CN215199702U

CN215199702U - Semiconductor processing platform

Info

Publication number: CN215199702U
Application number: CN202121761896.7U
Authority: CN
Inventors: 令霞
Original assignee: Qianhai Jingfangyun Shenzhen Test Equipment Co ltd
Current assignee: Qianhai Jingfangyun Shenzhen Test Equipment Co ltd
Priority date: 2021-07-30
Filing date: 2021-07-30
Publication date: 2021-12-17
Anticipated expiration: 2031-07-30

Abstract

The utility model discloses a semiconductor processing platform, including the processing platform, still include clamping device and drilling equipment, the clamping device is installed at processing bench surface, the clamping device specifically comprises clamp splice, screw, double-screw bolt, slide rail, spout and cushion, clamp splice surface mounting has the blotter, clamp splice sliding connection is at the slide rail surface, the spout has been seted up to clamp splice internal surface, the screw has been seted up to the clamp splice surface, screw and double-screw bolt surface sliding connection, the operation need use the clamping device on the processing bench, installs the blotter between two clamp splices, effectively protects the work piece of processing, utilizes the spout of seting up on the clamp splice to make the clamp splice slide to a certain position, and threaded connection between reuse double-screw bolt and the screw is fixed, and this clamping device plays the protection work piece, the effect of high-efficient clamping.

Description

Semiconductor processing platform

Technical Field

The utility model relates to a semiconductor wafer processing correlation technique field, in particular to semiconductor processing platform.

Background

The semiconductor refrigerating sheet, also called thermoelectric refrigerating sheet, is a heat pump, and its advantages are no sliding parts, limited application in some spaces, in the situation of high reliability requirement and no refrigerant pollution, when direct current passes through a couple formed by connecting two different semiconductor materials in series by utilizing the effect of the semiconductor materials, the two ends of the couple can respectively absorb heat and emit heat, the aim of refrigeration can be realized, the couple is a refrigeration technology generating negative thermal resistance, it is characterized by that it has no moving component, its reliability is higher, when the semiconductor wafer is processed, it must be positioned to implement quick processing, and a special positioning processing table is required, but the existing positioning processing table has poor convenience and inconvenience for installing externally installed processing equipment and adjusting, and the semiconductor wafer cannot be stably and quickly positioned, and the convenient adjustment after fixation is poor.

Patent No. CN109686691A discloses a semiconductor processing station. The utility model particularly relates to a support frame and a processing plate, the device is provided with a positioning device at the front end of the processing plate, an electric push rod in the positioning device is started to push an internal transverse rod to enable a movable rod to move, the movable rod can enable a roller to slide in a chute, and finally two groups of movable rods are pushed up to a top plate, a fixing device at the top of the top plate can quickly and stably fix a semiconductor sheet, the height is good in lifting effect, the efficiency is high, and the installation stability is strong; be provided with adjusting device at processing board top rear end, hold the hand wheel and rotate, can drive transmission case internal gear transmission for the lead screw rotates, and the lead screw can make ball bearing rotate at the pivoted in-process, can make the sliding plate at lockplate messenger top rotate when ball bearing rotates, can make the processing equipment position at top obtain adjusting at last, and it is convenient to adjust, quick, convenient and fast.

The semiconductor processing table has the following disadvantages: the operation of clamping the workpiece can be met on the operating platform, the design is not provided with a clamping device, inconvenience is brought to an operator, meanwhile, a drilling device is necessary to be arranged on the operating platform, clamping and drilling are necessary in the processing of the workpiece, and the device does not have a treatment measure after a series of processing is completed.

SUMMERY OF THE UTILITY MODEL

A primary object of the present invention is to provide a semiconductor processing station, which can effectively solve the problems of the background art.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a semiconductor processing platform, includes the processing platform, still includes clamping device and drilling equipment, the clamping device is installed at processing bench surface, the clamping device specifically comprises clamp splice, screw, double-screw bolt, slide rail, spout and cushion, clamp splice surface mounting has the blotter, clamp splice sliding connection is at the slide rail surface, the spout has been seted up to clamp splice internal surface, the screw has been seted up to the clamp splice surface, screw and double-screw bolt surface sliding connection.

Furthermore, a base frame is installed on the right side of the machining table, a screw hole groove is formed in the outer surface of the base frame, the screw hole groove is in threaded connection with the outer surface of a bolt, and a drilling device is installed on the left side of the base frame; the base frame is provided with bolts and screw holes, and the drilling device is fixed on the processing table by utilizing threaded connection.

Furthermore, the drilling device specifically comprises a connecting column, a threaded hole, a hanging plate and a drill bit, wherein the connecting column is connected with the hanging plate in a penetrating manner, the threaded hole is formed in the outer surface of the connecting column, the threaded hole is in threaded connection with the outer surface of the threaded column, and the drill bit is detachably connected to the bottom end of the connecting column; the drilling equipment of installation on the operation panel, spliced pole through connection hanger plate utilize the screw thread post for the screw hole of co-altitude not on the spliced pole fixed, and the person of facilitating the use height-adjusting can be dismantled to the drill bit and connect in the spliced pole bottom, conveniently change the drill bit.

Furthermore, the outer surface of the processing table is provided with a sliding chute A, the sliding chute A is in sliding connection with the outer surface of the tool box, the outer surface of the tool box is provided with a handle A, the outer surface of the processing table is provided with a sliding chute B, the sliding chute B is in sliding connection with the outer surface of the waste box, and the outer surface of the waste box is provided with a handle B; the collection of tools and waste materials is realized by utilizing the sliding connection between the sliding chute A and the sliding chute B and between the tool box and the waste material box, and the handle A and the handle B are convenient for an operator to push and pull.

Further, a base plate is mounted on the upper surface of the processing table, a hole groove is formed in the upper surface of the base plate, a motor is mounted inside the processing table, a dust collection pipe is mounted at the upper end of the motor, and an isolation net is mounted at the upper end of the dust collection pipe; a plurality of scraps exist after drilling, the scraps enter the processing table through the hole grooves in the base plate, the motor drives the dust absorption pipe to work, and the scraps enter the scrap box through the isolation net to finish waste collection.

Compared with the prior art, the utility model discloses following beneficial effect has: the operation needs to use the clamping device on the processing bench, install the blotter between two clamp splices, the work piece of effective protection processing, the spout of seting up on utilizing the clamp splice makes the clamp splice slide to a definite position, threaded connection between reuse double-screw bolt and the screw is fixed, this clamping device plays the protection work piece, the effect of high-efficient clamping, the drilling equipment of installation on the operation panel, spliced pole through connection hanger plate, utilize the screw hole of co-altitude on the spliced pole to fix with the screw thread post, the person's of facilitating the use height-adjusting, the connection can be dismantled in the spliced pole bottom to the drill bit, conveniently change the drill bit, there are many sweeps behind drilling, inside the hole groove entering processing bench through on the backing plate, the motor drives the work of dust absorption pipe, make the sweeps get into the dump bin through the separation net, accomplish the garbage collection.

Drawings

Fig. 1 is a schematic view of the overall structure of a semiconductor processing table according to the present invention.

Fig. 2 is a schematic view of the locally enlarged structure of the clamping device of the semiconductor processing table of the present invention.

Fig. 3 is a schematic view of the locally enlarged structure of the drilling device of the semiconductor processing table of the present invention.

Fig. 4 is a schematic view of a partially enlarged structure of a semiconductor processing table according to the present invention.

In the figure: 1. a clamping device; 2. a processing table; 3. a handle A; 4. a tool box; 5. a chute A; 6. a handle B; 7. a waste bin; 8. a chute B; 9. a base frame; 10. a screw hole groove; 11. a bolt; 12. a base plate; 13. a hole groove; 14. a drilling device; 15. a motor; 16. a dust collection pipe; 17. an isolation net; 101. a clamping block; 102. a screw hole; 103. a stud; 104. a slide rail; 105. a chute; 106. a cushion pad; 1401. connecting columns; 1402. a threaded post; 1403. a threaded hole; 1404. a hanger plate; 1405. a drill bit.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

As shown in fig. 1 to 4, a semiconductor processing table comprises a processing table 2, and further comprises a clamping device 1 and a drilling device 14, wherein the clamping device 1 is installed on the upper surface of the processing table 2, the clamping device 1 specifically comprises a clamping block 101, a screw hole 102, a stud 103, a slide rail 104, a slide groove 105 and a cushion pad 106, the cushion pad 106 is installed on the outer surface of the clamping block 101, the clamping block 101 is slidably connected to the outer surface of the slide rail 104, the slide groove 105 is formed on the inner surface of the clamping block 101, the screw hole 102 is formed on the outer surface of the clamping block 101, and the screw hole 102 is slidably connected to the outer surface of the stud 103.

A base frame 9 is installed on the right side of the processing table 2, a screw hole 102 groove is formed in the outer surface of the base frame 9, the screw hole 102 groove is in threaded connection with the outer surface of a bolt 11, and a drilling device 14 is installed on the left side of the base frame 9; the base frame 9 is provided with a bolt 11 and a screw hole 102, and the drilling device 14 is fixed to the machining table 2 by screwing.

The drilling device 14 specifically comprises a connecting column 1401, a threaded column 1402, a threaded hole 1403, a hanging plate 1404 and a drill 1405, wherein the connecting column 1401 penetrates through the hanging plate 1404, the threaded hole 1403 is formed in the outer surface of the connecting column 1401, the threaded hole 1403 is in threaded connection with the outer surface of the threaded column 1402, and the drill 1405 is detachably connected to the bottom end of the connecting column 1401; the drilling equipment 14 of installation on the operation panel, spliced pole 1401 run through and connect hanger plate 1404, utilize screw hole 1403 of co-altitude not on the spliced pole 1401 to fix with screw post 1402, and the height-adjusting of convenience of customers, connection in spliced pole 1401 bottom can be dismantled to drill bit 1405, conveniently changes drill bit 1405.

The outer surface of the processing table 2 is provided with a sliding groove A5, the sliding groove A5 is in sliding connection with the outer surface of the tool box 4, the outer surface of the tool box 4 is provided with a handle A3, the outer surface of the processing table 2 is provided with a sliding groove B8, the sliding groove B8 is in sliding connection with the outer surface of the waste bin 7, and the outer surface of the waste bin 7 is provided with a handle B6; the collection of tools and waste materials is realized by the sliding connection among the sliding groove A5, the sliding groove B8, the tool box 4 and the waste box 7, and the handle A3 and the handle B6 are convenient for an operator to push and pull.

The upper surface of the processing table 2 is provided with a backing plate 12, the upper surface of the backing plate 12 is provided with a hole groove 13, a motor 15 is arranged in the processing table 2, the upper end of the motor 15 is provided with a dust collection pipe 16, and the upper end of the dust collection pipe 16 is provided with an isolation net 17; after drilling, a plurality of scraps exist and enter the processing table 2 through the hole grooves on the base plate 12, the motor 15 drives the dust suction pipe 16 to work, and the scraps enter the scrap box 7 through the isolation net 17 to finish scrap collection.

It should be noted that the utility model relates to a semiconductor processing platform 2, in operation, install blotter 106 between two clamp splice 101, effectively protect the work piece of processing, utilize the spout 105 that sets up on clamp splice 101 to make clamp splice 101 slide to a certain position, reuse the threaded connection between double-screw bolt 103 and screw 102 fixed, this clamping device 1 plays the protection work piece, drilling equipment 14 of installation on processing platform 2, spliced pole 1401 runs through and connects hanger plate 1404, utilize screw hole 1403 of different heights on spliced pole 1401 to fix with screw post 1402, facilitate the user to adjust the height, drill 1405 can dismantle and connect in the spliced pole bottom, conveniently change drill 1405, install bolt 11 and screw 102 groove on bed frame 9, utilize threaded connection to fix drilling equipment 14 on processing platform 2, utilize sliding connection between spout A5, spout B8 and toolbox 4 and the dump bin 7 to realize the collection of instrument and waste material, the handle A3 and the handle B6 are convenient for an operator to push and pull, a plurality of scraps exist after drilling, the scraps enter the processing table 2 through the hole grooves 13 on the base plate 12, an external power supply is connected, the motor 15 drives the dust suction pipe 16 to work, and the scraps enter the waste bin 7 through the isolation net 17 to finish waste collection.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a semiconductor processing platform, includes processing platform (2), its characterized in that, still includes clamping device (1) and drilling equipment (14), the clamping device (1) is installed at processing platform (2) upper surface, clamping device (1) specifically comprises clamp splice (101), screw (102), double-screw bolt (103), slide rail (104), spout (105) and cushion pad (106), clamp splice (101) surface mounting has blotter (106), clamp splice (101) sliding connection is at slide rail (104) surface, spout (105) have been seted up to clamp splice (101) internal surface, screw (102) have been seted up to clamp splice (101) surface, screw (102) and double-screw bolt (103) surface sliding connection.

2. A semiconductor processing station as defined in claim 1, wherein: the drilling machine is characterized in that the base frame (9) is installed on the right side of the machining table (2), a screw hole (102) groove is formed in the outer surface of the base frame (9), the screw hole (102) groove is in threaded connection with the outer surface of the bolt (11), and the drilling device (14) is installed on the left side of the base frame (9).

3. A semiconductor processing station as defined in claim 2, wherein: the drilling device (14) is composed of a connecting column (1401), a threaded column (1402), a threaded hole (1403), a hanging plate (1404) and a drill bit (1405), wherein the connecting column (1401) is connected with the hanging plate (1404) in a penetrating mode, the threaded hole (1403) is formed in the outer surface of the connecting column (1401), the threaded hole (1403) is in threaded connection with the outer surface of the threaded column (1402), and the drill bit (1405) is detachably connected to the bottom end of the connecting column (1401).

4. A semiconductor processing station as defined in claim 1, wherein: processing platform (2) surface has seted up spout A (5), spout A (5) and toolbox (4) surface sliding connection, toolbox (4) surface mounting has handle A (3), spout B (8) have been seted up to processing platform (2) surface, spout B (8) and dump bin (7) surface sliding connection, dump bin (7) surface mounting has handle B (6).

5. A semiconductor processing station as defined in claim 1, wherein: processing platform (2) upper surface mounting has backing plate (12), hole groove (13) have been seted up to backing plate (12) upper surface, processing platform (2) internally mounted has motor (15), dust absorption pipe (16) are installed to motor (15) upper end, separation net (17) are installed to dust absorption pipe (16) upper end.