CN216246251U - Sputtering target detection device - Google Patents
Sputtering target detection device Download PDFInfo
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- CN216246251U CN216246251U CN202122669597.7U CN202122669597U CN216246251U CN 216246251 U CN216246251 U CN 216246251U CN 202122669597 U CN202122669597 U CN 202122669597U CN 216246251 U CN216246251 U CN 216246251U
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- 238000001514 detection method Methods 0.000 title claims abstract description 41
- 238000005477 sputtering target Methods 0.000 title claims abstract description 27
- 230000033001 locomotion Effects 0.000 claims abstract description 11
- 230000000694 effects Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 3
- 239000013077 target material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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Abstract
The utility model discloses a sputtering target detection device in the field of detection devices, which comprises a bottom plate, wherein the upper end of the bottom plate is fixedly connected with a fixing plate, a second bearing seat and a third bearing seat, the inside of the third bearing seat is rotatably connected with an intermittent movement device, the inside of the second bearing seat is rotatably connected with a reciprocating device, and the lower end of the bottom plate is fixedly connected with a power device.
Description
Technical Field
The utility model relates to the field of detection devices, in particular to a sputtering target detection device.
Background
The requirements of sputtering targets are higher than those of the traditional material industry, and the requirements are generally such as size, flatness, purity, content of various impurities, density, N/O/C/S, grain size and defect control; higher or special requirements include: surface roughness, resistance, grain size uniformity, composition and texture uniformity, foreign matter content and size, magnetic permeability, ultra-high density and ultra-fine grains, and the like.
However, when the flatness of the sputtering target is detected, the worker holds the detection device with one hand and holds the sputtering target with the other hand for detection, which not only wastes time and labor, but also reduces the production efficiency of the sputtering target.
Accordingly, the present invention is directed to a sputtering target detection apparatus that solves the above-mentioned problems of the prior art.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to a sputtering target detection apparatus to solve the above problems.
In order to achieve the purpose, the utility model provides the following technical scheme:
the utility model provides a sputter target detection device, includes the bottom plate, the upper end fixedly connected with fixed plate, second bearing frame and the third bearing frame of bottom plate, the inside of third bearing frame is rotated and is connected with intermittent type nature telecontrol equipment, the inside of second bearing frame is rotated and is connected with reciprocating device, the lower extreme fixedly connected with power device of bottom plate.
As a further scheme of the utility model: the lower extreme fixedly connected with supporting leg of bottom plate, the supporting leg is provided with a plurality of even distributions at the lower extreme of bottom plate, and the during operation makes the overall device more stable place subaerial under the effect of supporting leg.
As a still further scheme of the utility model: the intermittent movement device comprises a fourth bearing seat, a worm wheel, a second driven wheel, a second belt, a second driving wheel, a half gear, a first rotating shaft, a disc and a third rotating shaft, wherein the third rotating shaft is rotatably connected inside the third bearing seat, the right end of the third rotating shaft is fixedly connected with the second driving wheel, and the left end of the third rotating shaft is fixedly connected with the half gear; a first rotating shaft is rotatably connected inside the bottom plate, a disc is fixedly connected at the upper end of the first rotating shaft, the lower end of the first rotating shaft is fixedly connected with a worm wheel, the worm wheel is meshed with a worm, the worm is rotationally connected with a fourth bearing seat, the upper end of the fourth bearing seat is fixedly connected with the bottom plate, the right end of the worm is fixedly connected with a second driven wheel, the second driving wheel and the second driven wheel are connected through a second belt, when the worm-gear transmission mechanism works, when the half gear rotates to drive the third rotating shaft to rotate, the third rotating shaft rotates to drive the second driving wheel to rotate, the second driving wheel rotates to drive the second driven wheel to rotate under the action of the second belt, the second driven wheel rotates to drive the worm to rotate, the worm rotates to drive the worm wheel to rotate, the worm wheel rotates to drive the first rotating shaft to rotate, the first rotating shaft rotates to drive the disc to rotate, and thus the disc rotates to drive the sputtering target material positioned at the upper end of the disc to rotate.
As a still further scheme of the utility model: the reciprocating device comprises a square plate, a cam, an all-gear, a second rotating shaft, a moving strip, a detection head, a sliding rod and a spring, wherein the sliding rod is fixedly connected inside the fixed plate, the circumferential surface of the sliding rod is connected with the moving strip in a sliding manner, the lower end of the moving strip is fixedly connected with the spring and the detection head, one end of the spring, far away from the moving strip, is fixedly connected with the fixed plate, and the right end of the moving strip is fixedly connected with the square plate; the inner part of the second bearing seat is rotatably connected with a second rotating shaft, the circumferential surface of the second rotating shaft is fixedly connected with a full gear, when the second rotating shaft rotates to drive the cam and the full gear to rotate, the cam rotates to gradually approach and extrude the square plate, so that the direction plate moves upwards, the square plate moves to drive the moving strip to move along the sliding rod, at the moment, the moving strip drives the detection head to move along with the movement of the moving strip, the cam does not extrude the square plate along with the rotation of the cam, at the moment, the square plate and the moving strip stably move downwards under the action of the spring, and the moving strip does not stop to reciprocate up and down along with the continuous rotation of the cam, and the moving strip does not stop to reciprocate; the intermittent motion device is intermittently powered under the action of the full gear.
As a still further scheme of the utility model: power device includes biax motor, dwang, primary shaft bearing, first action wheel, first from driving wheel and first belt, the lower extreme fixedly connected with biax motor and the primary shaft bearing of bottom plate, the play axle end fixedly connected with dwang of biax motor, rotate between dwang and the primary shaft bearing and be connected, the first action wheel of right-hand member fixedly connected with of dwang, the first follow driving wheel of right-hand member fixedly connected with of second pivot, first action wheel and first from connecting through first belt between the driving wheel, the during operation opens biax motor, drive the dwang rotation under the effect of biax motor, the dwang rotates and drives first action wheel and rotates, and first action wheel rotates and drives first from taking place to rotate under the effect of first belt, gives reciprocating device power under the effect of first follow driving wheel like this.
As a still further scheme of the utility model: dwang, first bearing frame, first action wheel, first from driving wheel, first belt, second bearing frame, fixed plate, spring, slide bar, cam and square board symmetric distribution both ends about the bottom plate, the during operation can be so that remove the strip and detect the stable reciprocating of head.
Advantageous effects
Compared with the prior art, the utility model has the beneficial effects that:
by the cooperation of a fixed plate, a square plate, a cam, a full gear, a second rotating shaft, a moving strip, a detection head, a sliding rod, a spring, a fourth bearing seat, a worm wheel, a second driven wheel, a second belt, a second driving wheel, a half gear, a first rotating shaft, a disc, a third rotating shaft, a double-shaft motor, a rotating rod, a first bearing seat, a first driving wheel, a first driven wheel and a first belt, the double-shaft motor is started, the rotating rod is driven to rotate under the action of the rotating shaft motor, the rotating rod rotates to drive the first driving wheel to rotate, the first driving wheel rotates to drive the first driven wheel to rotate under the action of the first belt, the first driven wheel rotates to drive the second rotating shaft to rotate, the second rotating shaft rotates to drive the full gear and the cam, the half gear rotates the disc under the action of the half gear, and the moving strip and the detection head reciprocate up and down under the action of the cam, the detection head can intermittently detect the sputtering target on the disc, so that the problem that the sputtering target is not convenient to detect in the prior art is solved, and the purposes of time saving and labor saving are achieved.
Drawings
FIG. 1 is a schematic overall structure view of a front view of the present invention;
FIG. 2 is a schematic bottom view of the present invention;
FIG. 3 is an enlarged view of A in FIG. 2 according to the present invention.
In the figure: 1. a base plate; 2. supporting legs; 3. rotating the rod; 4. a first bearing housing; 5. a double-shaft motor; 6. a disc; 7. a first rotating shaft; 8. a fixing plate; 9. a second bearing housing; 10. a first belt; 11. a second rotating shaft; 12. a moving bar; 13. a detection head; 14. a square plate; 15. a cam; 16. a first drive wheel; 17. a second driven wheel; 18. a second belt; 19. all-gear; 20. a first driven wheel; 21. a second drive wheel; 22. a spring; 23. a slide bar; 24. a half gear; 25. a third rotating shaft; 26. a third bearing seat; 27. a fourth bearing seat; 28. a worm; 29. a worm gear.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 3, in an embodiment of the present invention, a sputtering target detection apparatus includes a base plate 1, a fixing plate 8, a second bearing seat 9 and a third bearing seat 26 are fixedly connected to an upper end of the base plate 1, an intermittent motion device is rotatably connected to an inside of the third bearing seat 26, a reciprocating device is rotatably connected to an inside of the second bearing seat 9, and a power device is fixedly connected to a lower end of the base plate 1.
As a further embodiment of the utility model: the lower extreme fixedly connected with supporting leg 2 of bottom plate 1, supporting leg 2 are provided with a plurality of even distributions at the lower extreme of bottom plate 1, and the during operation makes the overall device more stable place subaerial under supporting leg 2's effect.
As still further embodiments of the utility model: the intermittent movement device comprises a fourth bearing seat 27, a worm 28, a worm wheel 29, a second driven wheel 17, a second belt 18, a second driving wheel 21, a half gear 24, a first rotating shaft 7, a disc 6 and a third rotating shaft 25, wherein the third rotating shaft 25 is rotatably connected inside the third bearing seat 26, the right end of the third rotating shaft 25 is fixedly connected with the second driving wheel 21, and the left end of the third rotating shaft 25 is fixedly connected with the half gear 24; a first rotating shaft 7 is rotatably connected inside the bottom plate 1, a disc 6 is fixedly connected at the upper end of the first rotating shaft 7, a worm wheel 29 is fixedly connected at the lower end of the first rotating shaft 7, a worm 28 is meshed with the worm wheel 29, the worm 28 is rotatably connected with a fourth bearing seat 27, the upper end of the fourth bearing seat 27 is fixedly connected with the bottom plate 1, a second driven wheel 17 is fixedly connected at the right end of the worm 28, the second driven wheel 21 is connected with the second driven wheel 17 through a second belt 18, when the half gear 24 rotates to drive the third rotating shaft 25 to rotate, the third rotating shaft 25 rotates to drive the second driven wheel 21 to rotate, the second driven wheel 21 rotates to drive the second driven wheel 17 to rotate under the action of the second belt 18, the second driven wheel 17 rotates to drive the worm 28 to rotate, the worm wheel 28 rotates to drive the worm wheel 29 to rotate, the worm wheel 29 rotates to drive the first rotating shaft 7 to rotate, the first rotating shaft 7 rotates to drive the disc 6 to rotate, thus, the rotation of the disk 6 can drive the sputtering target material at the upper end of the disk 6 to rotate.
As still further embodiments of the utility model: the reciprocating device comprises a square plate 14, a cam 15, a full gear 19, a second rotating shaft 11, a moving strip 12, a detection head 13, a sliding rod 23 and a spring 22, the sliding rod 23 is fixedly connected inside the fixed plate 8, the circumferential surface of the sliding rod 23 is slidably connected with the moving strip 12, the spring 22 and the detection head 13 are fixedly connected to the lower end of the moving strip 12, one end, far away from the moving strip 12, of the spring 22 is fixedly connected with the fixed plate 8, and the square plate 14 is fixedly connected to the right end of the moving strip 12; a second rotating shaft 11 is rotatably connected inside the second bearing block 9, a full gear 19 is fixedly connected with the circumferential surface of the second rotating shaft 11, and when the device works, when the second rotating shaft 11 rotates to drive the cam 15 and the full gear 19 to rotate, the cam 15 rotates to gradually approach and extrude the square plate 14, so that the direction plate moves upwards, square plate 14 moves to drive moving strip 12 to move along slide rod 23, at this time, along with the movement of the moving strip 12, the moving strip 12 drives the detecting head 13 to move, because cam 15 is continuously rotated, cam 15 does not press square plate 14 with the rotation of cam 15, at this time, square plate 14 and moving strip 12 stably move downward under the action of spring 22, and with the continuous rotation of cam 15, the moving strip 12 continuously reciprocates up and down, and the moving strip 12 continuously reciprocates, so that the detection head 13 continuously reciprocates; the intermittent motion device is intermittently powered by the full gear 19.
As still further embodiments of the utility model: the power device comprises a double-shaft motor 5, a rotating rod 3, a first bearing seat 4, a first driving wheel 16, a first driven wheel 20 and a first belt 10, the double-shaft motor 5 and the first bearing seat 4 are fixedly connected to the lower end of the bottom plate 1, the rotating rod 3 is fixedly connected to the output shaft end of the double-shaft motor 5, the rotating rod 3 is rotatably connected with the first bearing seat 4, the first driving wheel 16 is fixedly connected to the right end of the rotating rod 3, the first driven wheel 20 is fixedly connected to the right end of the second rotating shaft 11, the first driving wheel 16 is connected with the first driven wheel 20 through the first belt 10, and when the power device works, the double-shaft motor 5 is started, the rotating rod 3 is driven to rotate under the action of the double-shaft motor 5, the rotating rod 3 rotates to drive the first driving wheel 16 to rotate, the first driving wheel 16 rotates to drive the first driven wheel 20 to rotate under the action of the first belt 10, and therefore power is supplied to the reciprocating device under the action of the first driven wheel 20.
As still further embodiments of the utility model: the rotating rod 3, the first bearing block 4, the first driving wheel 16, the first driven wheel 20, the first belt 10, the second bearing block 9, the fixing plate 8, the spring 22, the sliding rod 23, the cam 15 and the square plate 14 are symmetrically distributed at the left end and the right end of the bottom plate 1, and during operation, the moving strip 12 and the detection head 13 can be stably moved up and down.
The working principle of the utility model is as follows:
when the sputtering target detection device is used, a sputtering target to be detected is placed on a disc 6, then a double-shaft motor 5 is started, a rotating rod 3 is driven to rotate under the action of the double-shaft motor 5, the rotating rod 3 rotates to drive a first driving wheel 16 to rotate, the first driving wheel 16 rotates to drive a first driven wheel 20 to rotate under the action of a first belt 10, the first driven wheel 20 rotates to drive a second rotating shaft 11 to rotate, the second rotating shaft 11 rotates to drive a full gear 19 and a cam 15 to rotate, the cam 15 rotates to gradually approach and extrude a square plate 14, so that the direction plate moves upwards, the square plate 14 moves to drive a moving strip 12 to move upwards along a sliding rod 23, at the moment, along with the movement of the moving strip 12, the moving strip 12 drives a detection head 13 to move upwards, and simultaneously, the full gear 19 and a half gear 24 are meshed to rotate in the upward movement of the detection head 13, the half gear 24 rotates to drive the third rotating shaft 25 to rotate, the third rotating shaft 25 rotates to drive the second driving wheel 21 to rotate, the second driving wheel 21 rotates to drive the second driven wheel 17 to rotate under the action of the second belt 18, the second driven wheel 17 rotates to drive the worm 28 to rotate, the worm 28 rotates to drive the worm wheel 29 to rotate, the worm wheel 29 rotates to drive the first rotating shaft 7 to rotate, the first rotating shaft 7 rotates to drive the disc 6 to rotate, so that the disc 6 can drive the sputtering target positioned at the upper end of the disc 6 to rotate, the cam 15 does not extrude the square plate 14 along with the rotation of the cam 15, the square plate 14 and the moving strip 12 stably move downwards under the action of the spring 22, when the square plate 14 and the moving strip 12 move downwards, the half gear 24 and the gear are not meshed, the half gear 24 does not rotate, and the disc 6 does not rotate any more, at this moment, because the detection head 13 moves downwards, the detection head 13 can detect the sputtering target on the disc 6, because the cam 15 rotates ceaselessly, the detection head 13 can not detect when the detection head 13 moves upwards under the action of the cam 15, and the disc 6 drives the sputtering target to rotate, when the detection head 13 moves downwards, the detection head 13 detects when moving to a proper position, and the disc 6 does not rotate, so that the detection head 13 can detect different positions of the sputtering target.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and equivalent alternatives or modifications according to the technical solution of the present invention and the inventive concept thereof should be covered by the scope of the present invention.
Claims (6)
1. A sputtering target detection device comprises a bottom plate (1), and is characterized in that: the utility model discloses a bottom plate, including bottom plate (1), upper end fixedly connected with fixed plate (8), second bearing frame (9) and third bearing frame (26), the inside rotation of third bearing frame (26) is connected with intermittent type nature telecontrol equipment, the inside rotation of second bearing frame (9) is connected with reciprocating device, the lower extreme fixedly connected with power device of bottom plate (1).
2. The sputtering target detection apparatus according to claim 1, wherein: the lower extreme fixedly connected with supporting leg (2) of bottom plate (1), supporting leg (2) are provided with a plurality of even lower extreme that distribute at bottom plate (1).
3. The sputtering target detection apparatus according to claim 1, wherein: the intermittent movement device comprises a fourth bearing seat (27), a worm (28), a worm wheel (29), a second driven wheel (17), a second belt (18), a second driving wheel (21), a half gear (24), a first rotating shaft (7), a disc (6) and a third rotating shaft (25), wherein the third rotating shaft (25) is rotatably connected inside the third bearing seat (26), the right end of the third rotating shaft (25) is fixedly connected with the second driving wheel (21), and the left end of the third rotating shaft (25) is fixedly connected with the half gear (24); the inside of bottom plate (1) is rotated and is connected with first pivot (7), upper end fixedly connected with disc (6) of first pivot (7), lower extreme fixedly connected with worm wheel (29) of first pivot (7), worm wheel (29) meshing has worm (28), rotate between worm (28) and the fourth bearing seat (27) and be connected, fixed connection between the upper end of fourth bearing seat (27) and bottom plate (1), the right-hand member fixedly connected with second of worm (28) is followed driving wheel (17), second action wheel (21) and second are followed and are connected through second belt (18) between driving wheel (17).
4. The sputtering target detection apparatus according to claim 1, wherein: the reciprocating device comprises a square plate (14), a cam (15), a full gear (19), a second rotating shaft (11), a moving strip (12), a detection head (13), a sliding rod (23) and a spring (22), wherein the inside of the fixed plate (8) is fixedly connected with the sliding rod (23), the circumferential surface of the sliding rod (23) is slidably connected with the moving strip (12), the lower end of the moving strip (12) is fixedly connected with the spring (22) and the detection head (13), one end, far away from the moving strip (12), of the spring (22) is fixedly connected with the fixed plate (8), and the right end of the moving strip (12) is fixedly connected with the square plate (14); the inner part of the second bearing block (9) is rotatably connected with a second rotating shaft (11), and the circumferential surface of the second rotating shaft (11) is fixedly connected with a full gear (19).
5. The sputtering target detection apparatus according to claim 4, wherein: power device includes double-shaft motor (5), dwang (3), primary shaft bearing (4), first action wheel (16), first from driving wheel (20) and first belt (10), the lower extreme fixedly connected with double-shaft motor (5) and primary shaft bearing (4) of bottom plate (1), the play axle end fixedly connected with dwang (3) of double-shaft motor (5), rotate between dwang (3) and primary shaft bearing (4) and be connected, the first action wheel (16) of right-hand member fixedly connected with of dwang (3), the first follow driving wheel (20) of right-hand member fixedly connected with of second pivot (11), first action wheel (16) and first are connected through first belt (10) from between driving wheel (20).
6. The sputtering target detection apparatus according to claim 5, wherein: the automatic feeding device is characterized in that the rotating rod (3), the first bearing block (4), the first driving wheel (16), the first driven wheel (20), the first belt (10), the second bearing block (9), the fixing plate (8), the spring (22), the sliding rod (23), the cam (15) and the square plate (14) are symmetrically distributed at the left end and the right end of the bottom plate (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122669597.7U CN216246251U (en) | 2021-11-03 | 2021-11-03 | Sputtering target detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122669597.7U CN216246251U (en) | 2021-11-03 | 2021-11-03 | Sputtering target detection device |
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| Publication Number | Publication Date |
|---|---|
| CN216246251U true CN216246251U (en) | 2022-04-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122669597.7U Active CN216246251U (en) | 2021-11-03 | 2021-11-03 | Sputtering target detection device |
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| CN (1) | CN216246251U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115267432A (en) * | 2022-08-03 | 2022-11-01 | 西安电子科技大学工程技术研究院有限公司 | A cable fault locator |
-
2021
- 2021-11-03 CN CN202122669597.7U patent/CN216246251U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115267432A (en) * | 2022-08-03 | 2022-11-01 | 西安电子科技大学工程技术研究院有限公司 | A cable fault locator |
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