CN212943802U

CN212943802U - Triaxial sensor production equipment with bright light positioning and beam aligning functions

Info

Publication number: CN212943802U
Application number: CN202022125516.2U
Authority: CN
Inventors: 黄红梅; 廖泽武
Original assignee: Dongguan City Shileidi 3D Numerical Control Technology Co Ltd
Current assignee: Beijing Huazhu Technology Co ltd
Priority date: 2020-09-24
Filing date: 2020-09-24
Publication date: 2021-04-13
Anticipated expiration: 2030-09-24

Abstract

The invention discloses a three-axis sensor production device with a bright positioning and beam aligning function, which relates to the technical field of electronic part production, in particular to a conveyor belt, a sucker clamp, a rubber head angle adjusting mechanism, a positioning and exposing mechanism and an arbitrary angle carrier mechanism, wherein one side of the top end of the conveyor belt is provided with the sucker clamp, the bottom end of the arbitrary angle carrier mechanism is provided with a support, and two sides of a workbench are provided with connecting rod clamping mechanisms. Have the guard action to the material simultaneously concurrently, prevent that the scraping from appearing in the material surface, the suitability is stronger.

Description

Triaxial sensor production equipment with bright light positioning and beam aligning functions

Technical Field

The invention relates to the technical field of electronic part production, in particular to a three-axis sensor production device with a bright positioning and beam aligning function.

Background

With the development of the times, the mobile phone plays an important role in the aspects of daily life of people, among the components of the mobile phone, the three-axis acceleration sensor is known as an accelerator of most of the technologies such as micro-confidence-step counting hearts at present, the direction of the acceleration is determined by three dimensions in an original piece, the precision is very high, the power consumption is almost negligible, and the three-axis acceleration sensor is very strong.

The common problems of the existing three-axis sensor production equipment are as follows: the reason why precise processing of fine electronic parts in a triaxial acceleration sensor is difficult to realize due to the limitation of the existing manufacturing process and the finished products depend on import too much is mainly that the quality of the finished products is influenced due to the facts that the production environment cannot be controlled in place, the single crystal silicon disc material needs to keep a yellow light and dark light environment with a certain frequency all the time while preventing static electricity in the processing engineering, and the chemical photosensitizer is unevenly coated and inert gas type high-energy particles impact aluminum elements insufficiently.

Disclosure of Invention

Aiming at the defects of the prior art, the invention provides a three-axis sensor production device with a bright light positioning beam alignment function, and solves the problems in the background technology.

In order to realize the above purpose, the invention realizes a three-axis sensor production device with the functions of bright positioning and beam alignment by the following technical proposal, which comprises a conveyor belt, a sucker clamp, a rubber head angle adjusting mechanism, a positioning exposure mechanism and an arbitrary angle carrier mechanism, wherein one side of the top end of the conveyor belt is provided with the sucker clamp, one side of the top end of the conveyor belt is provided with a sputtering mechanism, the bottom end of the sputtering mechanism is provided with a base, one side of the top end of the base is provided with an inert gas ion generator, one side of the top end of the base is provided with a movable frame, one side of the movable frame is provided with a photosensitizer box, the middle end of the movable frame is provided with a floating platform, one side of the floating platform is provided with the rubber head angle adjusting mechanism, one side of the top end of the, a longitudinal slide rail is arranged on one side of the support, a moving seat is arranged on one side of the longitudinal slide rail, a scale frame is arranged on one side of the moving seat, a rib plate is fixed on the top end of the scale frame, a wedge block is arranged at the bottom end of the scale frame, a transverse slide rail is arranged at the bottom end of the wedge block, a positioning mechanism is arranged on one side of the transverse slide rail, a connecting seat is arranged on one side of the transverse slide rail, a telescopic rod is arranged on one side of the connecting seat, an indicating member is arranged on one side of the telescopic rod, a trunnion is arranged at the bottom end of the telescopic rod, a laser pen is connected to the bottom end of the trunnion, a driven crank is connected to one side of the trunnion, a slide block is arranged on one side of the driven crank away from the trunnion, second drive gear has been seted up on the support top, and the support top has seted up third drive gear, the pivot has been seted up to the support middle-end, and the pivot top has seted up driven gear, driven gear one side is fixed with the transmission arm, and the transmission arm keeps away from driven gear one side and is connected with the rocking arm, the rocking arm top is provided with the workstation, and has seted up the sealing washer all around the workstation, the workstation both sides are provided with connecting rod clamping mechanism, and the connecting rod clamping mechanism bottom is provided with the cylinder, cylinder one side is provided with the actuating lever, and actuating lever one side is provided with the crank, the crank bottom is connected with the action bars, and the action bars bottom is fixed with, the crank top is provided with the clamp plate.

Optionally, the sucking disc anchor clamps bottom is provided with the adsorption plane, and the main suction hole has been seted up to the adsorption plane middle-end, the suction groove has been seted up to the adsorption plane end, and has seted up the dashpot on one side of suction groove top, supplementary suction hole has been seted up to the dashpot middle-end, and has seted up the drainage groove on the dashpot top, the drainage mouth has been seted up to the drainage groove middle-end, and drainage groove one side is provided with the baffle.

Optionally, baffles are arranged around the adsorption surface, the height of each baffle is greater than that of the adsorption surface, the air suction grooves are located on the adsorption surface and are spirally distributed, the air suction grooves are connected with the buffer grooves through grooves formed in the middle ends of the air suction grooves, the distance between each main air suction hole and each auxiliary air suction hole is smaller than the diameter of the single crystal silicon disc material, and the cross section of each buffer groove is arc-shaped.

Optionally, the bottom end of the rubber head angle adjusting mechanism is provided with a back plate, a limit pin is arranged on one side of the back plate, the middle ends of the limit pins on two sides are provided with a plunger, one side of the plunger is provided with a rubber head, one side of the plunger away from the rubber head is provided with a wing plate, the bottom end of the wing plate is provided with a sliding groove, one side of the sliding groove is provided with a fixed block, one side of the sliding groove is provided with a cam bearing, the bottom end of the plunger is provided with an adjusting bolt, one side of the bottom end of the adjusting bolt is provided.

Optionally, be swing joint structure between gluey head angular adjustment mechanism and the floating platform, formula structure as an organic whole between fixed block and the backplate, and the jumper bar is connected with the fixed block through pterygoid lamina and spout, constitutes swing joint mechanism, be connected through the bolt between cam bearing and the backplate, constitute detachable construction, and formula structure as an organic whole between spacer pin and the backplate, the jumper bar is connected with adjusting block through adjusting bolt, constitutes swing joint structure, and the jumper bar is connected with the scale through the indicator lever that the bottom set up.

Optionally, the scale frame is connected with the motor through the movable seat and the longitudinal slide rail to form a transmission structure, the scale frame and the rib plate are in an integrated structure, the side face of the scale frame is provided with scale grooves, and the scale frame and the wedge block are in an integrated structure.

Optionally, the telescopic link is connected with the scale rack through a connecting seat, a transverse sliding rail and a wedge block to form a movable connection structure, the positioning mechanism and the transverse sliding rail are movably connected, the telescopic link and the indicating component are of an integrated structure, the telescopic link and the scale rack are connected in a floating mode, the sliding block and the wedge block are movably connected, and the sliding block is connected with the laser pen through a driven crank and a trunnion to form a transmission structure.

Optionally, the support is connected with first drive gear, second drive gear and third drive gear respectively through the bearing frame, constitutes rotatable structure, and the support bottom corresponds first drive gear, second drive gear and third drive gear position and is provided with three step motor respectively, and the input shaft is connected with three driven gear of group through the pivot, constitutes transmission structure, and be welding integral type structure between input shaft and the driving arm, be swing joint between rocking arm and the driving arm, and be connected through the bearing between driving arm and the workstation, constitute rotatable structure.

Optionally, the cylinder is connected with the crank through the actuating lever, constitutes transmission structure, and the crank is connected with action bars and clamp plate respectively through the bearing, constitutes rotatable structure, stationary vane and workstation formula structure as an organic whole, and the stationary vane is connected with the clamp plate through the bearing, constitutes rotatable structure, flexible rubber material is adopted to clamp plate top one side.

The invention provides a three-axis sensor production device with a bright light positioning beam alignment function, which has the following beneficial effects:

1. this triaxial sensor production facility that possesses bright light location is to restrainting function, through being provided with sucking disc anchor clamps, in order to acquire higher vacuum and stable suction, current vacuum clamp adopts the vacuum pump as the vacuum more and takes place the air supply, the vacuum suction that sucking disc anchor clamps provided avoids causing the material to drop because of the centrifugal force that high-speed rotary motion brought when realizing preventing the centre gripping inefficacy to the firm centre gripping of monocrystal silicon disc material, the guard action to the material has concurrently simultaneously, prevent that the scraping from appearing on the material surface, the suitability is stronger.

2. According to the three-axis sensor production equipment with the bright positioning beam-aligning function, due to the arrangement of the sucker clamp, a vacuum area of a traditional vacuum clamp is only partially covered, a photosensitive chemical agent can permeate into a vacuum cavity along the bottom surface of a workpiece under the action of negative pressure, the vacuum degree is reduced, and the clamp is disabled.

3. This triaxial sensor production facility that possesses bright light location and restraint function, glue first angle adjustment mechanism through being provided with, install on loader etc, a distributor for the adjustment adhesive is paintd, the inclination of liquid ration eduction gear and peripheral equipment, carry out the pre-compaction through the cam bearing follower that compresses tightly one side, realize radial nothing not hard up guiding mechanism, glue first angle adjustment mechanism's setting and carrying out accurate ration to sensitization chemical agent and carry out the simultaneous person of facilitating the use according to actual conditions and adjust ejection of compact angle, let chemical agent even cross at single crystal silicon disc material surface and flow, with the optimal mapping effect of trying to gain.

4. This triaxial sensor production facility that possesses bright light location and restraint function, through being provided with location exposure mechanism, benefit from connecting seat and voussoir, swing joint between scale rack and the removal seat, the higher degree of freedom of location exposure mechanism has been given, the laser pen makes the mechanism can adapt to the processing demand of different complicated operating modes through driven crank to the adjustment of laser pen processing angle with the extending structure design of telescopic link and slider, positioning mechanism's setting has ensured the location of bright light and has restrained, activation single crystalline silicon disc material surface sensitization chemical element, with glass dull and stereotyped sample transfer to the monocrystalline silicon disc on, form thousands of triaxial acceleration sensor's main appearance.

5. According to the three-axis sensor production equipment with the bright positioning and beam matching functions, the carrier mechanism with any angle is arranged, in order to ensure that other necessary chemical element solvents are uniformly distributed on a monocrystalline silicon disc in a flowing mode and reflect micro patterns more specifically, the carrier mechanism with any angle provided by the invention locks the flat edge of a disc material through the sealing ring, meanwhile, the workbench is controlled by the three stepping motors through the gear transmission and the nine rotary joints, any angle position can be reached in a three-dimensional space, the chemical element solvents can be fully remained and smeared on the surface of the monocrystalline silicon disc in the continuous angle change, and the mapping effect of the micro patterns is better.

Drawings

FIG. 1 is a schematic top view of the present invention;

FIG. 2 is a schematic top view of a three-axis sensor assembly of the present invention;

FIG. 3 is a schematic top view of the chuck assembly of the present invention;

FIG. 4 is a schematic view of a front view structure of the angle adjustment mechanism of the rubber head according to the present invention;

FIG. 5 is a schematic front view of the positioning exposure mechanism according to the present invention;

FIG. 6 is a schematic view of a front view of the carrier mechanism of any angle of the present invention;

FIG. 7 is an enlarged view of the structure at A in FIG. 6 according to the present invention.

In the figure: 1. a conveyor belt; 2. a suction cup clamp; 201. an adsorption surface; 202. a main suction hole; 203. a suction groove; 204. a buffer tank; 205. an auxiliary suction hole; 206. a drainage groove; 207. a drainage opening; 208. a baffle plate; 3. a sputtering mechanism; 4. a base; 5. an inert gas ion generator; 6. a movable frame; 7. a photosensitizer box; 8. a floating platform; 9. a rubber head angle adjusting mechanism; 901. a back plate; 902. a spacing pin; 903. punching; 904. gluing heads; 905. a wing plate; 906. a chute; 907. a fixed block; 908. a cam bearing; 909. adjusting the bolt; 910. adjusting the sliding block; 911. a graduated scale; 10. positioning an exposure mechanism; 11. a support; 12. a motor; 13. a longitudinal slide rail; 14. a movable seat; 15. a scale rack; 16. a rib plate; 17. a wedge block; 18. a transverse slide rail; 19. a positioning mechanism; 20. a connecting seat; 21. a telescopic rod; 22. an indicating member; 23. a trunnion; 24. a laser pen; 25. a driven crank; 26. a slider; 27. a mechanical arm; 28. any angle carrier mechanism; 29. a support; 30. a first drive gear; 31. a second drive gear; 32. a third drive gear; 33. a rotating shaft; 34. a driven gear; 35. a drive arm; 36. a rocker arm; 37. a work table; 38. a seal ring; 39. a connecting rod clamping mechanism; 40. a cylinder; 41. a drive rod; 42. a crank; 43. an operating lever; 44. a hinge; 45. pressing a plate; 46. and a fixed wing.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing and simplifying the description, and do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus are not to be construed as limiting the present invention, and furthermore, the terms "first", "second", "third", and the like are only used for descriptive purposes and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be directly connected or indirectly connected through an intermediate, and those skilled in the art will understand the specific meaning of the above terms in the present invention in specific situations.

Referring to fig. 1 to 7, the present invention provides a technical solution: a three-axis sensor production device with the functions of bright positioning and beam alignment comprises a conveyor belt 1, a sucker clamp 2, a rubber head angle adjusting mechanism 9, a positioning exposure mechanism 10 and a carrier mechanism 28 with any angle, wherein the sucker clamp 2 is arranged on one side of the top end of the conveyor belt 1, an adsorption surface 201 is arranged at the bottom end of the sucker clamp 2, a main suction hole 202 is arranged at the middle end of the adsorption surface 201, a suction groove 203 is arranged at the surface end of the adsorption surface 201, a buffer groove 204 is arranged on one side of the top end of the suction groove 203, an auxiliary suction hole 205 is arranged at the middle end of the buffer groove 204, baffles 208 are arranged around the adsorption surface 201, the heights of the baffles 208 are larger than the heights of the adsorption surface 201, the suction grooves 203 are spirally distributed at the surface end of the adsorption surface 201, the suction grooves 203 are connected with the buffer groove 204 through grooves arranged at the middle ends, the distance between, the arrangement of the drainage groove 206 avoids photosensitive chemical agent from permeating into a vacuum cavity along the bottom surface of a workpiece, so that the vacuum degree is reduced, and the sucker clamp 2 is caused to lose efficacy, meanwhile, the structural design of the main suction hole 202 matched with the auxiliary suction hole 205 ensures negative pressure suction to the monocrystalline silicon disc, and prevents loosening and falling, the arrangement of the baffle plate 208 prevents the photosensitive agent on the adsorption surface 201 from falling off due to centrifugal force in high-speed rotation movement, so that the pollution to the production environment is caused while the precision of a finished product is influenced, in addition, the drainage groove 206 is arranged at the top end of the buffer groove 204, the drainage port 207 is arranged at the middle end of the drainage groove 206, the baffle plate 208 is arranged at one side of the drainage groove 206, the arrangement of the sucker clamp 2 realizes the firm clamping of the negative pressure suction to the monocrystalline silicon disc material, prevents the material from falling off due to the centrifugal force caused by, the material surface scraping prevention device has the advantages that the material surface scraping prevention device is stronger in applicability, a sputtering mechanism 3 is arranged on one side of the top end of a conveyor belt 1, a base 4 is arranged at the bottom end of the sputtering mechanism 3, an inert gas ion generator 5 is arranged on one side of the top end of the base 4, a moving frame 6 is arranged on one side of the top end of the base 4, a photosensitizer magazine 7 is arranged on one side of the moving frame 6, a floating platform 8 is arranged at the middle end of the moving frame 6, a rubber head angle adjusting mechanism 9 is arranged on one side of the floating platform 8, a back plate 901 is arranged at the bottom end of the rubber head angle adjusting mechanism 9, a limiting pin 902 is arranged on one side of the back plate 901, a punch rod 903 is arranged at the middle end of the limiting pin 902 on two sides, a rubber head 904 is arranged on one side of the punch rod 903, a wing, the bottom end of the plunger 903 is provided with an adjusting bolt 909, one side of the bottom end of the adjusting bolt 909 is provided with an adjusting slider 910, a movable connection structure is arranged between the rubber head angle adjusting mechanism 9 and the floating platform 8, an integrated structure is arranged between the fixed block 907 and the back plate 901, the plunger 903 is connected with the fixed block 907 through a wing panel 905 and a sliding chute 906 to form a movable connection structure, the cam bearing 908 is connected with the back plate 901 through a bolt to form a detachable structure, an integrated structure is arranged between the limit pin 902 and the back plate 901, the plunger 903 is connected with the adjusting slider 910 through the adjusting bolt 909 to form a movable connection structure, the plunger 903 is connected with a graduated scale 911 through an indicating rod arranged at the bottom end, prepressing is carried out through a cam bearing 908 follower at one side to realize an adjusting mechanism without radial looseness, and a user can observe the adjusting bolt 909 to drive the plunger 903 to adjust the discharging angle, through adjusting the included angle between the rubber head 904 and the monocrystalline silicon disc material, the chemical agent can be uniformly covered on the surface of the monocrystalline silicon disc, the graduated scale 911 is arranged on one side of the plunger 903, the rubber head angle adjusting mechanism 9 is arranged to ensure that the photosensitive chemical agent is accurately and quantitatively conveyed, and simultaneously, a user can conveniently adjust the discharging angle according to actual conditions, so that the chemical agent uniformly flows across the surface of the monocrystalline silicon disc material to obtain the optimal mapping effect, the positioning exposure mechanism 10 is arranged on one side of the top end of the conveyor belt 1, the support 11 is arranged on one side of the positioning exposure mechanism 10, the motor 12 is arranged on one side of the top end of the support 11, the longitudinal slide rail 13 is arranged on one side of the support 11, the moving seat 14 is arranged on one side of the longitudinal slide rail 13, the scale frame 15 is arranged on one side of the moving seat 14, the rib plate 16 is fixed on the top end of the scale frame 15, the transmission structure is formed, an integral structure is formed between the scale frame 15 and the rib plate 16, a scale groove is formed in the side surface of the scale frame 15, the integral structure is formed between the scale frame 15 and the wedge block 17, the scale groove formed in one side of the scale frame 15 is convenient for a user to obtain the accurate direction of the mechanism through the indicating component 22, the processing precision is favorably controlled, the wedge block 17 is arranged at the bottom end of the scale frame 15, the transverse slide rail 18 is formed in the bottom end of the wedge block 17, the positioning mechanism 19 is arranged on one side of the transverse slide rail 18, the connecting seat 20 is arranged on one side of the transverse slide rail 18, the telescopic rod 21 is arranged on one side of the connecting seat 20, the indicating component 22 is arranged on one side of the telescopic rod 21, the trunnion 23 is arranged at the bottom end of the telescopic rod 21, the laser pen 24 is connected at the, the flexible connection structure is formed, the flexible connection structure is formed between the positioning mechanism 19 and the transverse slide rail 18, the telescopic rod 21 and the indicating component 22 are of an integrated structure, the telescopic rod 21 and the scale frame 15 are in floating connection, the movable connection structure is formed between the slide block 26 and the wedge block 17, the slide block 26 is connected with the laser pen 24 through the driven crank 25 and the trunnion 23 to form a transmission structure, the connection seat 20 and the wedge block 17 and the movable connection between the scale frame 15 and the movable seat 14 are beneficial to endowing the positioning exposure mechanism 10 with higher freedom degree, the flexible structure design of the laser pen 24 and the telescopic rod 21 and the adjustment of the slide block 26 on the processing angle of the laser pen 24 through the driven crank 25 enable the mechanism to adapt to the processing requirements of different complex working conditions, the positioning alignment of bright light is ensured by the positioning mechanism 19, the flow design is more applicable, the slide block 26 is arranged on one side of the driven crank 25 far away from the trunnion, a mechanical arm 27 is arranged on one side of the positioning exposure mechanism 10, an arbitrary-angle carrier mechanism 28 is arranged on one side of the mechanical arm 27, which is far away from the positioning exposure mechanism 10, a support 29 is arranged at the bottom end of the arbitrary-angle carrier mechanism 28, a first driving gear 30 is arranged at the top end of the support 29, a second driving gear 31 is arranged at the top end of the support 29, a third driving gear 32 is arranged at the top end of the support 29, a rotating shaft 33 is arranged at the middle end of the support 29, a driven gear 34 is arranged at the top end of the rotating shaft 33, a transmission arm 35 is fixed on one side of the driven gear 34, a rocker arm 36 is connected to one side of the transmission arm 35, which is far away from the driven gear 34, a working table 37 is arranged at the top end of the rocker arm 36, the support 29 is respectively connected with the first driving gear 30, the second driving gear 31 and the, the input shaft is connected with three groups of driven gears 34 through a rotating shaft 33 to form a transmission structure, the input shaft and the transmission arm 35 are in a welding integrated structure, the rocker arm 36 and the transmission arm 35 are movably connected, the transmission arm 35 and the workbench 37 are connected through a bearing to form a rotatable structure, the workbench 37 is controlled by three stepping motors through gear transmission and nine rotary joints while the flat edge of the disc material is locked through a sealing ring 38 by the carrier mechanism 28 with any angle, any angle position can be reached in a three-dimensional space, a chemical element solvent can be fully remained and smeared on the surface of the monocrystalline silicon disc in the ceaseless angle change, the mapping effect of micro patterns is better, the sealing ring 38 is arranged on the periphery of the workbench 37, connecting rod clamping mechanisms 39 are arranged on two sides of the workbench 37, an air cylinder 40 is arranged at the bottom end of the connecting rod clamping mechanism 39, a driving rod 41 is arranged on one side of the air, a crank 42 is arranged on one side of a driving rod 41, the bottom end of the crank 42 is connected with an operating rod 43, a pivot 44 is fixed at the bottom end of the operating rod 43, a pressing plate 45 is arranged at the top end of the crank 42, a cylinder 40 is connected with the crank 42 through the driving rod 41 to form a transmission structure, the crank 42 is respectively connected with the operating rod 43 and the pressing plate 45 through bearings to form a rotatable structure, a fixed wing 46 and a workbench 37 are of an integrated structure, the fixed wing 46 is connected with the pressing plate 45 through the bearings to form the rotatable structure, one side of the top end of the pressing plate 45 is made of flexible rubber materials, the laser bundling position of monocrystalline silicon disc materials after a positioning exposure process is hardened to form the basic appearance of a sensor, the outer edge is flat and soft, the monocrystalline silicon disc materials are firmly clamped by a connecting rod clamping mechanism 39, the pressing force applied by the cylinder 40 through the, the clamping is more stable, and one side of the bottom end of the pressing plate 45 is provided with a fixed wing 46.

In conclusion, when the device is used, a power supply is switched on, a monocrystalline silicon disc material is placed on the sucker clamp 2, a vacuum generator generates suction force through the main suction hole 202 and the auxiliary suction hole 205 which are arranged at the surface end of the suction surface 201 to firmly adsorb the monocrystalline silicon disc on the surface, the inert gas ion generator 5 arranged at one side of the top end of the sputtering mechanism 3 impacts the aluminum element in a high-energy particle form to enable the inert gas ion to be sputtered on the monocrystalline silicon disc until the object is accumulated to a certain level, the aluminum element level serves as an electric conductor, then the sucker clamp 2 benefits from the bearing seat arranged at the bottom end to drive the monocrystalline silicon disc material to quickly rotate, the photosensitive chemical agent flows into the rubber head angle adjusting mechanism 9 through the photosensitive agent box 7, and the rubber head angle adjusting mechanism 9 is designed through the floating platform 8 and the movable connection structure between the movable rack 6 and the base, the rubber head angle adjusting mechanism 9 has a higher degree of freedom to move to a proper processing position, a user drives the plunger 903 to adjust the discharging angle of the rubber head 904 through an observation adjusting bolt 909 of the graduated scale 911, chemical agents uniformly flow across the surface of the monocrystalline silicon disc material by adjusting the included angle between the rubber head 904 and the monocrystalline silicon disc material to obtain an optimal mapping effect, all processes are carried out under fixed-frequency yellow light similar to the environment where an unexposed negative plate needs to be located in order to prevent the chemical elements at the surface of the monocrystalline silicon disc from being activated to react to bright light too early, due to the arrangement of the baffle 208 around the sucker clamp 2, the photosensitive chemical agents can stay on the surface of the monocrystalline silicon disc in high-speed rotation motion, the reaction time is prolonged, the pollution of a solvent falling disc body to the processing environment is avoided, and then the monocrystalline silicon disc material is conveyed to the positioning exposure mechanism 10 through the conveyor belt 1 under the clamping of the sucker clamp 2, photosensitive chemical elements are prepared to deal with the brightness, thanks to the connection seat 20 through the transverse slide rail 18 and the wedge block 17, the scale rack 15 is movably connected with the longitudinal slide rail 13 through the moving seat 14, so that the positioning exposure machine 10 is endowed with higher freedom degree, the telescopic structure design of the laser pen 24 and the telescopic rod 21 and the adjustment of the slide block 26 to the processing angle of the laser pen 24 through the driven crank 25 enable the mechanism to adapt to the processing requirements of different complex working conditions, the positioning mechanism 19 ensures the positioning beam alignment of the brightness, the photosensitive chemical elements on the surface of the single crystal silicon disc material are activated, the glass flat plate sample is transferred onto the single crystal silicon disc to form the main appearance of thousands of three-axis acceleration sensors, finally the single crystal silicon disc material is sent to the top end working platform 37 of the carrier mechanism 28 with any angle under the clamping of the mechanical arm 27, the crank 42 is pushed by the cylinder 40 through the, the pressing plate 45 is driven to rotate around the fixed wings 46 to clamp an unexposed flat area on a monocrystalline silicon disc material, the workbench 37 is controlled by three stepping motors through a driving gear pair and nine rotary joints formed by the driving arms 35 and the rocker arms 36, and can reach any angle position in a three-dimensional space, chemical element solvents can be fully remained and smeared on the surface of the monocrystalline silicon disc in continuous angle change, so that uniform flow distribution of other necessary chemical element solvents on the monocrystalline silicon disc is ensured, and more specifically, tiny patterns are reflected, one side of the top end of the pressing plate 45 is made of flexible rubber materials to play a role in protecting the surface of the monocrystalline silicon disc, and in sum, the working principle of the three-axis sensor production equipment with the functions of bright positioning and beam bundling is the three-axis sensor production equipment.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims

1. The utility model provides a triaxial sensor production facility that possesses bright light location and restraint function, includes conveyer belt (1), sucking disc anchor clamps (2), glues first angle guiding mechanism (9), location exposure mechanism (10) and arbitrary angle carrier mechanism (28), its characterized in that: the device is characterized in that a sucker clamp (2) is arranged on one side of the top end of the conveyor belt (1), a sputtering mechanism (3) is arranged on one side of the top end of the conveyor belt (1), a base (4) is arranged at the bottom end of the sputtering mechanism (3), an inert gas ion generator (5) is arranged on one side of the top end of the base (4), a moving frame (6) is arranged on one side of the top end of the base (4), a photosensitizer material box (7) is arranged on one side of the moving frame (6), a floating platform (8) is arranged at the middle end of the moving frame (6), a rubber head angle adjusting mechanism (9) is arranged on one side of the floating platform (8), a positioning exposure mechanism (10) is arranged on one side of the top end of the conveyor belt (1), a support (11) is arranged on one side of the positioning exposure mechanism (10), the device is characterized in that a moving seat (14) is arranged on one side of the longitudinal sliding rail (13), a scale frame (15) is arranged on one side of the moving seat (14), a rib plate (16) is fixed at the top end of the scale frame (15), a wedge block (17) is arranged at the bottom end of the scale frame (15), a transverse sliding rail (18) is arranged at the bottom end of the wedge block (17), a positioning mechanism (19) is arranged on one side of the transverse sliding rail (18), a connecting seat (20) is arranged on one side of the transverse sliding rail (18), an expansion link (21) is arranged on one side of the connecting seat (20), an indicating member (22) is arranged on one side of the expansion link (21), a trunnion (23) is arranged at the bottom end of the expansion link (21), a laser pen (24) is connected at the bottom end of the trunnion (23), a driven crank, the device is characterized in that a mechanical arm (27) is arranged on one side of the positioning exposure mechanism (10), an arbitrary angle carrier mechanism (28) is arranged on one side, away from the positioning exposure mechanism (10), of the mechanical arm (27), a support (29) is arranged at the bottom end of the arbitrary angle carrier mechanism (28), a first driving gear (30) is arranged at the top end of the support (29), a second driving gear (31) is arranged at the top end of the support (29), a third driving gear (32) is arranged at the top end of the support (29), a rotating shaft (33) is arranged at the middle end of the support (29), a driven gear (34) is arranged at the top end of the rotating shaft (33), a transmission arm (35) is fixed on one side of the driven gear (34), a rocker arm (36) is connected on one side, away from the driven gear (34), a working table (37) is arranged at the top, workstation (37) both sides are provided with connecting rod clamping mechanism (39), and connecting rod clamping mechanism (39) bottom is provided with cylinder (40), cylinder (40) one side is provided with actuating lever (41), and actuating lever (41) one side is provided with crank (42), crank (42) bottom is connected with action bars (43), and action bars (43) bottom mounting has pivot (44), crank (42) top is provided with clamp plate (45), and clamp plate (45) bottom one side is provided with stationary vane (46).

2. The production equipment of the three-axis sensor with the function of bright light positioning and beam alignment according to claim 1, is characterized in that: the sucking disc anchor clamps (2) bottom is provided with adsorption plane (201), and main suction opening (202) have been seted up to adsorption plane (201) middle-end, suction groove (203) have been seted up to adsorption plane (201) surface end, and suction groove (203) top one side has seted up dashpot (204), supplementary suction opening (205) have been seted up to dashpot (204) middle-end, and dashpot (204) top has seted up drainage groove (206), drainage mouth (207) have been seted up to drainage groove (206) middle-end, and drainage groove (206) one side is provided with baffle (208).

3. The three-axis sensor production equipment with the bright light positioning beam-aligning function as claimed in claim 2, wherein: baffle (208) have been seted up around adsorption face (201), and baffle (208) highly are greater than adsorption face (201) height, suction groove (203) are located adsorption face (201) surface end and are the spiral and distribute, and suction groove (203) are connected with dashpot (204) through the logical groove that the middle-end was seted up, main suction hole (202) and supplementary suction hole (205) interval are less than single crystal silicon disc material diameter, dashpot (204) cross section is the arc.

4. The production equipment of the three-axis sensor with the function of bright light positioning and beam alignment according to claim 1, is characterized in that: the bottom end of the glue head angle adjusting mechanism (9) is provided with a back plate (901), one side of the back plate (901) is provided with a limit pin (902), the middle ends of the limit pins (902) on two sides are provided with a plunger (903), one side of the plunger (903) is provided with a glue head (904), one side, away from the glue head (904), of the plunger (903) is provided with a wing plate (905), the bottom end of the wing plate (905) is provided with a sliding groove (906), one side of the sliding groove (906) is provided with a fixing block (907), one side of the sliding groove (906) is provided with a cam bearing (908), the bottom end of the plunger (903) is provided with an adjusting bolt (909), one side of the bottom end of the adjusting bolt (909) is provided with an adjusting slider (910.

5. The production equipment of the three-axis sensor with the bright light positioning beam-aligning function according to claim 4, is characterized in that: the rubber head angle adjusting mechanism (9) and the floating platform (8) are movably connected, the fixed block (907) and the back plate (901) are of an integrated structure, the plunger (903) is connected with the fixed block (907) through a wing plate (905) and a sliding groove (906) to form a movable connection mechanism, the cam bearing (908) and the back plate (901) are connected through bolts to form a detachable structure, the limiting pin (902) and the back plate (901) are of an integrated structure, the plunger (903) is connected with the adjusting slider (910) through an adjusting bolt (909) to form a movable connection structure, and the plunger (903) is connected with the scale (911) through an indicating rod arranged at the bottom end.

6. The production equipment of the three-axis sensor with the function of bright light positioning and beam alignment according to claim 1, is characterized in that: the scale rack (15) is connected with the motor (12) through the movable seat (14) and the longitudinal slide rail (13) to form a transmission structure, the scale rack (15) and the rib plate (16) are of an integrated structure, a scale groove is formed in the side face of the scale rack (15), and the scale rack (15) and the wedge block (17) are of an integrated structure.

7. The production equipment of the three-axis sensor with the function of bright light positioning and beam alignment according to claim 1, is characterized in that: telescopic link (21) are connected with scale rack (15) through connecting seat (20), horizontal slide rail (18) and voussoir (17), constitute swing joint structure, and be swing joint structure between positioning mechanism (19) and horizontal slide rail (18), formula structure as an organic whole between telescopic link (21) and indicating component (22), and be the connection of floating between telescopic link (21) and scale rack (15), be swing joint structure between slider (26) and voussoir (17), and slider (26) are connected with laser pen (24) through driven crank (25) and trunnion (23), constitute transmission structure.

8. The production equipment of the three-axis sensor with the function of bright light positioning and beam alignment according to claim 1, is characterized in that: support (29) are connected with first drive gear (30), second drive gear (31) and third drive gear (32) respectively through the bearing frame, constitute rotatable structure, and support (29) bottom corresponds first drive gear (30), second drive gear (31) and third drive gear (32) position is provided with three step motor respectively, the input shaft is connected with three driven gear (34) of group through pivot (33), constitute transmission structure, and be welding integral type structure between input shaft and transmission arm (35), be swing joint between rocking arm (36) and transmission arm (35), and be connected through the bearing between transmission arm (35) and workstation (37), constitute rotatable structure.

9. The production equipment of the three-axis sensor with the function of bright light positioning and beam alignment according to claim 1, is characterized in that: the air cylinder (40) is connected with the crank (42) through the driving rod (41) to form a transmission structure, the crank (42) is connected with the operating rod (43) and the pressing plate (45) through the bearing respectively to form a rotatable structure, the fixed wing (46) and the workbench (37) are of an integrated structure, the fixed wing (46) is connected with the pressing plate (45) through the bearing to form a rotatable structure, and one side of the top end of the pressing plate (45) is made of flexible rubber.