CN216354061U - Fixing device for scanning electron microscope fine sample - Google Patents
Fixing device for scanning electron microscope fine sample Download PDFInfo
- Publication number
- CN216354061U CN216354061U CN202122268531.7U CN202122268531U CN216354061U CN 216354061 U CN216354061 U CN 216354061U CN 202122268531 U CN202122268531 U CN 202122268531U CN 216354061 U CN216354061 U CN 216354061U
- Authority
- CN
- China
- Prior art keywords
- sample
- jack
- platform
- electron microscope
- scanning electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model relates to the field of electron microscope inspection equipment, and discloses a fixing device for a scanning electron microscope fine sample, which comprises a sample table, wherein six circular holes are formed in the sample table at equal intervals, two circular holes are arranged in each sample table, and each circular hole comprises a first jack, a second jack, a third jack, a fourth jack, a fifth jack and a sixth jack. According to the utility model, through the six specifications of the circular holes formed in the sample platform, a plurality of fracture samples fractured at different drawing stages can be placed at one time, the sample chamber does not need to be deflated and vacuumized back and forth, the inspection efficiency is improved, and for fracture samples with radian, the inclination angle of the sample platform can be adjusted relative to the platform within a certain range, so that the fracture section is ensured to be on the same horizontal plane as much as possible, and the analysis accuracy and the working efficiency are effectively improved.
Description
Technical Field
The utility model relates to the field of electron microscope inspection equipment, in particular to a fixing device for scanning a small sample of an electron microscope.
Background
With the rapid development of the modern steel industry, in order to research new processes and new materials, process parameters are continuously optimized and product performance is improved, analysis of fractures by adopting a scanning electron microscope during failure analysis becomes one of indispensable links, however, a sample with a proper length must be intercepted firstly before analysis by the scanning electron microscope and fixed on a sample table of the scanning electron microscope.
At present, a commonly used Zeiss scanning electron microscope sample stage is a cylinder with the diameter of 4.6 centimeters, and the middle of the sample stage is provided with 9 circular holes with the diameter of 4 millimeters, but the sample stage is mainly used for fixing a sample pile, and the sample fixing after drawing only about 1 millimeter can not well meet the requirements, so that the sample is unstable in fixing and easy to incline, and certain interference and difficulty are generated when a fracture is comprehensively analyzed and scanned.
In view of this situation, those skilled in the art provide a fixing device for scanning electron microscope fine samples.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a fixing device for a scanning electron microscope fine sample, which aims to solve the problem that the analysis requirement cannot be met due to unstable fixation of the fine sample in the background technology.
In order to achieve the purpose, the utility model provides the following technical scheme:
the utility model provides a fixing device for tiny sample of scanning electron microscope, includes the sample platform, six kinds of circular holes have been seted up to the inside equidistant of sample platform, and every kind of circular hole all sets up to the same two, six of size circular hole includes first jack, second jack, third jack, fourth jack, fifth jack and sixth jack.
As a still further scheme of the utility model: the sample platform is a metal cylinder, the diameter of the sample platform is 3.5 cm, the height of the sample platform is 1.5 cm, and six circular holes axially penetrate through the sample platform and can be used for placing a plurality of fracture samples fractured at different drawing stages at one time.
As a still further scheme of the utility model: the center position department of sample platform bottom has seted up the recess, and the recess is hemispherical structure for match each other with the location ball, supplementary spacing.
As a still further scheme of the utility model: the sample platform is placed on the platform, and the central point on the top end of the platform is fixed with a positioning ball, the positioning ball is of a spherical structure, and the positioning ball and the groove are mutually embedded, so that the sample platform can be horizontally or obliquely placed relative to the platform within a certain range, and is suitable for fractures with radian, and the fracture surfaces of the fractures are ensured to be on a horizontal plane as much as possible.
As a still further scheme of the utility model: the diameters of the first jack, the second jack, the third jack, the fourth jack, the fifth jack and the sixth jack are respectively 0.5 mm, 0.8 mm, 1.2 mm, 1.5 mm, 2.0 mm and 3.0 mm, and holes with corresponding sizes can be selected according to fracture samples of different specifications and inserted into the holes.
The utility model has the beneficial effects that:
1. the round holes with six specifications are formed in one sample table, so that the test table is suitable for fracture samples with various specifications, a plurality of fracture samples fractured at different drawing stages can be placed at one time, the sample chamber does not need to be deflated and vacuumized back and forth, and the test efficiency is improved;
2. for the fracture sample with radian, the inclination angle of the sample platform can be adjusted relative to the platform within a certain range through the rotary embedding relation between the positioning ball and the groove, so that the fracture section of the fracture is ensured to be on the same horizontal plane as much as possible, and the analysis accuracy and the working efficiency are effectively improved.
Drawings
The utility model will be further described with reference to the accompanying drawings.
FIG. 1 is a perspective view of a fixture for scanning electron microscope fine specimens;
FIG. 2 is a bottom perspective view of the sample stage of FIG. 1;
fig. 3 is a perspective view of the platform of fig. 1.
In the figure: 1. a sample stage; 2. a first jack; 3. a second jack; 4. a third jack; 5. a fourth jack; 6. a fifth jack; 7. a sixth jack; 8. a groove; 9. a platform; 10. and a positioning ball.
Detailed Description
The technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiment of the present invention, and with reference to fig. 1 to 3, the embodiment of the present invention is as follows:
a fixing device for a scanning electron microscope fine sample is disclosed in figure 1: including sample platform 1, six kinds of circular holes have been seted up to the inside equidistant of sample platform 1, and every circular hole all sets up to the same two of size, and six kinds of circular holes include first jack 2, second jack 3, third jack 4, fourth jack 5, fifth jack 6 and sixth jack 7.
In fig. 1: the sample platform 1 is a metal cylinder, the diameter of the sample platform 1 is 3.5 cm, the height of the sample platform 1 is 1.5 cm, and six circular holes axially penetrate through the sample platform 1, so that a plurality of fracture samples fractured at different drawing stages can be placed at one time; the diameters of the first jack 2, the second jack 3, the third jack 4, the fourth jack 5, the fifth jack 6 and the sixth jack 7 are respectively 0.5 mm, 0.8 mm, 1.2 mm, 1.5 mm, 2.0 mm and 3.0 mm, and holes with corresponding sizes can be selected according to fracture samples of different specifications and inserted into the holes.
In fig. 2 and 3: a groove 8 is formed in the center of the bottom of the sample table 1, and the groove 8 is of a hemispherical structure and is used for matching with a positioning ball 10 and assisting in limiting; sample platform 1 is placed on platform 9, and the central point department of putting on platform 9 top is fixed with location ball 10, and location ball 10 is the ball column structure, and mutual gomphosis between location ball 10 and the recess 8 for sample platform 1 can be placed about platform 9 level or slope in the certain limit, thereby is applicable to the fracture that has the radian, ensures that the section of fracture is on a horizontal plane as far as possible.
The working principle of the utility model is as follows: the existing sigma-IGMA/HD zeiss scanning electron microscope sample table 1 in a test room is reformed, two circular holes with the diameter of 0.5 mm, the diameter of 0.8 mm, the diameter of 1.2 mm, the diameter of 1.5 mm, the diameter of 2.0 mm and the diameter of 3.0 mm are respectively formed in the sample table 1, fracture samples with different specifications are inserted into the holes with different sizes and are fixed in a cross mode by using a carbon conductive adhesive tape, the sample table 1 is adhered to a platform 9 of a sample real by using the carbon conductive adhesive tape, the fracture samples cannot shake back and forth and incline to interfere with analysis during scanning, the fracture samples with different specifications can be placed at one time, and a sample chamber is not required to be deflated and vacuumized back and forth, so that the inspection efficiency is improved;
in addition, for the fracture sample with radian, through the rotatory gomphosis relation between locating ball 10 and recess 8, can make sample platform 1 can be in certain extent about platform 9 adjustment inclination to ensure that the section of fracture is on a horizontal plane as far as possible, be favorable to obtaining a clear scanning electron microscope fracture photo, and then effectively improve analysis accuracy and work efficiency.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the scope of the present invention, and the technical solutions and the utility model concepts of the present invention are equivalent to or changed within the scope of the present invention.
Claims (5)
1. The utility model provides a fixing device for tiny sample of scanning electron microscope, includes sample platform (1), its characterized in that, six kinds of circular holes have been seted up to the inside equidistant of sample platform (1), and every kind of circular hole all sets up to the same two, six of size circular hole includes first jack (2), second jack (3), third jack (4), fourth jack (5), fifth jack (6) and sixth jack (7).
2. The fixing device for the scanning electron microscope fine sample is characterized in that the sample platform (1) is a metal cylinder, the diameter of the sample platform (1) is 3.5 cm, the height of the sample platform is 1.5 cm, and six circular holes axially penetrate through the sample platform (1).
3. The fixing device for the scanning electron microscope fine sample is characterized in that a groove (8) is formed in the center of the bottom of the sample stage (1), and the groove (8) is of a hemispherical structure.
4. The fixing device for the scanning electron microscope fine sample is characterized in that the sample stage (1) is placed on the platform (9), a positioning ball (10) is fixed at the center of the top end of the platform (9), the positioning ball (10) is of a spherical structure, and the positioning ball (10) and the groove (8) are mutually embedded.
5. A fixture for fine specimens for scanning electron microscopes according to claim 1, characterized in that the diameters of the first, second, third, fourth, fifth and sixth insertion holes (2, 3, 4, 5, 6, 7) are respectively 0.5 mm, 0.8 mm, 1.2 mm, 1.5 mm, 2.0 mm and 3.0 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122268531.7U CN216354061U (en) | 2021-09-17 | 2021-09-17 | Fixing device for scanning electron microscope fine sample |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122268531.7U CN216354061U (en) | 2021-09-17 | 2021-09-17 | Fixing device for scanning electron microscope fine sample |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216354061U true CN216354061U (en) | 2022-04-19 |
Family
ID=81172833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122268531.7U Active CN216354061U (en) | 2021-09-17 | 2021-09-17 | Fixing device for scanning electron microscope fine sample |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216354061U (en) |
-
2021
- 2021-09-17 CN CN202122268531.7U patent/CN216354061U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1715862A (en) | Apparatus for evacuating a sample | |
| WO2013187611A1 (en) | Test probe and machining method thereof | |
| CN216354061U (en) | Fixing device for scanning electron microscope fine sample | |
| CN1207531C (en) | Plate for measuring deviation of element mounting device and its measuring method | |
| CN106783651B (en) | Method for determining failure position of semiconductor device | |
| CN105092909B (en) | Bend probe and its tool | |
| CN208833876U (en) | A kind of high voltage resistant testing device of semiconductor chip | |
| CN208773512U (en) | Platform is reprocessed in a kind of leakage punching of stamping parts | |
| CN203312250U (en) | Multi-angle tightening type SEM sample bench | |
| CN108426504B (en) | Three-coordinate measuring device and method for measuring peak vertex wall thickness of thin-wall special-shaped pipe | |
| CN209945226U (en) | Quick deformation calibration jig for hardware stamping parts | |
| CN107855660A (en) | Collection mark is with being detected on integral rotary type marking mechanism | |
| CN201342588Y (en) | Locating device of multi-layer plate processing machine | |
| CN210487943U (en) | MicroLED test fixture and MicroLED test equipment | |
| CN210221874U (en) | Electronic probe sample seat capable of adjusting sample height and angle | |
| CN206546811U (en) | A kind of type that sorts clamps the sample platform of scanning electronic microscope of irregular small sample | |
| CN206225315U (en) | ESEM Multifunctional nonstandard sample stage | |
| CN221281058U (en) | Network-carrying card ring applied to three-dimensional scanning of electronic fault of refrigeration electron microscope | |
| CN115122254B (en) | Vacuum adsorption table, PCB product fixing method and PCB product processing equipment | |
| CN211178208U (en) | Assembled pipe fitting checking fixture | |
| CN212683681U (en) | Sample plate fixer suitable for equivalent flat plate test | |
| CN219799651U (en) | Tip discharge test equipment | |
| CN105319137A (en) | Device for improving precision degree of circular-arc Brazilian test and installation and debugging method of device | |
| CN204584781U (en) | Middle cylinder body machining center clamp | |
| CN206460132U (en) | Light emitting element detecting apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |