CN216000997U

CN216000997U - A trompil device for large-scale pipe class of semiconductor

Info

Publication number: CN216000997U
Application number: CN202121824486.2U
Authority: CN
Inventors: 单佩
Original assignee: Shanghai Feilihua Shichuang Technology Co ltd
Current assignee: Shanghai Feilihua Shichuang Technology Co ltd
Priority date: 2021-08-06
Filing date: 2021-08-06
Publication date: 2022-03-11
Anticipated expiration: 2031-08-06

Abstract

The utility model belongs to the technical field of semiconductor devices, and particularly relates to a punching device. A tapping device for semiconductor large-scale pipes comprises a worktable, wherein the worktable is provided with: the two clamps are respectively positioned on the left side and the right side of the workbench; the bench drill is positioned between the two clamps, and the axial direction of a drill bit of the bench drill is in the front-back direction; and the four-direction moving mechanism is provided with an up-down moving end and a left-right moving end, and the left-right moving end fixes the bench drill. The utility model improves the punching speed, reduces the labor cost, improves the punching reliability, reduces the influence of an operator on the punching quality of a product to be punched, improves the stability of the quality of the product to be punched, improves the production capacity, can be quickly assembled and disassembled, and improves the working efficiency.

Description

A trompil device for large-scale pipe class of semiconductor

Technical Field

The utility model belongs to the technical field of semiconductor devices, and particularly relates to a punching device.

Background

With the upward trend of the semiconductor industry, especially the quality requirements of the components (quartz tubes) used in large-scale equipment are higher and higher, and under the background that the requirements for the quartz tubes are greatly increased, especially the requirements for the large-scale semiconductor tubes are higher and higher, the technical indexes of assembly are higher and higher, and the technical indexes of holes related to assembly are higher and higher.

According to the traditional method for opening the quartz tube, an ink fountain is used for drawing an opening line at the opening position of the quartz tube in advance, and an angle grinder is used for manually opening the opening at the marking position.

SUMMERY OF THE UTILITY MODEL

The present invention is made in view of the above problems, and an object of the present invention is to provide a drilling device for large semiconductor pipes.

A tapping device for large semiconductor pipes comprises a worktable, wherein the worktable is provided with:

the two clamps are respectively positioned on the left side and the right side of the workbench;

the bench drill is positioned between the two clamps, and the axial direction of a drill bit of the bench drill is in the front-back direction;

and the four-direction moving mechanism is provided with an up-down moving end, a left-right moving end and a front-back moving end, and the front-back moving end is used for fixing the bench drill.

According to the utility model, two ends of a quartz tube needing to be perforated are fixed through a clamp, a bench drill on a workbench is used for perforating, the bench drill can move in the vertical direction and the horizontal direction through a four-direction moving mechanism so as to enable the bench drill to reach a product to be perforated, such as the position to be perforated of the quartz tube, after the bench drill is started, the bench drill moves back and forth through a feeding function of the bench drill, the product to be perforated is drilled, after the drilling is finished, the position of the bench drill is adjusted through the four-direction moving mechanism, the next drilling operation is carried out, and after all holes are machined, the clamp is loosened. The structure of the utility model improves the punching speed, reduces the labor cost, improves the punching reliability, reduces the influence of an operator on the punching quality of a product to be punched, improves the stability of the quality of the product to be punched, improves the production capacity, can be quickly assembled and disassembled, and improves the working efficiency.

The jig includes:

the clamping jaw base is fixed on the workbench;

the two linear guide rails are symmetrically fixed on the jaw base along the left-right direction, and the length directions are the front-back directions;

the two guide rail sliding blocks are symmetrically arranged in a group and are respectively connected with the two linear guide rails in a sliding manner, each guide rail sliding block is provided with a locking device, and the guide rail sliding blocks are locked on the linear guide rails by the locking devices;

and the bottoms of the two clamping jaws are fixed on the same group of guide rail sliding blocks, and the two clamping jaws are symmetrically arranged along the front-back direction.

According to the specification of a product to be punched, the distance between the two symmetrically arranged clamping jaws can be adjusted through the sliding guide rail sliding block, and one of the clamping jaws is locked through the locking device. The other clamping jaw can clamp the product to be punched through relative movement after the product to be punched falls onto the clamp.

The anchor clamps still include an anchor clamps lead screw and remove the module, anchor clamps lead screw removes the module and includes:

the fixture screw rod fixing base is fixed on the workbench;

the axial direction of the clamp screw rod is in the front-back direction, and one end of the clamp screw rod is fixed on the clamp screw rod fixing base;

the clamp nut is rotationally connected with the clamp screw rod, is fixed with one of the clamping jaws and drives the clamping jaw to move back and forth;

and the clamp hand wheel is fixed with the other end of the clamp screw rod.

By rotating the clamp hand wheel, the clamp nut moves back and forth on the clamp screw rod to drive one of the clamping jaws to move back and forth, so that the two clamping jaws move relatively to lock or loosen a product to be punched.

The opposite surfaces of the two clamping jaws are arc-shaped surfaces respectively so as to lock a product to be punched with a circular shape.

The four-direction moving mechanism includes:

an up-down moving mechanism having an up-down moving end;

and the left-right moving mechanism is fixed on the up-down moving end of the up-down moving mechanism and is provided with a left-right moving end, and the left-right moving end fixes the bench drill through the bench drill support.

The up-down moving mechanism includes:

the vertical screw rod is fixed on the side edge of the workbench, and the length direction is the up-down direction;

the vertical sliding table is used as the up-down moving end and is connected with the vertical screw rod;

and the vertical hand wheel is connected with one end of the vertical screw rod, and the vertical sliding table is driven by the rotation of the vertical hand wheel to do vertical linear motion on the vertical screw rod.

The left-right moving mechanism comprises:

the horizontal screw rod is fixed on the vertical sliding table, and the length direction is the left-right direction;

the horizontal sliding table is used as the left and right moving end and is connected with the horizontal screw rod;

and the horizontal hand wheel is connected with one end of the horizontal screw rod, and the horizontal sliding table is driven by the rotation of the horizontal hand wheel to do left and right linear motion on the horizontal screw rod.

The bench drill adopts a bench drill with a feeding function.

The workbench is also provided with:

the two lifting devices are symmetrically arranged between the two clamps along the left-right direction;

the lifting device comprises:

the top surface of the rotating shaft base is a downward concave arc-shaped surface, and rotating shaft accommodating grooves are respectively dug in the front side and the rear side of the top surface;

the two lifting cylinders are respectively positioned on the workbenches on the front side and the rear side of the rotating shaft base, and piston rods of the lifting cylinders are respectively fixed with the front side face and the rear side face of the rotating shaft base;

two pivots, along the fore-and-aft direction symmetry and slope setting are in the holding tank of pivot base, the rear side the pivot is vertical and upper portion is inclined backward, the front side the pivot is vertical and upper portion is leaned forward, two the periphery of pivot all outstanding in the arcwall face of pivot base. The pivot base can support in advance and treat the product of punching, can drive the pivot base through the lifting cylinder and lift up or descend, and the product that makes to wait to punch when the pivot base descends steadily falls on two anchor clamps, through two anchor clamps locking. After the product is punched, the product is loosened through the two clamps, the rotating shaft base is driven by the lifting cylinder to lift the product, and the product is convenient to take out.

The tapping device further comprises:

the other workbench is positioned on the left side or the right side of the workbench;

and the other two lifting devices are symmetrically arranged on the other workbench along the left-right direction.

Before waiting the trompil product trompil, can be with earlier on it as to two other lifting devices on another workstation, because two other lifting devices are located two lifting devices's left side or right side, and because the setting of pivot, directly can will wait that the trompil product pushes two lifting devices on the workstation along left right direction, rethread lifting cylinder drives the pivot base and descends to two anchor clamps and lock and the work of punching. After the product is punched, the product is loosened through the two clamps, the rotating shaft base is driven by the lifting cylinder to lift the product, the product is pushed to another two lifting devices on another workbench on the side edge along the left and right directions again, and then the product is taken out.

Has the advantages that: the utility model has the following advantages:

1. products to be punched can be quickly moved up and down, the working efficiency is improved, and manual carrying is reduced;

2. the drilling machine can be moved to the drilling position through a four-direction moving mechanism, so that the drilling precision is improved;

3. the method has the advantages of simple operation, convenient use, high efficiency, low cost and resource waste reduction.

Drawings

FIG. 1 is a schematic view of an overall structure of the present invention;

FIG. 2 is a schematic view of a clamp according to the present invention;

FIG. 3 is a schematic structural view of a fixture screw moving module according to the present invention;

fig. 4 is a schematic structural diagram of the lifting device of the present invention.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the utility model easy to understand, the utility model is further described with the specific drawings.

Referring to fig. 1, a tapping apparatus for a large-sized semiconductor tube includes a table 1 and another table 2 positioned at a left side or a right side of the table 1.

The workbench 1 is provided with two clamps 3, a bench drill 4, a four-direction moving mechanism and two lifting devices 6.

The two clamps 3 are respectively positioned at the left side and the right side of the workbench 1. Referring to fig. 2, each of the jigs 3 includes a jaw base 31, two linear guide rails 32, four rail sliders 33, two jaws 34, and a set of jig screw moving modules 35. The jaw base 31 is fixed on the table 1. Two linear guide rails 32 are symmetrically fixed on the jaw base 31 along the left-right direction, and the length direction of each linear guide rail 32 is the front-back direction. Two guide rail sliders 33 of the four guide rail sliders 33 are symmetrically arranged in a group and are respectively in sliding connection with the two linear guide rails 32, each guide rail slider 33 is provided with a locking device, and the guide rail sliders 33 are locked on the linear guide rails 32 by the locking devices. The locking device can be a screw or a bolt, a locking through hole is dug on the guide rail sliding block 33, and the guide rail sliding block 33 is fastened on the linear guide rail 32 through the screw or the bolt. The bottom of one claw 34 is fixed on the same group of guide rail sliding blocks 33, and the two claws 34 are symmetrically arranged along the front-back direction. The opposite faces of the two jaws 34 are respectively arc-shaped to facilitate the locking of the products to be perforated, which have a circular shape. As shown in fig. 2, the jaws 34 on the rear side are fixed jaws that are fixed by a locking device, and the jaws 34 on the front side are moving jaws that are movable by a jig screw moving module 35.

Referring to fig. 3, the clamp screw moving module 35 includes a clamp screw fixing base 351, a clamp screw 352, a clamp nut 353, and a clamp handwheel 354. The jig screw fixing base 351 is fixed to the table 1. Preferably, the clamp screw fixing base 351 is located below the fixing jaw. The axial direction of the jig screw 352 is the front-rear direction, and one end of the jig screw 352 is fixed to the jig screw fixing base 351. The clamp nut 353 is connected with the clamp screw rod 352, the clamp nut 353 is fixed with one of the jaws 34, namely the clamp nut 353 is fixed with the movable jaw, and the clamp nut 353 drives the movable jaw to move back and forth. The clamp handwheel 354 is fixed to the other end of the clamp screw 352.

The bench drill 4 is positioned between the two clamps, and the axial direction of the drill bit of the bench drill 4 is the front-back direction. The bench drill adopts a bench drill with a feeding mechanism. The bench drill with the feeding mechanism is a common and easily-obtained bench drill in the prior art, and is provided with a bench drill body and a front-back moving mechanism for moving the bench drill body in the front-back direction, wherein the front-back moving mechanism can comprise a front-back screw rod, a front-back nut and a front-back hand wheel, the front-back screw rod can be fixed on a bench drill support 41, the front-back nut is fixed on the front-back screw rod, the front-back hand wheel is connected with the end part of the front-back screw rod, the front-back nut is fixed with the bench drill body, the front-back nut is driven to move back and forth on the front-back screw rod by rotating the front-back hand wheel, and then the feeding or returning function of the bench drill body is realized.

The four-direction moving mechanism is provided with an up-down moving end and a left-right moving end, the left-right moving end fixes the bench drill 4, and the bench drill 4 realizes the movement in the up-down direction and the left-right direction through the four-direction moving mechanism.

The four-direction moving mechanism comprises an up-down moving mechanism with an up-down moving end and a left-right moving mechanism with a left-right moving end. The left-right moving mechanism is fixed on the up-down moving end of the up-down moving mechanism. The left and right moving ends of the left and right moving mechanism fix the bench drill 4 through the bench drill support 41.

Wherein, the up-and-down moving mechanism comprises a vertical screw rod 51, a vertical sliding table 52 and a vertical hand wheel 53. The vertical screw rod 51 is fixed on the side of the workbench 1, and the length direction of the vertical screw rod 51 is the up-down direction. The vertical slide table 52 is connected as an up-down moving end to the vertical screw rod 51. The vertical hand wheel is connected with one end of the vertical screw rod 51, and the vertical sliding table 52 is driven by the rotation of the vertical hand wheel 53 to do vertical linear motion on the vertical screw rod 51. The left-right moving mechanism comprises a horizontal screw rod 54, a horizontal sliding table 55 and a horizontal hand wheel 56. The horizontal screw 54 is fixed on the vertical sliding table 52, and the length direction of the horizontal screw 54 is the left-right direction. The horizontal slide table 55 is connected to the horizontal screw 54 as a left-right moving end. The horizontal hand wheel 56 is connected with one end of the horizontal screw rod 54, and the rotation of the horizontal hand wheel 56 drives the horizontal sliding table 55 to do left-right linear motion on the horizontal screw rod 54.

Two lifting devices 6 are symmetrically arranged between the two clamps 3 along the left-right direction. Referring to fig. 4, each lifting device 6 includes a spindle base 61, two lifting cylinders 62, and two spindles 63. The arc face of pivot base 61 top surface for the recess downwards, both sides dig respectively around on the top surface of pivot base 61 and are equipped with the pivot holding tank, and the pivot holding tank is used for connecting the both ends of pivot 63. The two lifting cylinders 62 are respectively located on the workbench 1 at the front side and the rear side of the rotating shaft base 61, and piston rods of the lifting cylinders 62 are respectively fixed with the front side and the rear side of the rotating shaft base 61. Two pivot 63 along fore-and-aft direction symmetry and slope setting in the holding tank of pivot base 61, pivot 63 rotates with pivot base 61 to be connected, and the pivot 63 of rear side is vertical and upper portion is inclined backward, and the pivot 63 of front side is vertical and upper portion is inclined forward, and the periphery of two pivot 63 all outstanding arc face in pivot base 61.

Another table 2 is located at the left and right or right side of the table 1, and as shown in fig. 1, another table 2 is located at the right side of the table 1. The other two lifting devices 7 are arranged on the other workbench 2, and the other two lifting devices 7 are symmetrically arranged on the other workbench 2 along the left-right direction.

When the punching machine works, before a product 7 to be punched is punched, the product 7 to be punched is firstly placed on the other two lifting devices 7 on the other workbench 2, the other two lifting devices 7 are positioned at the right sides of the two lifting devices 6, and due to the arrangement of the rotating shaft, the product 7 to be punched can be directly pushed into the two lifting devices 6 on the workbench 1 leftwards, and then the rotating shaft base 61 is driven by the lifting cylinder 62 to descend, so that the product 7 to be punched is stably placed on the two clamps 3. By rotating the clamp handwheel 354, the clamp nut 353 moves backwards on the clamp screw 352 to drive the moving claws on the front side to move backwards, so that the two claws 34 move relatively to lock the product 7 to be drilled. The vertical sliding table 52 is driven to move up and down on the vertical screw rod 51 by the rotation of a vertical hand wheel 53 in the up-and-down moving mechanism, and the vertical position is determined. The horizontal sliding table 55 is driven to move left and right on the horizontal screw rod 54 by the rotation of a horizontal hand wheel 56 in the left-right moving mechanism, and the left and right positions are determined, so that the bench drill 4 can reach the position to be drilled of the product 7 to be drilled. After the bench drill 4 is started, the product 7 to be drilled is drilled through the feeding mechanism of the bench drill 4, after drilling is completed, the position of the bench drill 4 is adjusted again through the four-direction moving mechanism, next drilling work is performed, after all holes are machined, the clamp hand wheel 354 is rotated in the opposite direction, the clamp jaws are moved forwards, and the product which is drilled is loosened. The lifting cylinder 62 drives the rotating shaft base 61 to lift the product, and the product is pushed to the right direction to the other two lifting devices 7 on the other workbench 2 on the right side, so that the product is taken out.

The foregoing shows and describes the general principles, essential features, and advantages of the utility model. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. A tapping device for large semiconductor pipes comprises a worktable, and is characterized in that the worktable is provided with:

and the four-direction moving mechanism is provided with an up-down moving end and a left-right moving end, and the left-right moving end is used for fixing the bench drill.

2. A tapping device for large semiconductor pipes according to claim 1 wherein the fixture comprises:

the clamping jaw base is fixed on the workbench;

3. A tapping device for large semiconductor tubes according to claim 2, wherein said fixture further comprises a fixture screw moving module, said fixture screw moving module comprising:

the fixture screw rod fixing base is fixed on the workbench;

the clamp nut is connected with the clamp screw rod, is fixed with one of the clamping jaws and drives the clamping jaw to move back and forth;

and the clamp hand wheel is fixed with the other end of the clamp screw rod.

4. A tapping device for large semiconductor tubes according to claim 2 wherein the opposing faces of said jaws are arcuate.

5. A tapping device for large semiconductor pipes according to claim 1 wherein the four-way movement mechanism comprises:

an up-down moving mechanism having an up-down moving end;

6. A tapping device for semiconductor large scale pipes as claimed in claim 5 wherein said up and down moving means comprises:

7. A tapping device for semiconductor large scale pipes as claimed in claim 6 wherein said side to side moving mechanism comprises:

8. A tapping device for large semiconductor pipes as set forth in claim 1 wherein the bench drill is a bench drill having a feed mechanism.

9. A tapping device for large pipes for semiconductors according to any one of claims 1 to 8 wherein said table further comprises:

the lifting device comprises:

two pivots, along the fore-and-aft direction symmetry and slope setting are in the holding tank of pivot base, the rear side the pivot is vertical and upper portion is inclined backward, the front side the pivot is vertical and upper portion is leaned forward, two the periphery of pivot all outstanding in the arcwall face of pivot base.

10. A tapping device for large semiconductor pipes according to claim 9 further comprising: