CN213739647U - Mounting structure of target in multi-arc ion plating - Google Patents
Mounting structure of target in multi-arc ion plating Download PDFInfo
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- CN213739647U CN213739647U CN202022100856.XU CN202022100856U CN213739647U CN 213739647 U CN213739647 U CN 213739647U CN 202022100856 U CN202022100856 U CN 202022100856U CN 213739647 U CN213739647 U CN 213739647U
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- ion plating
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Abstract
The utility model relates to a mounting structure of target in multi-arc ion plating, include: the water-cooling flange is arranged at the bottom of the mounting structure of the target in the multi-arc ion plating; the water sealing plate covers the upper part of the water cooling flange; the target is arranged above the water sealing plate; the fastening flange is fixed above the water-cooling flange; locking structure sets up in the combination department of fastening flange and target, compares with prior art, when needing to be changed the target, utilizes locking structure, no longer need carry out bolt dismantlement and installation, reduces operating time, improves work efficiency. The target material replacement is not frequent, so that the sealing ring is frequently failed, the sealing failure is caused, the technical problem that the sealing ring needs to be disassembled again and reinstalled appears, the fixing structures among the dismounting water-cooling flange, the fastening flange and the water sealing plate are reduced, the water sealing plate can be very thin, the thickness of the water sealing plate is reduced, the water-cooling effect of the thin water sealing plate is better, and the generation of large particles can be effectively reduced.
Description
Technical Field
The embodiment of the utility model relates to a mounting structure of target, in particular to mounting structure of target in multi-arc ion plating.
Background
In the prior art, as shown in an attached drawing 1, on a mounting structure of a target in multi-arc ion plating, a water-cooling flange, a fastening flange, a water sealing plate and the target are fixed together by bolts in a bolt fixing mode, when the target needs to be replaced, the bolts need to be removed, the target is reinstalled, the bolts are reused for fixing, and due to frequent replacement of the target, a sealing ring often fails to work, so that sealing failure is caused, the sealing ring needs to be disassembled again and reinstalled, the operation time is increased, and the work efficiency is reduced.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a mounting structure of target in multi-arc ion plating can be under the condition of not dismantling the bolt, changes the target, reduces operating time, provides work efficiency.
In order to achieve the above object, a mounting structure of a target in multi-arc ion plating, comprising:
the water-cooling flange is arranged at the bottom of the mounting structure of the target in the multi-arc ion plating;
the water sealing plate covers the upper part of the water cooling flange;
the target is arranged above the water sealing plate;
the fastening flange is fixed above the water-cooling flange;
and the locking structure is arranged at the joint of the fastening flange and the target.
Further, the locking structure further comprises:
the plurality of bumps are uniformly arranged on the arc surface of the outer side of the target material;
the concave blocks are uniformly arranged on the inner side of the inner circle of the fastening flange;
the locking structure is embedded into the concave block after the convex block rotates by an even angle to form a locking buckle.
Wherein, the convex block is arranged in an arc shape along the position of the center of the target material at equal angles; and a transition arc is arranged with the target material.
The concave block is arranged in an arc shape along the center position of the fastening flange at equal angles; a groove smaller than the convex block is arranged below the concave block; the groove is in clearance fit with the lug; one side of the concave block is arranged into a block shape; and a transition connection is arranged between the other side of the concave block and the fastening flange.
And a sealing ring is arranged between the water-cooling flange and the water sealing plate.
The fastening flange and the water-cooling flange are of an integrally formed structure or are connected through welding or bolts.
The target is round, and the target material is aluminum or nickel.
Wherein, the fastening flange is circular ring.
Wherein, the sealing washer be O coil or rubber pad.
The mounting structure of the target in the multi-arc ion plating is a target sealing structure of a multi-arc ion plating machine.
Compared with the prior art, the utility model, when needing to be changed target, utilized locking structure, no longer need carry out bolt dismantlement and installation, reduced operating time, improved work efficiency. Also can not cause because the target changes frequently for the sealing washer often became invalid, lead to sealed the inefficacy, just need unpack apart again, the technical problem of reinstallation appears, in addition, owing to reduce the fixed knot structure between dismouting water-cooling flange, fastening flange, the water-sealing plate, so the water-sealing plate can be done very thin, has reduced the thickness of water-sealing plate, and thin water-sealing plate water-cooling effect is better, can effectively reduce the production of big granule.
Drawings
FIG. 1 is a schematic cross-sectional view of a prior art structure;
FIG. 2 is a schematic structural section of the present invention;
fig. 3 is a perspective view of the present invention;
fig. 4 is a schematic structural view of a fastening flange of the present invention;
fig. 5 is a schematic structural diagram of the target material of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the following will explain in detail each embodiment of the present invention with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that in various embodiments of the invention, numerous technical details are set forth in order to provide a better understanding of the present application. However, the technical solutions claimed in the claims of the present application can be implemented without these technical details and with various changes and modifications based on the following embodiments.
The utility model discloses an embodiment relates to a mounting structure of target in multi-arc ion plating, combines as shown in fig. 2 and fig. 3, includes:
the water-cooling flange 1 is arranged at the bottom of the mounting structure of the target in the multi-arc ion plating; as the utility model discloses an installation base.
The water sealing plate 2 covers the upper part of the water cooling flange 1; the multi-arc ion plating device is used for sealing cooling water in the multi-arc ion plating process, plays a role in isolating and sealing the cooling water, and can play a role in cooling the water-cooling flange 1 through the water sealing plate 2.
The target 3 is arranged above the water sealing plate 2; the target material is used in the multi-arc ion plating process;
the fastening flange 4 is fixed above the water-cooling flange 1;
in the embodiment, the fastening flange is fixed above the water-cooling flange 1 and provides a locking side for forming a locking structure of the flange; and the locking structure 10 is arranged at the joint of the water-cooling flange 1 and the fastening flange 4, the locking is realized by mainly utilizing the locking structure 10, the target material is not fixed by bolts, the problems that as shown in figure 1, on the mounting structure of the target in the multi-arc ion plating, the water-cooling flange, the fastening flange, the water sealing plate and the target are fixed together by bolts in a bolt fixing mode, when the target material needs to be replaced, the bolt needs to be detached, the target material needs to be installed again, the bolt is used again for fixing, because the target material is frequently replaced, the sealing ring is often failed, the sealing ring is failed, and the sealing ring needs to be disassembled and reinstalled again, so relapse, cause the operating time to increase, the technical problem that work efficiency reduces has realized changing the target under the condition of not dismantling the bolt, reduces operating time, provides work efficiency's technological effect.
For further illustration of the locking structure 10, it is shown in fig. 3, 4 and 5.
The plurality of bumps 11 are uniformly arranged on the arc surface of the outer side of the target 3;
the concave blocks 12 are uniformly arranged on the inner side of the inner circle of the fastening flange 4;
the locking structure 10 is used for embedding the convex block 11 into the concave block 12 after rotating the convex block by an even angle to form a locking buckle; the locking structure 10 realizes locking by means of the matching between the convex block 11 and the concave block 12, and achieves the effect of fixing the target 3 on the fastening flange 4 after rotating by a certain angle.
Referring to fig. 5, the projections 11 are disposed in an arc shape at equal angles along the center of the target 3; in the embodiment, the arrangement is 90 °, 4 projections 11 are formed, and of course, the arrangement may be 6 or more according to the requirement of the actual situation, as long as the requirement of the equal division within the circumference of 360 ° is met, and then a transition arc 13 is arranged on the projection 11 of the target 3 for better screwing into the concave block 12.
Referring to fig. 4, the concave block 12 is disposed in an arc shape along the center of the fastening flange 4 at an equal angle; a groove 14 smaller than the convex block 12 is arranged below the concave block 12; the groove 14 is in clearance fit with the bump 11; mainly for the convenience of the lug 11 screwing into the groove 14, one side of the concave block 11 is arranged into a block shape; for preventing the projection 11 from being screwed into the recess 14 beyond a limit, which would affect the locking effect, a transition connection 15 is provided on the other side of the recess 12 with the fastening flange 4.
Referring to fig. 2, a sealing ring 5 is arranged between the water-cooling flange 1 and the water sealing plate 2, and the sealing ring 5 is an O-coil or a rubber pad; the sealing device is used for sealing between the water-cooled flange 1 and the water sealing plate 2. The fastening flange 4 and the water-cooling flange 1 are of an integrally formed structure or are connected through welding or bolts; the connecting effect can be achieved mainly through an integrated structure and through any one of welding connection and bolt connection.
In the present embodiment, the target 3 is generally provided in a circular shape.
Likewise, the fastening flange 4 is likewise provided in the form of a ring in order to facilitate the tightening of the locking mechanism 10.
The mounting structure of the target in the multi-arc ion plating in the embodiment is mainly used for a sealing structure on the target of the multi-arc ion plating machine.
It will be understood by those skilled in the art that the foregoing embodiments are specific examples of the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in its practical application.
Claims (10)
1. A mounting structure of a target in multi-arc ion plating is characterized by comprising:
the water-cooling flange is arranged at the bottom of the mounting structure of the target in the multi-arc ion plating;
the water sealing plate covers the upper part of the water cooling flange;
the target is arranged above the water sealing plate;
the fastening flange is fixed above the water-cooling flange;
and the locking structure is arranged at the joint of the fastening flange and the target.
2. The mounting structure of a target in multi-arc ion plating according to claim 1, wherein the locking structure further comprises:
the plurality of bumps are uniformly arranged on the arc surface of the outer side of the target material;
the concave blocks are uniformly arranged on the inner side of the inner circle of the fastening flange;
the locking structure is embedded into the concave block after the convex block rotates by an even angle to form a locking buckle.
3. The mounting structure of a target in multi-arc ion plating according to claim 2, wherein the projection is disposed in an arc shape at equal angles along a center position of the target; and a transition arc is arranged with the target material.
4. The mounting structure of a target in multi-arc ion plating according to claim 2, wherein the concave block is arranged in an arc shape at equal angles along the center position of the fastening flange; a groove smaller than the convex block is arranged below the concave block; the groove is in clearance fit with the lug; and a transition connection is arranged between the other side of the concave block and the fastening flange.
5. The mounting structure of a target in multi-arc ion plating according to claim 1, wherein a seal ring is disposed between the water-cooled flange and the water-sealing plate.
6. The mounting structure of a target in multi-arc ion plating according to claim 1, wherein the fastening flange and the water-cooling flange are integrally formed or connected by welding or bolts.
7. The mounting structure of a target for multi-arc ion plating according to claim 3, wherein the target is circular.
8. The mounting structure of a target in multi-arc ion plating according to claim 4, wherein the fastening flange is annular.
9. The mounting structure of a target in multi-arc ion plating according to claim 5, wherein the sealing ring is an O-coil or a rubber gasket.
10. The structure for mounting a target in multi-arc ion plating according to any one of claims 1 to 9, wherein the structure for mounting a target in multi-arc ion plating is a target sealing structure of a multi-arc ion plating machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022100856.XU CN213739647U (en) | 2020-09-23 | 2020-09-23 | Mounting structure of target in multi-arc ion plating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022100856.XU CN213739647U (en) | 2020-09-23 | 2020-09-23 | Mounting structure of target in multi-arc ion plating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213739647U true CN213739647U (en) | 2021-07-20 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022100856.XU Active CN213739647U (en) | 2020-09-23 | 2020-09-23 | Mounting structure of target in multi-arc ion plating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213739647U (en) |
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2020
- 2020-09-23 CN CN202022100856.XU patent/CN213739647U/en active Active
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