CN213081088U

CN213081088U - Burnishing device is used in semiconductor processing

Info

Publication number: CN213081088U
Application number: CN202021584309.7U
Authority: CN
Inventors: 马克军
Original assignee: Zhisheng Jinggong Electromechanical Tianjin Co ltd
Current assignee: Zhisheng Jinggong Electromechanical Tianjin Co ltd
Priority date: 2020-08-03
Filing date: 2020-08-03
Publication date: 2021-04-30
Anticipated expiration: 2030-08-03

Abstract

The utility model relates to the technical field of semiconductor polishing accessories, in particular to a polishing device for semiconductor processing, a semiconductor raw material plate of which can be conveniently and stably placed without being held by hands constantly and is convenient to use; the polishing machine comprises a workbench and a handheld polishing machine, wherein a supporting seat is arranged at the top end of the workbench; still including placing the platform, two sets of lead screws, two sets of splint, two sets of spacing posts, two sets of pivot and two sets of rotor plate, it all is connected with the curb plate to place the bench top left and right sides, two sets of first bearing frame are inside all to rotate and to be fixed with first ball bearing, two sets of lead screw outer ends all are connected with the hand wheel, two sets of first logical inslot lateral wall all can rotate and to be fixed with first ball group, two sets of second bearing frame are inside all to rotate and to be fixed with second ball bearing, still include two sets of arm-tie and two sets of pull rods, two sets of second logical inslot lateral wall all can rotate and to be fixed with second ball.

Description

Burnishing device is used in semiconductor processing

Technical Field

The utility model relates to a semiconductor polishing auxiliary device's technical field especially relates to a burnishing device for semiconductor processing.

Background

As is well known, a polishing device for semiconductor processing is an auxiliary device used in the semiconductor production and processing process to perform auxiliary polishing on a semiconductor raw material plate so as to enable the semiconductor raw material plate to be better used subsequently, and is widely used in the field of semiconductor polishing; the conventional polishing device for semiconductor processing comprises a workbench and a handheld polishing machine, wherein a supporting seat is arranged at the top end of the workbench; when the polishing device for processing the existing semiconductor is used, a semiconductor raw material plate is placed on a workbench and is held by a hand to stand, a proper polishing head is installed on a handheld polishing machine to be polished by the hand, the polishing machine is a common electric device in the market and is provided with a plurality of groups of polishing heads with different models in a standard mode, when the polishing device is bought back for use, the polishing device can be used only by being electrically connected according to a purchased instruction, and connecting wires can be reasonably wired only by working, so that the description is omitted; the existing polishing device for semiconductor processing is found in use that a semiconductor raw material plate cannot be conveniently and stably placed, needs to be held by hand at any time and is inconvenient to use.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a burnishing device is used in semiconductor processing, its former material board of semiconductor can conveniently stabilize and place, need not to hold constantly, convenient to use.

The utility model discloses a polishing device for semiconductor processing, which comprises a workbench and a handheld polishing machine, wherein the top end of the workbench is provided with a supporting seat, and the handheld polishing machine is placed at the supporting seat; the device also comprises a placing table, two groups of screw rods, two groups of clamping plates, two groups of limiting columns, two groups of rotating shafts and two groups of rotating plates, wherein the left side and the right side of the top end of the placing table are both connected with side plates, the outer sides of the two groups of clamping plates are both provided with first bearing seats, first ball bearings are rotatably fixed in the two groups of first bearing seats, the inner ends of the two groups of screw rods respectively penetrate through the two groups of side plates and respectively extend out of the two groups of side plates to be in interference fit with the two groups of first ball bearings, the outer ends of the two groups of screw rods are both connected with hand wheels, the two groups of limiting columns are respectively arranged on the two groups of clamping plates, the two groups of side plates are both transversely provided with first through grooves, the inner side walls of the two groups of first through grooves can be rotatably fixed with first ball groups, the outer ends of the two groups of, two sets of pivot outer ends respectively with two sets of second ball bearing interference fit, two sets of pivot inner is connected with two sets of rotor plate outside centers respectively, still include two sets of arm-tie and two sets of pull rod, two sets of pull rod one end are connected with two sets of arm-tie respectively, transversely all be provided with the second logical groove on two sets of splint, and all can rotate at two sets of second logical inslot lateral wall and be fixed with the second ball group, two sets of pull rod other ends pass two sets of second ball group respectively and stretch into the inboard to two sets of splint respectively, two sets of arm-tie outsides all are provided with the pull ring, two sets of rotor plate outsides all are provided with the draw-in groove, two sets of pull rod other ends insert respectively inside one of them set of draw-in grooves that are arranged.

Preferably, the equal fixed cover in two sets of pull rod outsides is equipped with the cardboard, be located left cardboard and be located between the left splint and be located the cardboard on right side and be located all be connected with first cover spring group and first scalable nest of tubes between the splint on right side, two sets of first cover spring groups suit respectively in two sets of first scalable nest of tubes outsides, two sets of spacing post outsides all are connected with wire rope, all be connected with the couple on two sets of wire rope, two sets of couples respectively the hook department at two sets of pull rings.

Preferably, place a top and be connected with the slot, both ends all are connected with the fixed plate around two sets of rotor plates are inboard, still include six clamping pieces of group, six second cover spring groups and six scalable nest of tubes of group second one end are equallyd divide do not with the slot in around both sides and four fixed plate inboards be connected, six second cover spring groups and six scalable nest of tubes of group second other end are equallyd divide do not with six clamping pieces of group and are connected, six second cover spring groups of suit respectively in six scalable nest of tubes of group outside of group second.

Preferably, the left side and the right side of the top end of the workbench are respectively connected with a supporting block and a supporting table, the workbench further comprises a reciprocating motor, a moving block and a threaded column, the reciprocating motor is installed on the top end of the supporting table, the right end of the threaded column is connected with the left output end of the reciprocating motor, a third bearing seat is arranged on the right side of the supporting block, a third ball bearing is rotatably fixed in the third bearing seat, a left end screw of the threaded column penetrates through the right side of the moving block and extends out of the left side of the moving block to be in interference fit with the.

Preferably, the right side of the top end of the workbench is connected with a vertical plate, a limiting rod is arranged on the vertical plate, a third through groove is transversely formed in the moving block, a third ball group is rotatably fixed on the inner side wall of the third through groove, and the other end of the limiting rod penetrates through the third ball group and extends out of the left side of the moving block to be connected with the supporting block.

Preferably, the bottom end of the moving block is connected with a pulley block, and the bottom end of the pulley block is in contact with the top end of the workbench.

Compared with the prior art, the beneficial effects of the utility model are that: the raw material plate can be placed by the placing table, the hand wheel is manually rotated to drive the screw rod to rotate, the clamping plate is convenient to move longitudinally due to the matching of the first ball bearing, thereby facilitating the clamping of the raw material plate, enabling the clamping plate to only move transversely without rotating along with the rotation of the screw rod due to the limiting column, enabling the first ball group to assist the limiting column to slide transversely relatively more smoothly, meanwhile, the semiconductor raw material plate can be matched with the two groups of rotating shafts to rotate during clamping, the use is more convenient, after the rotation, the pull rod is inserted into the corresponding slot positioned at the lower part to fix the rotating plate conveniently, when the rotating plate needs to drive the raw material plate to rotate, the pull ring is pulled manually to pull out the pull rod, the second ball group assists the pull rod to slide smoothly, the semiconductor raw material plate can be placed stably conveniently, and the semiconductor raw material plate does not need to be held by hands constantly, and is convenient to use.

Drawings

Fig. 1 is a schematic structural diagram of the present invention;

FIG. 2 is an enlarged partial view of portion A of FIG. 1;

FIG. 3 is an enlarged view of a portion B of FIG. 1;

FIG. 4 is an enlarged partial view of portion C of FIG. 1;

FIG. 5 is a right side view of the pivoting plate, the fixed plate and the clip connection on the left;

in the drawings, the reference numbers: 1. a work table; 2. a hand-held polishing machine; 3. a supporting seat; 4. a placing table; 5. a lead screw; 6. a splint; 7. a limiting column; 8. a rotating shaft; 9. a rotating plate; 10. a side plate; 11. a hand wheel; 12. pulling a plate; 13. a pull rod; 14. a pull ring; 15. a card slot; 16. clamping a plate; 17. a first set of springs; 18. a wire rope; 19. hooking; 20. a fixing plate; 21. a clip; 22. a second set of springs; 23. a support block; 24. a support table; 25. a reciprocating motor; 26. a moving block; 27. a threaded post; 28. a vertical plate; 29. a limiting rod; 30. and (4) a pulley block.

Detailed Description

The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

As shown in fig. 1 to 5, the polishing device for semiconductor processing of the present invention comprises a worktable 1 and a handheld polishing machine 2, wherein a supporting seat 3 is arranged at the top end of the worktable 1, and the handheld polishing machine 2 is placed at the supporting seat 3; the novel bearing device is characterized by further comprising a placing table 4, two groups of screw rods 5, two groups of clamping plates 6, two groups of limiting columns 7, two groups of rotating shafts 8 and two groups of rotating plates 9, wherein the left side and the right side of the top end of the placing table 4 are respectively connected with side plates 10, the outer sides of the two groups of clamping plates 6 are respectively provided with a first bearing seat, a first ball bearing is rotatably fixed in the two groups of first bearing seats, the inner ends of the two groups of screw rods 5 respectively penetrate through the two groups of side plates 10 and respectively extend out to the inner parts of the two groups of side plates 10 to be in interference fit with the two groups of first ball bearings respectively, the outer ends of the two groups of screw rods 5 are respectively connected with hand wheels 11, the two groups of limiting columns 7 are respectively arranged on the two groups of clamping plates 6, first through grooves are transversely arranged on the two groups of side plates 10, first ball groups are rotatably fixed, and the inside of two groups of second bearing seats can be rotatably fixed with second ball bearings, the outer ends of two groups of rotating shafts 8 are respectively in interference fit with the two groups of second ball bearings, the inner ends of two groups of rotating shafts 8 are respectively connected with the centers of the outer sides of two groups of rotating plates 9, the device also comprises two groups of pull plates 12 and two groups of pull rods 13, one ends of two groups of pull rods 13 are respectively connected with the two groups of pull plates 12, two groups of clamping plates 6 are transversely provided with second through grooves, the inner side walls of the two groups of second through grooves can be rotatably fixed with the second ball groups, the other ends of two groups of pull rods 13 respectively penetrate through the two groups of second ball groups and respectively extend into the inner sides of the two groups of clamping plates 6, the outer sides of the two groups of pull plates 12 are respectively provided with pull rings 14, the outer sides of the two groups of rotating plates 9 are respectively provided with clamping grooves 15, the, the semiconductor material plate can be placed through the placing table 4, the hand wheel 11 is manually rotated to drive the screw 5 to rotate, the clamping plate 6 can conveniently move longitudinally due to the matching of the first ball bearing, the material plate is further conveniently clamped, the limiting column 7 enables the clamping plate 6 to only move transversely and not rotate along with the rotation of the screw 5, the first ball group assists the limiting column 7 to slide transversely and relatively smoothly, meanwhile, the semiconductor material plate can cooperate with the two groups of rotating shafts 8 to rotate during clamping, the use is more convenient, after the rotation, the pull rod 13 is inserted into the corresponding slot at the lower part to conveniently fix the rotating plate 9, when the rotating plate 9 needs to drive the material plate to rotate, the pull ring 14 is manually pulled to pull out the pull rod 13, the second ball group assists the pull rod 13 to slide relatively smoothly, the semiconductor material plate can be conveniently and stably placed, the hand is not needed to be held constantly, and the use is convenient.

The clamping plates 16 are fixedly sleeved on the outer sides of the two groups of pull rods 13, a first spring set 17 and a first telescopic pipe set are respectively connected between the clamping plate 16 on the left side and the clamping plate 6 on the right side, the first spring set 17 is respectively sleeved on the outer sides of the two first telescopic pipe sets, steel wire ropes 18 are respectively connected on the outer sides of the two limiting columns 7, hooks 19 are respectively connected on the two steel wire ropes 18, the two hooks 19 are respectively hooked on the two groups of pull rings 14, the two hooks 19 are not hooked on the two groups of pull rings 14 under a normal state, the clamping plates 16 can be extruded by the first spring set 17 to enable the pull rods 13 to be tightly inserted into corresponding slots under the pull rods, when the pull rods 13 need to be pulled out for a long time, the hooks 19 are hooked on the pull rings 14 to limit the pull rods 13, the first spring set 17 of the first telescopic pipe set assists the first spring set to stretch and not to, the top end of the placing table 4 is connected with a slot, the front end and the rear end of the inner side of the two groups of rotating plates 9 are both connected with fixing plates 20, the placing table further comprises six groups of clamping pieces 21, six groups of second spring groups 22 and six groups of second telescopic tube groups, one ends of the six groups of second spring groups 22 and the six groups of second telescopic tube groups are respectively connected with the front side and the rear side in the slot and the inner sides of the four groups of fixing plates 20, the other ends of the six groups of second spring groups 22 and the six groups of second telescopic tube groups are respectively connected with the six groups of clamping pieces 21, the six groups of second spring groups 22 are respectively sleeved on the outer sides of the six groups of second telescopic tube groups, the placing table can facilitate the placing of the original plate through the slot, the six groups of second spring groups 22 drive the six groups of clamping pieces 21 to clamp the bottom end and the left side and the right side of the original plate, the fixing effect is improved, the second spring groups of second spring groups, the automatic angle adjusting device further comprises a reciprocating motor 25, a moving block 26 and a threaded column 27, wherein the reciprocating motor 25 is installed at the top end of the supporting table 24, the right end of the threaded column 27 is connected with the left output end of the reciprocating motor 25, a third bearing seat is arranged on the right side of the supporting block 23, a third ball bearing is rotatably fixed in the third bearing seat, the left end of the threaded column 27 penetrates through the right side of the moving block 26 and extends to the left side of the moving block 26 to be in interference fit with the third ball bearing, the placing table 4 is installed at the top end of the moving block 26 and can be electrically connected with an external controller through the reciprocating motor 25, the reciprocating motor 25 drives the threaded column 27 to rotate and is matched with the third ball bearing to enable the moving block 26 to drive the transverse movement, the raw material plate can be conveniently adjusted transversely, the polishing is more convenient, the reciprocating motor 25 is a common, when the movable block is bought and reused, the movable block can be used only by being electrically connected according to the purchased use instruction, and the connecting lead wire can be reasonably wired for working, so that the description is omitted, the right side of the top end of the workbench 1 is connected with a vertical plate 28, a limiting rod 29 is arranged on the vertical plate 28, a third through groove is transversely arranged on the movable block 26, a third ball group is rotatably fixed on the inner side wall of the third through groove, the other end of the limiting rod 29 passes through the third ball group and extends out to the left side of the moving block 26 to be connected with the supporting block 23, it can make movable block 26 only lateral shifting and not rotate along with screw post 27 through gag lever post 29, and the supplementary movable block 26 of third ball group slides more smoothly, and movable block 26 bottom is connected with assembly pulley 30, and assembly pulley 30 bottom and workstation 1 top contact can make things convenient for movable block 26 to slide and improve the support effect through assembly pulley 30.

The utility model discloses a burnishing device is used in semiconductor processing, it is above the mounting means of all parts, connected mode or the mode that sets up are the welding, riveting or other common mechanical mode, wherein can slide/rotate fixedly promptly for slide/not dropping under the rotation state, seal the intercommunication and seal when two connecting pieces communicate promptly, and the concrete structure of its all parts, model and coefficient index are its from the area technique, as long as can reach all implementation of its beneficial effect, above-mentioned all with the electric module and be the common electrical part in market with electrical apparatus, only need to connect according to the mutual electricity of the instruction manual of buying back together when using and can use, and control module is its common from taking the module, the event is no longer repeated here.

The polishing device for semiconductor processing of the utility model, without being described to the contrary, the directional words included in the terms "up, down, left, right, front, back, inner, and vertical and horizontal" and the like only represent the direction of the term in the normal use state, or be a trivial term understood by those skilled in the art, and should not be considered as limiting the term, at the same time, the numerical terms "first," "second," and "third," etc. do not denote any particular quantity or order, but rather are used to distinguish one from another, furthermore, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements, but also includes other elements not expressly listed or inherent to such process, method, article, or apparatus.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims

1. A polishing device for semiconductor processing comprises a workbench (1) and a handheld polishing machine (2), wherein a supporting seat (3) is arranged at the top end of the workbench (1), and the handheld polishing machine (2) is placed at the supporting seat (3); the device is characterized by further comprising a placing table (4), two groups of screw rods (5), two groups of clamping plates (6), two groups of limiting columns (7), two groups of rotating shafts (8) and two groups of rotating plates (9), wherein the left side and the right side of the top end of the placing table (4) are respectively connected with a side plate (10), the outer sides of the two groups of clamping plates (6) are respectively provided with a first bearing seat, a first ball bearing is rotatably fixed inside the two groups of first bearing seats, the inner ends of the two groups of screw rods (5) respectively penetrate through the two groups of side plates (10) in a threaded manner and respectively extend out of the two groups of side plates (10) to be respectively in interference fit with the two groups of first ball bearings, the outer ends of the two groups of screw rods (5) are respectively connected with a hand wheel (11), the two groups of limiting columns (7) are respectively installed on the two groups of clamping plates (, the outer ends of two groups of limiting columns (7) respectively penetrate through two groups of first ball groups and respectively extend out of two groups of side plates (10), the inner sides of two groups of clamping plates (6) are respectively provided with a second bearing seat, second ball bearings can be rotatably fixed in the two groups of second bearing seats, the outer ends of two groups of rotating shafts (8) are respectively in interference fit with the two groups of second ball bearings, the inner ends of the two groups of rotating shafts (8) are respectively connected with the outer side centers of two groups of rotating plates (9), the clamping device also comprises two groups of pull plates (12) and two groups of pull rods (13), one ends of the two groups of pull rods (13) are respectively connected with the two groups of pull plates (12), the two groups of clamping plates (6) are transversely provided with second through grooves, the inner side walls of the two groups of second through grooves can be rotatably fixed with the second ball groups, the other ends of the two groups of pull rods (13) respectively penetrate through the two groups of second ball groups and, the outer sides of the two groups of rotating plates (9) are respectively provided with a clamping groove (15), and the other ends of the two groups of pull rods (13) are respectively inserted into one group of clamping grooves (15) on the left side and one group of clamping grooves (15) on the right side.

2. The polishing device for semiconductor processing as recited in claim 1, wherein two sets of pull rods (13) are fixedly sleeved with clamp plates (16) at the outer sides, a first spring set (17) and a first telescopic tube set are connected between the clamp plate (16) at the left side and the clamp plate (6) at the left side and between the clamp plate (16) at the right side and the clamp plate (6) at the right side, the two first spring sets (17) are respectively sleeved at the outer sides of the two first telescopic tube sets, two sets of limiting columns (7) are respectively connected with steel wire ropes (18), two sets of steel wire ropes (18) are respectively connected with hooks (19), and the two sets of hooks (19) are respectively hooked at the two sets of pull rods (14).

3. A polishing apparatus for semiconductor processing according to claim 2, wherein the top of the placement stage (4) is connected to a slot, and the fixing plates (20) are connected to the front and rear ends of the inner sides of the two sets of pivotal plates (9), and further comprising six sets of clamping plates (21), six sets of second springing sets (22), and six sets of second telescopic tube sets, one ends of the six sets of second springing sets (22) and the six sets of second telescopic tube sets being connected to the front and rear sides of the slot and the inner sides of the four sets of fixing plates (20), respectively, the other ends of the six sets of second springing sets (22) and the six sets of second telescopic tube sets being connected to the six sets of clamping plates (21), respectively, and the six sets of second springing sets (22) being fitted to the outer sides of the six sets of second telescopic tube sets, respectively.

4. The polishing device for semiconductor processing as claimed in claim 3, wherein the left and right sides of the top end of the worktable (1) are respectively connected with a support block (23) and a support table (24), the polishing device further comprises a reciprocating motor (25), a moving block (26) and a threaded column (27), the reciprocating motor (25) is installed at the top end of the support table (24), the right end of the threaded column (27) is connected with the left output end of the reciprocating motor (25), a third bearing seat is arranged at the right side of the support block (23), a third ball bearing is rotatably fixed in the third bearing seat, a left end screw of the threaded column (27) penetrates through the right side of the moving block (26) and extends to the left side of the moving block (26) to be in interference fit with the third ball bearing, and the placing table (4) is installed at.

5. The polishing device for semiconductor processing as recited in claim 4, wherein a vertical plate (28) is connected to the right side of the top end of the table (1), a limit rod (29) is disposed on the vertical plate (28), a third through groove is transversely disposed on the moving block (26), a third ball group is rotatably fixed on the inner side wall of the third through groove, and the other end of the limit rod (29) passes through the third ball group and extends to the left side of the moving block (26) to be connected with the support block (23).

6. A polishing device for semiconductor processing according to claim 5, characterized in that a pulley block (30) is attached to the bottom end of the moving block (26), and the bottom end of the pulley block (30) is in contact with the top end of the table (1).