schematic view of a seal housing of an embodiment.
In the figure: 1-valve body, 2-valve core, 3-drive unit, 4-water-cooled shaft, 5-seal seat, 6-metal bellows, 10-valve port, 11-collision block, 12-cooling channel, 13-water inlet, 14-water outlet, 15-guide groove, 21-valve plate, 22-valve frame, 23-top wheel, 24-rotating shaft, 25-tension spring, 26-mounting block, 27-rotating connecting rod, 31-cylinder shaft, 41-water nozzle, 42-water-cooled interface, 51-mounting seat, 52-oil nozzle, 53-oil ring, 54-guide sleeve, 210-first annular seal ring, 221-front plate, 222-rear plate, 223-sliding plate and 241-track bearing.
[ detailed description ] embodiments
Referring to fig. 1 to 7, the embodiment provides a gate valve for vacuum sintering, which includes a valve body 1, a valve core 2, and a driving unit 3, wherein the driving unit 3 is connected to a first end of the valve core 2 and drives the valve core 2 to move along the interior of the valve body 1, a valve port 10 is disposed in a vertical direction at the first end of the valve body 1, a collision block 11 is disposed on an inner wall of the first end of the valve body 1, the valve core 2 includes a valve plate 21, a valve frame 22, a top wheel 23 mounted on the valve plate 21, two mounting blocks 26, and four tension springs 25, a rotating shaft 24 is mounted on the valve frame 22, the rotating shaft 24 is rotatably connected to the mounting blocks 26 through a rotating connecting rod 27, two ends of the rotating shaft 24 are slidably connected to the valve body 1, the upper end of the tension spring 25 is connected to the valve frame 22, a first annular sealing ring 210 is mounted at the bottom of the valve plate 21, when the driving unit 3 continues to drive the valve frame 22 to move forward after the top wheel 23 abuts against the collision block 11, the rotating connecting rod 27 rotates around the rotating shaft 27 to make the valve frame 21 to seal the valve port 10 and stretch the valve plate 10, when the driving unit 3 drives the valve frame 22 to move backwards, the tension spring 25 is reset, so that the valve plate 21 moves upwards to be separated from the valve port 10, wherein the valve body 1 is hollow, a sealing plate is installed at the second end of the valve body 1, and the driving unit 3 is fixedly installed on the sealing plate through a mounting bracket.
The valve body 1 adopts a double-layer structure, the middle of the valve body 1 is provided with a cooling channel 12, the top and the bottom of the valve body 1 are respectively provided with a water inlet 13 and a water outlet 14 which are communicated with the cooling channel 12, the valve body 1 adopts the double-layer structure and the water cooling channel 12 to be arranged, the valve body 1 can be effectively cooled, the surface temperature of the valve body 1 is reduced, and the double-layer structure ensures the overall strength of the valve body 1.
The gate valve still includes two water-cooling axle 4, the first end cooperation of water-cooling axle 4 is installed at the first end of valve frame 22, the second end of water-cooling axle 4 stretches out outside valve body 1, the second end of water-cooling axle 4 is equipped with water injection well choke 41, the first end border position of water-cooling axle 4 is connected with water-cooling interface 42, the inside cooling chamber that is equipped with of valve plate 21, link to each other with corrugated metal pipe 6 between the cooling chamber on water-cooling interface 41 and the valve plate 21, two water-cooling axle 4 are water-cooling axle 4 of usefulness and the water-cooling axle 4 of play water respectively for intaking, the second end of two water-cooling axle 4 passes closing plate and installing support, two water-cooling axle 4 sets up and can effectively cool off valve plate 21, reduce the heat altered of the first ring packing ring 210 in valve plate 21 bottom.
The driving unit 3 is a cylinder, a cylinder shaft 31 of the cylinder is connected with a first end of the valve frame 22, the cylinder shaft 31, the water cooling shaft 4 and the valve body 1 are connected through a sealing seat 5, the cylinder shaft 21 is arranged between the two water cooling shafts 4, the cylinder drives the valve frame 22 to be stable, the cylinder shaft 31, the water cooling shaft 4 and the valve body 1 are installed in a sealing mode, and the driving unit 3 can also use an electric push rod.
The mount pad 51 is close to valve body one end and is equipped with the right angle installation face, and the vertical face of right angle installation face is equipped with the sealing washer mounting groove, installs the sealing washer in the sealing washer mounting groove, guarantees the inseparable installation between mount pad and the closing plate.
The valve frame 22 comprises a front plate 221, a rear plate 222 and four sliding plates 223 arranged in parallel, two ends of each sliding plate 223 are connected with the front plate 221 and the rear plate 222, the four sliding plates 223 are connected with each other through two rotating shafts 24, two sides of each sliding plate 223 in the middle and two sides of each mounting block 26 below are correspondingly connected with a rotating connecting rod 27, each rotating shaft 24 penetrates through the rotating connecting rod 2, the outer walls of the upper ends of the front plate 221 and the rear plate 222 are respectively extended outwards to form a tension spring mounting part, the upper end side and the lower end side of each rotating connecting rod 27 are respectively connected with the corresponding sliding plate 223 and the corresponding mounting block 26 through pin shafts, the upper end and the lower end of each tension spring 25 are respectively connected with the corresponding tension spring mounting part and the corresponding valve plate 21, the two mounting blocks 26 are positioned on a straight line and parallel to the sliding plates 223, the first end of the valve frame 22 is provided with one end of the rear plate 222, the water cooling shaft 4 and the cylinder shaft 31 are both mounted on the rear plate 222, the top wheel 23 is positioned in front of the front plate 221, make things convenient for the installation between extension spring 25 and the valve frame 22, the whole atress of valve frame 22 is reasonable, and valve frame 22 and extension spring 25 can steadily lift or push down valve plate 21, guarantee going on smoothly of valve plate 21 sealed valve port 10.
The left and right inner walls of the valve body 1 are provided with guide grooves 15 along the length direction, the two ends of the rotating shaft 24 are provided with track bearings 241 in a matching manner, the track bearings 241 are arranged in the guide grooves 15 and move linearly along the guide grooves 15, so that the valve core 2 moves stably, the horizontal movement of the valve core 2 is ensured, and the subsequent top wheel 23 abuts against the collision block 11 and the valve plate 21 to smoothly seal the valve port 10.
The bottom of the valve plate 21 is provided with a sealing groove which is a dovetail groove, the first annular sealing ring 210 is embedded in the sealing groove, and the first annular sealing ring 210 is a fluororubber sealing ring, so that the first annular sealing ring 210 is firmly installed, and the first annular sealing ring 210 is made of fluororubber, so that the first annular sealing ring has good high temperature resistance and corrosion resistance and long service life.
A plurality of staggered reinforcing ribs are welded at the top and the bottom of the valve body 1, and the valve body 1 is enabled to have better bearing capacity due to the arrangement of the reinforcing ribs.
The working process of the utility model is as follows:
in the working process of the gate valve, when the valve port 10 needs to be sealed, the cylinder pushes the valve core 2 to move towards the direction close to the valve port 10, the cylinder continues to push the valve core 2 to move after the top wheel 23 abuts against the collision block 11, the connecting rod 27 rotates around the rotating shaft 24 under the blocking action of the collision block 11 and abuts against the valve plate 21 to move downwards, so that the valve plate 21 covers the valve port 10, the first annular sealing ring 210 seals the contact surface of the valve core and the collision block, at the moment, the tension spring 25 is in a stretching state, when the valve port 10 needs to be opened, the cylinder is recovered, the rotating connecting rod 27 rotates reversely, and the valve plate 21 is lifted upwards and separated from the valve port 10 under the elastic resetting action of the tension spring 25; when the valve plate 21 is cooled, cooling water is input into a cooling cavity of the valve plate 21 by one water-cooling shaft 4 to cool the valve plate 21 to a certain extent, so that the thermal deformation of the first annular sealing ring 210 is reduced, and the water in the cooling cavity is discharged by the other water-cooling shaft 4; when the valve body 1 is cooled, cooling water enters the cooling channel 12 of the valve body 1 from the water inlet 13 to cool the valve body 1, water in the cooling channel is discharged through the water outlet 14 after cooling, the gate valve can be used for a vacuum sintering furnace, the upper end of the valve port 10 of the gate valve is connected with an upper cooling chamber of the vacuum sintering furnace, and the lower end of the valve port 10 of the gate valve is connected with a lower sintering furnace of the vacuum sintering furnace.
The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.
Claims (10)
1. The utility model provides a push-pull valve for vacuum sintering, includes valve body, case, drive unit, and drive unit links to each other and drives the case along the inside removal of valve body with the first end of case, and the vertical direction of first end of valve body is equipped with valve port, its characterized in that: the inner wall of the first end of the valve body is provided with a collision block, the valve core comprises a valve plate, a valve frame, a top wheel, an installation block and a plurality of tension springs, the top wheel is installed on the valve plate, a rotating shaft is installed on the valve frame, the rotating shaft is rotatably connected with the installation block through a rotating connecting rod, two ends of the rotating shaft are slidably connected with the valve body, the upper end of each tension spring is connected with the valve frame, a first annular sealing ring is installed at the bottom of the valve plate, when the top wheel abuts against the collision block, a driving unit continues to drive the valve frame to move forwards, the rotating connecting rod rotates around the rotating shaft to enable the valve plate to move downwards to seal a valve port and stretch the tension springs, and when the driving unit drives the valve frame to move backwards, the tension springs reset to enable the valve plate to move upwards to be separated from the valve port.
2. The gate valve for vacuum sintering of claim 1, wherein: the valve body adopts a double-layer structure, a cooling channel is arranged in the middle of the valve body, and a water inlet and a water outlet which are communicated with the cooling channel are arranged on the valve body.
3. The gate valve for vacuum sintering of claim 1, wherein: still include two water-cooling axles, the first end cooperation of water-cooling axle is installed in the first end of valve frame, and outside the valve body was stretched out to the second end of water-cooling axle, the second end of water-cooling axle was equipped with the water injection well choke, and the first end border position of water-cooling axle is connected with the water-cooling interface, the inside cooling chamber that is equipped with of valve plate, link to each other with corrugated metal pipe between the cooling chamber on water-cooling interface and the valve plate.
4. A gate valve for vacuum sintering as claimed in claim 3 wherein: the driving unit is a cylinder, a cylinder shaft of the cylinder is connected with the first end of the valve frame, and the cylinder shaft, the water cooling shaft and the valve body are connected through a sealing seat.
5. The gate valve for vacuum sintering of claim 4, wherein: the sealing seat comprises a mounting seat and an oil nozzle arranged on the mounting seat, an oil duct communicated with the oil nozzle is arranged on the mounting seat, the mounting seat is installed on the valve body in a matched mode, a guide sleeve, an oil ring, a dust ring and a second annular sealing ring are installed between the cylinder shaft and the mounting seat and between the water cooling shaft and the mounting seat, and the oil duct is connected with the corresponding oil ring.
6. The gate valve for vacuum sintering of claim 5, wherein: the mounting seat is provided with a right-angle mounting surface at one end close to the valve body, a sealing ring mounting groove is formed in the vertical surface of the right-angle mounting surface, and a sealing ring is mounted in the sealing ring mounting groove.
7. The gate valve for vacuum sintering of claim 1, wherein: the valve frame comprises a front plate, a rear plate and a plurality of sliding plates, wherein the two ends of each sliding plate are connected with the front plate and the rear plate, the sliding plates are connected through a rotating shaft, the two sides of each rotating shaft and the two sides of each mounting block are connected through rotating connecting rods, tension spring mounting portions are extended out of the outer walls of the upper ends of the front plate and the rear plate, the upper ends of the tension springs are connected with the tension spring mounting portions, and the top wheels are located in front of the front plate.
8. The gate valve for vacuum sintering of claim 7 wherein: the inner wall of the valve body is provided with a guide groove, two ends of the rotating shaft are matched with track bearings, and the track bearings are installed in the guide groove and move linearly along the guide groove.
9. The gate valve for vacuum sintering of claim 1, wherein: the bottom of the valve plate is provided with a sealing groove, the first annular sealing ring is installed in the sealing groove in a matched mode, and the first annular sealing ring is a fluororubber sealing ring.
10. The gate valve for vacuum sintering of any one of claims 1 to 9, wherein: and a plurality of staggered reinforcing ribs are arranged on the valve body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121978045.8U CN216590016U (en) | 2021-08-20 | 2021-08-20 | Gate valve for vacuum sintering |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121978045.8U CN216590016U (en) | 2021-08-20 | 2021-08-20 | Gate valve for vacuum sintering |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216590016U true CN216590016U (en) | 2022-05-24 |
Family
ID=81636518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121978045.8U Active CN216590016U (en) | 2021-08-20 | 2021-08-20 | Gate valve for vacuum sintering |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216590016U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119878909A (en) * | 2024-11-29 | 2025-04-25 | 浙江晶泰半导体有限公司 | Water-cooled gate valve for single crystal furnace |
-
2021
- 2021-08-20 CN CN202121978045.8U patent/CN216590016U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119878909A (en) * | 2024-11-29 | 2025-04-25 | 浙江晶泰半导体有限公司 | Water-cooled gate valve for single crystal furnace |
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