CN214830790U

CN214830790U - Crystal growth furnace and silicon carbide crystal growth device with same

Info

Publication number: CN214830790U
Application number: CN202120350590.6U
Authority: CN
Inventors: 姚恒; 卞洪阳; 姚泰
Original assignee: Zhongshan Rongtuo Intelligent Equipment Co ltd
Current assignee: Yao Tai
Priority date: 2021-02-05
Filing date: 2021-02-05
Publication date: 2021-11-23
Anticipated expiration: 2031-02-05

Abstract

The utility model discloses a crystal growth furnace and have its carborundum crystal growing apparatus, crystal growth furnace includes: the furnace bottom assembly comprises a furnace bottom plate and a furnace bottom sleeve connected with the furnace bottom plate, and a first interlayer is formed between the furnace bottom sleeve and the furnace bottom plate; and a furnace body assembly, including the stove inner tube, furnace body cover and backward flow spare, the stove inner tube sets up on the bottom plate of the furnace, the furnace body cover is established on the bottom plate of the furnace, and the cover is located outside the stove inner tube, and be formed with the second intermediate layer between furnace body cover and the stove inner tube, the bottom plate of the furnace is equipped with the first through-hole that is used for communicateing second intermediate layer and first intermediate layer, the backward flow spare sets up in the second intermediate layer, the backward flow spare is equipped with the return flow channel who has import and export, the import is located the export and follows the top of direction of gravity, and import and second intermediate layer intercommunication, the export is used for the external intercommunication with crystal growth stove. The crystal growth furnace can avoid the damage or the shortened service life of the furnace bottom component and the furnace body component caused by long-term heating during the use period.

Description

Crystal growth furnace and silicon carbide crystal growth device with same

Technical Field

The utility model belongs to the technical field of the crystal growth technique and specifically relates to a crystal growing furnace and have its carborundum crystal growing device is related to.

Background

When a silicon carbide crystal growth experiment is carried out, a silicon carbide raw material needs to be placed in a crystal growth furnace, and the silicon carbide raw material needs to be heated through a heating device. In order to obtain corresponding crystals, the temperature required to be provided by the heating device is more than 2000 ℃, so the temperature of the furnace body component and the furnace bottom component of the crystal growth furnace is also continuously influenced by the heating device, and the crystal growth furnace is easy to damage or has shortened service life.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a crystal growth furnace can solve the furnace shaft subassembly and the stove bottom subassembly of traditional crystal growth furnace and damage easily or the short problem of life.

The utility model also provides a carborundum crystal growing apparatus who has above-mentioned crystal growing furnace.

According to the utility model discloses a crystal growth furnace of first aspect embodiment, crystal growth furnace includes: the furnace bottom assembly comprises a furnace bottom plate and a furnace bottom sleeve connected with the furnace bottom plate, wherein a first interlayer is formed between the furnace bottom sleeve and the furnace bottom plate and is used for injecting cooling liquid; and the furnace body assembly comprises a furnace inner cylinder, a furnace body sleeve and a backflow piece, the furnace inner cylinder is arranged on the furnace bottom plate, the furnace body sleeve is arranged on the furnace bottom plate and sleeved outside the furnace inner cylinder, a second interlayer is formed between the furnace body sleeve and the furnace inner cylinder, the furnace bottom plate is provided with a first through hole for communicating the second interlayer and the first interlayer, the backflow piece is arranged in the second interlayer, the backflow piece is provided with a backflow channel with an inlet and an outlet, the inlet is positioned above the outlet along the gravity direction, the inlet is communicated with the second interlayer, and the outlet is communicated with the outside of the crystal growth furnace.

According to the utility model discloses crystal growth stove has following technological effect at least:

during the use period of the crystal growth furnace, cooling liquid can be injected into the first interlayer of the furnace bottom component; in the process of injecting cooling liquid into the first interlayer, the cooling liquid in the first interlayer can flow to the second interlayer through the first through holes; the height of the cooling liquid gradually rises along with the increase of the cooling liquid in the second interlayer, and when the height of the cooling liquid rises to the inlet of the backflow channel of the backflow piece, the cooling liquid enters the backflow channel through the inlet of the backflow channel and then flows to the outside through the outlet of the backflow channel. Foretell crystal growth stove is during the use, and the coolant liquid can flow into the first interlayer of stove bottom subassembly, cools off stove bottom subassembly, and the coolant liquid can also flow into the second interlayer of furnace shaft subassembly, cools off the furnace shaft subassembly, avoids stove bottom subassembly and furnace shaft subassembly to damage or shorten life because of being heated for a long time. In addition, because the cooling liquid can be continuously injected into the first interlayer and the second interlayer, the cooling liquid in the first interlayer and the second interlayer can keep a circulating state and is discharged through the backflow piece after absorbing certain heat, and the refrigeration effect is good. And, just can enter into the backward flow spare in the backward flow spare again when the import department that enters into the intraformational coolant liquid of second intermediate layer reaches the backward flow spare, so, can be through setting up the import of backward flow spare on the top of second intermediate layer for the interior section of thick bamboo of stove and furnace shaft cover fully contact with the coolant liquid, guarantee the radiating effect of interior section of thick bamboo of stove and furnace shaft cover.

According to some embodiments of the utility model, the stove bottom plate is kept away from one side of shaft subassembly is formed with the cistern, the bottom of the furnace cover with the lateral wall sealing connection of cistern, and cover the cistern, so that the bottom of the furnace cover with form between the bottom of the furnace plate first intermediate layer.

According to some embodiments of the utility model, the crystal growth furnace still include the joint of bleeding, the stove inner tube has the inner chamber, the stove bottom plate be equipped with the first pilot hole of inner chamber intercommunication, the stove bottom cover be equipped with the second pilot hole that first pilot hole is relative, the joint of bleeding is worn to locate first pilot hole and the second pilot hole.

According to some embodiments of the utility model, the joint of bleeding includes inner tube and urceolus, the inner tube is worn to locate first pilot hole and second pilot hole, the urceolus encloses to be located the inner tube is located the stove bottom cover is kept away from first interbedded one side, just the urceolus with be formed with between the inner tube with the feed liquor groove of first intermediate layer intercommunication, the urceolus be equipped with the inlet of feed liquor groove intercommunication.

According to some embodiments of the utility model, the backward flow passageway be formed in the backward flow groove on the backward flow piece, the import with the export sets up relatively, the backward flow groove still have with the import reaches the lateral part opening that the export is adjacent, the backward flow piece with the stove inner tube offsets, so that the shutoff of stove inner tube lateral part opening.

According to some embodiments of the present invention, the outlet is provided at the bottom of the backflow member, the bottom of the backflow member abuts against the furnace bottom plate, and the furnace bottom plate is provided with a second through hole communicated with the outlet; the stove bottom subassembly still including set up in the stove bottom plate is kept away from the return water box of one side of backward flow piece, the return water box with the second through-hole sets up relatively, just the return water box have with the return water chamber of second through-hole intercommunication and with the liquid outlet of return water chamber intercommunication.

According to some embodiments of the utility model, the stove bottom cover is equipped with the breach, the lateral wall of return water box with the lateral wall of breach is connected, the lateral wall of return water box will the return water chamber with first intermediate layer separates, just the diapire of return water box seals the breach, the liquid outlet set up in on the diapire of return water box.

According to some embodiments of the utility model, the shaft subassembly still includes the support element, the support element support in the stove inner tube with between the shaft cover.

According to some embodiments of the present invention, the supporting unit includes a plurality of first supporting members arranged along the lateral interval and second supporting members arranged along the lateral interval, and every adjacent two gaps between the second supporting members are all opposite to the first supporting members.

The silicon carbide crystal growing apparatus according to the second aspect of the present invention includes the crystal growing furnace as described above.

According to the utility model discloses carborundum crystal growing apparatus has following technological effect at least:

the silicon carbide crystal growing apparatus comprises the crystal growing furnace, wherein the crystal growing furnace can inject cooling liquid into the first interlayer of the furnace bottom component during use; in the process of injecting cooling liquid into the first interlayer, the cooling liquid in the first interlayer can flow to the second interlayer through the first through holes; the height of the cooling liquid gradually rises along with the increase of the cooling liquid in the second interlayer, and when the height of the cooling liquid rises to the inlet of the backflow channel of the backflow piece, the cooling liquid enters the backflow channel through the inlet of the backflow channel and then flows to the outside through the outlet of the backflow channel. Foretell crystal growth stove is during the use, and the coolant liquid can flow into the first interlayer of stove bottom subassembly, cools off stove bottom subassembly, and the coolant liquid can also flow into the second interlayer of furnace shaft subassembly, cools off the furnace shaft subassembly, avoids stove bottom subassembly and furnace shaft subassembly to damage or shorten life because of being heated for a long time. In addition, because the cooling liquid can be continuously injected into the first interlayer and the second interlayer, the cooling liquid in the first interlayer and the second interlayer can keep a circulating state and is discharged through the backflow piece after absorbing certain heat, and the refrigeration effect is good. And, just can enter into the backward flow spare in the backward flow spare again when the import department that enters into the intraformational coolant liquid of second intermediate layer reaches the backward flow spare, so, can be through setting up the import of backward flow spare on the top of second intermediate layer for the interior section of thick bamboo of stove and furnace shaft cover fully contact with the coolant liquid, guarantee the radiating effect of interior section of thick bamboo of stove and furnace shaft cover.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic view of a crystal growth furnace according to an embodiment of the present invention;

FIG. 2 is a first schematic diagram of an explosion structure of a partial structure of a crystal growth furnace according to an embodiment of the present invention;

FIG. 3 is a second schematic diagram of the explosive structure of the partial structure of the crystal growth furnace according to an embodiment of the present invention;

FIG. 4 is a schematic view of an exploded view of a furnace bottom assembly and extraction adapter in accordance with an embodiment of the present invention;

FIG. 5 is a schematic view of an explosion structure of the hearth cover and the air extraction joint according to an embodiment of the present invention;

fig. 6 is a partially enlarged structural view of a portion a of the graph shown in fig. 5.

Reference numerals:

100. a hearth assembly; 110. a furnace floor; 111. a first through hole; 112. a second through hole; 113. a liquid bath; 114. a first assembly hole; 120. a furnace bottom sleeve; 121. a second assembly hole; 130. a water return box; 131. a water return cavity; 132. a liquid outlet; 140. a water outlet nozzle; 200. a shaft assembly; 210. an inner furnace cylinder; 220. a furnace shell sleeve; 230. a return member; 231. an inlet; 232. an outlet; 241. a first support member; 242. a second support member; 300. a furnace lid assembly; 400. an air extraction joint; 410. an inner barrel; 420. an outer cylinder; 430. a liquid inlet tank; 440. a water inlet nozzle.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1, an embodiment of the crystal growth furnace includes a furnace bottom assembly 100, a furnace shell assembly 200, and a furnace cover assembly 300, wherein the furnace shell assembly 200 is disposed on the furnace bottom assembly 100, and the furnace cover assembly 300 is disposed on the furnace shell assembly 200.

As shown in fig. 4, the hearth assembly 100 includes a hearth plate 110 and a hearth cover 120 connected to the hearth plate 110, and a first interlayer for injecting a cooling liquid is formed between the hearth cover 120 and the hearth plate 110. Referring to fig. 2, the furnace body assembly 200 includes a furnace inner cylinder 210, a furnace body sleeve 220 and a backflow member 230, the furnace inner cylinder 210 is disposed on the furnace bottom plate 110, the furnace body sleeve 220 is disposed on the furnace bottom plate 110 and sleeved outside the furnace inner cylinder 210, and a second interlayer is formed between the furnace body sleeve 220 and the furnace inner cylinder 210, as shown in fig. 3 and 4, the furnace bottom plate 110 is provided with a first through hole 111 for communicating the second interlayer and the first interlayer. As shown in fig. 3, the reflow member 230 is disposed in the second interlayer, the reflow member 230 is provided with a reflow channel having an inlet 231 and an outlet 232, the inlet 231 of the reflow channel is located above the outlet 232 of the reflow channel along the gravity direction, the inlet 231 of the reflow channel is communicated with the second interlayer, and the outlet 232 is used for being communicated with the outside of the crystal growth furnace.

As shown in fig. 2-4, during use of the crystal growth furnace, a cooling fluid may be injected into the first tier of the hearth assembly 100; in the process of injecting the cooling liquid into the first interlayer, the cooling liquid in the first interlayer can flow to the second interlayer through the first through holes 111; as the cooling liquid in the second interlayer increases, the height of the cooling liquid gradually increases, and when the height of the cooling liquid increases to the inlet 231 of the return channel of the return member 230, the cooling liquid enters the return channel through the inlet 231 of the return channel and then flows to the outside through the outlet 232 of the return channel. During the use period of the crystal growth furnace, the cooling liquid can flow into the first interlayer of the furnace bottom assembly 100 to cool the furnace bottom assembly 100, and the cooling liquid can also flow into the second interlayer of the furnace body assembly 200 to cool the furnace body assembly 200, so that the furnace bottom assembly 100 and the furnace body assembly 200 are prevented from being damaged or having shortened service life due to long-term heating. In addition, since the cooling fluid can be continuously injected into the first interlayer and the second interlayer, the cooling fluid in the first interlayer and the second interlayer can be kept in a circulating state, and is discharged through the backflow member 230 after absorbing a certain amount of heat, so that the refrigerating effect is good. And, the height of the cooling liquid entering the second interlayer can only enter the backflow piece 230 and then be discharged when reaching the inlet 231 of the backflow piece 230, so that the inlet 231 of the backflow piece 230 is arranged at the top end of the second interlayer, so that the furnace inner cylinder 210 and the furnace shell 220 are in full contact with the cooling liquid, and the heat dissipation effect of the furnace inner cylinder 210 and the furnace shell 220 is ensured.

Wherein, the cooling liquid can be water or other cooling liquids.

In one embodiment, as shown in fig. 4, a liquid groove 113 is formed on a side of the furnace floor 110 away from the shaft assembly 200, and the hearth cover 120 is hermetically connected to a side wall of the liquid groove 113 and covers the liquid groove 113, so that a first interlayer is formed between the hearth cover 120 and the furnace floor 110.

Specifically, the furnace body assembly 200 is disposed on the upper side of the furnace bottom plate 110, the liquid tank 113 is formed on the lower side of the furnace bottom plate 110, the furnace bottom sleeve 120 is in sealing fit with the side wall of the liquid tank 113, and the furnace bottom sleeve 120 is spaced from the top wall of the liquid tank 113, so that a first interlayer is formed between the furnace bottom sleeve 120 and the furnace bottom plate 110.

As shown in fig. 2, the furnace inner barrel 210 has an inner cavity. Referring to fig. 4, the crystal growth furnace further includes an air suction connector 400, the furnace bottom plate 110 is provided with a first assembling hole 114 communicated with the inner cavity of the furnace inner tube 210, the furnace bottom sleeve 120 is provided with a second assembling hole 121 opposite to the first assembling hole 114, and the air suction connector 400 is inserted through the first assembling hole 114 and the second assembling hole 121. The air extraction joint 400 is used for being connected with an air extraction pump, and the air extraction pump is used for vacuumizing the inner cavity of the furnace inner barrel 210 during working so as to provide a cultivation environment for the growth of the silicon carbide crystals.

As shown in fig. 5, the air extraction joint 400 includes an inner cylinder 410 and an outer cylinder 420, please refer to fig. 4, the inner cylinder 410 is inserted into the first assembly hole 114 and the second assembly hole 121, the outer cylinder 420 is disposed around the inner cylinder 410 and located at a side of the hearth cover 120 away from the first interlayer, a liquid inlet groove 430 is formed between the outer cylinder 420 and the inner cylinder 410, the liquid inlet groove 430 is communicated with the first interlayer, and the outer cylinder 420 is provided with a liquid inlet communicated with the liquid inlet groove 430. Thus, the cooling liquid can be injected into the liquid inlet groove 430 through the liquid inlet, and the cooling liquid in the liquid inlet groove 430 can enter the first interlayer.

As shown in fig. 4 and 5, in detail, the outer cylinder 420 is sleeved outside the inner cylinder 410, and the bottom of the outer cylinder 420 is connected to the outer wall of the inner cylinder 410, so that a liquid inlet groove 430 is formed between the outer cylinder 420 and the inner cylinder 410. The inner cylinder 410 penetrates through the first assembly hole 114 and the second assembly hole 121, the outer wall of the inner cylinder 410 is abutted against the hole wall of the first assembly hole 114, and the inner cylinder 410 is used for isolating a first interlayer of the furnace bottom assembly 100 from the inner cavity of the furnace inner cylinder 210 and preventing cooling liquid in the first interlayer from entering the furnace inner cylinder 210; a gap is formed between the outer wall of the inner cylinder 410 and the wall of the second assembly hole 121, the top of the inner cylinder 410 abuts against one side of the furnace bottom sleeve 120, which is far away from the first interlayer, and the liquid inlet groove 430 is communicated with the first interlayer through the gap between the outer wall of the inner cylinder 410 and the wall of the second assembly hole 121.

In another embodiment, the outer wall of the inner cylinder 410 abuts against the wall of the second assembly hole 121, and the hearth cover 120 is provided with a hole for communicating the first interlayer with the liquid inlet tank 430.

Further, the liquid inlet is opened on the side wall of the outer barrel 420, and a water inlet nozzle 440 is arranged at the liquid inlet, and the water inlet nozzle 440 is used for connecting a water inlet pipe.

As shown in fig. 3, in one embodiment, the backflow channel is a backflow groove formed on the backflow member 230, the inlet 231 is disposed opposite to the outlet 232, the backflow groove further has side openings adjacent to the inlet 231 and the outlet 232, and the backflow member 230 abuts against the furnace inner cylinder 210 so that the furnace inner cylinder 210 blocks the side openings.

Specifically, the backflow member 230 is a strip, one side of the backflow member 230 is provided with a backflow groove penetrating through the upper end and the lower end of the backflow member 230, the top end of the backflow groove is an inlet 231, the bottom end of the backflow groove is an outlet 232, and the backflow groove is provided with a side opening. The reflow material 230 is connected to the furnace inner tube 210, and the furnace inner tube 210 closes the side opening of the reflow groove. In this way, the coolant in the second interlayer can flow toward the outlet 232 of the reflow tank through the inlet 231 of the reflow tank.

As shown in fig. 3, further, the bottom of the backflow member 230 abuts against the furnace bottom plate 110, and the furnace bottom plate 110 is provided with a second through hole 112 communicating with the outlet 232 of the backflow channel; as shown in FIG. 4, the hearth assembly 100 further includes a water returning box 130 provided at a side of the hearth plate 110 away from the return member 230, the water returning box 130 being disposed opposite to the second through-hole 112. Referring to fig. 6, the water return box has a water return chamber 131 communicated with the second through hole 112, and a liquid outlet 132 communicated with the water return chamber 131. Thus, the cooling fluid in the return member 230 may flow to the return water chamber 131 in the return water box 130 through the second through hole 112 after exiting from the outlet 232 of the return passage, and then may be discharged to the outside through the outlet 132 of the return water box 130.

As shown in fig. 6, specifically, the hearth cover 120 is provided with a notch, a side wall of the water return box 130 is connected to a side wall of the notch, a bottom wall of the water return box 130 seals the notch of the hearth cover 120, the side wall of the water return box 130 separates the water return cavity 131 from the first interlayer, and the liquid outlet 132 is opened on the bottom wall of the water return box 130.

As shown in fig. 4 and fig. 6, in the present embodiment, a water outlet nozzle 140 is disposed at the liquid outlet 132, and the water outlet nozzle 140 is used for connecting a water pipe to facilitate liquid drainage.

As shown in fig. 2, in one embodiment, the shaft assembly 200 further includes a supporting unit supported between the furnace inner tube 210 and the shaft sleeve 220, and the supporting unit is used for keeping the furnace inner tube 210 and the shaft sleeve 220 at a certain distance so as to form a second interlayer between the furnace inner tube 210 and the shaft sleeve 220.

Specifically, the supporting unit includes a plurality of first supporting members 241 arranged at intervals in the transverse direction, and second supporting members 242 arranged at intervals in the transverse direction, and a gap between every two adjacent second supporting members 242 is opposite to one first supporting member 241. Thus, the first supporting members 241 and the second supporting members 242 are arranged alternately, so that the cooling liquid can be distributed in the second interlayer more uniformly.

More specifically, the first support 241 and the second support 242 are both vertically disposed support bars.

An embodiment also relates to a silicon carbide crystal growing device which comprises the crystal growing furnace.

The silicon carbide crystal growing apparatus comprises the crystal growing furnace, wherein the crystal growing furnace can inject cooling liquid into the first interlayer of the furnace bottom component 100 during use; in the process of injecting the cooling liquid into the first interlayer, the cooling liquid in the first interlayer can flow to the second interlayer through the first through holes 111; as the cooling liquid in the second interlayer increases, the height of the cooling liquid gradually increases, and when the height of the cooling liquid increases to the inlet 231 of the return channel of the return member 230, the cooling liquid enters the return channel through the inlet 231 of the return channel and then flows to the outside through the outlet 232 of the return channel. During the use period of the crystal growth furnace, the cooling liquid can flow into the first interlayer of the furnace bottom assembly 100 to cool the furnace bottom assembly 100, and the cooling liquid can also flow into the second interlayer of the furnace body assembly 200 to cool the furnace body assembly 200, so that the furnace bottom assembly 100 and the furnace body assembly 200 are prevented from being damaged or having shortened service life due to long-term heating. In addition, since the cooling fluid can be continuously injected into the first interlayer and the second interlayer, the cooling fluid in the first interlayer and the second interlayer can be kept in a circulating state, and is discharged through the backflow member 230 after absorbing a certain amount of heat, so that the refrigerating effect is good. And, the height of the cooling liquid entering the second interlayer can only enter the backflow piece 230 and then be discharged when reaching the inlet 231 of the backflow piece 230, so that the inlet 231 of the backflow piece 230 is arranged at the top end of the second interlayer, so that the furnace inner cylinder 210 and the furnace shell 220 are in full contact with the cooling liquid, and the heat dissipation effect of the furnace inner cylinder 210 and the furnace shell 220 is ensured.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A crystal growth furnace, comprising:

the furnace bottom assembly comprises a furnace bottom plate and a furnace bottom sleeve connected with the furnace bottom plate, wherein a first interlayer is formed between the furnace bottom sleeve and the furnace bottom plate and is used for injecting cooling liquid; and

the furnace body assembly comprises a furnace inner cylinder, a furnace body sleeve and a backflow piece, wherein the furnace inner cylinder is arranged on the furnace bottom plate, the furnace body sleeve is arranged on the furnace bottom plate and sleeved outside the furnace inner cylinder, a second interlayer is formed between the furnace body sleeve and the furnace inner cylinder, the furnace bottom plate is provided with a first through hole used for communicating the second interlayer and the first interlayer, the backflow piece is arranged in the second interlayer, the backflow piece is provided with a backflow channel with an inlet and an outlet, the inlet is located above the outlet in the gravity direction, the inlet is communicated with the second interlayer, and the outlet is used for being communicated with the outside of the crystal growth furnace.

2. The crystal growth furnace of claim 1, wherein a liquid bath is formed on a side of the furnace floor remote from the furnace body assembly, and the furnace bottom sleeve is hermetically connected to a side wall of the liquid bath and covers the liquid bath so that the first interlayer is formed between the furnace bottom sleeve and the furnace floor.

3. The crystal growth furnace of claim 1, further comprising an air extraction joint, wherein the inner furnace tube has an inner cavity, the furnace bottom plate is provided with a first assembly hole communicated with the inner cavity, the furnace bottom sleeve is provided with a second assembly hole opposite to the first assembly hole, and the air extraction joint is arranged through the first assembly hole and the second assembly hole.

4. The crystal growth furnace of claim 3, wherein the air extraction joint comprises an inner cylinder and an outer cylinder, the inner cylinder is arranged in the first assembling hole and the second assembling hole in a penetrating manner, the outer cylinder is arranged in the inner cylinder in a surrounding manner and is positioned on one side of the furnace bottom sleeve away from the first interlayer, a liquid inlet groove communicated with the first interlayer is formed between the outer cylinder and the inner cylinder, and the outer cylinder is provided with a liquid inlet communicated with the liquid inlet groove.

5. The crystal growth furnace of claim 1, wherein the return channel is a return channel formed in the return member, the inlet being disposed opposite the outlet, the return channel further having a side opening adjacent the inlet and the outlet, the return member abutting the furnace interior tube such that the furnace interior tube blocks the side opening.

6. The crystal growth furnace of claim 1, wherein the outlet is formed in the bottom of the backflow piece, the bottom of the backflow piece abuts against the furnace bottom plate, and the furnace bottom plate is provided with a second through hole communicated with the outlet;

the stove bottom subassembly still including set up in the stove bottom plate is kept away from the return water box of one side of backward flow piece, the return water box with the second through-hole sets up relatively, just the return water box have with the return water chamber of second through-hole intercommunication and with the liquid outlet of return water chamber intercommunication.

7. The crystal growth furnace of claim 6, wherein the furnace bottom sleeve is provided with a notch, the side wall of the water return box is connected with the side wall of the notch, the side wall of the water return box separates the water return cavity from the first interlayer, the bottom wall of the water return box seals the notch, and the liquid outlet is arranged on the bottom wall of the water return box.

8. The crystal growth furnace of claim 1, wherein the shaft assembly further comprises a support unit supported between the furnace inner barrel and the shaft jacket.

9. The crystal growth furnace of claim 8, wherein the support unit comprises a plurality of first supports arranged at intervals in the lateral direction, and second supports arranged at intervals in the lateral direction, and a gap between each adjacent two of the second supports is opposite to one of the first supports.

10. A silicon carbide crystal growing apparatus comprising the crystal growing furnace according to any one of claims 1 to 9.