CN212476955U

CN212476955U - Environment-friendly annealing furnace

Info

Publication number: CN212476955U
Application number: CN202020986724.9U
Authority: CN
Inventors: 王一璇; 王军
Original assignee: Lianyungang Yingjie Quartz Products Co ltd
Current assignee: Lianyungang Yingjie Quartz Products Co ltd
Priority date: 2020-06-03
Filing date: 2020-06-03
Publication date: 2021-02-05
Anticipated expiration: 2030-06-03

Abstract

The utility model discloses an environment-friendly annealing furnace, including annealing stove body, rose box and storage miscellaneous case, there is the check valve at annealing stove body top through flange joint, there is the rose box annealing stove body one side through the bolt fastening, rose box one side has storage miscellaneous case through the bolt fastening, rose box inside is fixed with filter plate through the draw-in groove, the bottom has No. two filters through the bolt fastening in the rose box, and No. two filter tops have a filter through the bolt fastening, there is the flowmeter bottom the rose box through flange joint, the flowmeter bottom is connected with the blast pipe through the thread groove. The utility model discloses simple structure can effectively filter the flue gas that annealing stove body work produced to retrieve and recycle, with the energy consumption of annealing stove body, be fit for being extensively promoted and used.

Description

Environment-friendly annealing furnace

Technical Field

The utility model relates to an annealing furnace technical field, in particular to environment-friendly annealing furnace.

Background

An annealing furnace is a process used in the manufacture of semiconductor devices, and comprises the steps of heating a plurality of semiconductor wafers to influence the electrical properties of the semiconductor wafers, wherein the existing annealing furnace adopts a direct fire heating mode, namely air and coal gas are directly mixed and combusted to generate open fire, and the generated high-temperature smoke is directly discharged to influence the surrounding environment.

Patent No. CN201721105042.7 discloses an environment-friendly annealing stove, annealing stove adopt the natural gas heating, utilize the waste heat of tail gas to carry out the waste heat to precombustion air, improve the utilization ratio of tail gas, reduce exhaust emissions, pollution abatement, three in the filter box the department of bending downwards is provided with deoiling device, water trap and except that oxygen molecular sieve purifier respectively, plays good purifying effect, and impurity removes to the greatest extent in the tail gas, prevents that impurity from getting into in the annealing stove.

The environment-friendly annealing furnace has the following defects: 1. the structure is complex, the smoke generated by gas combustion cannot be effectively filtered, and 2, the protective performance is poor, and the auxiliary function is less, so that an environment-friendly annealing furnace is provided.

SUMMERY OF THE UTILITY MODEL

The utility model mainly aims to provide an environment-friendly annealing furnace, which can effectively solve the problems in the background technology.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

an environment-friendly annealing furnace comprises an annealing furnace body, a filter box and a sundries storage box, wherein the top of the annealing furnace body is connected with a one-way valve through a flange, a filter box is fixed on one side of the annealing furnace body through a bolt, a trash storage box is fixed on one side of the filter box through a bolt, a filter screen plate is fixed in the filter box through a clamping groove, a second filter plate is fixed at the bottom in the filter box through a bolt, the top of the second filter plate is fixed with a first filter plate through bolts, the bottom of the filter box is connected with a flowmeter through a flange, the bottom of the flowmeter is connected with an exhaust pipe through a thread groove, one end of the exhaust pipe is connected with an air inlet valve through the thread groove, and admission valve one end is passed through pipe connection in the inlet end of annealing stove body, the blast pipe other end is connected with discharge valve through the thread groove, the filter box all has the insulating layer with the miscellaneous case surface veneer of storage.

Furthermore, the top of the one-way valve is connected with a connecting pipe through a thread groove, and the other side of the connecting pipe is fixed at the top of the filter box through the thread groove.

Furthermore, miscellaneous case door is connected with through the pivot in storage miscellaneous case one side, the picture peg is installed through the mounting groove in storage miscellaneous case top one end, storage miscellaneous case and rose box are linked together, filter plate one end is located inside the storage miscellaneous case.

Further, the thermometer is installed through the mount pad to rose box one end, and the sense terminal of thermometer is located inside the rose box, the sense terminal of flowmeter is located inside the blast pipe.

Furthermore, the first filter plate is made of a ceramic honeycomb filter screen, the second filter plate is made of an activated carbon material, and the heat insulation layer is made of a rock wool material.

Compared with the prior art, the utility model discloses following beneficial effect has:

1. by arranging the filter box, the impurity storage box and the one-way valve, when the annealing furnace body works, generated smoke flows into the filter box through the connecting pipe from the one-way valve, the one-way valve can prevent the smoke entering the filter box from flowing back to the inside of the annealing furnace body, the filter screen plate in the filter box primarily filters the smoke, impurities, solid particles and the like in the smoke are filtered, the filtered impurities and the solid particles fall into the impurity storage box due to the inclination angle of the filter screen plate, a person presses the inserting plate downwards to separate the impurity storage box from the filter box, the impurity storage box door is opened to clean the impurities in the impurity storage box, the smoke filtered by the filter screen plate flows downwards and is filtered again by the first filter plate and the second filter plate, the first filter plate made of the ceramic honeycomb filter screen can filter impurities, oil stains and the second filter plate made of an active carbon material, can filter and adsorb harmful substances in the smoke.

2. Through setting up thermometer, flowmeter and insulating layer, the thermometer can detect out the temperature of flue gas in the rose box to show, the flowmeter can detect, demonstrate the flow of filtering back flue gas, and the insulating layer that the rock wool material was made can the separation store up miscellaneous case and the inside heat conduction of rose box and go out, reduces the heat loss of the flue gas flow in-process.

Drawings

FIG. 1 is a schematic view of the overall structure of an environment-friendly annealing furnace.

FIG. 2 is a schematic view of the internal structure of the filtering box and the impurity storage box of the environment-friendly annealing furnace.

FIG. 3 is a sectional view of the external materials of the filtering box and the impurity storage box of the environment-friendly annealing furnace.

In the figure: 1. an annealing furnace body; 2. a filter box; 3. a trash bin; 4. a one-way valve; 5. A connecting pipe; 6. a flow meter; 7. an intake valve; 8. an exhaust valve; 9. a thermometer; 10. a filter screen plate; 11. a first filter plate; 12. a second filter plate; 13. a trash bin door; 14. Inserting plates; 15. a thermal insulation layer; 16. and (4) exhausting the gas.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

As shown in figures 1-3, an environment-friendly annealing furnace comprises an annealing furnace body 1, a filter box 2 and a sundry storage box 3, wherein the top of the annealing furnace body 1 is connected with a one-way valve 4 through a flange, one side of the annealing furnace body 1 is fixed with the filter box 2 through bolts, one side of the filter box 2 is fixed with the sundry storage box 3 through bolts, the inside of the filter box 2 is fixed with a filter screen plate 10 through a clamping groove, the bottom of the filter box 2 is fixed with a second filter plate 12 through bolts, the top of the second filter plate 12 is fixed with a first filter plate 11 through bolts, the bottom of the filter box 2 is connected with a flow meter 6 through a flange, the bottom of the flow meter 6 is connected with an exhaust pipe 16 through a thread groove, one end of the exhaust pipe 16 is connected with an air inlet valve 7 through a thread groove, one end of the air inlet valve 7 is connected with, the outer surfaces of the filter box 2 and the impurity storage box 3 are both glued with a heat insulation layer 15.

Wherein, the top of the one-way valve 4 is connected with a connecting pipe 5 through a thread groove, and the other side of the connecting pipe 5 is fixed on the top of the filter tank 2 through the thread groove.

This embodiment is shown in fig. 1.

Wherein, 3 one sides of storage case are connected with storage case door 13 through the pivot, 3 top one ends of storage case are installed picture peg 14 through the mounting groove, storage case 3 is linked together with rose box 2, it is inside that filter plate 10 one end is located storage case 3.

In this embodiment, as shown in fig. 2, one end of the filter screen 10 is located in the trash bin 3, and due to the inclination angle, the filtered trash and solid particles fall into the trash bin 3, and the person moves down the insert plate 14 to insert the insert plate between the trash bin 3 and the filter bin 2, so as to separate the trash bin 3 from the filter bin 2, and the trash bin door 13 is opened to clean the inside of the trash bin 3.

Wherein, 2 one end of rose box is passed through the mount pad and is installed thermometer 9, and thermometer 9's sense terminal is located rose box 2 inside, the sense terminal of flowmeter 6 is located inside 16 blast pipes.

In this embodiment, as shown in fig. 1, the temperature meter 9 can detect the temperature of the flue gas in the filter box 2 and display the temperature, and the flow meter 6 can detect and display the flow rate of the filtered flue gas.

Wherein, No. one filter 11 is made for ceramic honeycomb filter screen, No. two filter 12 are located the active carbon material and make, insulating layer 15 is made for the rock wool material.

In this embodiment, as shown in fig. 2 and 3, the first filter plate 11 made of the ceramic honeycomb filter screen can filter out impurities and oil stains in the flue gas, the second filter plate 12 made of the activated carbon material can filter and adsorb harmful substances in the flue gas, and the heat insulating layer 15 made of the rock wool material can block heat inside the impurity storage tank 3 and the filter tank 2 from being conducted away, so that heat loss in the flow process of the flue gas is reduced.

It should be noted that, the utility model relates to an environment-friendly annealing furnace, during operation, when the annealing furnace body 1 is in operation, the generated flue gas flows into the interior of the filtering box 2 from the one-way valve 4 through the connecting pipe 5, the one-way valve 4 can prevent the flue gas entering the filtering box 2 from flowing back to the interior of the annealing furnace body 1, the filtering screen plate 10 in the filtering box 2 primarily filters the flue gas, impurities, solid particles and the like in the flue gas are filtered, the filtered impurities and solid particles roll down into the impurity storage box 3 due to the inclination angle of the filtering screen plate 10, a person presses the inserting plate 14 to separate the impurity storage box 3 from the filtering box 2, the impurity storage box door 13 is opened to clean the impurities in the impurity storage box 3, the flue gas filtered by the filtering screen plate 10 flows downwards, and is filtered again by the first filtering plate 11 and the second filtering plate 12, the first filtering plate 11 made of the ceramic honeycomb filtering screen, can filter the impurity in the flue gas, the greasy dirt, No. two filter 12 that the active carbon material made, can filter, adsorb the harmful substance in the flue gas, the flue gas after the filtration flows in blast pipe 16, personnel close discharge valve 8 and open admission valve 7, the flue gas after the filtration gets into annealing stove body 1 inside, give annealing stove body 1 internal heating, reduce annealing stove body 1's energy consumption, personnel close admission valve 7, open discharge valve 8, can discharge the flue gas after the filtration, avoid influencing the ambient air environment, thermometer 9 can detect out the temperature of flue gas in rose box 2, and show, flowmeter 6 can detect, show the flow of flue gas after the filtration, insulating layer 15 that the rock wool material made, can the inside heat conduction of separation storage box 3 and rose box 2 go out, reduce the heat loss of flue gas flow in-process.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides an environment-friendly annealing furnace, includes annealing furnace body (1), rose box (2) and storage miscellaneous case (3), its characterized in that: the top of the annealing furnace body (1) is connected with a one-way valve (4) through a flange, one side of the annealing furnace body (1) is fixed with a filter box (2) through bolts, one side of the filter box (2) is fixed with a sundry storage box (3) through bolts, the inside of the filter box (2) is fixed with a filter screen plate (10) through a clamping groove, the bottom of the filter box (2) is fixed with a second filter plate (12) through bolts, the top of the second filter plate (12) is fixed with a first filter plate (11) through bolts, the bottom of the filter box (2) is connected with a flow meter (6) through a flange, the bottom of the flow meter (6) is connected with an exhaust pipe (16) through a thread groove, one end of the exhaust pipe (16) is connected with an air inlet valve (7) through a thread groove, and one end, the other end of the exhaust pipe (16) is connected with an exhaust valve (8) through a thread groove, and the outer surfaces of the filter box (2) and the impurity storage box (3) are both glued with a heat insulation layer (15).

2. The environment-friendly annealing furnace according to claim 1, characterized in that: the top of the one-way valve (4) is connected with a connecting pipe (5) through a thread groove, and the other side of the connecting pipe (5) is fixed at the top of the filter box (2) through the thread groove.

3. The environment-friendly annealing furnace according to claim 1, characterized in that: store up miscellaneous case (3) one side and be connected with storage miscellaneous case door (13) through the pivot, store up miscellaneous case (3) top one end and install picture peg (14) through the mounting groove, store up miscellaneous case (3) and rose box (2) and be linked together, filter plate (10) one end is located and stores up miscellaneous case (3) inside.

4. The environment-friendly annealing furnace according to claim 1, characterized in that: thermometer (9) are installed through the mount pad to rose box (2) one end, and the sense terminal of thermometer (9) is located inside rose box (2), the sense terminal of flowmeter (6) is located inside blast pipe (16).

5. The environment-friendly annealing furnace according to claim 1, characterized in that: the first filter plate (11) is made of a ceramic honeycomb filter screen, the second filter plate (12) is made of an activated carbon material, and the heat insulation layer (15) is made of a rock wool material.