CN213186597U - Graphite heater for preparing silicon single crystal - Google Patents

Graphite heater for preparing silicon single crystal Download PDF

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Publication number
CN213186597U
CN213186597U CN202022502429.4U CN202022502429U CN213186597U CN 213186597 U CN213186597 U CN 213186597U CN 202022502429 U CN202022502429 U CN 202022502429U CN 213186597 U CN213186597 U CN 213186597U
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sets
graphite
silicon single
heating
single crystal
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CN202022502429.4U
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Chinese (zh)
Inventor
尹朝洁
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Honglang New Materials Shanghai Co ltd
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Honglang New Materials Shanghai Co ltd
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Priority to CN202022502429.4U priority Critical patent/CN213186597U/en
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Abstract

The utility model relates to the technical field of graphite heaters, in particular to a graphite heater for preparing silicon single crystals, which can make the disassembly and assembly of a heating device more convenient, is convenient for maintenance, reduces the manufacturing cost of heating materials and reduces the use limitation; including the heating cabinet, the electric controller, the graphite cartridge heater, two sets of fixing bolt and sealed lid, the inside of heating cabinet is provided with the cavity, the top of heating cabinet is provided with gets and puts the mouth, it communicates with each other with the cavity to get to put the mouth, electric controller fixed mounting is at the front end of heating cabinet, the bottom mounting of cavity is provided with the base, the top bilateral symmetry of base is provided with two sets of slots and two sets of screw holes, the graphite cartridge heater is fixed to peg graft on the base through the cooperation of two sets of inserted blocks with the slot, the circumference outer wall of graphite cartridge heater is provided with multiunit province material groove of annular equidistance, what correspond on the heating cabinet is provided with four group's hasps, sealed lid is covering the dress on getting to.

Description

Graphite heater for preparing silicon single crystal
Technical Field
The utility model relates to a graphite heater's technical field especially relates to a graphite heater for preparation silicon single crystal.
Background
The silicon single crystal is also called monocrystalline silicon, is a single crystal of silicon, has a basically complete lattice structure, has different properties in different directions, is a good semiconductor material, is used for manufacturing semiconductor devices, solar cells, chips and the like, and is formed by heating the silicon single crystal at high temperature through a graphite heater and then drawing the silicon single crystal in a single crystal furnace in the production process.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a can make heating device dismouting more convenient, be convenient for overhaul and maintain, make heating material cost of manufacture reduce, reduce a preparation graphite heater for silicon single crystal who uses the limitation.
The utility model relates to a graphite heater for preparing silicon single crystal, which comprises a heating box, an electric controller, a graphite heating cylinder, two groups of fixing bolts and a sealing cover, wherein a cavity is arranged in the heating box, a fetching and placing opening is arranged at the top end of the heating box and is communicated with the cavity, the electric controller is fixedly arranged at the front end of the heating box, a base is fixedly arranged at the bottom end of the cavity, two groups of slots and two groups of threaded holes are symmetrically arranged at the top end of the base, two groups of insertion blocks are arranged at the bottom end of the graphite heating cylinder, the graphite heating cylinder is fixedly inserted on the base through the matching of the two groups of insertion blocks and the slots, the graphite heating cylinder is electrically connected with the electric controller, fixing seats are arranged at the left end and the right end of the graphite heating cylinder, the two groups of fixing bolts are respectively rotatably and fixedly arranged on the two groups of fixing seats through the matching with, four groups of lock sleeves are annularly and equidistantly arranged on the sealing cover, four groups of lock catches are correspondingly arranged on the heating box, and the sealing cover is arranged on the taking and placing opening through the lock sleeves and the fixed cover matched with the lock catches.
The utility model discloses a preparation graphite heater for silicon single crystal still includes two sets of carrying handle, and the fixed mounting of two sets of carrying handle difference symmetry is at both ends about graphite heater cylinder circumference outer wall.
The utility model discloses a preparation graphite heater for silicon single crystal still includes four group's gimbals and four group's truckles, and the equal fixed mounting of four group's gimbals is in the bottom of heating cabinet, and four group's truckles rotate respectively and install on four group's gimbals, all are provided with the locking plate on four group's gimbals.
The utility model discloses a preparation graphite heater for silicon single crystal still includes the hand push handle, and the hand push is fixed mounting at the left end of heating cabinet.
The utility model discloses a graphite heater for preparing silicon single crystal still includes anti-skidding handle cover, and the fixed suit of anti-skidding handle cover is on the circumference outer wall of hand push handle.
The utility model discloses a preparation graphite heater for silicon single crystal still includes the handle, and handle fixed mounting is on the top of sealed lid.
The utility model discloses a preparation graphite heater for silicon single crystal, be provided with the intermediate layer in the inner wall of heating cabinet, the intermediate layer intussuseption is filled and is provided with insulation material.
The utility model discloses a preparation graphite heater for silicon single crystal still includes sealed the pad, and sealed pad fixed mounting is on getting the border of putting a mouthful top.
Compared with the prior art, the beneficial effects of the utility model are that: firstly when installing, on the base is received through inserted block fixed insertion with the graphite cartridge heater, rethread fixing bolt fixes the graphite cartridge heater, the completion equipment, then put into the cavity with the material of heating, through automatically controlled ware control starting equipment, regard as the resistance heat-generating body with the graphite cartridge heater, rapid heating up after the circular telegram, heat the material, install through adopting the mode of pegging graft and bolt fastening, can make the heating device dismouting more convenient, be convenient for overhaul and maintain, through set up economize silo on the graphite cartridge heater, can be under the circumstances of guaranteeing the heating efficiency, reduce the production materials of graphite cartridge heater, make heating material cost of manufacture reduce, reduce and use the limitation.
Drawings
Fig. 1 is a front schematic view of the present invention;
fig. 2 is a schematic sectional structure of the present invention;
FIG. 3 is a schematic diagram of a transverse cross-sectional structure of a graphite heating cylinder according to the present invention;
FIG. 4 is a schematic view of the underside of a graphite heating cartridge according to the present invention;
in the drawings, the reference numbers: 1. a heating box; 2. an electric controller; 3. a base; 4. a graphite heating cylinder; 5. inserting a block; 6. a fixed seat; 7. fixing the bolt; 8. a material-saving groove; 9. a sealing cover; 10. a lock sleeve; 11. locking; 12. a carrying handle; 13. a gimbal; 14. a caster wheel; 15. a locking plate; 16. a hand-push handle; 17. an anti-slip handle sleeve; 18. a handle; 19. a thermal insulation material; 20. and a gasket.
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
As shown in figures 1 to 4, the utility model relates to a graphite heater for preparing silicon single crystal, which comprises a heating box 1, an electric controller 2, a graphite heating cylinder 4, two groups of fixing bolts 7 and a sealing cover 9, wherein a cavity is arranged in the heating box 1, a taking and placing opening is arranged at the top end of the heating box 1 and is communicated with the cavity, the electric controller 2 is fixedly arranged at the front end of the heating box 1, a base 3 is fixedly arranged at the bottom end of the cavity, two groups of slots and two groups of threaded holes are symmetrically arranged at the top end of the base 3, two groups of inserting blocks 5 are arranged at the bottom end of the graphite heating cylinder 4, the graphite heating cylinder 4 is fixedly inserted on the base 3 through the matching of the two groups of inserting blocks 5 and the slots, the graphite heating cylinder 4 is electrically connected with the electric controller 2, fixing seats 6 are arranged at the left end and the right end of the graphite heating cylinder 4, the two groups of fixing bolts 7 are respectively and rotatably, a plurality of groups of material saving grooves 8 are annularly and equidistantly arranged on the circumferential outer wall of the graphite heating cylinder 4, four groups of lock sleeves 10 are annularly and equidistantly arranged on the sealing cover 9, four groups of lock catches 11 are correspondingly arranged on the heating box 1, and the sealing cover 9 is arranged on the taking and placing opening through the fixed cover of the lock sleeves 10 and the lock catches 11; firstly when installing, will graphite heating cylinder 4 through inserting 5 fixed the pegging graft base 3 on, rethread fixing bolt 7 fixes graphite heating cylinder 4, the completion equipment, then put into the cavity with the material of heating, through automatically controlled 2 control starting equipment, regard graphite heating cylinder 4 as the resistance heat-generating body, rapid heating up after the circular telegram, heat the material, install through adopting the mode of pegging graft and bolt fastening, it is more convenient to make the heating device dismouting, be convenient for overhaul the maintenance, through setting up province silo 8 on graphite heating cylinder 4, can be under the circumstances of guaranteeing the heating efficiency, reduce the production materials of graphite heating cylinder 4, make heating material cost of manufacture reduce, reduce the use limitation.
The utility model relates to a graphite heater for preparing silicon single crystal, which also comprises two groups of handles 12, wherein the two groups of handles 12 are respectively and symmetrically and fixedly arranged at the left and right ends of the circumferential outer wall of a graphite heating cylinder 4; through setting up the carrying handle 12, can make getting of graphite heating cylinder 4 put more convenient, reduce and use the limitation.
The utility model discloses a graphite heater for preparing silicon single crystal, which also comprises four groups of universal frames 13 and four groups of trundles 14, wherein the four groups of universal frames 13 are all fixedly arranged at the bottom end of the heating box 1, the four groups of trundles 14 are respectively rotatably arranged on the four groups of universal frames 13, and locking plates 15 are arranged on the four groups of universal frames 13; through setting up gimbal 13 and truckle 14, can make the removal of equipment and adjust laborsaving convenient more, reduce and use the limitation.
The utility model relates to a graphite heater for preparing silicon single crystal, which also comprises a hand push handle 16, wherein the hand push handle 16 is fixedly arranged at the left end of the heating box 1; through setting up hand push 16, can be convenient for the pushing equipment and remove and adjust, reduce and use the limitation.
The utility model relates to a graphite heater for preparing silicon single crystal, which also comprises an anti-skid handle sleeve 17, wherein the anti-skid handle sleeve 17 is fixedly sleeved on the circumferential outer wall of a hand push handle 16; through setting up antiskid handle cover 17, can effectively prevent to appear skidding the condition of taking off the hand in promoting the in-process, improve and use the reliability.
The utility model relates to a graphite heater for preparing silicon single crystal, which also comprises a handle 18, wherein the handle 18 is fixedly arranged at the top end of the sealing cover 9; through setting up handle 18, can make sealed lid 9 get put more convenient, reduce the use limitation.
The utility model relates to a graphite heater for preparing silicon single crystal, an interlayer is arranged in the inner wall of a heating box 1, and a heat-insulating material 19 is filled in the interlayer; through setting up insulation material 19, can strengthen the thermal insulation performance of heating cabinet 1, reduce thermal scattering and disappearing, improve the reliability of using.
The utility model relates to a graphite heater for preparing silicon single crystal, which also comprises a sealing gasket 20, wherein the sealing gasket 20 is fixedly arranged on the edge of the top end of the taking and placing opening; by providing the gasket 20, the sealing of the sealing cover 9 can be more tightly performed, the sealing performance of the sealing cover 9 can be enhanced, the heat loss can be further reduced, and the reliability in use can be improved.
The utility model discloses a preparation graphite heater for silicon single crystal, it is at the during operation, at first when installing, on earlier with graphite cartridge heater 4 through 5 fixed insertions of inserted block to base 3, rethread fixing bolt 7 fixes graphite cartridge heater 4, accomplishes the equipment, then puts into the cavity with the material of heating, through automatically controlled 2 control starting equipment to graphite cartridge heater 4 is as the resistance heat-generating body, and rapid heating up after the circular telegram can heat the material.
The installation mode, the connection mode or the arrangement mode of the graphite heater for preparing the silicon single crystal of the utility model are common mechanical modes, and the graphite heater can be implemented as long as the beneficial effects can be achieved; the utility model discloses a preparation graphite heater for silicon single crystal's automatically controlled ware is purchase on the market, and this industry technical staff only need according to its subsidiary service instruction install and operate can.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims (8)

1. A graphite heater for preparing silicon single crystals is characterized by comprising a heating box (1), an electric controller (2), a graphite heating cylinder (4), two sets of fixing bolts (7) and a sealing cover (9), wherein a cavity is arranged inside the heating box (1), a taking and placing opening is formed in the top end of the heating box (1) and communicated with the cavity, the electric controller (2) is fixedly installed at the front end of the heating box (1), a base (3) is fixedly arranged at the bottom end of the cavity, two sets of inserting grooves and two sets of threaded holes are symmetrically formed in the left and right of the top end of the base (3), two sets of inserting blocks (5) are arranged at the bottom end of the graphite heating cylinder (4), the graphite heating cylinder (4) is fixedly inserted in the base (3) through the matching of the two sets of inserting blocks (5) and the inserting grooves, the graphite heating cylinder (4) is electrically connected with the electric controller (2), fixing seats (6) are arranged at the left end and the right end, two sets of fixing bolts (7) are respectively rotatably and fixedly installed on the two sets of fixing seats (6) through matching with the fixing seats (6) and threaded holes, a plurality of groups of material saving grooves (8) are arranged on the outer wall of the circumference of the graphite heating cylinder (4) in an annular and equidistant mode, four groups of lock sleeves (10) are arranged on the sealing cover (9) in an annular and equidistant mode, four groups of lock catches (11) are correspondingly arranged on the heating box (1), and the sealing cover (9) is fixedly covered on the taking and placing opening through the matching of the lock sleeves (10) and the lock catches (11).
2. The graphite heater for preparing silicon single crystal according to claim 1, further comprising two sets of handles (12), wherein the two sets of handles (12) are symmetrically and fixedly installed at the left and right ends of the circumferential outer wall of the graphite heating cylinder (4), respectively.
3. The graphite heater for producing silicon single crystals as claimed in claim 2, further comprising four sets of gimbals (13) and four sets of casters (14), wherein the four sets of gimbals (13) are fixedly installed at the bottom end of the heating chamber (1), the four sets of casters (14) are respectively rotatably installed on the four sets of gimbals (13), and locking plates (15) are provided on the four sets of gimbals (13).
4. The graphite heater for producing a silicon single crystal according to claim 3, further comprising a handle (16), the handle (16) being fixedly installed at the left end of the heating chamber (1).
5. The graphite heater for producing silicon single crystal as claimed in claim 4, further comprising an anti-slip grip cover (17), wherein the anti-slip grip cover (17) is fixedly attached to the circumferential outer wall of the handle (16).
6. A graphite heater for producing a silicon single crystal as set forth in claim 5, further comprising a handle (18), wherein the handle (18) is fixedly installed at the top end of the sealing cover (9).
7. The graphite heater for producing a silicon single crystal according to claim 6, wherein an interlayer is provided in the inner wall of the heating chamber (1), and a heat insulating material (19) is filled in the interlayer.
8. The graphite heater for producing a silicon single crystal according to claim 7, further comprising a packing (20), wherein the packing (20) is fixedly installed on a rim of a top end of the access port.
CN202022502429.4U 2020-11-03 2020-11-03 Graphite heater for preparing silicon single crystal Active CN213186597U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022502429.4U CN213186597U (en) 2020-11-03 2020-11-03 Graphite heater for preparing silicon single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022502429.4U CN213186597U (en) 2020-11-03 2020-11-03 Graphite heater for preparing silicon single crystal

Publications (1)

Publication Number Publication Date
CN213186597U true CN213186597U (en) 2021-05-11

Family

ID=75780681

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202022502429.4U Active CN213186597U (en) 2020-11-03 2020-11-03 Graphite heater for preparing silicon single crystal

Country Status (1)

Country Link
CN (1) CN213186597U (en)

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