CN212587484U - 一种双重散热半导体产品及电子产品 - Google Patents
一种双重散热半导体产品及电子产品 Download PDFInfo
- Publication number
- CN212587484U CN212587484U CN202020583731.4U CN202020583731U CN212587484U CN 212587484 U CN212587484 U CN 212587484U CN 202020583731 U CN202020583731 U CN 202020583731U CN 212587484 U CN212587484 U CN 212587484U
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- Prior art keywords
- chip
- heat sink
- heat
- substrate
- semiconductor
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 44
- 230000017525 heat dissipation Effects 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000000463 material Substances 0.000 claims abstract description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- 230000000875 corresponding Effects 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000003822 epoxy resin Substances 0.000 claims description 6
- 229920000647 polyepoxide Polymers 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 229910021389 graphene Inorganic materials 0.000 claims description 3
- 230000000149 penetrating Effects 0.000 claims description 3
- 150000001879 copper Chemical class 0.000 claims description 2
- MPTQRFCYZCXJFQ-UHFFFAOYSA-L copper(II) chloride dihydrate Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 O.O.[Cl-].[Cl-].[Cu+2] MPTQRFCYZCXJFQ-UHFFFAOYSA-L 0.000 claims 3
- 239000004593 Epoxy Substances 0.000 abstract description 9
- 125000003700 epoxy group Chemical group 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- -1 graphite alkene Chemical class 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
Abstract
本实用新型公开一种双重散热半导体产品,包括基板、设置在基板上方的芯片以及用于封装芯片的环氧树脂,芯片具有朝向基板一侧的芯片上表面以及朝向环氧树脂一侧的芯片下表面,芯片上表面通过粘结材料设置有顶部散热片,芯片下表面通过粘结材料设置有底部散热片,顶部散热片的上表面与环氧树脂的上表面齐平,底部散热片的上表面与芯片抵接,底部散热片的下表面与基板的下表面齐平。通过在芯片两侧均设置散热片,使得芯片工作过程中所产生的热量可以很好的传递至散热片上,并通过散热片传递至电路板等电子产品上,由于散热片的散热性能高于基板的散热性能,通过该设计可以大幅度提高功率IC芯片的散热能力。
Description
技术领域
本实用新型涉及半导体产品技术领域,尤其涉及一种双重散热半导体产品及应用其的电子产品。
背景技术
半导体是一种导电能力介于导体与非导体之间的材料,半导体元件根据半导体材料的特性,属于固态元件,其体积可以缩小到很小的尺寸,因此耗电量少,集成度高,在电子技术领域获得了广泛的应用,而随着半导体元件运行功率的逐渐增加,散热性能成为半导体元件的重要指标之一,在这样的高热量工作环境下,保持半导体元件的工作可靠性是一个非常重要的问题。
功率IC芯片需要比较多的引出端,所以多采用基板进行封装,封装外形为 LGA和BGA,但是基板散热效果差,制约了IC的封装发展。
实用新型内容
本实用新型实施例的目的在于:提供一种双重散热半导体产品及应用其的电子产品,其能够解决现有技术中存在的上述问题。
为达上述目的,本实用新型采用以下技术方案:
一方面,提供一种双重散热半导体产品,包括基板、设置在所述基板上方的芯片以及用于封装所述芯片的环氧树脂,所述芯片具有朝向所述基板一侧的芯片上表面以及朝向所述环氧树脂一侧的芯片下表面,所述芯片上表面通过粘结材料设置有顶部散热片,所述芯片下表面通过粘结材料设置有底部散热片,所述基板上设置有散热片安装通孔,所述底部散热片设置在所述散热片安装通孔中,所述顶部散热片的上表面与所述环氧树脂的上表面齐平,所述底部散热片的上表面与所述芯片抵接,所述底部散热片的下表面与所述基板的下表面齐平。
作为所述的双重散热半导体产品的一种优选的技术方案,所述散热片安装通孔包括位于所述基板上表面一侧第一安装孔以及位于所述基板下表面一侧的第二安装孔,所述第一安装孔与所述第二安装孔相连通,所述第一安装孔的外形尺寸大于所述第二安装孔的外形尺寸。
作为所述的双重散热半导体产品的一种优选的技术方案,所述底部散热片包括与所述第一安装孔形状及尺寸相对应的第一凸台以及与所述第二安装孔形状及尺寸对应的第二凸台,所述第一凸台与所述第二凸台为一体结构。
作为所述的双重散热半导体产品的一种优选的技术方案,所述底部散热片的下表面设置有若干散热槽,相邻所述散热槽之间的距离相同。
作为所述的双重散热半导体产品的一种优选的技术方案,所述散热片安装通孔设置有多个,每个所述散热片安装通孔中分别设置有至少一个所述底部散热片。
作为所述的双重散热半导体产品的一种优选的技术方案,所述芯片同时与所有所述底部散热片接触。
作为所述的双重散热半导体产品的一种优选的技术方案,所述底部散热片采用石墨烯、石墨烯改性铜、金属铜、铝或陶瓷材料制成。
作为所述的双重散热半导体产品的一种优选的技术方案,所述芯片包括相对设置的芯片上表面和芯片下表面,所述芯片下表面朝向所述基板上表面设置,所述芯片上表面通过金属线与外部电连接。
作为所述的双重散热半导体产品的一种优选的技术方案,所述基板上设置有贯穿所述基板的板内铜线路,所述芯片上表面通过所述金属线电连接所述板内铜线路,所述双重散热半导体产品通过所述板内铜线路与外部电连接。
另一方面,提供一种电子产品,具有如上所述的双重散热半导体产品。
本实用新型的有益效果为:通过在芯片两侧均设置散热片,使得芯片工作过程中所产生的热量可以很好的传递至散热片上,并通过散热片传递至电路板等电子产品上,由于散热片的散热性能高于基板的散热性能,通过该设计可以大幅度提高功率IC芯片的散热能力。
附图说明
下面根据附图和实施例对本实用新型作进一步详细说明。
图1为本实用新型实施例所述双重散热半导体产品结构示意图。
图2为图1中I处放大图。
图3为本实用新型实施例所述双重散热半导体产品又一结构示意图。
图4为本实用新型实施例所述双重散热半导体产品再一结构示意图。
图中:
100、基板;110、散热片安装通孔;111、第一安装孔;112、第二安装孔; 200、芯片;300、环氧树脂;400、底部散热片;500、粘结材料;600、基板内铜线路;700、金属线;800、顶部散热片。
具体实施方式
为使本实用新型解决的技术问题、采用的技术方案和达到的技术效果更加清楚,下面对本实用新型实施例的技术方案作进一步的详细描述,显然,所描述的实施例仅仅是本实用新型一部分实施例,而不是全部的实施例。基于本实用新型中的实施例,本领域技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本实用新型保护的范围。
在本实用新型的描述中,除非另有明确的规定和限定,术语“相连”“连接”、“固定”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或成一体;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本实用新型中的具体含义。
在本实用新型中,除非另有明确的规定和限定,第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触,也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且,第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方,或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方,或仅仅表示第一特征水平高度小于第二特征。
如图1、2所示,本实施例提供一种双重散热半导体产品,包括基板100、设置在所述基板100上方的芯片200以及用于封装所述芯片200的环氧树脂300,所述芯片200具有朝向所述基板100一侧的芯片上表面以及朝向所述环氧树脂一侧的芯片下表面,所述芯片上表面通过粘结材料500设置有顶部散热片800,所述芯片下表面通过粘结材料500设置有底部散热片400,所述基板100上设置有散热片安装通孔110,所述底部散热片400设置在所述散热片安装通孔110中,所述顶部散热片800的上表面与所述环氧树脂的上表面齐平,所述底部散热片 400的上表面与所述芯片200抵接,所述底部散热片400的下表面与所述基板 100的下表面齐平。
通过在芯片200两侧均设置散热片,使得芯片200工作过程中所产生的热量可以很好的传递至散热片上,并通过散热片传递至电路板等电子产品上,由于散热片的散热性能高于基板100的散热性能,通过该设计可以大幅度提高功率IC芯片200的散热能力。
由于用于安装底部散热片400的为散热片安装通孔110,使得芯片200直接与底部散热片400接触,使得热传递效果达到最大。
具体的,本实施例中所述散热片安装通孔110包括位于所述基板上表面一侧第一安装孔111以及位于所述基板下表面一侧的第二安装孔112,所述第一安装孔111与所述第二安装孔112相连通,所述第一安装孔111的外形尺寸大于所述第二安装孔112的外形尺寸。
所述底部散热片400包括与所述第一安装孔111形状及尺寸相对应的第一凸台以及与所述第二安装孔112形状及尺寸对应的第二凸台,所述第一凸台与所述第二凸台为一体结构。
本实施例中通过将散热片安装通孔110设置为台阶状,且靠近环氧树脂300 一侧的开口大,同时将底部散热片400设置呈与之对应的台阶状,使得底部散热片400在安装到散热片安装通孔110中时不需要采用其与结构进行固定也能稳固在基板100与环氧树脂300之间。
作为所述双重散热半导体产品的一种优选的技术方案,如图3所示实施例中所述底部散热片400的下表面设置有若干散热槽,相邻所述散热槽之间的距离相同。
通过在所述底部散热片400的下表面设置散热槽,使其具有与空气进行热交换的换热空间,使得底部散热片400上的热量能够快速扩散到空气中,从而对芯片200进行快速散热。
需要指出的是,在其他实施例中还可以为所述散热片安装通孔110设置有多个,每个所述散热片安装通孔110中分别设置有至少一个所述底部散热片400。所述芯片200同时与所有所述底部散热片400接触。
如图4所示,所述散热片安装通孔110为两个,两个所述散热片安装通孔 110中分别设置有一个所述底部散热片400。
本方案中所述底部散热片400可以采用石墨烯、石墨烯改性铜、金属铜、铝或陶瓷材料制成。
具体的,本实施例中所述底部散热片400采用石墨烯材料制成。
同时,本实施例所述的双重散热半导体产品中所述芯片200包括相对设置的芯片上表面和芯片下表面,所述芯片下表面朝向所述基板上表面设置,所述芯片上表面通过金属线700与外部电连接。所述基板100上设置有贯穿所述基板100的板内铜线路,所述芯片上表面通过所述金属线700电连接所述板内铜线路,所述双重散热半导体产品通过所述板内铜线路与外部电连接。
同时,本实施例中还提供一种电子产品,其具有如上所述的双重散热半导体产品。
于本文的描述中,需要理解的是,术语“上”、“下”、“左”、“右”、等方位或位置关系,仅是为了便于描述和简化操作,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本实用新型的限制。此外,术语“第一”、“第二”,仅仅用于在描述上加以区分,并没有特殊的含义。
在本说明书的描述中,参考术语“一实施例”、“示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本实用新型的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施例或示例。
此外,应当理解,虽然本说明书按照实施方式加以描述,但并非每个实施方式仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施例中的技术方案也可以适当组合,形成本领域技术人员可以理解的其他实施方式。
以上结合具体实施例描述了本实用新型的技术原理。这些描述只是为了解释本实用新型的原理,而不能以任何方式解释为对本实用新型保护范围的限制。基于此处的解释,本领域的技术人员不需要付出创造性的劳动即可联想到本实用新型的其它具体实施方式,这些方式都将落入本实用新型的保护范围之内。
Claims (10)
1.一种双重散热半导体产品,包括基板(100)、设置在所述基板(100)上方的芯片(200)以及用于封装所述芯片(200)的环氧树脂(300),其特征在于,所述芯片(200)具有朝向所述基板(100)一侧的芯片上表面以及朝向所述环氧树脂(300)一侧的芯片下表面,所述芯片上表面通过粘结材料(500)设置有顶部散热片(800),所述芯片下表面通过粘结材料(500)设置有底部散热片(400),所述基板(100)上设置有散热片安装通孔(110),所述底部散热片(400)设置在所述散热片安装通孔(110)中,所述顶部散热片(800)的上表面与所述环氧树脂(300)的上表面齐平,所述底部散热片(400)的上表面与所述芯片(200)抵接,所述底部散热片(400)的下表面与所述基板(100)的下表面齐平。
2.根据权利要求1所述的双重散热半导体产品,其特征在于,所述散热片安装通孔(110)包括位于所述基板上表面一侧第一安装孔(111)以及位于所述基板下表面一侧的第二安装孔(112),所述第一安装孔(111)与所述第二安装孔(112)相连通,所述第一安装孔(111)的外形尺寸大于所述第二安装孔(112)的外形尺寸。
3.根据权利要求2所述的双重散热半导体产品,其特征在于,所述底部散热片(400)包括与所述第一安装孔(111)形状及尺寸相对应的第一凸台以及与所述第二安装孔(112)形状及尺寸对应的第二凸台,所述第一凸台与所述第二凸台为一体结构。
4.根据权利要求3所述的双重散热半导体产品,其特征在于,所述底部散热片(400)的下表面设置有若干散热槽,相邻所述散热槽之间的距离相同。
5.根据权利要求1所述的双重散热半导体产品,其特征在于,所述散热片安装通孔(110)设置有多个,每个所述散热片安装通孔(110)中分别设置有至少一个所述底部散热片(400)。
6.根据权利要求5所述的双重散热半导体产品,其特征在于,所述芯片(200) 同时与所有所述底部散热片(400)接触。
7.根据权利要求1所述的双重散热半导体产品,其特征在于,所述底部散热片(400)采用石墨烯、石墨烯改性铜、金属铜、铝或陶瓷材料制成。
8.根据权利要求1所述的双重散热半导体产品,其特征在于,所述芯片(200)包括相对设置的芯片上表面和芯片下表面,所述芯片下表面朝向所述基板上表面设置,所述芯片上表面通过金属线(700)与外部电连接。
9.根据权利要求8所述的双重散热半导体产品,其特征在于,所述基板(100)上设置有贯穿所述基板(100)的板内铜线路,所述芯片上表面通过所述金属线(700)电连接所述板内铜线路,所述双重散热半导体产品通过所述板内铜线路与外部电连接。
10.一种电子产品,其特征在于,具有权利要求1-9中任一项所述的双重散热半导体产品。
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