CN215240185U - Fixture of grinding machine - Google Patents

Fixture of grinding machine Download PDF

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Publication number
CN215240185U
CN215240185U CN202120863878.3U CN202120863878U CN215240185U CN 215240185 U CN215240185 U CN 215240185U CN 202120863878 U CN202120863878 U CN 202120863878U CN 215240185 U CN215240185 U CN 215240185U
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China
Prior art keywords
fixture
crystal
grinding machine
jig according
positioning rod
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CN202120863878.3U
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Chinese (zh)
Inventor
周一
彭杰
毕洪伟
赵红
黄玉荣
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Weike Saile Microelectronics Co Ltd
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Weike Saile Microelectronics Co Ltd
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Abstract

The utility model discloses a grinding machine fixture, including the fixture main part, set up the dress draw-in groove that runs through two sides around in this fixture main part the upper end of dress draw-in groove has been seted up cutting mouth, this cutting mouth with the dress draw-in groove communicates with each other, stop screw is installed respectively to the both sides of cutting mouth a port department of dress draw-in groove installs supplementary instrument of adjusting well. When the large edge of the crystal is ground, after the crystal is placed into the clamping groove, the auxiliary alignment tool is used for ensuring that the cleavage line of the crystal is vertical, namely the cleavage line is completely aligned with the auxiliary alignment tool, then the limit screws on two sides are used for clamping the crystal at the same time, the crystal is prevented from displacing to cause the deviation of the cleavage line, and the large edge of the crystal after being ground and cut through the cutting opening is ensured to be vertical to the cleavage line.

Description

Fixture of grinding machine
Technical Field
The utility model relates to a crystal grinds technical field, concretely relates to grinding machine fixture.
Background
In the wafer production process, the crystal needs to be subjected to slicing pretreatment first. An important process of the slicing pretreatment is that the crystal is subjected to main and auxiliary edge positioning treatment, namely large edge and small edge positioning of the crystal; it must be ensured that the large edge of the crystal cut is perpendicular to the crystal cleave line.
The current common main and auxiliary edge positioning method comprises the following steps: and (3) accurately measuring deflection angles of 4 points at two ends of the cleavage line and two ends perpendicular to the cleavage line by using an X-ray diffractometer, and determining the position of the large edge by the deflection angles of 4 points. After the large edge is determined, the crystal is clamped into a clamp, and the crystal and the clamp are fixed on a workbench of a surface grinding machine together to grind the large edge.
When the crystal is clamped on the clamp, the cleavage line of the crystal needs to be ensured to be completely vertical. The method commonly adopted at present comprises the following steps: the cleavage line is aligned by the square, one right-angle side of the square is completely attached to the horizontal operating platform, the other right-angle side of the square is close to the cleavage line, and the cleavage line is determined to be vertical when the right-angle side and the cleavage line are completely overlapped. This method has some drawbacks, one of which is: the table top of the operating table cannot be guaranteed to be absolutely flat and horizontal, and errors can be caused by the right-angle edge fitting; the second step is as follows: the right-angle side and the cleavage line are completely overlapped by observing and judging by human eyes, and accidental errors still exist.
The existing clamping apparatus is in an inverted form, other materials are laid below the clamping apparatus to heighten the clamping apparatus, so that the lower part of the clamping apparatus is suspended, crystals can be smoothly loaded into the clamping apparatus, the whole clamping apparatus needs to be turned over and placed right after the clamping apparatus is loaded, and dangers such as falling of the clamping apparatus, falling of the crystals, cracking of the crystals, injury of operators and the like are easily caused in the turning process; meanwhile, the screw for fixing the crystal is arranged at the bottom end of the clamp, and if the screw is too long, the clamp is not favorable for fixing the clamp on the workbench after clamping is finished; the clamp only has a single-position screw, can only limit the displacement of the crystal from a single direction, and is easy to cause the crystal positioning deviation when being screwed down; the process has very strict requirements on the length of the screw and higher manufacturing cost.
SUMMERY OF THE UTILITY MODEL
In order to solve the vertical technical problem of accurate judgement cleavage line among the crystal grinding process, the utility model discloses a grinding machine fixture, this fixture utilize supplementary instrument of adjusting well, can be accurate whether vertical of cleavage line of judgement crystal.
In order to achieve the above purpose, the technical scheme of the utility model is as follows:
the utility model provides a grinding machine fixture, includes the fixture main part, has seted up the dress draw-in groove that runs through two sides around in this fixture main part the upper end of dress draw-in groove has seted up the cutting mouth, this cutting mouth with the dress draw-in groove communicates with each other, stop screw is installed respectively to the both sides of cutting mouth a port department of dress draw-in groove installs supplementary instrument of adjusting well.
By adopting the scheme, when the large edge of the crystal is ground, after the crystal is arranged in the clamping groove, the auxiliary alignment tool is utilized to ensure that the cleavage line of the crystal is vertical, namely the cleavage line is completely aligned with the auxiliary alignment tool, then the crystal is clamped by utilizing the limit screws on two sides simultaneously, the crystal is prevented from generating displacement to cause the deviation of the cleavage line, and the large edge of the crystal after being ground and cut through the cutting opening is ensured to be vertical to the cleavage line.
Furthermore, the auxiliary alignment tool comprises two guide rails horizontally arranged, the two guide rails are fixedly installed on the fixture main body through fixing screws, a positioning rod is vertically installed between the two guide rails, and a positioning sheet is sleeved on the positioning rod.
By adopting the scheme, the high-precision level of the two guide rails in the alignment tool is assisted, and the positioning rod and the positioning sheet are completely vertical. The spacer adopts the mode of suit, rotates the spacer to the position completely perpendicular with the crystal cross-section around the locating lever, can judge very conveniently whether the line of cleaving is adjusted well, finishes when judging, can turn back it and be parallel with the crystal cross-section to do not hinder the crystal and surely grind the process, avoid producing the scratch on the crystal.
Furthermore, two ends of the positioning rod are respectively provided with a transverse sleeve, and two ends of the positioning rod are respectively sleeved on the two guide rails through the sleeves in a sliding mode.
Further, the sleeve and the positioning rod are integrally formed.
Further, the sleeve is fixed on the guide rail through a fixing screw.
By adopting the scheme, the positioning rod can slide on the guide rail through the sleeves at the two ends, can be matched with the crystal cleavage line to move to a proper position, and is positioned by the fixing screw. And can be disassembled when not in use.
Furthermore, the front end of the positioning piece is of a flat structure, and the rear end of the positioning piece is of a sleeve structure and is sleeved on the positioning rod.
Adopt above-mentioned scheme, the flat structure of spacer anterior segment is used for laminating crystal cleavage line, and the spacer front end is flatter more, and the crystal cleavage line is adjusted well more accurately. But the flat structure ends with a blunt edge in order to prevent the ends of the flat structure from being too sharp and scratching the crystals.
Further, the limiting screw penetrates through the fixture main body on two sides of the cutting opening, and the length of the limiting screw is larger than the wall thickness of the fixture main body. The limit screw is composed of a plurality of screws which are parallel to each other.
By adopting the scheme, the screw penetrates through the clamp main body and is close to the crystal, and the screw is used for stably clamping the crystal. Because the stop screw sets up on fixture upper portion, its length can not influence fixture fixed, also need not to fill up other materials and make the unsettled height of drawing up below the fixture below.
Furthermore, the bottom of the fixture main body is provided with two mounting grooves, the bottom of the fixture main body is also provided with two iron bars, and the two iron bars are respectively clamped in one mounting groove.
By adopting the scheme, the iron strips at the bottom of the fixture main body are fixed on the grinding machine, the mounting grooves of the fixture main body are clamped on the iron strips, and the two iron strips can enable the fixture main body to be more stably mounted.
Has the advantages that: (1) an auxiliary alignment tool is adopted, so that the operating platform does not need to be high-precision, smooth and horizontally placed, and the adaptability of the fixture is stronger; the auxiliary alignment tool enables the positioning rod to slide in the horizontal direction through the guide rail, so that the positioning piece is adjusted to align the cleavage lines at different positions, and the positioning piece can rotate around the positioning rod by adopting a sleeve structure, so that the flat end of the positioning piece can be better attached to the surface of the crystal, and the alignment of the cleavage lines is more accurate; (2) the clamping apparatus adopts a normal mounting mode, so that the crystal can be conveniently mounted and clamped without turning over the clamping apparatus, and the danger that the crystal is broken when falling is avoided.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is an exploded view of the structure of the present invention.
Fig. 3 is a schematic view of the installation of the positioning rod and the guide rail.
FIG. 4 is a cross-sectional view of the splines.
Wherein: the method comprises the following steps of 1, a fixture main body, 2, a clamping groove, 3, an auxiliary alignment tool, 4, a limiting screw, 5, a mounting groove, 6, an iron bar, 31, a guide rail, 32, a positioning rod, 33, a positioning sheet and 34, wherein the fixture main body is provided with a clamping groove.
Detailed Description
The embodiments of the present invention will be described below with reference to the accompanying drawings:
as shown in fig. 1 and 2, a fixture for a grinding machine comprises a fixture main body 1, wherein a clamping groove 2 penetrating through front and rear side surfaces is formed in the fixture main body 1, a cutting opening is formed in the upper end of the clamping groove 2 and is communicated with the clamping groove 2, two sides of the cutting opening are respectively provided with a limit screw 4, the limit screw 4 penetrates through the fixture main body 1 on two sides of the cutting opening, the length of the limit screw 4 is greater than the wall thickness of the fixture main body 1, and the limit screw 4 is composed of a plurality of screws which are parallel to each other. An auxiliary alignment tool 3 is arranged at one port of the card slot 2. The fixture comprises a fixture body 1 and is characterized in that two mounting grooves 5 are formed in the bottom of the fixture body 1, two iron strips 6 are further arranged at the bottom of the fixture body 1, and the two iron strips 6 are respectively clamped in one mounting groove 5.
In this embodiment, dress draw-in groove 2 is cylindric cell body, and the top of this cell body is cut away by the cutting mouth, and the diameter of this cell body is greater than crystal diameter specification 3mm, and when the crystal was put into dress draw-in groove 2, the crystal leaned on the lower extreme and contacts with fixture main part inner wall, and the crystal upper left side and upper right side about have about 3 mm's clearance with fixture to it collides with to reduce to produce the friction with the fixture upper end when the crystal was put into the fixture main part. Meanwhile, the top end of the crystal in the clamping groove 2 protrudes out of the clamp through the cutting opening, so that the grinding wheel can grind a large edge conveniently.
As shown in fig. 1 and 2, the auxiliary alignment fixture 3 includes two horizontally disposed guide rails 31, the two guide rails 31 are both fixedly mounted on the fixture body 1 through fixing screws, a positioning rod 32 is vertically mounted between the two guide rails 31, and a positioning plate 33 is sleeved on the positioning rod 32.
As shown in fig. 3, two ends of the positioning rod 32 are both provided with a transverse sleeve 34, and two ends of the positioning rod 32 are respectively slidably sleeved on the two guide rails 31 through the sleeves 34. The sleeve 34 is integrally formed with the positioning rod 32. The sleeve 34 is fixed to the guide rail 31 by a fixing screw.
As shown in fig. 4, the front end of the positioning plate 33 is a flat structure, and the rear end of the positioning plate is a sleeve structure and is sleeved on the positioning rod 32. In this embodiment, the flatter the front-end flat structure of the positioning piece 33, the more accurate the alignment effect of the auxiliary alignment tool. Meanwhile, in order to prevent the tail end of the flat structure from being too sharp to scratch the crystal, passivation treatment is carried out on the tail end of the flat structure, and the tail end of the flat structure is a passivation edge.
The use mode of the fixture is as follows: when an operator cuts the large edge of the crystal, firstly, the auxiliary alignment device 3 of the fixture is completely installed to achieve the installation effect as shown in fig. 1, and the positioning sheet 33 is manually shifted to be parallel to the guide rail 31; then, the crystal is loaded from the other port of the card loading groove 2, one side of the crystal with the cleavage line is close to the auxiliary alignment device 3, and at the moment, the operator manually rotates the positioning sheet 33 to enable the positioning sheet 33 to be positioned at a position vertical to the guide rail 31; then, an operator observes whether the crystal cleavage line is overlapped with the front end of the positioning piece 33 or not, if not, the position of the crystal is adjusted until the cleavage line is overlapped with the positioning piece 33, and the limiting screws 4 on two sides of the cutting opening of the clamp are screwed down to fix the position of the crystal; finally, the whole fixture (including the crystal) is stably arranged on a grinding machine by utilizing the iron bar 6 and the installation groove 5, and the crystal is cut in a large edge mode by utilizing a cutting device.
The fixture has the advantages that: an auxiliary alignment tool is adopted, so that the operating platform does not need to be high-precision, smooth and horizontally placed, and the adaptability of the fixture is stronger; the auxiliary alignment tool enables the positioning rod to slide in the horizontal direction through the guide rail, so that the positioning piece is adjusted to align the cleavage lines at different positions, and the positioning piece can rotate around the positioning rod by adopting a sleeve structure, so that the flat end of the positioning piece can be better attached to the surface of the crystal, and the alignment of the cleavage lines is more accurate; and the clamping apparatus adopts the mode of formal installation, is convenient for the crystal dress card, does not need to overturn the clamping apparatus, avoids the cracked danger of crystal dropping.
Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art will understand that the present invention can be modified or replaced with other embodiments without departing from the spirit and scope of the present invention, which should be construed as limited only by the appended claims.

Claims (10)

1. The utility model provides a grinding machine fixture, includes the fixture main part, has seted up the dress draw-in groove that runs through two sides around this fixture main part, its characterized in that: the upper end of the clamping groove is provided with a cutting opening, the cutting opening is communicated with the clamping groove, two sides of the cutting opening are respectively provided with a limit screw, and an auxiliary alignment tool is arranged at one port of the clamping groove.
2. A grinding machine jig according to claim 1 wherein: the auxiliary alignment fixture comprises two guide rails which are horizontally arranged, the two guide rails are fixedly arranged on the fixture main body through fixing screws, a positioning rod is vertically arranged between the two guide rails, and a positioning sheet is sleeved on the positioning rod.
3. A grinding machine jig according to claim 2 wherein: and two ends of the positioning rod are respectively provided with a transverse sleeve, and the two ends of the positioning rod are respectively sleeved on the two guide rails through the sleeves in a sliding manner.
4. A grinding machine jig according to claim 3 wherein: the sleeve and the positioning rod are integrally formed.
5. A grinding machine jig according to claim 4 wherein: the sleeve is fixed on the guide rail through a fixing screw.
6. A grinding machine jig according to claim 2 wherein: the front end of the positioning piece is of a flat structure, and the rear end of the positioning piece is of a sleeve structure and is sleeved on the positioning rod.
7. A grinding machine jig according to claim 6 wherein: the flat structure terminates in a blunted edge.
8. A grinding machine jig according to claim 1 wherein: the limiting screw penetrates through the fixture main body on two sides of the cutting opening, and the length of the limiting screw is larger than the wall thickness of the fixture main body.
9. A grinding machine jig according to claim 8 wherein: the limit screw is composed of a plurality of screws which are parallel to each other.
10. A grinding machine jig according to claim 1 wherein: the fixture comprises a fixture body and is characterized in that two mounting grooves are formed in the bottom of the fixture body, two iron strips are further arranged at the bottom of the fixture body, and the two iron strips are respectively clamped in one mounting groove.
CN202120863878.3U 2021-04-23 2021-04-23 Fixture of grinding machine Active CN215240185U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202120863878.3U CN215240185U (en) 2021-04-23 2021-04-23 Fixture of grinding machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202120863878.3U CN215240185U (en) 2021-04-23 2021-04-23 Fixture of grinding machine

Publications (1)

Publication Number Publication Date
CN215240185U true CN215240185U (en) 2021-12-21

Family

ID=79510950

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202120863878.3U Active CN215240185U (en) 2021-04-23 2021-04-23 Fixture of grinding machine

Country Status (1)

Country Link
CN (1) CN215240185U (en)

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