CN213624367U - Temporary storage device and coating equipment - Google Patents
Temporary storage device and coating equipment Download PDFInfo
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- CN213624367U CN213624367U CN202022697734.3U CN202022697734U CN213624367U CN 213624367 U CN213624367 U CN 213624367U CN 202022697734 U CN202022697734 U CN 202022697734U CN 213624367 U CN213624367 U CN 213624367U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a temporary storage device and coating equipment, wherein, temporary storage device sets up between two process devices of transmission line, include: temporary storage mechanism and actuating mechanism. The temporary storage mechanism comprises at least two temporary storage tables, the bearing surfaces of the temporary storage tables are arranged in parallel with the transmission direction of the transmission line, and the bearing capacity of the bearing surfaces of the temporary storage tables is at least larger than the single-process machining capacity of any one of the two process devices; the driving mechanism comprises at least one butt joint driver, the driving end of the butt joint driver is connected with each temporary storage table, and the butt joint driver drives the bearing surface to be connected with the adjacent device on the transmission line. Through the cache of the temporary storage table, the mutual adaptation of the slow process and the fast process is realized, the problem that the slow process waits for the supply of workpieces to be processed is reduced, and the production beat of the whole equipment is effectively shortened, so that the problem of linkage between adjacent process devices is solved, and the production beat smoothness of the whole equipment is ensured.
Description
Technical Field
The utility model relates to the technical field of transmission, concretely relates to temporary storage device and coating equipment.
Background
At present, magnetron sputtering is one of the mainstream techniques for coating. The sputtering technique is a phenomenon in which ions are bombarded on the surface of a target material and atoms of the target material are knocked out, and is called sputtering. The atoms generated by sputtering deposit on the surface of the substrate to form a film called sputtering coating. The technique generally utilizes gas discharge to generate gas ionization, positive ions of the gas ionization bombard a cathode target body at a high speed under the action of an electric field, and the positive ions strike out atoms or molecules of the cathode target body and fly to the surface of a plated substrate to be deposited into a film.
In PVD (Physical Vapor Deposition) sputter coating equipment, a plurality of process units are usually included, and different process steps are performed in different process units to coat different coatings on a workpiece to be coated according to design. However, in the existing coating equipment, because the coating speeds and the required process times of the previous process device and the subsequent process device are different, the situation that the corresponding process steps of a part of chambers can be carried out only when the processes of other chambers are finished exists, and the waiting time has to be set in consideration of the normal running of production, so that the production rhythm of the whole equipment is influenced. In particular, when the process time of the preceding process apparatus is shorter than that of the subsequent process apparatus, the production efficiency is seriously lowered.
People always strive to improve the efficiency of the magnetron sputtering technology and expand the application range of the magnetron sputtering technology, and the compact connection of production beats is a technical problem to be solved urgently at present.
SUMMERY OF THE UTILITY MODEL
Therefore, the utility model aims to solve the technical problem because among the coating equipment, because the coating speed of preceding process device and back process device is different with required process time in the coating equipment, lead to having the condition that partial cavity need wait for other cavity processes to accomplish just can carry out the corresponding technology step of this cavity, provide a temporary storage device and corresponding coating equipment, solve and link up the problem between the adjacent process device, avoid appearing the condition that influences the production beat of complete machine equipment.
The utility model provides a temporary storage device sets up between two process devices of transmission line, include:
the temporary storage mechanism comprises at least two temporary storage tables, the bearing surfaces of the temporary storage tables are arranged in parallel with the transmission direction of the transmission line, and the bearing capacity of the bearing surfaces of the temporary storage tables is at least greater than the single-process machining capacity of any one of the two process devices;
and the driving mechanism comprises at least one butt joint driver, the driving end of the butt joint driver is connected with each temporary storage table, and the butt joint driver drives the bearing surface to be connected with an adjacent device on the transmission line.
Optionally, in the above temporary storage device, a driving direction of the docking driver forms an included angle with respect to the transmission direction.
Optionally, in the above temporary storage device, the driving direction is perpendicular to the transmission direction.
Optionally, the temporary storage device includes at least two sets of driving mechanisms, and the driving mechanisms are symmetrically disposed on two sides of the temporary storage table.
Optionally, the temporary storage device further comprises an in-place detection structure, wherein the in-place detection structure is mounted on the bearing surface and used for detecting the in-place position of the workpiece to be machined on the bearing surface.
Optionally, the temporary storage device further includes a pressure detection structure, and the pressure detection structure is mounted on the driving end and used for detecting the pressure of the driving end.
A plating apparatus comprising: the temporary storage device is arranged between the adjacent process devices;
and the transmission mechanism is used for driving the workpiece to be processed on the bearing surface to be transmitted along the transmission direction.
Optionally, in the foregoing coating apparatus, the conveying mechanism includes:
the transmission roller is arranged on the temporary storage table;
the roller driver is connected with the transmission roller and drives the transmission roller to rotate.
Optionally, in the above coating apparatus, the conveying mechanism is a manipulator, and the manipulator has a conveying state in which the workpiece to be processed is clamped and conveyed along the conveying direction; and a reset state with no load in the reset direction;
the conveying direction is a direction from the previous process device to the subsequent process device; the reset direction is a direction in which the subsequent-process apparatus is reset to the preceding-process apparatus.
Optionally, in the foregoing film plating apparatus, in adjacent process devices, a process time of completing one film plating by a previous process device is shorter than a process time of completing one film plating by a subsequent process device, and a carrying capacity of the carrying surface of the temporary storage table is greater than a primary film plating processing capacity of the previous process device.
The technical scheme provided by the utility model, following advantage has:
1. the temporary storage device provided by the utility model is provided with at least two temporary storage tables through the temporary storage mechanism, the bearing surfaces of the temporary storage tables are used for bearing workpieces to be processed, when the time required by the prior process is shorter, and when the time required by the post process is longer, the processed workpieces to be processed are carried on by the temporary storage tables of the temporary storage structure; meanwhile, the temporary storage table is parallel to the transmission direction of the transmission line through the bearing surface, so that the extending direction of the bearing surface and the transmission direction are ensured to be smooth during transmission, and the conveying time is further saved. Through the caching of the temporary storage table, the board to be placed completed under the previous quick process is cached, and the low-speed process can be adapted by uninterruptedly providing the parts to be processed to the subsequent process device, so that the mutual adaptation of the low-speed process and the quick process is realized, the problem that the low-speed process waits for the supply of the parts to be processed is reduced, the production beat of the whole equipment is effectively shortened, the problem of connection between the adjacent process devices is solved, and the production beat smoothness of the whole equipment is ensured; in addition, the docking driver drives the temporary storage table to be connected with the transmission line, and the accuracy of conveying and docking is further guaranteed.
2. The utility model provides a temporary storage device, the drive direction of butt joint driver with the transmission direction is the contained angle setting. The temporary storage device with the structure saves the plane occupation space and reduces the occupation area of a production line by the arrangement of the butt joint driver and the transmission direction. The driving direction is vertical to the bearing surface. Further ensuring the stability in driving.
3. The utility model provides a temporary storage device, including at least two sets of actuating mechanism, actuating mechanism be symmetrically with the platform of keeping in connects. The symmetrically arranged driving mechanisms drive the temporary storage table, so that the stability of the driving process is ensured.
4. The utility model provides a temporary storage device still includes the detection structure that targets in place, installs on the loading end, the detection structure that targets in place is used for detecting target in place of treating the machined part on the loading end. The in-place detection structure detects whether the workpiece to be processed is stored on the temporary storage table or not, so that the workpiece to be processed is matched according to requirements.
5. The utility model provides a temporary storage device still includes the pressure detection structure, installs on the drive end, be used for detecting the last pressure that bears of drive end. The number of the workpieces to be processed on all temporary storage tables connected with the driving end is detected, and whether the workpieces to be processed on each temporary storage table are detected or not is realized by matching with the in-place detection structure; in addition, the pressure detection structure can also detect whether the workpiece to be machined completely targets in place and is placed on the temporary storage table, and the temporary storage table is prevented from moving when the workpiece to be machined is not completely placed, so that the problem of damage to the workpiece to be machined is solved.
6. The utility model provides a coating equipment, it includes: the temporary storage device is connected with the adjacent process devices; the transmission mechanism is used for driving the workpiece to be machined on the bearing surface to be transmitted along the transmission direction. According to the coating equipment with the structure, the temporary storage device is arranged between the front process device and the rear process device, so that the front-end rapid process and the rear-end slow process in the coating equipment are isolated from each other through the temporary storage device, the workpiece to be processed which is completed under the rapid process is cached through the cache of the temporary storage device, the workpiece to be processed can be supplied to the rear process device uninterruptedly to adapt to the slow process, the mutual adaptation of the slow process and the rapid process is realized, the problem that the rear-end slow process waits for the supply of the workpiece to be processed is reduced, and the production rhythm of the whole equipment is effectively shortened.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a coating apparatus provided in an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a temporary storage device provided in an embodiment of the present invention;
description of reference numerals:
1-temporary storage table;
21-docking actuator; 22-a drive rod; 23-a pressure detection structure;
3-in-place detection structure;
4-conveying rollers;
5-processing the workpiece;
61-temporary storage device; 62-previous process equipment; 63-post process equipment.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.
Example 1
The present embodiment provides a temporary storage device 61, which is disposed between two process devices of a transmission line, as shown in fig. 1 and 2, and includes: the temporary storage device 61 comprises three temporary storage tables 1 and two groups of driving mechanisms, the bearing surfaces of the temporary storage tables 1 are arranged in parallel with the transmission direction of the transmission line, any group of driving mechanisms comprises a butt joint driver 21, the driving end of the butt joint driver 21 is connected with each temporary storage table 1, and the butt joint driver 21 drives the bearing surfaces to be connected with adjacent devices on the transmission line.
In the temporary storage device 61 provided in this embodiment, the driving direction of the docking driver 21 forms an included angle with the transmission direction. Through the arrangement of the butt joint driver 21 and the transmission direction, the plane occupied space is saved, and the occupied area of a production line is reduced. The driving direction is arranged perpendicular to the bearing surface, so that the stability during driving is further ensured. Specifically, the docking driver 21 in this embodiment is a driving motor, the driving end is a driving rod 22, and the driving motor drives the driving rod 22 to lift and lower along the vertical direction. The bearing surface in this embodiment is a horizontal surface.
As shown in fig. 2, the four sets of driving mechanisms in this embodiment are symmetrically connected to the temporary storage table 1, so as to ensure the stability of the driving process. The driving motors of the four groups of driving mechanisms are respectively arranged at the four edges of the temporary storage table 1, and the driving ends of the driving motors are fixedly connected with the temporary storage table 1.
As shown in fig. 2, the temporary storage device 61 further includes an in-position detection structure 3 installed on the carrying surface, and the in-position detection structure 3 is used for detecting the in-position of the workpiece 5 to be processed on the carrying surface. The in-place detection structure 3 is a gravity sensor. In this embodiment, the gravity sensor is installed on the temporary storage table 1, and the gravity sensor detects whether the workpiece 5 to be processed is stored on the temporary storage table 1, so that the workpiece 5 to be processed is matched according to requirements.
As shown in fig. 2, the temporary storage device 61 of the present embodiment further includes a pressure detecting structure 23 installed on the driving end for detecting the pressure at the driving end. The pressure detection structure 23 in this embodiment is an integration of a bellows and a displacement sensor, and is used for sensing the pressure borne by the driving end. Therefore, the pressure detection structure 23 detects the number of the workpieces to be processed on all the temporary storage tables 1 connected with the driving end, and is matched with the in-place detection structure 3 to detect whether the workpieces to be processed 5 on each temporary storage table 1 are detected; in addition, the pressure detection structure 23 can also detect whether the workpiece 5 to be processed is completely in place and placed on the temporary storage table 1, so that the problem that the workpiece 5 to be processed is damaged due to the fact that the temporary storage table 1 moves when the workpiece 5 is not completely placed is avoided.
In the temporary storage device 61 provided by the present embodiment, at least two temporary storage tables 1 are arranged through a temporary storage mechanism, a carrying surface of each temporary storage table 1 is used for carrying a workpiece 5 to be processed, when a process time of a previous process device 62 (mentioned below) is short, that is, a complete previous process time is completed faster, and a process time of a subsequent process device (mentioned below) is long, that is, a complete subsequent process time is completed slower, the processed workpiece 5 to be processed in the previous process device is carried by the temporary storage table 1 of the temporary storage mechanism; meanwhile, the temporary storage table 1 is parallel to the transmission direction of the transmission line through the bearing surface, so that the extending direction of the bearing surface and the transmission direction are ensured to be smooth during transmission, and the conveying time is further saved. Therefore, the board to be placed completed under the previous rapid process is cached through the caching of the temporary storage table, and the workpiece to be processed can be supplied to the subsequent process device uninterruptedly to adapt to the slow process, so that the mutual adaptation of the slow process and the rapid process is realized, the problem that the slow process waits for the supply of the workpiece to be processed is reduced, the production beat of the whole machine equipment is effectively shortened, the problem of connection between the adjacent process devices is solved, and the production beat smoothness of the whole machine equipment is ensured; in addition, the docking driver 21 drives the connection between the temporary storage table 1 and the transmission line, so that the accuracy of conveying and docking is further ensured.
In other optional embodiments, a group of driving mechanisms may be further provided, and a driving end of the driving mechanism is connected to the temporary storage table 1, so as to drive the temporary storage mechanism.
In other alternative embodiments, two, six or eight drive mechanisms may be provided to ensure that the drive mechanisms are symmetrically arranged.
Of course, for ease of installation, a single number of drive mechanisms may be provided while ensuring smooth transport.
In other optional embodiments, the number of the temporary storage tables 1 is two, four, five or more, and the more the number of the temporary storage tables 1 is, the more the positions of temporary storage can be realized, and the further the temporary storage space is increased.
In other alternative embodiments, the driving direction of the docking driver 21 may be set at an angle relative to the horizontal direction, for example, the driving direction may be set at any angle such as 30 degrees, 45 degrees or 60 degrees with the horizontal direction, as long as the movement of the buffer table 1 is realized.
Certainly in other embodiments, if the transmission direction of transmission line is along the transmission of horizontal direction, temporary storage platform 1 also can choose to follow vertical direction and extend for use, and at this moment, the last fixture that needs to adopt of temporary storage platform 1 treats the machined part and carries out the centre gripping, guarantees the stability of temporary storage when treating machined part 5.
Example 2
The present embodiment provides a plating apparatus, as shown in fig. 1 and 2, including: the temporary storage device 61 in embodiment 1, wherein the temporary storage device 61 is arranged between adjacent process devices; the transmission mechanism is used for driving the workpiece 5 to be processed on the bearing surface to be transmitted along the transmission direction. In the present embodiment, both the pre-process device 62 and the post-process device 63 are plating process devices. The coating equipment in the embodiment can be PVD coating equipment or CVD coating equipment.
In this embodiment, the carrying capacity of the carrying surface of the temporary storage table is the single-process processing capacity of any one of the previous process device and the subsequent process device; specifically, the single preceding process machining amount is m, the single subsequent machining amount is n, the bearing capacity of the temporary storage table is x, and in the embodiment, x is greater than m and x is greater than n; of course, in alternative embodiments, the relationship between m, n, and x can be n ≧ x > m, or m ≧ x > n.
In this embodiment, the battery cells are mounted in the carrier plate, so the processing amount is the number of the battery cells stored in the carrier plate.
In the present embodiment, the process time for completing one plating by the preceding process device 62 is shorter than the process time for completing one plating by the following process device. For example, the process time for completing one coating in the former process is a, and the process time for completing one coating in the later process is b, specifically in this embodiment, a < b.
The transmission mechanism that this embodiment provided includes: a transport roller 4 and a roller drive. Wherein, the transmission roller 4 is arranged on the temporary storage table 1; the roller driver is connected with the transmission roller 4, and the roller driver drives the transmission roller 4 to rotate. The top surface of the in-position detecting structure 3 in the temporary storage device 61 may be arranged parallel to the top surface of the roller. The member 5 to be processed in this embodiment may be a carrier plate.
The setting position of drive roller also can choose for use the setting to deposit on platform 1 temporarily, and the number of gyro wheel can set up a plurality of, as long as guarantee to treat that machined part 5 transmits can. The transmission of treating machined part 5 is realized to transmission gyro wheel 4, guarantees the smoothness nature of transmission process.
The using process of the coating equipment provided by the embodiment is as follows:
the carrier plate is firstly coated by the former process device 62 and then output from the cavity connecting port, at this time, the transmission roller 4 arranged on the temporary storage table 1 at the connecting port is driven by the roller driver, so that the roller is driven to rotate, the carrier plate is transferred to the temporary storage table 1, and at this time, the in-place detection structure 3 on the temporary storage table 1 detects the carrier plate to feed back the in-place of the carrier plate. Similarly, the pressure detection structure 23 also receives the corresponding pressure value change, so as to realize the feedback that the carrier plate is in place, and realize the buffer storage and temporary storage of the carrier plate on the previous process device 62; thereafter, when the post-process apparatus 63 requires loading of the carrier sheet, the transfer rollers 4 are driven by the roller driver, and the carrier sheet is delivered from the connection port with the post-process apparatus 63 and delivered to the post-process apparatus 63. When the temporary storage table 1 corresponding to the connecting port is provided with a carrier plate, at this time, the butt joint driver 21 of the driving mechanism is lifted along the vertical direction, and the temporary storage table 1 which is detected by the in-place detection structure 3 and is not provided with the carrier plate is butted with the butt joint port, so that the loading of the carrier plate is realized. Thus, the coating working process is completed.
If there is a carrier plate in the post-process device 63 that is working, the post-process device 63 does not have a position where the process flow can be performed; alternatively, when the other post-process connected to the post-process device 63 does not have the process conditions; the coating equipment will only execute the process flow of the previous process device 62 and transport the carrier plates that completed the process flow to the temporary storage device.
When the temporary storage table of the temporary storage device is full of carrier plates, in the coating equipment, a feed port of the previous process device is suspended from inputting the carrier plates into the previous process device until the carrier plates are arranged in the temporary storage table, the previous process device starts feeding, the process flow of the previous process device is carried out, and then the carrier plates are conveyed into the temporary storage device.
The film coating equipment provided by the embodiment has the advantages that the temporary storage device is arranged between the front process device 62 and the rear process device 63, so that the front-end rapid process and the rear-end slow process in the film coating equipment are mutually isolated through the temporary storage device, the carrier plate finished under the rapid process is cached through the cache of the temporary storage device, the carrier plate can be continuously provided for the rear process device by the slow process, the mutual adaptation of the slow process and the rapid process is realized, the problem that the rear-end slow process waits for the supply of the carrier plate is reduced, and the production rhythm of the whole equipment is effectively shortened.
Correspondingly, the photovoltaic cell production line adopting the coating equipment has the advantages of more compact production rhythm and high production efficiency.
In other embodiments of this embodiment, the conveying mechanism is a robot, and the robot has a conveying state for holding the workpiece to be processed and conveying the workpiece along a conveying direction; and a reset state with no load in the reset direction; specifically, the transport direction is a direction from the preceding process device 62 to the subsequent process device 63; the reset direction is a direction from the post-process apparatus 63 to the pre-process apparatus 62. By the clamping and conveying action of the manipulator, for example, in a conveying state, the manipulator clamps the workpiece 5 to be processed on the pre-process device 62 and moves towards the temporary storage table along the conveying direction until the workpiece 5 to be processed reaches the temporary storage table to be placed on the temporary storage table 1; in the reset state, the manipulator moves from the temporary storage table to the previous process device along the reset direction.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications can be made without departing from the scope of the invention.
Claims (10)
1. A temporary storage device is arranged between two process devices of a transmission line, and is characterized by comprising:
the temporary storage mechanism comprises at least two temporary storage tables (1), the bearing surfaces of the temporary storage tables (1) are arranged in parallel with the transmission direction of the transmission line, and the bearing capacity of the bearing surfaces of the temporary storage tables (1) is at least larger than the single-process machining capacity of any one of the two process devices;
the driving mechanism comprises at least one butt joint driver (21), the driving end of the butt joint driver (21) is connected with each temporary storage table (1), and the butt joint driver (21) drives the bearing surface to be connected with an adjacent device on the transmission line.
2. A buffer arrangement as claimed in claim 1, wherein the drive direction of the docking drive (21) is arranged at an angle to the transport direction.
3. A buffer as claimed in claim 2 wherein the drive direction is arranged perpendicular to the transport direction.
4. A buffer as in any of claims 1-3, comprising at least two sets of drive mechanisms symmetrically disposed on either side of the buffer table (1).
5. A buffer device as in any of claims 1-3, further comprising a positioning inspection structure (3), said positioning inspection structure (3) being mounted on said carrying surface for inspecting the positioning of a workpiece (5) to be processed on said carrying surface.
6. A buffer as claimed in any of claims 1-3 further comprising a pressure sensing arrangement (23), the pressure sensing arrangement (23) being mounted on the drive end for sensing pressure at the drive end.
7. A plating apparatus, characterized by comprising:
the buffer device (61) of any of claims 1-6, said buffer device (61) being disposed between adjacent process devices;
and the transmission mechanism is used for driving the workpiece (5) to be processed on the bearing surface to be transmitted along the transmission direction.
8. The plating device according to claim 7, wherein the transport mechanism comprises:
the transmission roller (4) is arranged on the temporary storage table (1);
the roller driver is connected with the transmission roller (4), and the roller driver drives the transmission roller (4) to rotate.
9. The plating apparatus according to claim 7, wherein the conveyance mechanism is a robot having a conveyance state in which the member to be processed is held and conveyed in the conveyance direction; and a reset state with no load in the reset direction;
the conveying direction is a direction from the previous process device to the subsequent process device; the reset direction is a direction in which the subsequent-process apparatus is reset to the preceding-process apparatus.
10. The plating apparatus according to any one of claims 7 to 9, wherein in adjacent process units, the process time for completing one plating process in a preceding process unit is shorter than the process time for completing one plating process in a following process unit, and the carrying capacity of the carrying surface of the temporary storage table (1) is larger than the primary plating processing capacity of the preceding process unit.
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| CN202022697734.3U CN213624367U (en) | 2020-11-19 | 2020-11-19 | Temporary storage device and coating equipment |
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| CN202022697734.3U CN213624367U (en) | 2020-11-19 | 2020-11-19 | Temporary storage device and coating equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113877974A (en) * | 2021-10-20 | 2022-01-04 | 华帝股份有限公司 | Automatic punching line connecting operation process layout and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113877974A (en) * | 2021-10-20 | 2022-01-04 | 华帝股份有限公司 | Automatic punching line connecting operation process layout and method |
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