CN214814510U

CN214814510U - High-performance sputtering target rolling and forging integrated equipment

Info

Publication number: CN214814510U
Application number: CN202121231508.4U
Authority: CN
Inventors: 林农
Original assignee: V&d New Materials Jiangsu Co ltd
Current assignee: V&d New Materials Jiangsu Co ltd
Priority date: 2021-06-03
Filing date: 2021-06-03
Publication date: 2021-11-23
Anticipated expiration: 2031-06-03

Abstract

The utility model relates to a high performance sputtering target rolls and forges integrative equipment, including work main part and installation mechanism, the inside of work main part is provided with installation mechanism, installation mechanism includes dead lever, knob and leads to the groove, the left side of knob is provided with the drive lever, the surface of drive lever is provided with the action wheel, the surface of action wheel is provided with from the driving wheel, the surface from the driving wheel is provided with the biography guide pulley, the inside of passing the guide pulley is provided with the fixed sleeve, the fixed sleeve's surface is provided with the control wheel, the surface of control wheel is provided with the removal rack. This integrative equipment is rolled and forged to high performance sputtering target drives the rack through knob control gear, makes removal grip block and fixed grip block interlock then for the device can the mount pad of centre gripping control box surface, and fixed control box, whole process need not any instrument, increases work efficiency, reduces the work degree of difficulty.

Description

High-performance sputtering target rolling and forging integrated equipment

Technical Field

The utility model relates to a penetrate target material roll forging technical field, specifically be a high performance sputtering target material roll forging integrative equipment.

Background

The requirement of the sputtering target is higher than that of the traditional material industry, and the sputtering target is mainly applied to the electronic and information industry, such as integrated circuits, information storage, liquid crystal display screens, laser memories, electronic control devices and the like; can also be applied to the field of glass coating; can also be applied to the industries of wear-resistant materials, high-temperature corrosion resistance, high-grade decorative products and the like.

Although the roll forging all-in-one machine in the existing market has the advantages of high performance, low manufacturing cost, strong applicability and the like, when a control box is installed, welding and bolts are generally used for being connected and fixed with the surface of a machine body, an installer needs to carry various tools, the installation tools mostly lead the worker to need to be replaced and used for many times, time and labor are wasted, and the installation efficiency of the worker is reduced, so that the roll forging all-in-one machine for the high-performance sputtering target is provided for solving the problems.

SUMMERY OF THE UTILITY MODEL

Not enough to prior art, the utility model provides a high performance sputters target and rolls and forges integrative equipment possesses advantages such as simple to operate, has solved the problem that wastes time and energy and reduce workman's installation effectiveness.

In order to achieve the above object, the utility model provides a following technical scheme: a high-performance sputtering target rolling and forging integrated device comprises a working main body and a mounting mechanism, wherein the mounting mechanism is arranged in the working main body, the mounting mechanism comprises a fixed rod, a knob and a through groove, the left side of the knob is provided with a driving rod, the outer surface of the driving rod is provided with a driving wheel, the outer surface of the driving wheel is provided with a driven wheel, the outer surface of the driven wheel is provided with a transmission wheel, the inside of the transmission wheel is provided with a fixed sleeve, the outer surface of the fixed sleeve is provided with a control wheel, the outer surface of the control wheel is provided with a movable rack, the outer surface of the movable rack is provided with a movable rod, the outer surface of the movable rod is provided with a movable clamping block, the movable rod extends to the outside of the working main body through the through groove, the fixed rod is arranged on the outer surface of the working main body, and the right end of the fixed rod is provided with the fixed clamping block.

Further, the work main part includes the mount table, the top fixed mounting of mount table has the stabilizer blade, the top fixed mounting organism of stabilizer blade, dead lever fixed mounting is in the surface of organism.

Furthermore, a fixing groove is processed at the top end of the mounting table and matched with the support legs.

Further, the fixed sleeve is divided into an inner shaft and a sleeve, the inner shaft part is fixedly connected with the machine body, and the sleeve part can rotate.

Further, the driving rod is in threaded connection with the machine body, penetrates through the machine body and extends to the outside.

Further, the outer fixed surface of removal rack installs the slider, the cavity processing of organism has the spout, slider and spout looks adaptation.

Furthermore, the movable clamping block is semicircular, and the shape and the size of the fixed clamping block are consistent with those of the movable clamping block.

Compared with the prior art, the technical scheme of the application has the following beneficial effects:

this integrative equipment is rolled and forged to high performance sputtering target drives the rack through knob control gear, makes removal grip block and fixed grip block interlock then for the device can the mount pad of centre gripping control box surface, and fixed control box, whole process need not any instrument, increases work efficiency, reduces the work degree of difficulty.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a right side view of the structure of the present invention;

fig. 3 is an appearance diagram of the present invention.

In the figure: 1 working main body, 101 mounting table, 102 support feet, 103 machine body, 2 mounting mechanism, 201 knob, 202 driving rod, 203 driving wheel, 204 driven wheel, 205 transmission wheel, 206 control wheel, 207 moving rack, 208 moving rod, 209 moving clamping block, 210 through groove, 211 fixing rod, 212 fixing clamping block and 213 fixing sleeve.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the high-performance sputtering target rolling and forging integrated equipment in the present embodiment includes a working main body 1 and a mounting mechanism 2, the mounting mechanism 2 is disposed inside the working main body 1, the mounting mechanism 2 includes a fixing rod 211, a knob 201 and a through groove 210, a driving rod 202 is fixedly mounted on the left side of the knob 201, the driving rod 202 is located in a cavity of a machine body 103, a driving wheel 203 is fixedly mounted on the outer surface of the driving rod 202, a driven wheel 204 is engaged with the outer surface of the driving wheel 203, a conducting wheel 205 is engaged with the outer surface of the driven wheel 204, a fixing sleeve 213 is fixedly mounted inside the conducting wheel 205, a control wheel 206 is fixedly mounted on the outer surface of the fixing sleeve 213, a moving rack 207 is engaged with the outer surface of the control wheel 206, a moving rod 208 is fixedly mounted on the outer surface of the moving rack 207, a moving clamping block 209 is fixedly mounted on the outer surface of the moving rod 208, the moving rod 208 extends to the outside the working main body 1 through the through groove 210, the fixing rod 211 is fixedly installed on the outer surface of the working body 1, and a fixing clamping block 212 is fixedly installed at the right end of the fixing rod 211.

When the device is installed, a user aligns and places the installation position of the control box between the movable clamping block 209 and the fixed clamping block 212, the fixed rod 211 provides supporting force for the fixed clamping block 212, at this time, the user rotates the knob 201 to drive the driving rod 202 to rotate, the driving wheel 203 on the driving rod 202 drives the driven wheel 204 to rotate, the conducting wheel 205 meshed with the driven wheel 204 rotates, the conducting wheel 205 drives the fixed sleeve 213 to rotate, the fixed sleeve 213 drives the control wheel 206 fixedly installed on the outer surface of the control wheel to rotate, the control wheel 206 enables the movable racks 207 meshed above and below the outer surface to respectively move transversely and vertically, the movable racks 207 drive the movable clamping block 209 to move from the through groove 210 to the fixed clamping block 212 until being meshed, at this time, the movable clamping block 209 and the fixed clamping block 212 jointly act to fix the control box on the outer surface of the machine body 103, if the driving wheel 203 is directly engaged with the control wheel 206, the knob 201 is located at the installation position of the control box, so that the user is very difficult to adjust and control the knob 201, and if the area of the driving wheel 203 and the area of the control wheel 206 are too large, the knob 201 cannot be installed, so that the transmission wheel 205 and the driven wheel 204 are arranged, so that the user can conveniently adjust and control the knob 201.

The fixing sleeve 213 is divided into an inner shaft and a sleeve, the inner shaft is fixedly connected with the machine body 103, the sleeve can rotate, and the inner shaft is fixed and the sleeve can rotate because the fixing sleeve 213 needs to provide supporting force for the transmission wheel 205 and the control wheel 206 and drive the control wheel 206 to rotate.

In order to adjust the engagement degree of the clamping control box through the knob 201, the active rod 202 is in threaded connection with the machine body 103, and the active rod 202 penetrates through the machine body 103 and extends to the outside in order to facilitate a user to manually adjust the knob 201.

In order to provide supporting force for the movable rack 207 and reduce friction during movement, the operation of the assembly is increased to ensure stability, a sliding block is fixedly arranged on the outer surface of the movable rack 207, a sliding groove is processed in a cavity of the machine body 103, and the sliding block is matched with the sliding groove.

The shape of the movable clamping block 209 is semicircular, the shape and the size of the fixed clamping block 212 are consistent with those of the movable clamping block 209, and the control box is fixed in order to enable the movable clamping block 209 and the fixed clamping block 212 to act together, so that the shape is regular and consistent, and the control box is preferably matched with the mounting part of the control box.

The installation mechanism 2 in this embodiment is a mechanism for realizing a zero tool installation control box and improving the work efficiency.

Work main part 1 includes mount table 101 in this embodiment, and the top fixed mounting of mount table 101 has stabilizer blade 102, and the top fixed mounting of stabilizer blade 102 has organism 103, and dead lever 211 fixed mounting is in the surface of organism 103, and mount table 101 is used for putting organism 103, and organism 103 is used for production, and organism 103 is fixed to stabilizer blade 102, for the steadiness that increases organism 103 for organism 103 is difficult for removing, and the top processing of mount table 101 has the fixed slot, fixed slot and stabilizer blade 102 looks adaptation.

The working body 1 in this embodiment is a mechanism for producing and mounting components.

Compared with the prior art, when in installation, a user aligns the installation position of the control box between the movable clamping block 209 and the fixed clamping block 212, the fixed rod 211 provides supporting force for the fixed clamping block 212, at this time, the user rotates the knob 201 to drive the driving rod 202 to rotate, the driving wheel 203 on the driving rod 202 drives the driven wheel 204 to rotate, the conducting wheel 205 meshed with the driven wheel 204 rotates, the conducting wheel 205 drives the fixed sleeve 213 to rotate, the fixed sleeve 213 drives the control wheel 206 fixedly installed on the outer surface of the control wheel to rotate, the control wheel 206 enables the movable racks 207 meshed above and below the outer surface to respectively move transversely and vertically, the movable racks 207 drive the movable clamping block 209 to move from the inside of the through groove 210 to the direction of the fixed clamping block 212 until the movable clamping block is meshed, and at this time, the movable clamping block 209 and the fixed clamping block 212 jointly act to fix the control box on the outer surface of the machine body 103, if the driving wheel 203 is directly engaged with the control wheel 206, the knob 201 is located at the installation position of the control box, so that the user is very difficult to adjust and control the knob 201, and if the area of the driving wheel 203 and the area of the control wheel 206 are too large, the knob 201 cannot be installed, so that the transmission wheel 205 and the driven wheel 204 are arranged, so that the user can conveniently adjust and control the knob 201.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides an integrative equipment of high performance sputtering target roll forging, includes work main part (1) and installation mechanism (2), its characterized in that: an installation mechanism (2) is arranged in the working main body (1);

the installation mechanism (2) comprises a fixed rod (211), a knob (201) and a through groove (210), a driving rod (202) is arranged on the left side of the knob (201), a driving wheel (203) is arranged on the outer surface of the driving rod (202), a driven wheel (204) is arranged on the outer surface of the driving wheel (203), a transmission wheel (205) is arranged on the outer surface of the driven wheel (204), a fixed sleeve (213) is arranged inside the transmission wheel (205), a control wheel (206) is arranged on the outer surface of the fixed sleeve (213), a movable rack (207) is arranged on the outer surface of the control wheel (206), a movable rod (208) is arranged on the outer surface of the movable rack (207), a movable clamping block (209) is arranged on the outer surface of the movable rod (208), and the movable rod (208) extends to the outside of the working main body (1) through the through groove (210), the fixing rod (211) is arranged on the outer surface of the working main body (1), and a fixing clamping block (212) is arranged at the right end of the fixing rod (211).

2. The high-performance sputtering target rolling and forging integrated equipment as claimed in claim 1, wherein: the working main body (1) comprises an installation table (101), supporting legs (102) are fixedly installed at the top of the installation table (101), an organism (103) is fixedly installed at the top of the supporting legs (102), and the fixing rods (211) are fixedly installed on the outer surface of the organism (103).

3. The high-performance sputtering target rolling and forging integrated equipment as claimed in claim 2, wherein: the top end of the mounting table (101) is provided with a fixing groove, and the fixing groove is matched with the supporting leg (102).

4. The high-performance sputtering target rolling and forging integrated equipment as claimed in claim 1, wherein: the fixed sleeve (213) is divided into an inner shaft and a sleeve, the inner shaft is fixedly connected with the machine body (103), and the sleeve can rotate.

5. The high-performance sputtering target rolling and forging integrated equipment as claimed in claim 1, wherein: the driving rod (202) is in threaded connection with the machine body (103), and the driving rod (202) penetrates through the machine body (103) and extends to the outside.

6. The high-performance sputtering target rolling and forging integrated equipment as claimed in claim 2, wherein: the outer surface of the movable rack (207) is fixedly provided with a sliding block, a sliding groove is processed in a cavity of the machine body (103), and the sliding block is matched with the sliding groove.

7. The high-performance sputtering target rolling and forging integrated equipment as claimed in claim 1, wherein: the shape of the movable clamping block (209) is semicircular, and the shape and the size of the fixed clamping block (212) are consistent with those of the movable clamping block (209).