CN213592869U - Clamping manipulator suitable for semiconductor wafer storage basket conveying line - Google Patents

Clamping manipulator suitable for semiconductor wafer storage basket conveying line Download PDF

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Publication number
CN213592869U
CN213592869U CN202022221468.7U CN202022221468U CN213592869U CN 213592869 U CN213592869 U CN 213592869U CN 202022221468 U CN202022221468 U CN 202022221468U CN 213592869 U CN213592869 U CN 213592869U
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CN
China
Prior art keywords
basket
semiconductor wafer
clamping
plate
clamping plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202022221468.7U
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Chinese (zh)
Inventor
杨鹏飞
金华
杨黎明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Tairui Electric Equipment Co ltd
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Wuxi Tairui Electric Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to CN202022221468.7U priority Critical patent/CN213592869U/en
Application granted granted Critical
Publication of CN213592869U publication Critical patent/CN213592869U/en
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Abstract

The utility model discloses a clamping manipulator suitable for a semiconductor wafer saving basket conveying line, which comprises a manipulator supporting plate and telescopic devices arranged at two sides of the manipulator supporting plate; the push rod end of the telescopic device is connected with the flower basket clamping plate; be equipped with the locating pin that matches the deposit basket of flowers locating hole on the basket of flowers clamp plate, to the structure of current semiconductor wafer basket of flowers, make the adaptability adjustment, be equipped with the locating pin that matches the deposit basket of flowers locating hole on the basket of flowers clamp plate, can accomplish the effective clamp of tight to semiconductor wafer basket of flowers. The second positioning block is provided with a positioning face for butting the storage basket, and the angle fixation of the semiconductor wafer basket is accurately finished by matching the positioning pin, so that the semiconductor wafer storage basket is prevented from rotating and shifting in the transportation process.

Description

Clamping manipulator suitable for semiconductor wafer storage basket conveying line
Technical Field
The utility model relates to a field is carried to automatic line of nonstandard automation, in particular to clamping manipulator that is suitable for semiconductor wafer savings basket transfer chain.
Background
The production of semiconductor wafers involves a number of steps, and in the current semiconductor wafer production process, semiconductor wafers are typically carried by a semiconductor wafer basket and transported between steps.
FIG. 3 is a semiconductor wafer basket 9 with a semiconductor wafer 93 disposed thereon, the semiconductor wafer basket 9 including a basket bottom surface 90 and support posts 92; the storage basket bottom surface 90 is provided with a storage basket positioning hole 91 and a storage basket positioning surface 901.
In order to accelerate the conveying speed and the smoothness of the flower basket among the working procedures, a production line is often used in the material process, the semiconductor wafer is horizontally placed on the flower basket, and after the flower basket is turned over, the semiconductor wafer is vertically conveyed and the like. Therefore, it is desirable to design a specific robot for a semiconductor wafer storage basket to accomplish the horizontal to vertical angular conversion of the semiconductor wafer storage basket. Meanwhile, the overturning process needs to be ensured to be stable, and the damage of the semiconductor wafer caused by the fact that the clamping of a manipulator is not in place or the clamping is not firm due to overlarge clamping force or inaccurate clamping positions can be avoided.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem who solves: the utility model aims at solving the deficiencies in the prior art and providing a clamping manipulator to semiconductor wafer basket of flowers, simple structure, clamping are firm.
The technical scheme of the utility model: the utility model relates to a clamping manipulator suitable for a semiconductor wafer saving basket conveying line, which comprises a manipulator supporting plate and telescopic devices arranged at two sides of the manipulator supporting plate; the push rod end of the telescopic device is connected with the flower basket clamping plate; and the flower basket clamping plate is provided with a positioning pin matched with the storage flower basket positioning hole.
Furthermore, a second positioning block is arranged on the flower basket clamping plate, and the vertical distance from the second positioning block to the positioning pin is equal to or slightly larger than the vertical distance from the storage flower basket positioning hole to the storage flower basket positioning surface.
Furthermore, the second positioning block is strip-shaped.
Further, a base plate is arranged on the flower basket clamping plate; the surface of the backing plate is provided with anti-skid grains.
Further, the height of the second positioning block is greater than that of the base plate.
Furthermore, the manipulator supporting plate is provided with a transverse reinforcing strip and a vertical reinforcing strip.
Furthermore, a photoelectric switch sensor is arranged on the clamping plate.
Further, the flower basket clamping plate comprises a left clamping plate and a right clamping plate; the photoelectric switch sensor is a laser correlation photoelectric sensor, a laser transmitting end is arranged on the left clamping plate, and a laser receiving end is arranged on the right clamping plate.
Furthermore, a pressure equalizing plate is arranged at the front end of the push rod end of the telescopic device and connected with the flower basket clamping plate.
The utility model has the advantages of compared with the prior art:
1. the structure to current semiconductor wafer basket of flowers makes the adaptability adjustment, is equipped with the locating pin that matches storage basket of flowers locating hole on the basket of flowers clamp plate, can accomplish the effective clamp of tight to semiconductor wafer basket of flowers.
2. The second positioning block is provided with a positioning face for butting the storage basket, and the angle fixation of the semiconductor wafer basket is accurately finished by matching the positioning pin, so that the semiconductor wafer storage basket is prevented from rotating and shifting in the transportation process.
3. The clamping plate is provided with a photoelectric switch sensor, and the photoelectric switch sensor can be used for finishing judging whether the clamping manipulator successfully clamps the semiconductor wafer basket and performing subsequent operation in the manipulator clamping system; the pressure equalizing plate is arranged at the front end of the push rod end of the telescopic device and connected with the flower basket clamping plate, so that the stability of connection between the clamping plate and the telescopic device is kept.
Drawings
FIG. 1 is a schematic view of the overall structure system of the present invention;
fig. 2 is a schematic structural diagram of the manipulator support plate of the present invention;
fig. 3 is a semiconductor wafer basket with semiconductor wafers disposed thereon.
Detailed Description
In order to deepen the understanding of the present invention, we will make further details of the present invention with reference to the drawings, and this embodiment is only used to explain the present invention, and does not constitute a limitation to the protection scope of the present invention.
Fig. 1-2 show an embodiment of a clamping manipulator of a semiconductor wafer saving basket conveying line according to the present invention, which includes a manipulator support plate 1 and telescopic devices 2 disposed at two sides of the manipulator support plate 1; the push rod end of the telescopic device 2 is connected with a flower basket clamping plate 3; a connecting plate 23 is arranged between the push rod end of the telescopic device 2 and the clamping plate 3; the flower basket clamping plate 3 comprises a left clamping plate 3-1 and a right clamping plate 3-2; the photoelectric switch sensor is a diffusion reflection type photoelectric sensor, a laser emitting end is arranged on the left clamping plate 3-1, and an RFID reading head is arranged on the right clamping plate 3-2. The flower basket clamping plate 3 is provided with a positioning pin 30 matched with the storage flower basket positioning hole 91, a base plate 31 and a photoelectric switch sensor; the surface of the backing plate 31 is provided with anti-skid grains. The basket clamping plate 3 is provided with a second positioning block 32 in a long strip shape, and the vertical distance from the second positioning block 32 to the positioning pin 30 is equal to or slightly greater than the vertical distance from the storage basket positioning hole 91 to the storage basket positioning surface 901. The height of the second positioning block 32 is greater than that of the backing plate 31.
The manipulator supporting plate 1 is provided with a transverse reinforcing strip 11 and a vertical reinforcing strip 12.
Two transverse reinforcing strips 11 are arranged in parallel; two vertical reinforcing strips 12 are arranged in parallel;
the vertical reinforcing strips 12 are arranged between the two parallel transverse reinforcing strips 11, and divide the manipulator supporting plate 1 into a left expansion device fixing area 1-1, a right expansion device fixing area 1-2 and a manipulator mechanical arm connecting area 1-3; the left expansion device fixing area 1-1 and the right expansion device fixing area 1-2 are internally provided with expansion devices 2. Because the device is in the clamping process, the semiconductor wafer basket 9 needs to be clamped, the device is mainly stressed by the force in the horizontal direction, and the rigidity of the mechanical arm supporting plate 1 is enhanced by the design of the transverse reinforcing strips 11 and the vertical reinforcing strips 12.
The utility model has the characteristics of simple structure and stable clamping for the semiconductor wafer basket, the utility model makes adaptability adjustment for the structure of the existing semiconductor wafer basket, and the positioning pin 30 matched with the storage basket positioning hole 91 is arranged on the basket clamping plate 3, thus the effective clamping for the semiconductor wafer basket can be completed; secondly, a second positioning block 32 which is butted with the storage basket positioning surface 901 is arranged and matched with the positioning pin 30, so that the angle fixation of the semiconductor wafer basket is accurately finished, and the semiconductor wafer storage basket is prevented from rotating and shifting in the transportation process; finally, the clamping plate 3 is provided with a photoelectric switch sensor, and the photoelectric switch sensor can be used for finishing judging whether the clamping manipulator successfully clamps the semiconductor wafer basket and carrying out subsequent operation in a manipulator clamping system; the pressure equalizing plate is arranged at the front end of the push rod end of the telescopic device and connected with the flower basket clamping plate, so that the stress area is increased, and the stability of connection between the clamping plate 3 and the telescopic device 2 is favorably kept.
The foregoing detailed description of the embodiments is provided for the purpose of illustrating the technical concept and structural features of the present invention, and is not intended to limit the scope of the present invention, which is defined by the claims and the accompanying drawings.

Claims (9)

1. The utility model provides a be suitable for clamping manipulator of semiconductor wafer savings basket transfer chain which characterized in that: comprises a manipulator supporting plate (1) and telescopic devices (2) arranged at two sides of the manipulator supporting plate (1); the push rod end of the telescopic device (2) is connected with a flower basket clamping plate (3); and the flower basket clamping plate (3) is provided with a positioning pin (30) matched with the storage flower basket positioning hole (91).
2. A clamping robot adapted for a semiconductor wafer storage basket conveyor line as claimed in claim 1, wherein: the flower basket clamping plate (3) is provided with a second positioning block (32), and the vertical distance from the second positioning block (32) to the positioning pin (30) is equal to or slightly greater than the vertical distance from the storage flower basket positioning hole (91) to the storage flower basket positioning surface (901).
3. The clamping manipulator for a semiconductor wafer storage basket conveying line as claimed in claim 2, wherein: the second positioning block (32) is strip-shaped.
4. A clamping robot adapted for a semiconductor wafer storage basket conveyor line as claimed in claim 3, wherein: a backing plate (31) is arranged on the flower basket clamping plate (3); the surface of the backing plate (31) is provided with anti-skid grains.
5. The clamping manipulator for a semiconductor wafer storage basket conveying line as claimed in claim 4, wherein: the height of the second positioning block (32) is greater than that of the backing plate (31).
6. A clamping robot adapted for a semiconductor wafer storage basket conveyor line as claimed in claim 1, wherein: and a transverse reinforcing strip (11) and a vertical reinforcing strip (12) are arranged on the manipulator supporting plate (1).
7. A clamping robot adapted for a semiconductor wafer storage basket conveyor line as claimed in claim 1, wherein: and a photoelectric switch sensor is arranged on the clamping plate (3).
8. A clamping robot adapted for a semiconductor wafer storage basket delivery line as recited in claim 7, wherein: the flower basket clamping plate (3) comprises a left clamping plate (3-1) and a right clamping plate (3-2); the photoelectric switch sensor is a diffusion reflection type photoelectric sensor, a laser emitting end is arranged on the left clamping plate (3-1), and an RFID reading head is arranged on the right clamping plate (3-2).
9. A clamping robot adapted for a semiconductor wafer storage basket conveyor line as claimed in claim 1, wherein: the front end of the push rod end of the telescopic device (2) is provided with a pressure equalizing plate (23), and the pressure equalizing plate (23) is connected with the flower basket clamping plate (3).
CN202022221468.7U 2020-09-30 2020-09-30 Clamping manipulator suitable for semiconductor wafer storage basket conveying line Active CN213592869U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022221468.7U CN213592869U (en) 2020-09-30 2020-09-30 Clamping manipulator suitable for semiconductor wafer storage basket conveying line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022221468.7U CN213592869U (en) 2020-09-30 2020-09-30 Clamping manipulator suitable for semiconductor wafer storage basket conveying line

Publications (1)

Publication Number Publication Date
CN213592869U true CN213592869U (en) 2021-07-02

Family

ID=76589708

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022221468.7U Active CN213592869U (en) 2020-09-30 2020-09-30 Clamping manipulator suitable for semiconductor wafer storage basket conveying line

Country Status (1)

Country Link
CN (1) CN213592869U (en)

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Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: A clamping manipulator suitable for semiconductor chip storage basket conveying line

Effective date of registration: 20220614

Granted publication date: 20210702

Pledgee: Bank of Jiangsu Co.,Ltd. Wuxi Xixi sub branch

Pledgor: WUXI TAIRUI ELECTRIC EQUIPMENT CO.,LTD.

Registration number: Y2022320010224

PE01 Entry into force of the registration of the contract for pledge of patent right