CN214060632U - Vacuum coating multistage adjustable gas distribution system - Google Patents

Abstract

The utility model relates to a solar vacuum tube processing equipment, especially an adjustable gas distribution system of vacuum coating multistage formula. The problem of long-distance supply instability of the gas distribution pipeline is solved. The gas distribution pipeline is provided with a plurality of gas outlet holes, the gas distribution pipeline is fixed together through a connecting sleeve after a plurality of positions in the middle of the gas distribution pipeline are cut off, and the gas distribution pipeline is divided into a plurality of sections of relatively closed areas; the gas supply device is provided with a plurality of gas distribution pipes in parallel, the middle gas distribution pipe is connected to the nearest gas distribution pipeline, and other gas distribution pipes extend forwards to be connected to the middle position of each gas distribution pipeline and are communicated with each other; each gas distributing pipe is provided with a precise needle valve. The segmentation air feed, air feed atmospheric pressure is more stable simultaneously, satisfies different technological requirements, and ductility is stronger, and old equipment reforms transform with low costs.

Description

Vacuum coating multistage adjustable gas distribution system

Technical Field

The utility model relates to a solar vacuum tube processing equipment, especially an adjustable gas distribution system of vacuum coating multistage formula.

Background

The common use of China for manufacturing vacuum heat collecting pipes is still the manufacturing technology of the multilayer aluminum-nitrogen/aluminum solar selective absorption coating. The basic principle of the technology is that a magnetron sputtering system of a single cylindrical aluminum target is arranged in a coating machine. Tens of glass tubes as inner tubes of heat collecting tubes are loaded in the film plating machine at one time, and the glass tubes revolve and rotate under the transmission of a planetary mechanism. The vertical cylindrical aluminum target is positioned at the center, an aluminum bottom layer is deposited in argon gas by non-reactive sputtering, and then nitrogen gas with controllable flow is injected to prepare a multilayer aluminum-nitrogen composite film material as an absorption layer.

At present, a gas distribution system adopts a mode of a single gas inlet pipe, gas enters from one end of the gas inlet pipe, and due to the fact that the pressure is gradually reduced when the gas flows out from the gas inlet end to the tail end, the gas flowing out from small holes is gradually reduced, uneven gas supply is formed, and the unevenness of sputtering coating is caused. Further showing that the product has color difference in appearance, particularly the color difference of the round head and the pipe orifice is obvious. The prior equipment comprises the following process flows: overhauling, first empty recovery, target clearing, color mixing, color inconsistency, door opening adjustment and air distribution system, second empty recovery (the same steps are repeated, no production state exists), two times of empty recovery time are wasted after door opening, 10 hours of empty recovery time needs to be wasted each time after adjustment, 2 times are wasted each month averagely, and 240 hours are wasted each line each year.

Disclosure of Invention

In order to overcome the above shortcoming of prior art, the utility model provides an reform transform old vacuum coating process pipeline, guarantee like this that every venthole atmospheric pressure on the pipeline is more even more stable, can realize the adjustable gas distribution system of vacuum coating multistage formula of segmentation air feed according to the actual production demand moreover.

The utility model provides a technical scheme that its technical problem adopted is: a vacuum coating multi-section adjustable gas distribution system comprises a gas distribution pipeline and a gas supply device, wherein the gas distribution pipeline is provided with a plurality of gas outlet holes, a plurality of positions in the middle of the gas distribution pipeline are fixed together through a connecting sleeve after being cut off, and the gas distribution pipeline is divided into a plurality of sections of relatively closed areas; the gas supply device is provided with a plurality of gas distribution pipes in parallel, the middle gas distribution pipe is connected to the nearest gas distribution pipeline, and other gas distribution pipes extend forwards to be connected to the middle position of each gas distribution pipeline and are communicated with each other; each gas distributing pipe is provided with a precise needle valve.

The gas distribution pipe is located behind the precise needle valve and is provided with a locking nut assembly, and the locking nut assembly sequentially comprises a transfer sleeve, a silica gel sealing ring, a sealing ring pressing ring and a nut from left to right. The redistribution combination of the gas distribution pipes can be realized through the locking nut assembly, and partial gas distribution pipes can be disassembled according to actual production requirements, so that the maintenance is convenient.

The air outlet of the air distribution pipeline is plugged by the air distribution nail, and the air distribution pipeline is uniformly divided into a plurality of sections. The air outlet is plugged by the air distribution nail, and can be plugged according to production requirements.

The utility model discloses following beneficial effect has: after the gas distribution pipeline is divided into a plurality of sections, the gas pressure on each gas outlet hole is ensured to be more stable, the condition that the gas pressure is attenuated due to the fact that one end of the gas distribution pipeline is far away from a gas supply device is avoided, and therefore the coating process level of the vacuum tube is better. Each section of separated air supply can meet different coating process requirements according to different process requirements, the adaptability is wider, and different air pressure processes are provided. Meanwhile, the whole equipment is transformed, the old equipment meets the requirement of new process production, and the transformation cost and the use cost are reduced.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a schematic structural view of the lock nut assembly of the present invention.

Detailed Description

The present invention will be further explained with reference to the drawings and examples.

In which like parts are designated by like reference numerals. It is noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, the terms "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component, and the drawings are in greatly simplified form and employ non-precise ratios, merely for the purpose of facilitating and distinctly aiding in the description of the embodiments of the present invention.

Examples

As shown in fig. 1, a vacuum coating multi-section adjustable gas distribution system comprises a gas distribution pipeline 1 and a gas supply device 2, wherein the gas distribution pipeline 1 is provided with a plurality of gas outlets 3, a plurality of positions in the middle of the gas distribution pipeline 1 are fixed together through a connecting sleeve 4 after being cut off, and the gas distribution pipeline 1 is divided into a plurality of sections of relatively closed areas; the gas supply device 2 is provided with a plurality of gas distribution pipes 5 in parallel, the middle gas distribution pipe 5 is connected to the nearest gas distribution pipeline 1, and other gas distribution pipes 5 extend forwards to be connected to the middle position of each gas distribution pipeline 1 and are communicated with each other; each gas distributing pipe 5 is provided with a precise needle valve 6.

As shown in fig. 2, a locking nut assembly 7 is arranged on the gas distribution pipe 5 behind the precision needle valve 6, and the locking nut assembly is composed of an adapter sleeve 71, a silica gel sealing ring 72, a sealing ring pressing ring 73 and a nut 74 from left to right of 7. The gas distribution pipeline 1 is evenly divided into a plurality of sections. Like this through lock female member from 7 redistributions combinations that can realize the gas-distributing pipe, according to actual production needs, can disassemble partial gas-distributing pipe, also convenient maintenance. And the air outlet 3 of the air distribution pipeline 1 is blocked by an air distribution nail 8. The air outlet is plugged by the air distribution nail, and can be plugged according to production requirements.

The gas distribution pipeline is cut into a plurality of sections of relatively closed areas, then the gas of each section of gas distribution pipeline is supplied through the gas distribution pipe by the gas supply device, each section of gas distribution pipeline is directly supplied, the phenomenon that long-distance gas transmission leads to gas pressure attenuation is avoided, the gas pressure on each section of gas distribution pipe is adjusted by adjusting a precise needle valve on the gas distribution pipe, the gas pressure entering each section of gas distribution pipeline is more stable, the gas pressure of gas outlets on the gas distribution pipeline is ensured to tend to be stable and uniform, and the coating quality is better.

By adding the gas distribution regulating system, independent control of different areas of the film layer can be realized, the uniformity of the film coating is improved, and the product quality is improved. Meanwhile, according to actual production requirements, the air pressure of the air outlet holes on each section of air distribution pipeline can be different, so that the requirements of producing different coating process requirements at the same time can be met, the production efficiency is improved, and the production line is wider in adaptability.

The improved equipment process flow is as follows: the method comprises the following steps of maintenance, first empty recovery (empty recovery: machine empty run recovery, empty run operation without product discharge, product discharge when the parameters such as vacuum degree, temperature, humidity and the like reach the product discharge), target cleaning, color mixing, color inconsistency, door closing adjustment and gas distribution system, no second empty recovery, normal production, chamber opening adjustment again can be avoided, outdoor air inlet flow of each section can be independently adjusted, and the purposes of reducing empty recovery time and improving yield are achieved: the empty recovery time is reduced by 2 times per month, 240 hours of empty recovery time are saved every year, and the yield of each line is increased by 10 thousands of people every year; each line saves 48000 degrees of power consumption each year. (the rear-stage circular exhaust gas charge and the electric charge are not counted in)

In the following description, for purposes of clarity, not all features of an actual implementation are described, well-known functions or constructions are not described in detail since they would obscure the invention with unnecessary detail, it being understood that in the development of any actual embodiment, numerous implementation details must be set forth in order to achieve the developer's specific goals, such as compliance with system-related and business-related constraints, changing from one implementation to another, and it being recognized that such development efforts may be complex and time consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the art.

Claims (3)

1. The utility model provides an adjustable gas distribution system of vacuum coating multistage formula, includes gas distribution pipeline and air feeder, is equipped with a plurality of ventholes on the gas distribution pipeline, its characterized in that: the gas distribution pipeline is divided into a plurality of sections at a plurality of positions, the sections are fixed together through connecting sleeves, and the gas distribution pipeline is divided into a plurality of relatively closed areas; the gas supply device is provided with a plurality of gas distribution pipes in parallel, the middle gas distribution pipe is connected to the nearest gas distribution pipeline, and other gas distribution pipes extend forwards to be connected to the middle position of each gas distribution pipeline and are communicated with each other; each gas distributing pipe is provided with a precise needle valve.

2. The vacuum coating multi-stage adjustable air distribution system of claim 1, wherein: the gas distribution pipe is located behind the precise needle valve and is provided with a locking nut assembly, and the locking nut assembly sequentially comprises a transfer sleeve, a silica gel sealing ring, a sealing ring pressing ring and a nut from left to right.

3. The vacuum coating multi-section adjustable air distribution system of claim 1 or 2, wherein: the gas distribution pipeline is evenly divided into a plurality of sections, and the gas outlet holes of the gas distribution pipeline are plugged by gas distribution nails.

Images