CN214748069U

CN214748069U - Automatic detection device for semiconductor processing process

Info

Publication number: CN214748069U
Application number: CN202023290737.1U
Authority: CN
Inventors: 周林
Original assignee: Zhangjiagang Tisi Technology Co ltd
Current assignee: Shanghai Zhen'an Information Technology Co ltd
Priority date: 2020-12-31
Filing date: 2020-12-31
Publication date: 2021-11-16
Anticipated expiration: 2030-12-31

Abstract

The utility model discloses an automatic detection device for semiconductor processing process, which comprises a shell, wherein a first fixed block is fixed on the front surface of the shell, rotating shafts are fixed on the surfaces of the two sides of the first fixed block, a second fixed block is sleeved on a bearing at the tail end of the rotating shaft, a transparent dustproof cover is fixed on one side surface of the second fixed block, a first connecting block is fixed on one side surface of the transparent dustproof cover, and a clamping block is fixed on the rear surface of the first connecting block; a second connecting block corresponding to the button is fixed on the front surface of the shell, a fixing groove is formed in the front surface of the second connecting block, and elastic pieces are fixed inside two sides of the fixing groove; the clamping block is positioned in the fixing groove, and one side surface of the elastic sheet is tightly attached to one side surface of the clamping block; through the transparent shield who sets up, can be convenient for play dustproof, the effect of protection to the display screen on the casing, ensured the display effect of display screen to detecting data, improved the detection effect of device.

Description

Automatic detection device for semiconductor processing process

Technical Field

The utility model relates to a detection device technical field especially relates to an automatic detection device is used to semiconductor processing process.

Background

The species may exist in a wide variety of forms, solid, liquid, gas, plasma, and the like. We generally refer to poorly conductive materials such as coal, intraocular lenses, amber, ceramics, etc. as insulators; an automated inspection device is required to be used in the process of processing the workpiece.

However, the existing automatic detection device still has some disadvantages, when the device is used, certain dust falls on the surface of the display screen, and after the device is used for a long time, a worker can have the problems of unclear and fuzzy data observation, so that the automatic detection device for the semiconductor processing process is provided.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model provides an automatic detection device for semiconductor processing process through the dustproof mechanism who sets up, can be convenient for play dustproof, the effect of protection to the display screen on the casing, has ensured the display effect of display screen to the detection data then to the detection effect of device has been improved.

In order to solve the technical problem, the utility model provides a following technical scheme: an automatic detection device for a semiconductor processing process comprises a shell, wherein a first fixed block is fixed on the front surface of the shell, rotating shafts are fixed on the surfaces of two sides of the first fixed block, a second fixed block is sleeved on a bearing at the tail end of each rotating shaft, a transparent dustproof cover is fixed on the surface of one side of the second fixed block, a first connecting block is fixed on the surface of one side of the transparent dustproof cover, and a clamping block is fixed on the rear surface of the first connecting block; a second connecting block corresponding to the button is fixed on the front surface of the shell, a fixing groove is formed in the front surface of the second connecting block, and elastic pieces are fixed inside two sides of the fixing groove; the clamping block is positioned in the fixing groove, and one side surface of the elastic sheet is tightly attached to one side surface of the clamping block.

As a preferred technical proposal of the utility model, a button is movably penetrated on the front surface of the shell; a fixed frame is fixed in a cavity of the shell, a sliding column penetrates through the outer wall of the fixed frame, extends to an inner cavity of the fixed frame, and is fixed with a rubber contact at the tail end; a switch corresponding to the rubber contact is fixed in the inner cavity of the fixed frame; and a reset spring is fixed at the joint of the sliding column and the fixed frame and is annularly arranged on the outer wall of the sliding column.

As a preferred technical scheme of the utility model, the heat dissipation window has all been seted up on the both sides surface of casing, the inside of heat dissipation window is passed through the bolt fastening and is had the dust screen.

As an optimal technical scheme of the utility model, the external fixation of transparent shield has the anticollision strip, the anticollision strip is "S" form equidistance and distributes.

As an optimized technical scheme of the utility model, the both sides surface of casing all is fixed with the antislip strip, the antislip strip is "W" form equidistance and distributes.

As a preferred technical scheme of the utility model, the spout has all been seted up on the both sides surface of traveller, the inside slider that all is fixed with the spout cunning in both sides of fixed frame, slider and spout grafting adaptation.

As an optimized technical scheme of the utility model, one side fixed surface of shell fragment has soft pad, one side surface of soft pad is provided with the antislip strip.

Compared with the prior art, the utility model discloses the beneficial effect that can reach is:

1. through the transparent dustproof cover, the problem that certain dust falls on the surface of the display screen when the device is used for a long time, so that a worker can observe data clearly and fuzzily is solved, the dustproof and protective effects on the display screen on the shell can be conveniently achieved, the display effect of the display screen on the detected data is further guaranteed, and the detection effect of the device is improved;

2. through the rubber contact who sets up, effectively avoided when the device uses the back for a long time, the button probably appears not in place resetting when reseing, appears the problem of card pause phenomenon even for the button can be fast, accurate reseing, ensured then the control action of button to the device, also prolonged the life of button simultaneously.

Drawings

Fig. 1 is a schematic structural view of the present invention;

fig. 2 is a schematic top view of the housing and the transparent dust cover in fig. 1 according to the present invention;

fig. 3 is an enlarged view of a in fig. 2 according to the present invention;

fig. 4 is a schematic side view of the button and the housing of fig. 1 according to the present invention;

fig. 5 is a schematic top view of the strut of fig. 4 according to the present invention;

wherein: 1. a housing; 2. a first fixed block; 3. a rotating shaft; 4. a second fixed block; 5. a transparent dust cover; 6. a first connection block; 7. a button; 8. a second connecting block; 9. a clamping block; 10. fixing grooves; 11. a spring plate; 12. a fixing frame; 13. a switch; 14. a traveler; 15. a return spring; 16. a rubber contact; 17. a slider; 18. a chute.

Detailed Description

In order to make the technical means, the creation features, the achievement purposes and the functions of the invention easy to understand, the invention is further explained below with reference to the specific embodiments, but the following embodiments are only the preferred embodiments of the invention, not all. Based on the embodiments in the implementation, other embodiments obtained by those skilled in the art without any creative work belong to the protection scope of the present invention. The experimental methods in the following examples are conventional methods unless otherwise specified, and materials, reagents and the like used in the following examples are commercially available unless otherwise specified.

Example (b):

as shown in fig. 1-3, an automatic detection device for a semiconductor processing process includes a housing 1, a first fixed block 2 is fixed on a front surface of the housing 1, a rotating shaft 3 is fixed on both side surfaces of the first fixed block 2, a second fixed block 4 is sleeved on a bearing at the tail end of the rotating shaft 3, a transparent dust cover 5 is fixed on one side surface of the second fixed block 4, a first connection block 6 is fixed on one side surface of the transparent dust cover 5, and a fixture block 9 is fixed on a rear surface of the first connection block 6; a second connecting block 8 corresponding to the button 7 is fixed on the front surface of the shell 1, a fixing groove 10 is formed in the front surface of the second connecting block 8, and elastic sheets 11 are fixed inside two sides of the fixing groove 10; the fixture block 9 is positioned in the fixing groove 10, and one side surface of the elastic sheet 11 is tightly attached to one side surface of the fixture block 9;

dustproof at the display screen to on the device, when protecting, at first with transparent shield 5 through the rotation between second fixed block 4 and pivot 3, can cover the front surface of closing at casing 1, then at this moment fixture block 9 will block in the inside of fixed slot 10, then two sets of shell fragments 11 of rethread fixed slot 10 inside, elastic force through its self tightly with fixture block 9 block in the inside of fixed slot 10, make the lid that transparent shield 5 can fasten close the front side at casing 1, then realized can be convenient for play dustproof to the display screen on casing 1, the effect of protection, then ensured the display screen to the display effect of detection data, thereby the detection effect of device has been improved.

In other embodiments, the present embodiment discloses the installation position of the reset mechanism, as shown in fig. 1 and 4, a button 7 is movably penetrated through the front surface of the housing 1; a fixed frame 12 is fixed in the cavity of the shell 1, a sliding column 14 penetrates through the outer wall of the fixed frame 12, the sliding column 14 extends to the inner cavity of the fixed frame 12, and a rubber contact 16 is fixed at the tail end of the sliding column 14; a switch 13 corresponding to the rubber contact 16 is fixed in the inner cavity of the fixed frame 12; a return spring 15 is fixed at the joint of the sliding column 14 and the fixed frame 12, and the return spring 15 is arranged around the outer wall of the sliding column 14;

when resetting button 7, at first through inwards pressing button 7, then drive traveller 14 through the slider 17 can be in the inside removal of position around fixed frame 12's inside in the inside of spout 18, reset spring 15 at this moment will be in compression state, can make rubber contact 16 touch switch 13, then can wholly carry out operation control to the device, then after loosening button 7 again, rubber contact 16 at this moment will be through the effect of reset spring 15 resilience, leave the surface of switch 13, and then can rebound button 7 to initial position, cause and to realize fast, accurate resetting, then ensured the control effect of button 7 to the device, the life of button 7 has also been prolonged simultaneously.

In other embodiments, the present embodiment discloses the installation positions of the heat dissipation window and the dust screen, as shown in fig. 1, the heat dissipation window is disposed on both side surfaces of the housing 1, and the dust screen is fixed inside the heat dissipation window through a bolt;

the part inside the shell 1 can be cooled, and normal work of the device is guaranteed.

In other embodiments, the embodiment discloses the installation position of the bumper strips, as shown in fig. 1, the bumper strips are fixed on the outer surface of the transparent dustproof cover 5 and are distributed in an S-shaped equidistant manner;

so that damage to the transparent dust cap 5 by external factors can be reduced, and the service life of the transparent dust cap 5 is prolonged.

In other embodiments, the embodiment discloses the installation position of the anti-skid strips, as shown in fig. 1, the anti-skid strips are fixed on the two side surfaces of the shell 1, and are distributed in a W shape at equal intervals;

so that the working personnel has certain antiskid effect when carrying or using the device.

In other embodiments, the present embodiment discloses the mounting positions of the sliding blocks 17 and the sliding grooves 18, as shown in fig. 3 and 4, the sliding grooves 18 are respectively formed on the two side surfaces of the sliding column 14, the sliding blocks 17 sliding with the sliding grooves 18 are respectively fixed inside the two sides of the fixed frame 12, and the sliding blocks 17 are inserted into the sliding grooves 18;

the sliding column 14 can slide in a limiting way through the sliding block 17 and the sliding groove 18, the switch 13 arranged in the fixed frame 12 can be pressed and loosened, and then the reset condition when the button 7 is pressed is ensured

In other embodiments, the present embodiment discloses the installation position of the soft pad, as shown in fig. 3, the soft pad is fixed on one side surface of the elastic sheet 11, and the anti-slip strip is arranged on one side surface of the soft pad;

the clamping of the elastic sheet 11 to the clamping block 9 can be increased, so that the clamping is more stable.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. An automatic detection device for semiconductor processing process, includes casing (1), its characterized in that: a first fixing block (2) is fixed on the front surface of the shell (1), a rotating shaft (3) is fixed on the surfaces of two sides of the first fixing block (2), a second fixing block (4) is sleeved on a bearing at the tail end of the rotating shaft (3), a transparent dustproof cover (5) is fixed on the surface of one side of the second fixing block (4), a first connecting block (6) is fixed on the surface of one side of the transparent dustproof cover (5), and a clamping block (9) is fixed on the rear surface of the first connecting block (6); a second connecting block (8) corresponding to the button (7) is fixed on the front surface of the shell (1), a fixing groove (10) is formed in the front surface of the second connecting block (8), and elastic sheets (11) are fixed inside two sides of the fixing groove (10); the clamping block (9) is positioned inside the fixing groove (10), and one side surface of the elastic sheet (11) is tightly attached to one side surface of the clamping block (9).

2. The automated inspection apparatus of claim 1, wherein: a button (7) is movably penetrated through the front surface of the shell (1); a fixed frame (12) is fixed in a cavity of the shell (1), a sliding column (14) penetrates through the outer wall of the fixed frame (12), the sliding column (14) extends to an inner cavity of the fixed frame (12), and a rubber contact (16) is fixed at the tail end of the sliding column; a switch (13) corresponding to the rubber contact (16) is fixed in the inner cavity of the fixed frame (12); a return spring (15) is fixed at the joint of the sliding column (14) and the fixed frame (12), and the return spring (15) is arranged on the outer wall of the sliding column (14) in a surrounding mode.

3. The automated inspection apparatus of claim 1, wherein: the heat dissipation window is formed in the surfaces of the two sides of the shell (1), and the dust screen is fixed inside the heat dissipation window through bolts.

4. The automated inspection apparatus of claim 1, wherein: the outer fixed surface of transparent shield (5) has the anticollision strip, the anticollision strip is "S" form equidistance and distributes.

5. The automated inspection apparatus of claim 1, wherein: the anti-skidding strips are fixed on the surfaces of the two sides of the shell (1) and distributed in W-shaped equidistance.

6. The automated inspection apparatus for semiconductor processing according to claim 2, wherein: the sliding column is characterized in that sliding grooves (18) are formed in the surfaces of the two sides of the sliding column (14), sliding blocks (17) which are in sliding fit with the sliding grooves (18) are fixed inside the two sides of the fixing frame (12), and the sliding blocks (17) are in plug-in fit with the sliding grooves (18).

7. The automated inspection apparatus of claim 1, wherein: a soft pad is fixed on the surface of one side of the elastic sheet (11), and an anti-slip strip is arranged on the surface of one side of the soft pad.