CN214149183U - Light source device for wafer interference inspection - Google Patents
Light source device for wafer interference inspection Download PDFInfo
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- CN214149183U CN214149183U CN202120053280.8U CN202120053280U CN214149183U CN 214149183 U CN214149183 U CN 214149183U CN 202120053280 U CN202120053280 U CN 202120053280U CN 214149183 U CN214149183 U CN 214149183U
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- light source
- cover body
- source device
- sliding pin
- wafer
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Abstract
The utility model discloses a light source device for inspection is interfered to wafer, including pedestal and lamp shade subassembly, the lamp shade subassembly is including the cover body, the cover body articulates through its one side the higher authority of pedestal, bracing piece subassembly, the bracing piece subassembly location is in the cover body with between the pedestal, low pressure sodium lamp sets up the cover is internal, the filter glass board sets up the opening part of the cover body is articulated through the cover body and pedestal to arrange the low pressure sodium lamp in the cover internally, the staff can change the angle of shining of sodium lamp to the wafer product through the angle of the manual change cover body, and slip bayonet filter glass board can be taken off fast and install, and can place a plurality of wafer products on the pedestal, has improved the detection efficiency to the wafer product greatly.
Description
Technical Field
The utility model relates to a wafer detects technical field, specifically is a light source device for inspection is interfered to wafer.
Background
Optical wafers are produced and manufactured by quality detection, generally, the optical wafers are mainly subjected to light transmittance and surface flatness detection, and for the detection of the surface flatness of the wafers, if the surface of the wafers is easily scratched by using mechanical detection, the surface of the wafers is generally detected by using an optical principle;
for example, chinese utility model publication No. CN203562127U discloses a double prism interference experiment demonstration apparatus suitable for bright room environment, wherein a sodium lamp is used as a light source, the light source is filtered by using a single slit, then the double prism is used for interference, and the technical characteristics of observing the interfered light are provided, which provides an experimental principle, but in the field of wafer detection, if the wafer needs to be detected, the double prism needs to be changed into a wafer sample to be detected, and it is very troublesome to change another wafer after one wafer is detected;
in practical production application, for detecting the flatness of the surface of a wafer, a light source is required to be obliquely irradiated on the wafer, the flatness of the surface of the wafer is detected by utilizing reflection and refraction, the light source irradiation angles are different for different products, most of the traditional light interference experiments do not have a mechanism for changing the light source irradiation angles, the light source irradiation angles are convenient to adjust in order to improve the production efficiency, and the detection quantity of the wafer products is required to be improved as much as possible in each detection;
therefore, in order to combine the theory with the production practice, it is very necessary to design a light source device for wafer interference inspection, which inspects the quality of an optical surface by using the interference phenomenon of light.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a light source device for inspection is interfered to wafer, can be quick detect the wafer upper and lower surface.
In order to solve the technical problem, the utility model discloses a realize through following technical scheme: a light source device for wafer interference inspection comprises a base body and a lampshade assembly, wherein the lampshade assembly comprises a cover body, the cover body is hinged to the upper surface of the base body through one side of the cover body, a support rod assembly is positioned between the cover body and the base body, and a low-pressure sodium lamp is arranged in the cover body; the filter glass plate is arranged at the opening of the cover body, and the sliding insertion type filter glass plate can be quickly taken down and installed and is convenient to take down and clean, wherein the support rod assembly comprises a support rod and a support frame; one end of the supporting rod is pivoted on the supporting frame; the bracing piece is equipped with a long spout for slide along a sliding pin be equipped with the locking piece on the sliding pin, through placing the low pressure sodium lamp at the internal of cover, make operating personnel only need through the angle that changes the cover body, just can change the angle of shining of low pressure sodium lamp, convenient and fast.
Preferably, the support frame is fixed on the base, the sliding pin is arranged on the cover body, and the support frame is fixed on the base, so that the support rod is more stable, and the support frame is more convenient to mount due to the larger surface of the base.
Preferably, the support frame is fixed on the cover body, the sliding pin is arranged on the base body, the support frame is fixed on the cover body, when the device is not used, the cover body covers the base body, and the support rod can be accommodated on one side of the base body.
Preferably, a cavity is arranged in the base, one side of the cavity is designed to be an opening, a drawer is arranged in the cavity in a sliding mode, the drawer is used for installing a transformer and can slide out of and be pushed into the cavity, the functionality of the base is improved, and the design of the drawer can be used for conveniently taking out and pushing the stored objects in the cavity, and the drawer is flexible and convenient.
Preferably, the drawer includes riser and diaphragm, offer the pilot lamp hole that is used for installing the power indicator on the riser, still be equipped with the switch hole that is used for installing the switch on the riser, the staff can judge whether circular telegram of equipment through the pilot lamp, cuts off the power supply earlier when getting put wafer product, has guaranteed operating personnel's safety, when not using this light source device, also can judge whether closed the power through observing the pilot lamp, practices thrift the unnecessary energy.
Preferably, the bottom surface of the transverse plate is provided with a guide rail, and the inner wall of the cavity is rotatably provided with a roller capable of cooperating with the guide rail.
Preferably, a first wire hole is formed in the base body, a second wire hole is formed in the cover body, a wire on the transformer passes through the first wire hole and the second wire hole and is electrically connected with the low-voltage sodium lamp, and the wire hole enables the wire to connect the transformer and the low-voltage sodium lamp together.
Preferably, the locking piece comprises a nut screwed on the sliding pin through threads, the supporting rod can be fixed with the cover body and the base body through the installation mode that the nut is screwed on the sliding pin, and the screwing mode of the nut is not easy to loose.
Preferably, the locking piece includes that the one set establishes gasket on the sliding pin and pin joint are in on the sliding pin and the eccentric wheel of location in the gasket outer end, stir the eccentric wheel through the manual, can make the eccentric wheel extrude the gasket to make sliding pin and bracing piece quick fastening, and the stirring of eccentric wheel, compare in the screw thread screw more convenient and fast.
The utility model has the advantages that: articulated through the cover body and pedestal, and it is internal to arrange the cover with the low pressure sodium lamp in, the staff can change the angle of shining of sodium lamp to the wafer product through the angle of the manual change cover body, slip bayonet filter glass board can take off fast and install, it is convenient follow-up to take off the washing to filter glass board, and the existence of drawer, can make the transformer slide more easily and pull out, overhaul it, and the pilot lamp can be for this light source device energy saving unnecessary, the eccentric wheel can be fixed with the bracing piece fast simultaneously, it is certain angle fixed to make between the cover body and the pedestal, and is convenient and fast, and can place a plurality of wafer products on the pedestal, the detection efficiency to the wafer product is greatly improved
Drawings
Fig. 1 is an external view of a light source device for wafer interference inspection according to the present invention;
FIG. 2 is a side view of a light source apparatus for wafer interference inspection in accordance with the present invention;
FIG. 3 is a rear side view of a light source apparatus for wafer interference inspection in accordance with the present invention;
FIG. 4 is a right side view of a light source device for wafer interference inspection in accordance with the present invention;
FIG. 5 is a schematic view of a second embodiment of a drawer according to the present invention;
FIG. 6 is a schematic view of a roller of the present invention;
fig. 7 is a schematic view of a nut according to the present invention;
FIG. 8 is a schematic view of the nut and slide pin assembly of the present invention;
FIG. 9 is a schematic view of the engagement between the knob and the support rod;
fig. 10 is a schematic view of a knob according to the present invention;
5, a lampshade assembly; 6. a support rod assembly; 7. a low pressure sodium lamp; 8. a locking member; 9. a nut; 10. a base body; 11. a cover body; 12. a support bar; 13. a slide pin; 14. a light-filtering glass plate; 15. a cavity; 17. a long chute; 18. a second wire hole; 19. folding; 20. a first wire hole; 23. a support frame; 30. a drawer; 31. an indicator light hole; 32. a vertical plate; 33. a switch hole; 34. a transverse plate; 40. a guide rail; 41. a roller; 71. an eccentric wheel; 72. and (7) a gasket.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; may be mechanically coupled, may be electrically coupled or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
Referring to fig. 1, 2 and 3, the utility model discloses a light source device for wafer interference inspection's embodiment, including the pedestal 10 that is used for placing the experimental wafer and the lamp shade subassembly 5 that is used for depositing low pressure sodium lamp 7, the lamp shade subassembly 5 includes the cover body 11, and pedestal 10 is in the same place through folding paper 19 and cover body 11 articulated installation, and cover body 11 can swing to can cover on pedestal 10, the one side that cover body 11 is close to pedestal 10 is the open design, and cover body 11 is inside to be used for placing low pressure sodium lamp 7.
in the first embodiment of the support rod assembly 6, the support frame 23 is fixed on the surface of the seat body 10, the side surface of the cover body 11 is fixedly provided with a slide pin 13, the slide pin 13 is inserted into the long chute 17 and is matched with the size of the long chute 17, the support rod 12 supports the cover body 11 to change the angle of the cover body 11, and the slide pin 13 is provided with a locking piece 8;
in the second embodiment of the supporting rod assembly 6, the supporting frame 23 is fixed on the cover 11, the side surface of the base 10 is fixedly provided with a sliding pin 13, the sliding pin 13 is inserted into the long sliding groove 17 and is matched with the size of the long sliding groove 17, the supporting rod 12 supports the cover 11 to change the angle of the cover 11, and the sliding pin 13 is provided with a locking piece 8.
The locking member 8 has two embodiments, with reference to fig. 1, 7, 8, 9 and 10:
in the first embodiment of the locking member 8, a thread is provided on one end of the sliding pin 13, and after the operator selects an angle, the operator manually screws a nut 9 on the sliding pin 13 to fix the support rod 12 to the cover 11, thereby supporting the cover 11.
In a second embodiment of the locking member 8, the locking member 8 comprises a washer 72 mounted on the sliding pin 13 and an eccentric 71 pivoted to the sliding pin 13 and positioned at the outer end of the washer 72, the operator manually rotates the eccentric 71, and the eccentric 71 presses the washer 72 to press the washer 72 against the supporting rod 12.
Referring to fig. 1, 2 and 3, an opening of the cover 11 can be slidably provided with a filter glass plate 14, the filter glass plate 14 can be slidably taken out and also can be slidably inserted into the opening of the cover 11 to filter a light source emitted by the low-pressure sodium lamp 7 in the cover 11, so that the filtered light source can irradiate the wafer, operators can observe refraction and reflection effects of the surface of the wafer conveniently, and whether the surface of the wafer is smooth or not can be judged.
A cavity 15 is arranged in the seat body 10, the front side of the cavity 15 is designed to be an opening, a drawer 30 is arranged in the cavity 15 in a sliding mode, the transformer is arranged on the drawer 30, the drawer 30 can be manually slid out and pushed into the cavity 15, the drawer 30 can be manually pulled out when the transformer needs to be overhauled, and when the overhaul is finished, the drawer 30 is manually pushed into the cavity 15, so that the transformer is stored in the cavity 15.
There are two embodiments of the drawer 30, see fig. 4, 5 and 6;
the drawer 30 comprises a vertical plate 32 and a transverse plate 34, an indicator light hole 31 used for installing a power indicator light is formed in the vertical plate 32, an operator can observe whether a power supply is switched on or not through the indicator light, a switch hole 33 used for installing a switch is further formed in the vertical plate 32, the switch hole 33 is internally used for installing the switch, and the operator can control the low-pressure sodium lamp 7 to be turned on or turned off through starting or closing the switch.
In the second embodiment of the drawer 30, the drawer 30 comprises a vertical plate 32 and a horizontal plate 34, guide rails 40 are fixedly installed on both sides of the horizontal plate 34, rollers 41 capable of cooperating with the guide rails 40 are rotatably installed on the inner wall of the cavity 15, and when the drawer 30 is manually pulled out or pushed in, friction between the drawer 30 and the housing 10 is reduced due to the presence of the rollers 41, thereby facilitating the pushing in and pulling out of the drawer 30.
Referring to fig. 2 and 3, a first wire hole 20 is formed in the base 10, a second wire hole 18 is formed in the cover 11, and a wire on the transformer can pass through the first wire hole 20 and the second wire hole 18 and then be electrically connected with the low-pressure sodium lamp 7 to provide power for the low-pressure sodium lamp 7.
When the device is used, firstly, a worker places a wafer product on a plastic plate wrapped by black cotton cloth through tweezers wrapped by the cotton cloth, then the plastic plate is placed on the base body 10, then the worker manually adjusts the supporting rod 12 and the cover body 11 according to different products, the angle of the cover body 11 is changed to a required position, then the manual control switch is turned on, the low-pressure sodium lamp 7 is electrified, a light source of the low-pressure sodium lamp 7 is filtered by the filter glass plate 14 and then irradiates on the wafer product for refraction, an operator observes the wafer, and if the interference fringes show convex-concave parts, the unevenness of the optical surface of the wafer is proved, so that whether the wafer product is qualified is obtained.
The above description is only for the specific embodiment of the present invention, but the technical features of the present invention are not limited thereto, and any person skilled in the art can make changes or modifications within the scope of the present invention.
Claims (10)
1. A light source device for wafer interference inspection comprises a base body (10) and a lampshade assembly (5); the method is characterized in that: the lampshade assembly (5) comprises a cover body (11), and the cover body (11) is hinged to the upper surface of the seat body (10) through one side of the cover body;
a support rod assembly (6), the support rod assembly (6) being positioned between the cover (11) and the seat (10);
the low-pressure sodium lamp (7), the said low-pressure sodium lamp (7) is set up in the said cover body (11);
the filter glass plate (14), the filter glass plate (14) is set up in the opening of the said cover (11);
wherein the support rod assembly (6) comprises a support rod (12) and a support frame (23); one end of the supporting rod (12) is pivoted on the supporting frame (23); the support rod (12) is provided with a long sliding groove (17) used for sliding along a sliding pin (13), and a locking piece (8) is arranged on the sliding pin (13).
2. The light source device according to claim 1, wherein: the support frame (23) is fixed on the base body (10), and the sliding pin (13) is arranged on the cover body (11).
3. The light source device according to claim 1, wherein: the supporting frame (23) is fixed on the cover body (11), and the sliding pin (13) is arranged on the seat body (10).
4. The light source device according to claim 1, 2 or 3, wherein: a cavity (15) is arranged in the base body (10), one side of the cavity (15) is designed to be an opening, a drawer (30) is arranged in the cavity (15) in a sliding mode, the drawer (30) is used for installing a transformer, and the drawer (30) can slide out of and be pushed into the cavity (15).
5. The light source device according to claim 4, wherein: drawer (30) are including riser (32) and diaphragm (34), offer pilot lamp hole (31) that are used for installing the power indicator on riser (32), still be equipped with switch hole (33) that are used for installing the switch on riser (32).
6. The light source device according to claim 5, wherein: the bottom surface of the transverse plate (34) is provided with a guide rail (40), and the inner wall of the cavity (15) is rotatably provided with a roller (41) which can cooperate with the guide rail (40).
7. The light source device according to claim 1, 2 or 3, wherein: the base body (10) is provided with a first wire hole (20), the cover body (11) is provided with a second wire hole (18), and a wire on the transformer passes through the first wire hole (20) and the second wire hole (18) and is electrically connected with the low-voltage sodium lamp (7).
8. The light source device according to claim 1, 2 or 3, wherein: the locking element (8) comprises a nut (9) screwed onto the sliding pin (13).
9. The light source device according to claim 1, 2 or 3, wherein: the locking piece (8) comprises a gasket (72) sleeved on the sliding pin (13) and an eccentric wheel (71) pivoted on the sliding pin (13) and positioned at the outer end of the gasket (72).
10. The light source device according to claim 4, wherein: the locking piece (8) comprises a gasket (72) sleeved on the sliding pin (13) and an eccentric wheel (71) pivoted on the sliding pin (13) and positioned at the outer end of the gasket (72).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120053280.8U CN214149183U (en) | 2021-01-07 | 2021-01-07 | Light source device for wafer interference inspection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120053280.8U CN214149183U (en) | 2021-01-07 | 2021-01-07 | Light source device for wafer interference inspection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214149183U true CN214149183U (en) | 2021-09-07 |
Family
ID=77547033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120053280.8U Active CN214149183U (en) | 2021-01-07 | 2021-01-07 | Light source device for wafer interference inspection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214149183U (en) |
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2021
- 2021-01-07 CN CN202120053280.8U patent/CN214149183U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A light source device for wafer interference inspection Effective date of registration: 20220623 Granted publication date: 20210907 Pledgee: Bank of Jiaxing science and technology branch of Limited by Share Ltd. Pledgor: JIAXING HAISHENG ELECTRONICS Co.,Ltd. Registration number: Y2022980008697 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |