CN213638314U

CN213638314U - Low-temperature plasma generating device

Info

Publication number: CN213638314U
Application number: CN202022872574.1U
Authority: CN
Inventors: 杨磊
Original assignee: Shenzhen Aoyue Photoelectric Technology Co ltd
Current assignee: Shenzhen Aoyue Photoelectric Technology Co ltd
Priority date: 2020-12-03
Filing date: 2020-12-03
Publication date: 2021-07-06
Anticipated expiration: 2030-12-03

Abstract

The utility model discloses a low temperature plasma generating device, including hollow shaft motor, the high pressure cover of negative pole, electrode subassembly and shower nozzle, the high pressure cover of negative pole links to each other with the rotor of hollow shaft motor, electrode subassembly's one end pass behind the hollow portion of hollow shaft motor and be located the negative pole high pressure cover in and with there is the clearance between the negative pole high pressure cover, electrode subassembly's the other end links to each other with the stator of hollow shaft motor, still includes copper brush and adapter sleeve, the copper brush is located the hollow portion of hollow shaft motor, the one end of copper brush links to each other with the stator of hollow shaft motor, the other end is connected with the rotor of hollow shaft motor, the both ends of adapter sleeve respectively with high pressure cover of negative pole and shower nozzle threaded connection, the outside of high pressure cover of negative pole is equipped with a plurality of archs side by side, the arch is. The utility model provides a low temperature plasma generating device has that the shower nozzle is changed the frequency and is hanged down, shower nozzle change advantage with low costs.

Description

Low-temperature plasma generating device

Technical Field

The utility model relates to a plasma equipment technical field, concretely says so and relates to a low temperature plasma generating device.

Background

A plasma surface treatment instrument is a brand-new technology, and utilizes plasma to achieve the effect which cannot be achieved by a conventional cleaning method, wherein the plasma is in one state of a substance, is also called as a fourth state of the substance and does not belong to common solid-liquid-gas tri-state. The plasma temperature can be respectively expressed by the electron temperature and the ion temperature, the ionization rate of the low-temperature plasma is low, the ion temperature of the low-temperature plasma is almost the same as the room temperature, and the low-temperature plasma can generate a large number of active particles with more types and stronger activity than general chemical reactions in the production process, and the active particles can react more easily when contacting with the surface of a material. To generate low temperature plasma, ultraviolet radiation, electromagnetic field excitation, high temperature heating, and X-ray irradiation may be used, among which electromagnetic field excitation is most commonly used.

The structure of the low-temperature plasma generating device excited by an electromagnetic field is that one end of a negative high-voltage sleeve is connected with a rotor of a hollow shaft motor, the other end of the negative high-voltage sleeve is connected with a spray head, one end of an electrode assembly penetrates through a hollow part of the hollow shaft motor and then is positioned in a negative high-voltage sleeve, the other end of the electrode assembly is fixedly connected with a stator of the hollow shaft motor, one end of a carbon brush in the hollow part of the hollow shaft motor is connected with the rotor, and the other end of the. The existing low-temperature plasma generating device has the defects that: dust is easily generated when the carbon brush rubs with the electrode assembly in the rotating process of the rotor, and the nozzle is blocked by the dust, so that the replacement frequency of the nozzle is high; the shower nozzle is direct to link to each other with the negative pole high-pressure bushing, because the high temperature of negative pole high-pressure bushing department causes the shower nozzle to take place oxidation reaction with the junction of negative pole high-pressure bushing easily, leads to the shower nozzle to pull down from the negative pole high-pressure bushing when changing, then need pull down negative pole high-pressure bushing and shower nozzle together and change to lead to the replacement cost of shower nozzle to be high.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a low temperature plasma generating device has the shower nozzle and changes the advantage that the frequency is low, the shower nozzle replacement cost is low.

The utility model discloses a technical scheme that low temperature plasma generating device adopted is:

the utility model provides a low temperature plasma generating device, includes hollow shaft motor, the high pressure cover of negative pole, electrode subassembly and shower nozzle, the high pressure cover of negative pole links to each other with the rotor of hollow shaft motor, electrode subassembly's one end passes behind the hollow portion of hollow shaft motor and be located the negative pole high pressure cover and exist the clearance between the high pressure cover of negative pole, electrode subassembly's the other end links to each other with the stator of hollow shaft motor, still includes copper brush and adapter sleeve, the copper brush is located the hollow portion of hollow shaft motor, the one end of copper brush links to each other with the stator of hollow shaft motor, the other end is connected with the rotor of hollow shaft motor, the both ends of adapter sleeve respectively with the high pressure cover of negative pole and shower nozzle threaded connection, the outside of the high pressure cover of negative pole is equipped with a plurality of archs side by.

According to a preferable scheme, the electrode assembly comprises a high-voltage insulation sleeve connecting pipe, a high-voltage insulation sleeve, a high-voltage wire and an electrode assembly, a first connecting flange is arranged at one end of the high-voltage insulation sleeve connecting pipe, the first connecting flange is fixedly connected with a stator of the hollow shaft motor through a bolt, the other end of the high-voltage insulation sleeve connecting pipe is in threaded connection with the high-voltage insulation sleeve, one end of the electrode assembly is installed in the high-voltage insulation sleeve, one end of the high-voltage wire sequentially penetrates through the high-voltage insulation sleeve connecting pipe and the high-voltage insulation sleeve and then is connected with the electrode assembly, and the other end of the high-voltage.

As preferred scheme, the electrode combination includes electrode, high-voltage line spliced pole, connection pad and locking screw, the connecting hole has been seted up to electrode one end, the screw hole has been seted up to one side of electrode, the screw hole communicates with each other with the connecting hole is perpendicular, the transversal annular of personally submitting of connection pad, the connection pad is fixed in high-voltage insulation cover, the intra-annular of high-voltage line spliced pole one end embedding connection pad, the other end insert in the connecting hole of electrode post, locking screw installs in the screw hole to it is inconsistent with the high-voltage line spliced pole, the screw hole is located outside the high-voltage insulation cover, the high-voltage line links to each other with the.

Preferably, the motor also comprises a spring, and the copper brush is connected with the stator of the hollow shaft motor through the spring.

Preferably, the plurality of protrusions are arranged on the outer side of the negative high-pressure sleeve side by side along the circumferential direction.

Preferably, a second connecting flange is arranged at one end of the rotor of the hollow shaft motor, and the negative high-pressure sleeve is fixedly connected with the second connecting flange through bolts.

Preferably, a lightening hole and a through hole are formed in one side, away from the connecting sleeve, of the spray head, the lightening hole is located in the center of the spray head and used for reducing the weight of the spray head, the through hole is communicated with the inside of the connecting sleeve, and the through hole is used for emitting plasma.

As a preferred scheme, a plurality of weight holes are further formed in one side, away from the connecting sleeve, of the spray head, and the weight holes and the through holes are respectively located on two opposite sides of the lightening hole.

The motor also comprises an end cover and a spacer ring, wherein the spacer ring is arranged at one end of the hollow shaft motor, which is far away from the high negative pressure sleeve, the end cover is covered on the spacer ring, and the end cover is provided with a wire passing hole.

The utility model discloses a low temperature plasma generating device's beneficial effect is: the hollow part of the hollow shaft motor is changed into the carbon brush which is contacted with the electrode assembly, and the copper material has higher wear resistance, so that dust is not easy to generate in the process of friction with the electrode assembly, secondary pollution of the generated dust to products is avoided, the abrasion of the nozzle bearing can be reduced, and the replacement frequency of the nozzle bearing is reduced; the connecting sleeve is additionally arranged between the negative high-voltage sleeve and the spray head, two ends of the connecting sleeve are respectively in threaded connection with the negative high-voltage sleeve and the spray head, in addition, a plurality of bulges for heat dissipation are arranged on the outer side of the negative high-voltage sleeve side by side, high temperature can be generated when discharge is carried out between an electrode assembly positioned in the negative high-voltage sleeve and the negative high-voltage sleeve, the high temperature in the negative high-voltage sleeve is dissipated through the bulges of the negative high-voltage sleeve and conducted through the connecting sleeve, the temperature of the joint of the spray head is lower than that of the joint without the additional connecting sleeve and the bulges, the high-temperature oxidation of the joint of the spray head and the connecting sleeve is avoided, when the spray head needs to be replaced, the spray head is easily detached from the connecting sleeve, the negative high-voltage sleeve does.

Drawings

The accompanying drawings, which form a part of the present application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 is a schematic view of a low temperature plasma generating apparatus according to the present invention;

fig. 2 is an exploded view of a low-temperature plasma generator according to the present invention;

fig. 3 is a sectional view of a low temperature plasma generating apparatus of the present invention;

fig. 4 is a schematic view of an electrode of a low temperature plasma generating apparatus according to the present invention; fig. 5 is a schematic view of a showerhead of a low temperature plasma generating apparatus according to the present invention.

Detailed Description

The invention will be further elucidated and described with reference to the following embodiments and drawings in which:

referring to fig. 1 to 3, a low temperature plasma generating apparatus includes a hollow shaft motor 10, a negative electrode high voltage bushing 20, an electrode assembly 30 and a showerhead 40, the hollow shaft motor comprises a copper brush 50 and a connecting sleeve 60, one end of the hollow shaft motor 10 is connected with the negative high-voltage sleeve 20 through a rotor, one end of an electrode assembly 30 penetrates through the hollow part of the hollow shaft motor 10 and then is positioned in the negative high-voltage sleeve 20, a certain gap exists between the electrode assembly 30 and the negative high-voltage sleeve 20, the other end of the electrode assembly 30 is connected with the stator of the hollow shaft motor 10, the copper brush 50 is positioned in the hollow part of the hollow shaft motor 10, one end of the copper brush 50 is connected with the stator of the hollow shaft motor 10, the other end of the copper brush is contacted with the rotor of the hollow shaft motor 10, two ends of the connecting sleeve 60 are respectively in threaded connection with the negative high-voltage sleeve 20 and the spray head 40, a plurality of protrusions 21 are.

Since the carbon brush in the hollow portion of the hollow shaft motor 10 is changed to the copper brush 50, dust is not easily generated in the process of friction with the rotor of the hollow shaft motor 10 due to the high wear resistance of the copper material, so that the blockage of the spray head 40 can be reduced, and the replacement frequency of the spray head 40 is reduced; because the connecting sleeve 60 is additionally arranged between the negative high-voltage sleeve 20 and the spray head 40, two ends of the connecting sleeve 60 are respectively in threaded connection with the negative high-voltage sleeve 20 and the spray head 40, a plurality of bulges 21 for heat dissipation are arranged on the outer side of the negative high-voltage sleeve 20 side by side, when high temperature is generated by discharge between the electrode assembly 30 positioned in the negative high-voltage sleeve 20 and the negative high-voltage sleeve 20, the temperature of the joint of the spray head 40 is much lower than that when the connecting sleeve 60 and the bulges 21 are not additionally arranged after the heat dissipation of the bulges 21 in the negative high-voltage sleeve 20 is carried out, so that the high-temperature oxidation of the joint of the spray head 40 and the connecting sleeve 20 is avoided, when the spray head 40 needs to be replaced, the spray head 40 is more easily detached from the connecting sleeve 60, the spray head 40 and the negative high-voltage sleeve 20 do not need to be detached together for.

Referring to fig. 1 to 3, the electrode assembly 30 includes a high voltage insulation sleeve connection tube 31, a high voltage insulation sleeve 32, an electrode assembly 33, and a high voltage wire, wherein a first connection flange 311 is disposed at one end of the high voltage insulation sleeve connection tube 31, the first connection flange 311 is fixedly connected to the stator of the hollow shaft motor 10 by a bolt, the other end of the high voltage insulation sleeve connection tube 31 is in threaded connection with the high voltage insulation sleeve 32, one end of the electrode assembly 33 is mounted in the high voltage insulation sleeve 32, one end of the high voltage wire sequentially passes through the high voltage insulation sleeve connection tube 31 and the high voltage insulation sleeve 32 and then is connected to the electrode assembly 33, and the other end of the high voltage wire is connected to an external. The high-voltage insulating bush connecting pipe 31 is fixedly connected with the stator of the hollow shaft motor 10 through a bolt, and when the electrode assembly 30 needs to be replaced, the electrode assembly 30 can be detached from the hollow shaft motor 10 only by detaching the bolt, so that the electrode assembly 30 is convenient to replace on the premise of ensuring the firm connection between the electrode assembly 30 and the hollow shaft motor 10. The high-voltage wire realizes the electrical connection between the electrode assembly 33 and the external equipment, and the high-voltage insulating sleeve connecting pipe 31 and the high-voltage insulating sleeve 32 play a role in insulating and protecting the high-voltage wire and the rotor of the hollow shaft motor 10.

Referring to fig. 1 to 4, the electrode assembly 33 includes an electrode 331, a high voltage wire connection post 332, a connection pad 333 and a locking screw 334, wherein one end of the electrode 331 is provided with a connection hole 3311, one side of the electrode 331 is provided with a screw hole 3312, the screw hole 3312 is vertically communicated with the connection hole 3311, the cross section of the connection pad 333 is annular, the connection pad 333 is fixed in the high voltage insulation sleeve 32, one end of the high voltage wire connection post 332 is embedded in the ring of the connection pad 333, the other end of the high voltage wire connection post is inserted into the connection hole 3311 of the electrode 331, the locking screw 334 is installed in the screw hole 3312 and abuts against the high voltage wire connection post 332, the screw hole 3312 is located outside the high voltage. The electrode 331 is connected with the high-voltage insulating sleeve 32 through the high-voltage wire connecting post 332 and the connecting disc 333, and is reinforced through the locking screw 334, when the electrode 331 needs to be replaced, the electrode 331 can be directly taken down from the high-voltage wire connecting post 332 after the locking screw 334 is detached, and therefore the electrode 331 is convenient to replace.

Referring to fig. 1 to 3, a spring 70 is further included, and the copper brush 50 is connected to the stator of the hollow shaft motor 10 through the spring 70. The spring 70 can automatically adjust the contact force between the copper brush 50 and the rotor of the hollow shaft motor 10, thereby preventing poor contact between the copper brush 50 and the rotor of the hollow shaft motor 10 due to too loose contact or excessive wear of the copper brush 50 and the rotor of the hollow shaft motor 10 due to too tight contact.

The plurality of protrusions 21 can also be arranged on the outer side of the negative electrode high voltage sleeve 20 side by side along the axial direction of the negative electrode high voltage sleeve 20, but when the protrusions 21 are arranged on the outer side of the negative electrode high voltage sleeve 20 side by side along the circumferential direction of the negative electrode high voltage sleeve 20, not only can the effect of quickly radiating the negative electrode high voltage sleeve 20 be achieved, but also when the negative electrode high voltage sleeve 20 rotates under the driving of the rotor of the hollow shaft motor 10, the grooves between the protrusions 21 are beneficial to the flowing of air flow when the negative electrode high voltage sleeve 20 rotates, and therefore the resistance of wind when the negative electrode high voltage sleeve 20 rotates is reduced.

One end of the rotor of the hollow shaft motor 10 is provided with a second connecting flange 11, and the negative electrode high-voltage sleeve 20 is fixedly connected with the second connecting flange 11 through bolts. When the negative electrode high voltage bushing 20 needs to be replaced, the negative electrode high voltage bushing 20 can be detached from the hollow shaft motor 10 only by detaching the bolt, thereby facilitating the replacement of the negative electrode high voltage bushing 20.

Referring to fig. 5, a lightening hole 41 and a through hole 42 are formed on a side of the nozzle 40 away from the connecting sleeve 60, the lightening hole 41 is located at the center of the nozzle 40, the lightening hole 41 is used for reducing the weight of the nozzle 40, the through hole 42 is communicated with the inside of the connecting sleeve 60, and plasma generated by the electrode 331 sequentially passes through the high negative pressure sleeve 20 and the connecting sleeve 60 and then is ejected from the through hole 42 of the nozzle 40. The weight of the spray head 40 is reduced by forming the lightening hole 41, which is advantageous for the miniaturization of the hollow shaft motor 10.

The side of the nozzle 40 far away from the connecting sleeve 60 is further provided with a plurality of weight ports 43, and the weight ports 43 and the through holes 42 are respectively located on two opposite sides of the lightening hole 41. The weight ports 43 and the through holes 42 are symmetrically arranged with the central axis of the nozzle 40, and the weight of the weight ports 43 to the nozzle 40 is equal to the weight of the through holes 42 to the nozzle 40, so that the dynamic balance of the nozzle 40 in the rotating process is realized.

Referring to fig. 1 to 3, the high-voltage connection structure further includes an end cover 80 and a spacer 90, the spacer 90 is installed at an end of the hollow shaft motor 10 far from the negative high-voltage bushing 20, the end cover 80 covers the spacer 90, the end cover 80 is provided with a wire passing hole 81, and a high-voltage wire passes through the wire passing hole 81, the high-voltage bushing connection pipe 31 and the high-voltage bushing 32 and then is connected to the high-voltage wire connection post 332. By providing the end cap 80 and the spacer 90, the connection of the high voltage line to the electrode assembly 30 is facilitated, and the protection of the high voltage line is enhanced.

As described above, by changing the carbon brush in contact with the electrode assembly 30 in the hollow portion of the hollow shaft motor 10 to the copper brush 50, clogging of the head 40 can be reduced, thereby reducing the frequency of replacement of the head 40. The connecting sleeve 60 is additionally arranged between the cathode high-voltage sleeve 20 and the spray head 40, the plurality of protrusions 21 for heat dissipation are arranged on the outer side of the cathode high-voltage sleeve 20 side by side, and the temperature of the joint of the spray head 40 is reduced, so that the high-temperature oxidation of the joint of the spray head 40 and the connecting sleeve 20 is avoided, when the spray head 40 needs to be replaced, the spray head 40 is easily detached from the connecting sleeve 60, the spray head 40 and the cathode high-voltage sleeve 20 do not need to be detached together for replacement, and therefore the replacement cost is reduced. The weight of the spray head 40 is reduced by forming the lightening holes 41 in the spray head 40, which is advantageous for the miniaturization of the hollow shaft motor 10. The dynamic balance of the spray head 40 in the rotating process is realized by arranging a plurality of weight holes 43 on the spray head 40.

It should be finally noted that the above embodiments are only intended to illustrate the technical solutions of the present invention, and not to limit the scope of the present invention, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the present invention can be modified or replaced with equivalents without departing from the spirit and scope of the technical solutions of the present invention.

Claims

1. The utility model provides a low temperature plasma generating device, includes hollow shaft motor, the high pressure cover of negative pole, electrode subassembly and shower nozzle, the high pressure cover of negative pole links to each other with the rotor of hollow shaft motor, electrode subassembly's one end passes behind the hollow portion of hollow shaft motor and be located the negative pole high pressure cover and exist the clearance between the high pressure cover of negative pole, electrode subassembly's the other end links to each other with the stator of hollow shaft motor, its characterized in that still includes copper brush and adapter sleeve, the copper brush is located the hollow portion of hollow shaft motor, the one end of copper brush links to each other with the stator of hollow shaft motor, and the other end is connected with the rotor of hollow shaft motor, the both ends of adapter sleeve respectively with high pressure cover of negative pole and shower nozzle threaded connection, the outside of high pressure cover of negative pole is equipped with a plurality of archs side by side.

2. The low-temperature plasma generating device according to claim 1, wherein the electrode assembly comprises a high-voltage insulating bushing connecting pipe, a high-voltage insulating bushing, a high-voltage wire and an electrode assembly, wherein a first connecting flange is arranged at one end of the high-voltage insulating bushing connecting pipe, the first connecting flange is fixedly connected with a stator of the hollow shaft motor through a bolt, the other end of the high-voltage insulating bushing connecting pipe is in threaded connection with the high-voltage insulating bushing, one end of the electrode assembly is installed in the high-voltage insulating bushing, one end of the high-voltage wire sequentially penetrates through the high-voltage insulating bushing connecting pipe and the high-voltage insulating bushing and then is connected with the electrode assembly, and the other end of the high-voltage wire is connected with.

3. The low-temperature plasma generation device according to claim 2, wherein the electrode assembly comprises an electrode, a high-voltage wire connection column, a connection disc and a locking screw, a connection hole is formed in one end of the electrode, a screw hole is formed in one side of the electrode, the screw hole is vertically communicated with the connection hole, the cross section of the connection disc is in an annular shape, the connection disc is fixed in the high-voltage insulation sleeve, one end of the high-voltage wire connection column is embedded into the ring of the connection disc, the other end of the high-voltage wire connection column is inserted into the connection hole of the electrode column, the locking screw is installed in the screw hole and is abutted against the high-voltage wire connection column, the screw hole is located outside the high-.

4. The low temperature plasma generating apparatus according to claim 1, further comprising a spring, wherein the copper brush is connected to a stator of the hollow shaft motor through the spring.

5. The low temperature plasma generating apparatus according to claim 1, wherein the protrusions are arranged side by side in a circumferential direction outside the negative high pressure bushing.

6. The low-temperature plasma generating apparatus according to claim 1, wherein a second connecting flange is provided at one end of the rotor of the hollow shaft motor, and the negative high-pressure sleeve is fixedly connected to the second connecting flange by bolts.

7. The low-temperature plasma generating device according to claim 1, wherein a lightening hole and a through hole are formed in one side of the spray head away from the connecting sleeve, the lightening hole is located in the center of the spray head, the lightening hole is used for reducing the weight of the spray head, the through hole is communicated with the inside of the connecting sleeve, and the through hole is used for emitting plasma.

8. The low-temperature plasma generating device according to claim 7, wherein a plurality of weight ports are further formed in one side of the spray head away from the connecting sleeve, and the weight ports and the through holes are respectively located on two opposite sides of the weight-reducing hole.

9. The low-temperature plasma generating device according to any one of claims 1 to 8, further comprising an end cap and a spacer ring, wherein the spacer ring is mounted at one end of the hollow shaft motor far away from the negative high-pressure sleeve, the end cap is covered on the spacer ring, and the end cap is provided with a wire passing hole.