CN214865733U - An ultrasonic plasma cleaning machine - Google Patents
An ultrasonic plasma cleaning machine Download PDFInfo
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- CN214865733U CN214865733U CN202120410509.9U CN202120410509U CN214865733U CN 214865733 U CN214865733 U CN 214865733U CN 202120410509 U CN202120410509 U CN 202120410509U CN 214865733 U CN214865733 U CN 214865733U
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- 238000004140 cleaning Methods 0.000 title claims abstract description 128
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 84
- 238000001035 drying Methods 0.000 claims abstract description 54
- 230000007246 mechanism Effects 0.000 claims abstract description 30
- 238000007599 discharging Methods 0.000 claims abstract description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 8
- 230000008569 process Effects 0.000 claims abstract description 8
- 239000007788 liquid Substances 0.000 claims description 48
- 238000001704 evaporation Methods 0.000 claims description 22
- 238000010438 heat treatment Methods 0.000 claims description 21
- 230000008020 evaporation Effects 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 11
- 238000000926 separation method Methods 0.000 claims description 11
- 238000009833 condensation Methods 0.000 claims description 10
- 230000005494 condensation Effects 0.000 claims description 9
- 238000005192 partition Methods 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000002699 waste material Substances 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 6
- 210000002381 plasma Anatomy 0.000 description 43
- 238000005406 washing Methods 0.000 description 23
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000010358 mechanical oscillation Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002957 persistent organic pollutant Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
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Abstract
本实用新型涉及一种超声波等离子清洗机，超声波等离子清洗机包括清洗箱、连接在清洗箱上的自动进料机构、自动出料机构和控制柜，清洗箱内自左向右依次设置有超声波清洗区、烘干区、等离子清洗区；超声波清洗区内安装有超声波清洗组件，用于对工件进行超声波清洗，同时能够实现水的循环利用；烘干区设有烘干组件，用于对超声波清洗后的工件表面烘干；等离子清洗区内设有等离子清洗组件，用于对工作进行等离子清洗；控制柜内设有PLC控制器，PLC控制器连接有操作面板，操作面板上设有与进料、出料、超声波清洗、烘干、等离子清洗工序一一对应的控制按钮。上述机器能够在工件进行超声波清洗后进行等离子清洗，清洗效果更好，使工件的品质达到最佳状态。
The utility model relates to an ultrasonic plasma cleaning machine. The ultrasonic plasma cleaning machine comprises a cleaning box, an automatic feeding mechanism, an automatic discharging mechanism and a control cabinet which are connected to the cleaning box. The cleaning box is sequentially arranged with ultrasonic cleaning machines from left to right. area, drying area, and plasma cleaning area; ultrasonic cleaning components are installed in the ultrasonic cleaning area, which are used for ultrasonic cleaning of workpieces, and at the same time, water can be recycled; drying areas are equipped with drying components for ultrasonic cleaning. The surface of the finished workpiece is dried; there is a plasma cleaning component in the plasma cleaning area, which is used for plasma cleaning of the work; a PLC controller is arranged in the control cabinet, the PLC controller is connected with an operation panel, and the operation panel is provided with a feeder , discharge, ultrasonic cleaning, drying, plasma cleaning process one-to-one corresponding control buttons. The above-mentioned machine can perform plasma cleaning after ultrasonic cleaning of the workpiece, and the cleaning effect is better, so that the quality of the workpiece can reach the best state.
Description
Technical Field
The utility model relates to a material surface cleaning equipment technical field especially relates to an ultrasonic wave plasma cleaning machine.
Background
Ultrasonic cleaning is carried out by converting ultrasonic signals above 40KHz into high-frequency mechanical oscillation through a transducer, transmitting the high-frequency mechanical oscillation into cleaning liquid, radiating the ultrasonic waves forward at intervals in the cleaning liquid, making the liquid flow and generating tens of thousands of tiny bubbles, wherein the bubbles grow in a negative pressure area formed by longitudinal propagation of the ultrasonic waves and are rapidly closed in a positive pressure area, and the formation growth and rapid closing of the bubbles are called cavitation phenomenon. In the cavitation phenomenon, the closing of the bubbles forms instantaneous high pressure of more than 1000 atmospheric pressure (equivalent to 1 x 103kg/cm 2), and continuous instantaneous high pressure is like a series of small 'explosions', continuously bombards the surface of the object, so that dirt on the surface of the object and in gaps is rapidly peeled off, and the rapid cleaning effect is achieved.
However, the ultrasonic cleaner mainly cleans dust and pollutants on the surface of a material, is a rough cleaning, and for some special materials, the surface of the material after ultrasonic cleaning has low activation degree and low adhesive force, and cannot be coated or plated.
SUMMERY OF THE UTILITY MODEL
In view of this, the present invention provides an ultrasonic plasma cleaning machine to improve the wetting ability of the material surface, so that various materials can be coated and plated, and the adhesion and bonding force of the material surface can be enhanced to achieve a better cleaning effect on the material.
In order to achieve the above object, the utility model adopts the following technical scheme:
an ultrasonic plasma cleaner comprising:
the cleaning box is defined to be in the left-right direction, an ultrasonic cleaning area, a drying area and a plasma cleaning area are sequentially arranged in the cleaning box from left to right, a feeding hole and a discharging hole are formed in the cleaning box, a cleaning basket inlet position and a cleaning station are arranged in the cleaning box, switchable partition plates are arranged between the cleaning basket inlet position and the ultrasonic cleaning area and between the drying area and the plasma area in the cleaning box, and a cleaning basket lifting mechanism is further arranged in the cleaning box and used for lifting the cleaning basket from the cleaning basket inlet position to a set station;
the automatic feeding mechanism is detachably connected at the feeding port, conveys the cleaning basket into the cleaning box through the chain transmission assembly, and feeds forward;
the automatic discharging mechanism is the same as the automatic feeding mechanism in structure and detachably connected to the discharging port, the cleaned workpiece is conveyed out of the cleaning box through the chain transmission assembly, and the automatic discharging mechanism discharges materials backwards;
the ultrasonic cleaning assembly comprises an ultrasonic cleaning tank and an ultrasonic transducer which are arranged in the ultrasonic cleaning area, wherein an overflow port is formed in the ultrasonic cleaning tank, the overflow port is connected with an oil-water separation tank through an overflow pipe, the oil-water separation tank is communicated with an evaporation tank, a heating pipe is arranged in the evaporation tank, the evaporation tank is communicated with a condensation tank, the condensation tank is communicated with the ultrasonic cleaning tank, a liquid outlet is formed in the bottom of the ultrasonic cleaning tank, the liquid outlet is communicated with a waste liquid pipeline through a liquid outlet pipe, and a protective screen is arranged at the liquid outlet to prevent cleaning workpieces or sundries from flowing into the liquid outlet pipe;
the drying assembly comprises a drying groove, a fan and a heating device which are arranged in the drying area, wherein the bottom of the drying groove is provided with an air inlet, the top of the drying groove is provided with an air return inlet, and the heating device is used for heating air generated by the fan;
the plasma cleaning assembly comprises a plasma door panel which is arranged in the plasma cleaning area and used for generating plasma, and the left end of the plasma door panel is propped against a partition panel arranged between the drying area and the plasma area;
the control cabinet is connected to the right side of the cleaning box, a PLC is arranged in the control cabinet, the PLC is connected with an operation panel capable of being operated by a person, and control buttons corresponding to the feeding, discharging, ultrasonic cleaning, drying and plasma cleaning processes one by one are arranged on the operation panel;
the ultrasonic cleaning tank, the drying tank and the plasma door panel respectively correspond to a cleaning station.
The beneficial effects of the above technical scheme are: the utility model discloses an ultrasonic plasma cleaning machine can realize automatic feed, self-cleaning, automatic discharging's function, simultaneously the automatic feed, discharge mechanism and washing case releasable connection are in the same place, convenient follow-up maintenance to whole ultrasonic plasma cleaning machine, the washing divides three processes altogether, after adopting ultrasonic cleaning's mode to wash the work piece, do further refining the washing to the work piece surface through plasma cleaning's mode again, thereby change the infiltration ability of work piece surface, make the work piece can coat, operation such as plating, reinforcing adhesive force, bonding force, the organic pollutant on work piece surface also can be got rid of simultaneously, greasy dirt or grease, guarantee is provided for follow-up technology, make the quality of work piece reach the optimum. When carrying out ultrasonic cleaning, accessible overflow mouth flows into the oil-water separation groove with the floater in the ultrasonic cleaning groove, flows into the evaporating bath after filtering in, and the vapour of evaporating bath flows into the condensate tank, and the vapour after the condensation becomes liquid and flows into the ultrasonic cleaning groove again in, realizes cyclic utilization. The utility model discloses an ultrasonic plasma cleaning machine can reach better work piece cleaning performance, and is more energy-conserving simultaneously.
Furthermore, be provided with low liquid level protection switch and high liquid level protection switch in the evaporation tank, parallel connection between low liquid level protection switch and high liquid level protection switch and the heating pipe, the PLC controller is connected with low liquid level protection switch and high liquid level protection switch all control.
Has the advantages that: a high and low liquid level protection switch is arranged to close the heating pipe at a low liquid level, thereby protecting the heating pipe from being damaged.
Further, ultrasonic cleaning tank is equipped with threely along left and right sides direction interval, and two adjacent ultrasonic cleaning tanks are through overflow mouth and the overflow pipe intercommunication of connecting these two overflow mouths on their own, and oil water separating tank is provided with two, and one of them oil water separating tank with be in leftmost ultrasonic cleaning tank and evaporating bath intercommunication, another one oil water separating tank with be in rightmost ultrasonic cleaning tank and condensing tank intercommunication.
Has the advantages that: can once only wash a plurality of work pieces, improve ultrasonic plasma cleaning machine's cleaning efficiency.
Furthermore, each cleaning station is provided with a cleaning basket positioning tool.
Has the advantages that: the positioning tool is arranged to prevent the cleaning basket from being inclined when placed and damaging a machine.
Further, the upper portions of the ultrasonic cleaning tank and the drying tank are provided with cover plates, lifting motors used for driving the cover plates to move up and down are arranged at corresponding positions in the cleaning tank, the PLC is in control connection with the lifting motors to control the cover plates to move down to seal corresponding notches when the cleaning basket enters the ultrasonic cleaning tank and the drying tank.
Has the advantages that: the cover plate can effectively prevent heat leakage during cleaning and drying, and can reduce noise generated during drying.
Further, the position department that is in between feed inlet and the discharge gate on the washing case is provided with the observation window, and the observation window sets up with ultrasonic cleaning district, drying zone, plasma cleaning district one-to-one.
Has the advantages that: make things convenient for the staff to observe the washing condition in each work area in the washing case.
Drawings
Fig. 1 is a schematic view of the overall structure of the ultrasonic plasma cleaning machine of the present invention;
FIG. 2 is a schematic view of the cleaning process in the ultrasonic cleaning zone of the ultrasonic plasma cleaning machine of the present invention;
fig. 3 is a schematic structural view of a heating pipe in an evaporation tank of the ultrasonic plasma cleaning machine of the present invention.
Description of reference numerals: 1-cleaning box, 2-automatic feeding mechanism, 3-automatic discharging mechanism, 4-feeding gate, 5-discharging gate, 6-conveying chain, 7-cleaning basket, 8-observation window, 9-ultrasonic cleaning zone, 10-drying zone, 11-plasma cleaning zone, 12-partition plate, 13-1# ultrasonic cleaning tank, 14-2# ultrasonic cleaning tank, 15-3# ultrasonic cleaning tank, 16-evaporation tank, 17-condensation tank, 18-1# oil-water separation tank, 19-2# oil-water separation tank, 20-liquid discharge pipe, 21-waste liquid pipeline, 22-valve, 23-drying tank, 24-low liquid level protection switch, 25-high liquid level protection switch, 26-operation panel, 27-heating pipe, 28-protective net, 29-plasma door plate.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
The utility model discloses an ultrasonic plasma cleaning machine's concrete embodiment:
as shown in fig. 1, the ultrasonic plasma cleaning machine includes a cleaning tank for performing a workpiece cleaning process, a control cabinet connected to a side of the cleaning tank, an automatic feeding mechanism, and an automatic discharging mechanism. Wherein, the cleaning box body consists of a chassis welded by stainless steel profiles and an outer frame door plate which is connected with the chassis and is made of stainless steel abrasive glue plates. In this embodiment, the length direction of the cleaning box is defined as the left-right direction, and the ultrasonic cleaning zone, the drying zone and the plasma cleaning zone are sequentially arranged in the cleaning box from left to right. Be provided with feed inlet and discharge gate on the washing case, the position department that washs the incasement and correspond in the feed inlet is equipped with washing basket entry position, is equipped with the washing station in the corresponding position department in ultrasonic cleaning district, drying area and plasma cleaning district, for the stable placement of washing basket on the washing station, all be equipped with washing basket location frock on every washing station, when can avoiding the work piece to wash like this, the washing basket takes place to empty and damage the machine. The inside clearance basket of washing case enters the position and is provided with the partition panel of switch between ultrasonic cleaning district and the drying zone and the plasma region to guarantee each other not to influence between each process.
Automatic feed mechanism detachable connection is in the feed inlet department that washs the case, and automatic discharge mechanism detachable connection is in the discharge gate department that washs the case. The automatic feeding mechanism conveys the cleaning basket to a cleaning basket inlet position arranged in the cleaning box through the chain transmission assembly, and the automatic feeding mechanism feeds materials forwards; the automatic discharging mechanism conveys the cleaned workpiece out of the cleaning box through the chain transmission assembly, and the discharging mechanism discharges the workpiece backwards. In this embodiment, automatic discharging mechanism is the same with automatic feed mechanism structure, and chain drive assembly includes drive chain and the conveyor belt who is in on drive chain, and the washing basket is carried to the washing incasement or is seen off the washing incasement through conveyor belt. The automatic feeding mechanism and the automatic discharging mechanism are both provided with pneumatic doors to isolate the leakage of cold air during feeding and discharging.
The switch board sets up on the right side of wasing the case, and the operating panel of switch board is cantilever type structure, connects on the right side of wasing the case, concentrates on arranging power indicator, touch-sensitive screen etc.. And a power switch, a PLC control contactor, a relay and other master control electrical appliances are installed in the electric control cabinet. The operation panel is provided with control buttons which correspond to the feeding, discharging, ultrasonic cleaning, drying and plasma cleaning processes one to one. The whole machine operation program is controlled by PLC, and the equipment is provided with two modes of manual operation and automatic operation.
Be equipped with the ultrasonic cleaning subassembly in the ultrasonic cleaning district, in this embodiment, the ultrasonic cleaning subassembly includes ultrasonic cleaning tank, ultrasonic transducer. The ultrasonic cleaning tank includes three ultrasonic cleaning tanks, as shown in fig. 2, which are a 1# ultrasonic cleaning tank, a 2# ultrasonic cleaning tank, and a 3# ultrasonic cleaning tank. The bottom of each ultrasonic cleaning tank is provided with an ultrasonic vibrator with a polishing and cleaning motion, so that the workpiece is cleaned by sound waves while being polished to remove stains on the surface, and the cleaning purpose is achieved. The ultrasonic cleaning tank is formed by welding stainless steel mirror panels, and the tank body is welded in an encrypted special mode, so that liquid micro-seepage can be prevented. Overflow ports are formed in each ultrasonic cleaning tank, and the overflow ports between every two adjacent ultrasonic cleaning tanks are connected through overflow pipes; the heating plate is installed to the lateral part of each ultrasonic cleaning tank, and the tank bottom is provided with the leakage fluid dram, and leakage fluid dram department is connected with the fluid-discharge tube, is provided with the protection network in order to avoid wasing work piece or debris and flow into the fluid-discharge tube. Each liquid discharge pipe is communicated with a waste liquid pipeline, and a valve is arranged on the waste liquid pipeline.
The ultrasonic cleaning area is also provided with a No. 1 oil-water separating tank, a No. 2 oil-water separating tank, an evaporating tank and a condensing tank. As shown in fig. 2, the 1# ultrasonic cleaning tank communicates with the 1# oil-water separation tank through an overflow pipe, the 1# oil-water separation tank communicates with the evaporation tank, the evaporation tank communicates with the condensation tank, the condensation tank communicates with the 2# oil-water separation tank, and the 2# oil-water separation tank communicates with the 3# ultrasonic cleaning tank. The specific during operation, ultrasonic cleaning tank's liquid level has flowed into 2# ultrasonic cleaning tank after full, and 2# ultrasonic cleaning tank has been full to flow into 1# ultrasonic cleaning tank, and 1# ultrasonic cleaning tank flows into 1# oil water separating tank with the inslot floater through the overflow mouth, flows into the evaporating bath after filtering, and the steam of evaporating bath flows into the condensate sump, and the steam after the condensation becomes liquid and flows into 3# ultrasonic cleaning tank through 2# oil water separating tank, reaches a circulation effect.
As shown in fig. 2 and 3, the evaporation tank is internally provided with a heating pipe which is spirally coiled, the tank wall of the evaporation tank is provided with a low liquid level protection switch and a high liquid level protection switch at intervals up and down, the low liquid level protection switch, the high liquid level protection switch and the heating pipe are connected in parallel, and the PLC is in control connection with the low liquid level protection switch and the high liquid level protection switch. When the liquid level in the evaporation tank is low, the heating pipe is not started to heat.
The drying area is internally provided with a drying assembly, the drying assembly comprises a drying groove, a fan and a heating device, the bottom of the drying groove is provided with an air inlet, the top of the drying groove is provided with an air return opening, the heating device adopts a stainless steel heater, air generated by the fan is blown into the drying groove through the heating device to form high-temperature air flow to dry the surface of a workpiece, and then the wet air flow is drawn out through the air return opening above the drying groove to form circulation.
The upper portion in each ultrasonic cleaning tank and drying groove all is equipped with the apron, washs the incasement and corresponds the position department and is equipped with the promotion motor that is used for driving the apron and reciprocates, PLC controller with promote motor control and be connected to control the apron and move down to seal the notch that corresponds when wasing the basket and entering into ultrasonic cleaning tank and drying groove. Therefore, heat leakage during cleaning and drying can be effectively prevented, and noise generated during drying is reduced.
The plasma cleaning assembly is arranged in the plasma cleaning area and comprises a plasma door plate for generating plasma, and the left end of the plasma door plate abuts against a partition plate arranged between the drying area and the plasma area. The vacuum pump is utilized in the plasma cleaning area to enable the inside of the plasma cavity to reach a certain vacuum value, and due to the action of the electric field, plasmas are formed when the plasmas collide, so that the generated plasmas can achieve the effect of surface cleaning treatment. Meanwhile, an RF microwave power supply is used as an ion generator, so that high ion activity and high ion concentration are ensured.
Ultrasonic cleaning tank, drying tank and plasma door plant correspond a washing station respectively, wash the incasement and still be equipped with washing basket lifting mechanism in order to be used for carrying the washing basket to the station department of setting for from washing basket entry position. The cleaning basket lifting and conveying mechanism comprises a mechanical arm, a hanging frame and a guide rail, wherein the mechanical arm, the hanging frame and the guide rail extend in the left-right direction; meanwhile, the mechanical arm moves up and down through the lifting motor. When the cleaning basket is conveyed to the cleaning basket inlet position by the automatic feeding mechanism, the partition door is opened, the mechanical arm moves to the position, hooks the cleaning basket and moves the cleaning basket to the ultrasonic cleaning tank, the drying tank and the plasma door panel.
The position department that is in between feed inlet and the discharge gate on wasing the case is provided with the observation window, and the observation window sets up with ultrasonic cleaning district, drying zone, plasma cleaning district one-to-one to make things convenient for the personnel to observe the washing condition of wasing the incasement. In order to ensure the cleanness of air in the machine body, two sets of cooling systems are arranged in the cleaning box, and the two sets of cooling systems can be switched to be used. After the high-efficiency cooling, the vapor of the cleaning agent in the machine body is changed into liquid, so that the workshop pollution caused by the vapor can be prevented.
The above-described embodiments of the present invention do not limit the scope of the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (6)
1. An ultrasonic plasma cleaning machine, comprising:
the cleaning box is defined to be in the left-right direction, an ultrasonic cleaning area, a drying area and a plasma cleaning area are sequentially arranged in the cleaning box from left to right, a feeding hole and a discharging hole are formed in the cleaning box, a cleaning basket inlet position and a cleaning station are arranged in the cleaning box, switchable partition plates are arranged between the cleaning basket inlet position and the ultrasonic cleaning area and between the drying area and the plasma area in the cleaning box, and a cleaning basket lifting mechanism is further arranged in the cleaning box and used for lifting the cleaning basket from the cleaning basket inlet position to a set station;
the automatic feeding mechanism is detachably connected at the feeding port, conveys the cleaning basket into the cleaning box through the chain transmission assembly, and feeds forward;
the automatic discharging mechanism is the same as the automatic feeding mechanism in structure and detachably connected to the discharging port, the cleaned workpiece is conveyed out of the cleaning box through the chain transmission assembly, and the automatic discharging mechanism discharges materials backwards;
the ultrasonic cleaning assembly comprises an ultrasonic cleaning tank and an ultrasonic transducer which are arranged in the ultrasonic cleaning area, wherein an overflow port is formed in the ultrasonic cleaning tank, the overflow port is connected with an oil-water separation tank through an overflow pipe, the oil-water separation tank is communicated with an evaporation tank, a heating pipe is arranged in the evaporation tank, the evaporation tank is communicated with a condensation tank, the condensation tank is communicated with the ultrasonic cleaning tank, a liquid outlet is formed in the bottom of the ultrasonic cleaning tank, the liquid outlet is communicated with a waste liquid pipeline through a liquid outlet pipe, and a protective screen is arranged at the liquid outlet to prevent cleaning workpieces or sundries from flowing into the liquid outlet pipe;
the drying assembly comprises a drying groove, a fan and a heating device which are arranged in the drying area, wherein the bottom of the drying groove is provided with an air inlet, the top of the drying groove is provided with an air return inlet, and the heating device is used for heating air generated by the fan;
the plasma cleaning assembly comprises a plasma door panel which is arranged in the plasma cleaning area and used for generating plasma, and the left end of the plasma door panel is propped against a partition panel arranged between the drying area and the plasma area;
the control cabinet is connected to the right side of the cleaning box, a PLC is arranged in the control cabinet, the PLC is connected with an operation panel capable of being operated by a person, and control buttons corresponding to the feeding, discharging, ultrasonic cleaning, drying and plasma cleaning processes one by one are arranged on the operation panel;
the ultrasonic cleaning tank, the drying tank and the plasma door panel respectively correspond to a cleaning station.
2. The ultrasonic plasma cleaning machine according to claim 1, wherein a low liquid level protection switch and a high liquid level protection switch are arranged in the evaporation tank, the low liquid level protection switch, the high liquid level protection switch and the heating pipe are connected in parallel, and the PLC is in control connection with both the low liquid level protection switch and the high liquid level protection switch.
3. An ultrasonic plasma cleaning machine as defined in claim 1, wherein three ultrasonic cleaning tanks are provided at intervals in the left-right direction, two adjacent ultrasonic cleaning tanks are communicated through respective overflow ports and overflow pipes connecting the two overflow ports, and two oil-water separating tanks are provided, one of which is communicated with the ultrasonic cleaning tank located at the leftmost side and the evaporation tank, and the other of which is communicated with the ultrasonic cleaning tank located at the rightmost side and the condensation tank.
4. The ultrasonic plasma cleaner according to any one of claims 1 to 3, wherein a cleaning basket positioning tool is provided on each cleaning station.
5. The ultrasonic plasma cleaning machine as claimed in any one of claims 1 to 3, wherein a cover plate is provided on the upper part of the ultrasonic cleaning tank and the drying tank, a lifting motor for driving the cover plate to move up and down is provided at a corresponding position in the cleaning tank, and the PLC is in control connection with the lifting motor to control the cover plate to move down to close the corresponding notch when the cleaning basket enters the ultrasonic cleaning tank and the drying tank.
6. The ultrasonic plasma cleaning machine according to any one of claims 1 to 3, wherein an observation window is provided on the cleaning tank at a position between the feed port and the discharge port, the observation window being provided in one-to-one correspondence with the ultrasonic cleaning zone, the drying zone, and the plasma cleaning zone.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120410509.9U CN214865733U (en) | 2021-02-25 | 2021-02-25 | An ultrasonic plasma cleaning machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120410509.9U CN214865733U (en) | 2021-02-25 | 2021-02-25 | An ultrasonic plasma cleaning machine |
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| CN214865733U true CN214865733U (en) | 2021-11-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202120410509.9U Expired - Fee Related CN214865733U (en) | 2021-02-25 | 2021-02-25 | An ultrasonic plasma cleaning machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116460094A (en) * | 2023-04-20 | 2023-07-21 | 北京国基科航第三代半导体检测技术有限公司 | A kind of plasma cleaning method of GaN microwave chip |
-
2021
- 2021-02-25 CN CN202120410509.9U patent/CN214865733U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116460094A (en) * | 2023-04-20 | 2023-07-21 | 北京国基科航第三代半导体检测技术有限公司 | A kind of plasma cleaning method of GaN microwave chip |
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Granted publication date: 20211126 |