CN216422565U - A manipulator for wafer box intelligence haulage equipment - Google Patents
A manipulator for wafer box intelligence haulage equipment Download PDFInfo
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- CN216422565U CN216422565U CN202122547912.9U CN202122547912U CN216422565U CN 216422565 U CN216422565 U CN 216422565U CN 202122547912 U CN202122547912 U CN 202122547912U CN 216422565 U CN216422565 U CN 216422565U
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- 230000005540 biological transmission Effects 0.000 claims abstract description 48
- 239000003638 chemical reducing agent Substances 0.000 claims description 26
- 230000001360 synchronised effect Effects 0.000 claims description 18
- 235000012431 wafers Nutrition 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a manipulator for wafer box intelligence haulage equipment, including first power drive arrangement, second power drive arrangement, first arm, second arm and third arm, the third arm is installed inside the second arm, and first power drive arrangement links to each other with being used for driving first arm pivoted power transmission device, and second power drive arrangement links to each other with the power transmission device who is used for driving second arm, third arm, the utility model discloses utilize the transmission of two sets of power transmission device control multiunit arm to carry out the wafer transport, use manpower sparingly greatly, improve work efficiency, and improve the security through mechanical transport.
Description
Technical Field
The utility model relates to a wafer box haulage equipment field specifically is a manipulator for wafer box intelligence haulage equipment.
Background
With the widespread use of industrial products in daily life, semiconductors are increasingly important in products, and their demand is relatively greatly increased, thereby promoting the vigorous development of the global semiconductor market, and in order to meet the large demand of integrated circuits, most semiconductor manufacturing enterprises take the priority of improving productivity and qualification rate, in semiconductor manufacturing enterprises, wafers are generally transported in batches, however, the efficiency is low through manual transportation, danger is easy to occur, and uncertain factors such as chip pollution and chip collision and breakage exist in the transportation process, so as to solve the risk and uncertain factors brought by manual transportation, therefore, the application document provides a manipulator for wafer cassette intelligent transportation equipment.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is overcome the defect that prior art exists, the utility model provides a manipulator for wafer box intelligence haulage equipment, the utility model discloses utilize the transmission of two sets of power transmission device control multiunit arm to carry out the wafer transport, use manpower sparingly greatly, improve work efficiency, and improve the security through mechanical transport.
In order to solve the technical problem, the utility model adopts the technical scheme that: the utility model provides a manipulator for wafer box intelligence haulage equipment, includes first power drive, second power drive, first arm, second arm and third arm, the third arm is installed inside the second arm, first power drive links to each other with being used for driving first arm pivoted power transmission device, second power drive links to each other with the power transmission device who is used for driving second arm, third arm.
Further, power transmission device includes that first from driving wheel, second follow driving wheel, first transfer line, first little band pulley and first big band pulley, first arm bottom one end is fixed with the link, install the first follow driving wheel that is used for connecting first power drive device on the link, link internally mounted has can follow its pivoted first transfer line, and the second that is used for connecting second power drive device is installed from the driving wheel bottom first transfer line, and first little band pulley is installed to the first transfer line other end, and first big band pulley that installs in second arm bottom one end links to each other through first hold-in range, links to each other through the second transfer line between second arm and the first big band pulley, installs the first tight pulley that is used for adjusting its elasticity on the first hold-in range.
Further, the power transmission device further comprises a fixing rod, a second small belt wheel and a second large belt wheel, the fixing rod is mounted inside the second mechanical arm, the second small belt wheel is mounted on the fixing rod and connected with the second large belt wheel mounted inside the second mechanical arm through a second synchronous belt, the second large belt wheel is connected with a third mechanical arm through a third transmission rod, and a second tensioning wheel used for adjusting the tightness of the second tensioning wheel is mounted on the second synchronous belt.
Further, the first power driving device comprises a first servo motor, a first planetary reducer and a first driving wheel, the first servo motor is connected with the first planetary reducer, and the first driving wheel for driving the power transmission device is mounted on a driving shaft of the first planetary reducer.
Further, the second power driving device comprises a second servo motor, a second planetary reducer and a second driving wheel, the second servo motor is connected with the second planetary reducer, and the second driving wheel for driving the power transmission device is mounted on a driving shaft of the second planetary reducer.
Compared with the prior art, the beneficial effects of the utility model are as follows:
1. the utility model discloses utilize the transmission of two sets of power transmission device control multiunit arm to carry out the wafer transport, use manpower sparingly greatly, improve work efficiency, and improve the security through mechanical transport.
2. The utility model discloses a servo motor individual drive one can 360 rotatory arms, passes through two arms that remain of power transmission drive with another servo motor, through the number of teeth difference that changes the hold-in range the rotation of different angles.
Drawings
1. A first power drive; 2. a second power drive; 3. a power transmission device; 4. a first robot arm; 5. A second mechanical arm; 6. a third mechanical arm; 11. a first servo motor; 12. a first planetary reducer; 13. a first drive wheel; 21. a second servo motor; 22. a second planetary reducer; 23. a second drive wheel; 31. a first driven wheel; 32. a connecting frame; 33. a second driven wheel; 34. a first drive lever; 35. a first synchronization belt; 36. a first small belt pulley; 37. a first tensioning wheel; 38. a second transmission rod; 39. a first large pulley; 391. fixing the rod; 392. a second synchronous belt; 393. a second small belt pulley; 394. a second large belt pulley; 395. and a third transmission rod.
Fig. 1 is a schematic structural view of a manipulator for an intelligent handling device of a wafer cassette according to the present invention;
fig. 2 is an assembly diagram of a manipulator for an intelligent handling device of wafer cassettes according to the present invention;
fig. 3 is a front view of a joint between a first power driving device and a first arm of a robot for an intelligent handling apparatus for wafer cassettes of the present invention;
fig. 4 is a schematic structural view illustrating a connection between a second power device and a second mechanical arm in a manipulator of the intelligent handling equipment for wafer cassettes of the present invention;
fig. 5 is the utility model relates to a power transmission device is connected with third arm in manipulator for wafer box intelligence haulage equipment.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, rather than all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative work belong to the protection scope of the present invention based on the embodiments of the present invention.
According to the utility model discloses an embodiment combines fig. 1-5 to show, a manipulator for wafer box intelligence haulage equipment, including first power drive 1, second power drive 2, first arm 4, second arm 5 and third arm 6, third arm 6 is installed inside second arm 5, and first power drive 1 links to each other with being used for driving first arm 4 pivoted power transmission device 3, and second power drive 2 links to each other with power transmission device 3 that is used for driving second arm 5, third arm 6.
The power transmission device 3 comprises a first driven wheel 31, a second driven wheel 33, a first transmission rod 34, a first small belt wheel 36 and a first large belt wheel 39, a connecting frame 32 is fixed at one end of the bottom of the first mechanical arm 4, the first driven wheel 31 used for connecting the first power driving device 1 is installed on the connecting frame 32, the first transmission rod 34 capable of rotating along the connecting frame 32 is installed inside the connecting frame 32, the second driven wheel 33 used for connecting the second power driving device 2 is installed at the bottom of the first transmission rod 34, the first small belt wheel 36 is installed at the other end of the first transmission rod 34, the first small belt wheel 36 is connected with the first large belt wheel 39 installed at one end of the bottom of the second mechanical arm 5 through a first synchronous belt 35, the second mechanical arm 5 is connected with the first large belt wheel 39 through a second transmission rod 38, a first tensioning wheel 37 used for adjusting the tightness of the first synchronous belt 35 is installed on the first synchronous belt 35, when the robot is used, the first driven wheel 31 drives the first mechanical arm 4 to rotate through the connecting frame 32, the second driven wheel 33 drives the first transmission rod 34 to rotate, the first transmission rod 34 rotates to drive the first small belt wheel 36 to rotate, the first small belt wheel 36 rotates to drive the first large belt wheel 39 to rotate through the first synchronous belt 35, and the first large belt wheel 39 rotates to drive the second mechanical arm 5 to rotate through the second transmission rod 38.
The fixed rod 391 is fixed to the first arm 4, and when the first large pulley 39 on the first arm 4 rotates the second arm 5, the first small pulley 36 rotates in the opposite direction with respect to the second arm 5, so as to rotate the second large pulley 394 on the second arm 5 together with the third arm 6.
The power transmission device 3 further comprises a fixing rod 391, a second small belt wheel 393 and a second large belt wheel 394, the fixing rod 391 is installed inside the second mechanical arm 5, the second small belt wheel 393 is installed on the fixing rod 391, the second small belt wheel 393 is connected with the second large belt wheel 394 installed inside the second mechanical arm 5 through a second synchronous belt 392, the second large belt wheel 394 is connected with the third mechanical arm 6 through a third transmission rod 395, a second tensioning wheel used for adjusting the tightness of the second synchronous belt 392 is installed on the second synchronous belt 392, the second mechanical arm 5 rotates to drive the second small belt wheel 393 to rotate, the second small belt wheel 393 rotates to drive the second large belt wheel 394 to rotate through the second synchronous belt 392, and the second large belt wheel 394 rotates to drive the third mechanical arm 6 to rotate through the third transmission rod 395.
The first power driving device 1 comprises a first servo motor 11, a first planetary reducer 12 and a first driving wheel 13, the first servo motor 11 is connected with the first planetary reducer 12, the first driving wheel 13 used for driving the power transmission device 3 is installed on a driving shaft of the first planetary reducer 12, the first servo motor 11 rotates to reduce the speed through the first planetary reducer 12, the first planetary reducer 12 drives the first driving wheel 13 to rotate, and the first driving wheel 13 is meshed with a first driven wheel 31 to drive the first driven wheel 31 to rotate.
The second power driving device 2 comprises a second servo motor 21, a second planetary reducer 22 and a second driving wheel 23, the second servo motor 21 is connected with the second planetary reducer 22, the second driving wheel 23 used for driving the power transmission device 3 is mounted on a driving shaft of the second planetary reducer 22, the second servo motor 21 rotates to reduce the speed through the second planetary reducer 22, the second planetary reducer 22 drives the second driving wheel 23 to rotate, and the second driving wheel 23 is meshed with a second driven wheel 33 to drive the second driven wheel 33 to rotate.
The utility model discloses in, first servo motor 11 rotates and drives first action wheel 13 through first planetary reducer 12 and rotate when using, first action wheel 13 rotates and drives first from 31 rotations of driving wheel, first 31 rotations of driving wheel drive first arm 4 through link 32 and rotate, realize 360 rotations to first arm 4, second servo motor 21 drives second action wheel 23 through second planetary reducer 22 and rotates, second action wheel 23 rotates and drives first transfer line 34 and rotate, first transfer line 34 rotates and drives first little band pulley 36 and rotate, first little band pulley 36 rotates and drives first big band pulley 39 through first synchronous belt 35 and rotate, first big band pulley 39 rotates and drives second arm 5 through second transfer line 38 and rotates.
The dead lever 391 is fixed on first arm 4, first band pulley 36 is reverse rotation for second arm 5 when first big band pulley 39 on first arm 4 drives second arm 5 and rotates, thereby it rotates together with third arm 6 to drive second big band pulley 394 on the second arm 5, second arm 5 rotates and drives second little band pulley 393 and rotate, second little band pulley 393 rotates and drives second big band pulley 394 through second hold-in range 392 and rotates, second big band pulley 394 rotates and drives third arm 6 through third transfer line 395 and rotate, thereby realize second power drive 2 to second arm 5, the direct drive of third arm 6, carry out the rotation of different angles through the number of teeth difference that changes first hold-in range 35 and second hold-in range 392, the utility model discloses a practicality improves.
Having shown and described the basic principles and principal features of the invention and advantages thereof, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof; the present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, and any reference signs in the claims are not intended to be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (5)
1. The utility model provides a manipulator for wafer box intelligence haulage equipment, its characterized in that, includes first power drive device (1), second power drive device (2), first arm (4), second arm (5) and third arm (6), install inside second arm (5) third arm (6), first power drive device (1) links to each other with power transmission device (3) that are used for driving first arm (4) pivoted, second power drive device (2) link to each other with power transmission device (3) that are used for driving second arm (5), third arm (6).
2. The robot arm for the intelligent handling equipment of the wafer cassette according to claim 1, wherein: the power transmission device (3) comprises a first driven wheel (31), a second driven wheel (33), a first transmission rod (34), a first small belt wheel (36) and a first large belt wheel (39), one end of the bottom of the first mechanical arm (4) is fixedly provided with a connecting frame (32), the first driven wheel (31) used for being connected with the first power driving device (1) is installed on the connecting frame (32), the first transmission rod (34) capable of rotating along the connecting frame is installed inside the connecting frame (32), the second driven wheel (33) used for being connected with the second power driving device (2) is installed at the bottom of the first transmission rod (34), the first small belt wheel (36) is installed at the other end of the first transmission rod (34), the first small belt wheel (36) is connected with the first large belt wheel (39) installed at one end of the bottom of the second mechanical arm (5) through a first synchronous belt (35), and the second mechanical arm (5) is connected with the first large belt wheel (39) through a second transmission rod (38), a first tension wheel (37) for adjusting the tightness of the first synchronous belt (35) is installed on the first synchronous belt.
3. The robot arm for the intelligent handling equipment of wafer cassettes as claimed in claim 2, wherein: the power transmission device (3) further comprises a fixing rod (391), a second small belt wheel (393) and a second large belt wheel (394), the fixing rod (391) is installed inside the second mechanical arm (5), the second small belt wheel (393) is installed on the fixing rod (391), the second small belt wheel (393) is connected with the second large belt wheel (394) installed inside the second mechanical arm (5) through a second synchronous belt (392), the second large belt wheel (394) is connected with the third mechanical arm (6) through a third transmission rod (395), and a second tensioning wheel used for adjusting the tightness of the second synchronous belt (392) is installed on the second synchronous belt (392).
4. The robot arm for the intelligent handling equipment of the wafer cassette according to claim 1, wherein: the first power driving device (1) comprises a first servo motor (11), a first planetary reducer (12) and a first driving wheel (13), the first servo motor (11) is connected with the first planetary reducer (12), and the first driving wheel (13) used for driving the power transmission device (3) is installed on a driving shaft of the first planetary reducer (12).
5. The robot arm for the intelligent handling equipment of the wafer cassette according to claim 1, wherein: the second power driving device (2) comprises a second servo motor (21), a second planetary speed reducer (22) and a second driving wheel (23), the second servo motor (21) is connected with the second planetary speed reducer (22), and the second driving wheel (23) used for driving the power transmission device (3) is installed on a driving shaft of the second planetary speed reducer (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122547912.9U CN216422565U (en) | 2021-10-22 | 2021-10-22 | A manipulator for wafer box intelligence haulage equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122547912.9U CN216422565U (en) | 2021-10-22 | 2021-10-22 | A manipulator for wafer box intelligence haulage equipment |
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| Publication Number | Publication Date |
|---|---|
| CN216422565U true CN216422565U (en) | 2022-05-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122547912.9U Active CN216422565U (en) | 2021-10-22 | 2021-10-22 | A manipulator for wafer box intelligence haulage equipment |
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| Country | Link |
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| CN (1) | CN216422565U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116654490A (en) * | 2023-04-19 | 2023-08-29 | 尊芯智能科技(苏州)有限公司 | Mechanical arm for conveying wafers |
-
2021
- 2021-10-22 CN CN202122547912.9U patent/CN216422565U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116654490A (en) * | 2023-04-19 | 2023-08-29 | 尊芯智能科技(苏州)有限公司 | Mechanical arm for conveying wafers |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231124 Address after: 200131 floor 1, No. 3-4, Lane 1775, Qiushan Road, Lingang xinpian District, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai Patentee after: Mifei Technology (Shanghai) Co.,Ltd. Address before: Room 3-107, No. 189, Zhangji Road, Kunshan Development Zone, Suzhou, Jiangsu 215334 Patentee before: Jiangsu ruixinku Intelligent Technology Co.,Ltd. |
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| TR01 | Transfer of patent right |