CN214767421U - Automatic crucible cleaning machine - Google Patents
Automatic crucible cleaning machine Download PDFInfo
- Publication number
- CN214767421U CN214767421U CN202120395037.4U CN202120395037U CN214767421U CN 214767421 U CN214767421 U CN 214767421U CN 202120395037 U CN202120395037 U CN 202120395037U CN 214767421 U CN214767421 U CN 214767421U
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- crucible
- chamber
- cleaning
- acidification
- cleaning machine
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- 238000004140 cleaning Methods 0.000 title claims abstract description 62
- 230000020477 pH reduction Effects 0.000 claims abstract description 32
- 230000018044 dehydration Effects 0.000 claims abstract description 24
- 238000006297 dehydration reaction Methods 0.000 claims abstract description 24
- 238000005202 decontamination Methods 0.000 claims abstract description 21
- 230000003588 decontaminative effect Effects 0.000 claims abstract description 21
- 238000005406 washing Methods 0.000 claims abstract description 16
- 239000007921 spray Substances 0.000 claims description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 21
- 238000005507 spraying Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 8
- 239000012535 impurity Substances 0.000 abstract description 6
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 239000010453 quartz Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000001291 vacuum drying Methods 0.000 description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The application provides an automatic crucible cleaning machine which comprises a support, a decontamination acidification device, a cleaning device, a dehydration device and a crucible moving device, wherein the decontamination acidification device, the cleaning device and the dehydration device are arranged in the support and are sequentially installed along the horizontal direction; the crucible moving device moves along the guide rail, the crucible is sequentially placed into the decontamination acidification device, the cleaning device and the dehydration device for washing treatment, and the crucible is subjected to acidification reaction for removing impurities in the decontamination acidification device, treatment for removing surface residues in the cleaning device and dehydration process of the dehydration device in sequence, so that the cleaning effect of the crucible is improved; the crucible moving device is used for moving the crucible, so that pollution caused in the crucible carrying process is avoided, the crucible quality is guaranteed, the labor intensity of workers is reduced, and the crucible cleaning efficiency is improved.
Description
[ technical field ] A method for producing a semiconductor device
The application relates to the field of mechanical automation, in particular to an automatic crucible cleaning machine.
[ background of the invention ]
The monocrystalline silicon rod is a raw material for producing monocrystalline silicon pieces, and along with the rapid increase of the demand of domestic and international markets for monocrystalline silicon pieces, the market demand of the monocrystalline silicon rod also shows a rapid growth trend, and the demand of quartz crucibles used for manufacturing the monocrystalline silicon rod also increases rapidly. The quality of the outer surface of the quartz crucible, whether the outer surface is smooth and clean or not is directly related to the quality of a smelting product of the quartz crucible and the service life of the quartz crucible. At present, most of quartz marmite cleaning is manual cleaning, the labor cost is too high, the efficiency is too low, the impurity removal is not clean, and the quality of the manufactured quartz crucible can not be ensured.
Accordingly, there is a need for improvements in the art that overcome the deficiencies in the prior art.
[ Utility model ] content
The application aims to provide an automatic crucible cleaning machine which is efficient and can clean impurities in a quartz crucible.
The purpose of the application is realized by the following technical scheme: an automatic crucible cleaning machine comprises a support, a decontamination acidification device, a cleaning device, a dehydration device and a crucible moving device, wherein the decontamination acidification device, the cleaning device and the dehydration device are arranged in the support and are sequentially installed along the horizontal direction;
the crucible moving device moves along the guide rail, and the crucibles are sequentially placed into the decontamination acidification device, the cleaning device and the dehydration device for washing treatment.
Further, the decontamination acidification device comprises a pre-washing chamber, an acidification chamber and a first rinsing chamber which are connected in sequence.
Further, a first conveying mechanism is arranged in the first rinsing chamber and used for moving the crucible from one end to the other end in the rinsing tank.
Further, cleaning device is including adjacent ultrasonic chamber and the high pressure spray room of setting, the ultrasonic chamber is close to decontamination acidizing device sets up.
Further, the water pressure in the high-pressure spraying chamber is set to be 10 MPa.
Further, the cleaning device also comprises a second rinsing chamber arranged between the dehydration device and the high-pressure spray chamber.
Furthermore, a second conveying mechanism used for moving the crucible in the second rinsing chamber is arranged in the second rinsing chamber.
Further, the dewatering device comprises a vacuum dryer.
Further, the crucible moving device is arranged as a mechanical arm, and the mechanical arm grabs the crucible and then drives the crucible to move.
Further, the number of the mechanical arms is three.
Compared with the prior art, the method has the following beneficial effects: the device leads the crucible to be subjected to acidification reaction for removing impurities in the decontamination acidification device, treatment for removing surface residues in the cleaning device and dehydration process of the dehydration device in sequence, thereby improving the cleaning effect of the crucible; the crucible moving device is used for moving the crucible, so that pollution caused in the crucible carrying process is avoided, the crucible quality is guaranteed, the labor intensity of workers is reduced, and the crucible cleaning efficiency is improved.
[ description of the drawings ]
Fig. 1 is a front view of the structure of the present application.
Fig. 2 is a top view of the structure of the present application.
Figure 3 is a side view of the structure of the present application.
[ detailed description ] embodiments
The technical solutions of the present application will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
In addition, the technical features mentioned in the different embodiments of the present application described below may be combined with each other as long as they do not conflict with each other. In the description of the present application, the axis direction coincides with the height direction.
Referring to fig. 1 to 3, the present application provides an automatic crucible cleaning machine 100, which can be used for cleaning a crucible to improve the purity of the crucible, wherein the crucible in this embodiment can be a quartz crucible, and in other embodiments, can also be a kind of crucible. The automatic crucible cleaning machine 100 comprises a support 1, a decontamination acidification device, a cleaning device and a dehydration device 8 which are arranged in the support 1 and are sequentially installed along the horizontal direction, and a crucible moving device 9 which is connected on the support 1 and is used for moving a crucible. The bracket 1 is used for sequentially connecting the decontamination acidification device, the cleaning device and the dehydration device 8, the guide rail 11 is arranged on the bracket 1, the crucible moving device 9 moves along the guide rail 11, the crucible is sequentially placed into the decontamination acidification device, the cleaning device and the dehydration device 8 for treatment, and the crucible is used for converting sinter impurities adhered to the surface of the crucible into compounds capable of dissolving in water through the decontamination acidification device so as to improve the purity of the crucible; deeply cleaning the crucible through a cleaning mechanism so as to further remove residues firmly adhered to the surface of the crucible; the crucible after cleaning is dehydrated through the dehydration mechanism, so that water stains on the crucible are prevented from being automatically air-dried to leave traces, and the crucible cleaned by the automatic crucible cleaning machine 100 can be directly used, so that the crucible cleaning machine is fast and convenient.
Concretely, decontamination acidizing device is including the room 2 that washes in advance that connects gradually, acidizing chamber 3 and first washing room 4, the crucible is put into room 2 that washes in advance through 9 back-offs of crucible mobile device and is washed the residue that the surface was easily cleared up, wherein, 2 tops in the room of washing in advance are provided with the opening, the crucible passes through crucible mobile device 9 and gets into 2 inner chambers in the room of washing in advance from the top, 2 tops in the room of washing in advance are provided with the first cylinder door 21 that can open and shut automatically, first cylinder door 21 gets into and closes in the crucible after 2 in the room of washing in advance, avoid the washing water spill. The inside of the prewashing chamber 2 is provided with a positioning frame for placing a crucible, the center of the positioning frame is provided with a spray nozzle for cleaning the inner wall of the crucible, so as to wash the inner wall of the crucible, a spray pipe is arranged on the side wall of the prewashing chamber 2, the spray pipe is arranged in an L shape and is positioned on the side wall and the upper wall of the crucible, a plurality of spray holes are arranged on the spray pipe so as to wash the outer wall of the crucible, the spray pipe and the spray nozzle are connected with a water pump, and the water pump can be arranged in the prewashing chamber 2 or outside the prewashing chamber 2 without specific limitation. In order to comprehensively clean the crucible, the positioning frame can rotate along the axis of the positioning frame to drive the crucible to rotate, so that the spraying pipe and the spraying nozzle can comprehensively clean the crucible, and the cleaning effect of the crucible is improved. To ensure the pre-washing effect of the pre-washing chamber 2, the pre-washing time was set to 30 s. After the prewashing is finished, the crucible moving device 9 transfers the crucible from the prewashing chamber 2 to the acidification chamber 3, and the acidification chamber 3 is controlled to be opened and closed through a second cylinder door 31 arranged at the top. The acidification chamber 3 is provided therein with a strong acid, such as nitric acid, hydrochloric acid, sulfuric acid, etc., which is not specifically limited herein. In this embodiment, in order to ensure the chemical reaction effect, the soaking time of the crucible is set to 5 minutes, so that the sinter impurities and the strong acid react sufficiently. Because the soaking time is long, in order to improve the efficiency of the automatic crucible cleaning machine 100, the acidification chamber 3 is provided with two stations, so that the two crucibles can be soaked. After the acidification is finished, the crucible moving device 9 grabs the crucible from the acidification chamber 3, and moves the crucible to the inner cavity of the first rinsing chamber 4 along the top of the first rinsing chamber 4 for rinsing, and the top of the first rinsing chamber 4 can be provided with a cylinder door or is not provided with a cylinder door, so that specific limitation is not made herein. After the crucible enters the first rinsing chamber 4, the crucible is rinsed by the positioning frame, the spraying nozzle, the spraying pipe and the water pump in the pre-rinsing process, so as to rinse the acid solution and residues on the surface of the crucible, which are easy to clean.
The cleaning device comprises an ultrasonic chamber 5 and a high-pressure spray chamber 6 which are adjacently arranged, wherein the ultrasonic chamber 5 is arranged close to the decontamination acidification device. Specifically, the ultrasonic chamber 5 is arranged close to the first rinsing chamber 4, after the crucible is cleaned in the first rinsing chamber 4, the crucible is moved from the first rinsing chamber 4 to the ultrasonic chamber 5 through the crucible moving device 9 for ultrasonic treatment, and residues on the crucible are vibrated to be loose or directly vibrated down by the ultrasonic mechanism arranged in the ultrasonic chamber 5. The high-pressure spray room 6 is arranged between the ultrasonic room 5 and the dewatering device 8, the top of the high-pressure spray room 6 is provided with an opening, the opening is provided with a third air cylinder door 61 for controlling the opening to be closed, a positioning frame which is the same as that in the prewashing room 2 is arranged in the high-pressure spray room 6, the spray nozzle and the spray pipe clean the crucible, the spray nozzle and the spray pipe in the high-pressure spray room 6 are connected with a high-pressure water pump, so that the water pressure sprayed out along the spray nozzle and the spray pipe is high-pressure water flow, and the cleaning force of the spray nozzle and the spray pipe in the high-pressure spray room is improved. In this embodiment, the high pressure water pump provides 10MPa of water pressure for the spray nozzle and the spray pipe disposed inside the high pressure spray tank. In order to further improve the cleaning effect and ensure that the surface of the crucible is kept at a certain temperature before entering the dehydration device 8, so that no water mark is generated on the surface of the crucible after dehydration, the high-pressure spray chamber 6 is cleaned by hot water, and the water temperature is preferably controlled between 45 and 70 degrees.
In this embodiment, the crucible cleaning force is further improved, the cleaning device further includes a second rinsing chamber 7 disposed between the dehydration device 8 and the high-pressure shower chamber 6, and is used for further cleaning the crucible coming out from the high-pressure shower chamber 6, the equipment in the second rinsing chamber 7 is the same as the equipment in the first rinsing chamber 4, and the water temperature of the water in the second rinsing chamber 7 is 45 ° to 70 °.
In this embodiment, for guaranteeing dewatering device 8's dehydration effect and energy can be saved, set up dewatering device 8 into vacuum drying machine 8, the crucible is along establishing the 8 inner chambers of opening entering vacuum drying machine at vacuum drying machine 8 top, the opening opens and shuts through fourth cylinder door 81 control, vacuum drying machine 8 makes its inner chamber be vacuum or be approximate to vacuum through the air of taking out from the inner chamber, thereby it reduces the boiling point of water to be atmospheric pressure, make the water that depends on the crucible only need heat to lower temperature can make the water boiling evaporation, practice thrift 8 heat time of dewatering device, the loss of saving the electric quantity, also accelerate the stoving dehydration time of crucible simultaneously. In order to further improve the efficiency of the automatic crucible cleaning machine 100, in the embodiment, the vacuum drying machine 8 is provided with two stations, and two crucibles can be simultaneously dewatered.
The crucible moving device 9 is set as a mechanical arm 9, the mechanical arm 9 drives the crucible to move after grabbing the crucible, so as to put the crucible in different positions for processing, in this embodiment, in order to improve the operation efficiency of the automatic crucible cleaning machine 100, three mechanical arms 9 are provided, namely a first mechanical arm 91, a second mechanical arm 92 and a third mechanical arm 93, wherein the unwashed crucible is placed on a placing table 12 arranged on one side of the pre-washing chamber 2, which is far away from the acidification chamber 3, and the crucible is sequentially put into the pre-washing chamber 2, the acidification chamber 3 and the first rinsing chamber 4 for processing after being grabbed by the first mechanical arm 91 from the placing table 12; the second mechanical arm 92 picks up the crucible from the first rinsing chamber 4 and sequentially puts the crucible into the ultrasonic chamber 5, the high-pressure spray chamber 6 and the second rinsing chamber 7 for processing; the third robot 93 picks up the crucible from the second rinsing chamber 7 and puts it into the vacuum dryer 8 for processing.
In order to simplify the control flow of the mechanical arms 9 and prevent interference caused by movement between different mechanical arms 9, in this embodiment, the first rinsing chamber 4 and the second rinsing chamber 7 are both provided with two stations which are communicated with each other, at this time, a first transmission mechanism is arranged in the first rinsing chamber 4, the first mechanical arm 91 places the crucible on the station of the first rinsing chamber 4 close to the acidification chamber 3 for cleaning, and after cleaning is finished, the first transmission mechanism moves the crucible to the station of the first rinsing chamber 4 close to the ultrasonic chamber 5 to wait for grabbing of the second mechanical arm 92; set up second transmission device in the second rinsing room 7, second arm 92 puts into the crucible and washs on the station that second rinsing room 7 is close to high pressure spray room 6, and after wasing, second transmission device removes the crucible to the station that second rinsing room 7 is close to vacuum drying machine 8 on, waits for snatching of third arm 93. By arranging the first rinsing chamber 4 and the second rinsing chamber 7 in two stations, the positions of the different mechanical arms 9 moving along the guide rail 11 are not repeated and interfered with each other.
In conclusion, the crucible is treated by arranging different chambers, so that the crucible cleaning effect is improved; the crucible is moved by arranging the mechanical arms 9, so that the crucible moving process is automated, the production efficiency is obviously improved, the production cost is reduced, the labor intensity of workers is reduced, and pollution caused in the crucible carrying process is avoided.
The above is only one specific embodiment of the present application, and any other modifications based on the concept of the present application are considered as the protection scope of the present application.
Claims (10)
1. An automatic crucible cleaning machine is characterized by comprising a support, a decontamination acidification device, a cleaning device, a dehydration device and a crucible moving device, wherein the decontamination acidification device, the cleaning device and the dehydration device are arranged in the support and are sequentially installed along the horizontal direction;
the crucible moving device moves along the guide rail, and the crucibles are sequentially placed into the decontamination acidification device, the cleaning device and the dehydration device for washing treatment.
2. The automatic crucible cleaning machine according to claim 1, wherein: the decontamination acidification device comprises a pre-washing chamber, an acidification chamber and a first rinsing chamber which are sequentially connected.
3. The automatic crucible cleaning machine according to claim 2, wherein: and a first transmission mechanism is arranged in the first rinsing chamber.
4. The automatic crucible cleaning machine according to claim 1, wherein: the cleaning device comprises an ultrasonic chamber and a high-pressure spray chamber which are adjacently arranged, and the ultrasonic chamber is close to the decontamination acidification device.
5. The automatic crucible cleaning machine according to claim 4, wherein: the water pressure in the high-pressure spraying chamber is set to be 10 MPa.
6. The automatic crucible cleaning machine according to claim 4, wherein: the cleaning device also comprises a second rinsing chamber arranged between the dehydration device and the high-pressure spray chamber.
7. The automatic crucible cleaning machine according to claim 6, wherein: and a second conveying mechanism used for moving the crucible in the second rinsing chamber is arranged in the second rinsing chamber.
8. The automatic crucible cleaning machine according to claim 1, wherein: the dewatering device comprises a vacuum drier.
9. The automatic crucible cleaning machine according to claim 1, wherein: the crucible moving device is arranged as a mechanical arm, and the mechanical arm grabs the crucible and then drives the crucible to move.
10. The automatic crucible cleaning machine according to claim 9, wherein: the mechanical arm is provided with three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120395037.4U CN214767421U (en) | 2021-02-23 | 2021-02-23 | Automatic crucible cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120395037.4U CN214767421U (en) | 2021-02-23 | 2021-02-23 | Automatic crucible cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214767421U true CN214767421U (en) | 2021-11-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120395037.4U Active CN214767421U (en) | 2021-02-23 | 2021-02-23 | Automatic crucible cleaning machine |
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| CN (1) | CN214767421U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114349358A (en) * | 2021-12-24 | 2022-04-15 | 连云港福典石英科技有限公司 | Surface treatment process and processing equipment for quartz crucible |
| CN115193854A (en) * | 2022-08-12 | 2022-10-18 | 江山市检验检测研究院 | Experimental glass psammitolite crucible cleaning equipment of dry powder extinguishing agent |
| CN115780439A (en) * | 2022-12-12 | 2023-03-14 | 江阴泓潮科技有限公司 | Automatic cleaning system and cleaning method for quartz crucible |
-
2021
- 2021-02-23 CN CN202120395037.4U patent/CN214767421U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114349358A (en) * | 2021-12-24 | 2022-04-15 | 连云港福典石英科技有限公司 | Surface treatment process and processing equipment for quartz crucible |
| CN115193854A (en) * | 2022-08-12 | 2022-10-18 | 江山市检验检测研究院 | Experimental glass psammitolite crucible cleaning equipment of dry powder extinguishing agent |
| CN115193854B (en) * | 2022-08-12 | 2024-02-23 | 江山市检验检测研究院 | Glass sand core crucible cleaning equipment for dry powder extinguishing agent test |
| CN115780439A (en) * | 2022-12-12 | 2023-03-14 | 江阴泓潮科技有限公司 | Automatic cleaning system and cleaning method for quartz crucible |
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