CN212442316U - Ozone water cleaning device - Google Patents
Ozone water cleaning device Download PDFInfo
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- CN212442316U CN212442316U CN202020868474.9U CN202020868474U CN212442316U CN 212442316 U CN212442316 U CN 212442316U CN 202020868474 U CN202020868474 U CN 202020868474U CN 212442316 U CN212442316 U CN 212442316U
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- ozone water
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Abstract
The utility model provides an ozone water belt cleaning device, including the washing tank, the drain pipe that links to each other with the washing tank, the ozone water generater that links to each other with the drain pipe, set up circulating pump on the drain pipe, set up in the inside pH on-line measuring appearance of and/or circulating pump entrance and/or exit of washing tank, connect ozone water generater with the feed liquor pipe on washing tank upper portion and set up in the acidizing fluid complementary unit of washing tank top. Inputting the solution in the cleaning tank into an ozone water generator by a circulating pump, and then entering the cleaning tank from a liquid inlet pipe after generating ozone water to form a circulating system so as to ensure the concentration of the ozone water in the cleaning tank; the pH on-line detector detects the pH value of the solution in the cleaning tank, and when the pH value is lower than a preset value, the acid liquor supplementing mechanism supplements the acid liquor with required quantity towards the cleaning tank, so that the pH value of the solution in the cleaning tank is accurately maintained, the concentration of ozone water is controlled more stably, and the cleaning quality of a product is improved.
Description
Technical Field
The utility model relates to a semiconductor cleaning technology field especially relates to an ozone water belt cleaning device.
Background
In the production process of the ozone cleaning water washing process in the fields of photovoltaics, semiconductors and the like, in order to control the stability of the concentration of ozone water in a tank body, a certain amount of hydrochloric acid (or hydrofluoric acid) needs to be supplemented, the existing supplementing mode is controlled by PLC memory, hydrochloric acid (or hydrofluoric acid) is supplemented into a certain amount of products after the certain amount of products are washed, the supplementing amount is a fixed value, the consumption and the supplementing amount are not consistent, the pH value in the washing tank is unstable, the concentration of the ozone water is unstable, and certain influence is caused on the quality of product washing.
SUMMERY OF THE UTILITY MODEL
The technical problem solved by the utility model is to provide an ozone water cleaning device.
In order to solve the technical problem, the utility model provides an ozone water cleaning device, including the washing tank, with drain pipe that the washing tank bottom links to each other, with ozone water generater that the drain pipe links to each other, set up in circulating pump on the drain pipe, set up in the washing tank and/or the pH on-line measuring appearance, connection of circulating pump entrance and/or exit ozone water generater with the feed liquor pipe of washing tank and set up in the acidizing fluid replenishment mechanism of feed liquor pipe top.
Further, the acid liquor supplementing mechanism comprises a liquid storage tank, a liquid inlet flow equalizing plate and a liquid outlet flow equalizing plate which are arranged in the liquid storage tank, a liquid supplementing control device arranged in the liquid storage tank, and a liquid outlet which is arranged at the other end of the liquid storage tank and connected with the cleaning tank, wherein the liquid outlet is positioned above the cleaning tank.
Furthermore, both ends of the liquid storage tank are respectively provided with a liquid inlet and a liquid outlet, the liquid storage tank is provided with an observation window, and the observation window is provided with scale marks.
Further, the ozone water generator is connected with a control unit, and the pH online detector and the liquid supplementing control device are respectively connected with the control unit.
Further, a liquid level meter is arranged in the cleaning tank, and a solution supplementing mechanism is arranged at the upper part of the cleaning tank.
In the ozone water cleaning device of the utility model, the solution in the cleaning tank is input into the ozone water generator by the circulating pump, and then enters the cleaning tank through the liquid inlet pipe after ozone water is generated, so as to form a circulating system and ensure the concentration of the ozone water in the cleaning tank; the pH online detector detects the pH value of the solution in the cleaning tank, and when the pH value is lower than a preset value, the acid liquor supplementing mechanism supplements the required amount of acid liquor, which can be hydrochloric acid or hydrofluoric acid, towards the cleaning tank, so that the pH value of the solution in the cleaning tank is accurately maintained, the concentration of ozone water is controlled more stably, and the cleaning quality of products is improved.
Drawings
FIG. 1 is a schematic view of an ozone water cleaning apparatus according to a first embodiment of the present invention;
FIG. 2 is a schematic view of an ozone water cleaning apparatus according to a second embodiment of the present invention;
FIG. 3 is a schematic view of an ozone water cleaning apparatus according to a third embodiment of the present invention;
FIG. 4 is a schematic view of an acid liquid replenishing mechanism of the ozone water cleaning apparatus of the present invention;
FIG. 5 is a schematic diagram of a control unit of the ozone water cleaning apparatus of the present invention;
labeled as: the device comprises a cleaning tank 1, a liquid level meter 11, a liquid outlet pipe 2, an ozone water generator 3, a circulating pump 4, a pH online detector 5, a liquid inlet pipe 6, an acid liquid supplementing mechanism 7, a liquid storage tank 71, a pushing piston 72, a liquid supplementing control device 73, a liquid outlet 74, a mounting fixing seat 75, an observation window 76, a scale mark 77, a control unit 8 and a solution supplementing mechanism 9.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.
As shown in fig. 1 to 5, an ozone water cleaning apparatus includes a cleaning tank 1, a circulation line 2 connected to a bottom of the cleaning tank 1, an ozone water generator 3 connected to the circulation line 2, a circulation pump 4 disposed on the circulation line 2, an online pH detector 5 disposed in the cleaning tank 1 and/or at an inlet and/or an outlet of the circulation pump 4, a liquid inlet pipe 6 connecting the ozone water generator 3 and an upper portion of the cleaning tank 1, and an acid solution supplementing mechanism 7 disposed above the cleaning tank 1. The circulating pump 4 inputs the solution in the cleaning tank 1 into the ozone water generator 3, and after ozone water is generated, the solution enters the cleaning tank 1 through the liquid inlet pipe 6 to form a circulating system so as to ensure the concentration of the ozone water in the cleaning tank 1; the pH online detector 5 detects a pH value of the solution in the cleaning tank 1, and when the pH value is lower than a preset value, the acid solution supplementing mechanism 7 supplements a required amount of acid solution, which may be hydrochloric acid or hydrofluoric acid, toward the cleaning tank 1, so as to accurately maintain the pH value of the solution in the cleaning tank 1, thereby controlling the concentration of ozone water more stably and improving the cleaning quality of products.
The acid liquor supplementing mechanism 7 comprises a liquid storage tank 71, a liquid inlet flow equalizing plate 72 and a liquid outlet flow equalizing plate 72 which are arranged in the liquid storage tank 71, a liquid supplementing control device 73 arranged in the liquid storage tank 71, and a liquid outlet 74 which is arranged at the other end of the liquid storage tank 71 and connected with the cleaning tank 1, wherein the liquid outlet 74 is positioned above the cleaning tank 1. The liquid supplementing control device 73 accurately supplements acid liquid to the cleaning tank 1 through a detection signal fed back by the pH on-line detector, the control is accurate and convenient, and the liquid outlet 74 is positioned above the cleaning tank 1.
The two ends of the liquid storage tank 71 are respectively provided with a mounting fixing seat 75, an observation window 76 is arranged on the liquid storage tank 71 along the length direction of the liquid storage tank, and the position of the observation window 76 is provided with a scale mark 77. The observation window 76 and the scale marks 77 facilitate observation of the amount of liquid in the liquid storage tank 71.
The ozone water generator 3 is connected with a control unit 8, and the pH online detector 5 and the liquid supplementing and supplementing control device 73 are respectively connected with the control unit 8. The control unit 8 may be a PLC controller, and calculates the required amount of acid solution according to the pH value detected by the pH online detector 5, and then controls the solution supplement control device 73 to supplement the required amount of acid solution to the cleaning tank 1, so that the control is convenient and accurate.
A liquid level meter 11 is arranged in the cleaning tank 1, a solution supplementing mechanism 9 is arranged at the upper part of the cleaning tank 1, and the liquid level meter 11 and the solution supplementing mechanism 9 are respectively connected with the control unit 8. The liquid level meter 11 detects the liquid level in the cleaning tank 1, and when the liquid level is lower than a preset value, the solution supplementing mechanism 9 supplements the solution in the cleaning tank 1, so as to ensure that the solution in the cleaning tank is in a proper cleaning range.
In the ozone water cleaning apparatus of the present invention, the solution in the cleaning tank 1 is inputted into the ozone water generator 3 by the circulating pump 4, and after ozone water is generated, the solution enters the cleaning tank 1 through the liquid inlet pipe 6, so as to form a circulating system, thereby ensuring the concentration of the ozone water in the cleaning tank 1; the pH online detector 5 detects a pH value of the solution in the cleaning tank 1, and when the pH value is lower than a preset value, the acid solution supplementing mechanism 7 supplements a required amount of acid solution, which may be hydrochloric acid or hydrofluoric acid, toward the cleaning tank 1, so as to accurately maintain the pH value of the solution in the cleaning tank 1, thereby controlling the concentration of ozone water more stably and improving the cleaning quality of products.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and those skilled in the art can make many variations and modifications of the technical solution of the present invention without departing from the scope of the technical solution of the present invention.
Claims (5)
1. An ozone water cleaning device is characterized in that: the device comprises a cleaning tank, a liquid outlet pipe connected with the cleaning tank, an ozone water generator connected with the liquid outlet pipe, a circulating pump arranged on the liquid outlet pipe, a pH on-line detector arranged in the cleaning tank and/or at an inlet and/or an outlet of the circulating pump, a liquid inlet pipe connected with the ozone water generator and the upper part of the cleaning tank, and an acid liquor supplementing mechanism arranged above the liquid inlet pipe.
2. The ozonated water cleaning apparatus according to claim 1, wherein: the acid liquor supplementing mechanism comprises a liquid storage tank, a liquid inlet flow equalizing plate and a liquid outlet flow equalizing plate which are arranged in the liquid storage tank, a liquid supplementing control device arranged in the liquid storage tank and a liquid outlet which is arranged at the other end of the liquid storage tank and connected with the cleaning tank, wherein the liquid outlet is positioned above the cleaning tank.
3. The ozonated water cleaning apparatus according to claim 2, wherein: the liquid storage tank is characterized in that a liquid inlet and a liquid outlet are respectively arranged at two ends of the liquid storage tank, an observation window is arranged on the liquid storage tank, and scale marks are arranged at the observation window.
4. The ozonated water cleaning apparatus according to claim 2, wherein: the ozone water generator is connected with a control unit, and the pH on-line detector and the liquid supplementing control device are respectively connected with the control unit.
5. The ozonated water cleaning apparatus according to claim 1, wherein: the cleaning tank is internally provided with a liquid level meter, and the upper part of the cleaning tank is provided with a solution supplementing mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020868474.9U CN212442316U (en) | 2020-05-21 | 2020-05-21 | Ozone water cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020868474.9U CN212442316U (en) | 2020-05-21 | 2020-05-21 | Ozone water cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212442316U true CN212442316U (en) | 2021-02-02 |
Family
ID=74500329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020868474.9U Active CN212442316U (en) | 2020-05-21 | 2020-05-21 | Ozone water cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212442316U (en) |
-
2020
- 2020-05-21 CN CN202020868474.9U patent/CN212442316U/en active Active
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