CN212245293U - Small product grabbing device - Google Patents

Small product grabbing device Download PDF

Info

Publication number
CN212245293U
CN212245293U CN202021664927.2U CN202021664927U CN212245293U CN 212245293 U CN212245293 U CN 212245293U CN 202021664927 U CN202021664927 U CN 202021664927U CN 212245293 U CN212245293 U CN 212245293U
Authority
CN
China
Prior art keywords
top cover
gripping device
processing module
data processing
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202021664927.2U
Other languages
Chinese (zh)
Inventor
高椿明
胡强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ningbo Jiwei Express Intelligent Technology Co Ltd
Original Assignee
Ningbo Jiwei Express Intelligent Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ningbo Jiwei Express Intelligent Technology Co Ltd filed Critical Ningbo Jiwei Express Intelligent Technology Co Ltd
Priority to CN202021664927.2U priority Critical patent/CN212245293U/en
Application granted granted Critical
Publication of CN212245293U publication Critical patent/CN212245293U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Manipulator (AREA)

Abstract

The utility model discloses a tiny product gripping device, which comprises a data processing module, a negative pressure cavity, a direction adjuster and a suction head; the upper end of the negative pressure cavity is provided with an air exhaust port and is connected with external air exhaust equipment. The utility model discloses a real-time perception sucking disc of piezoelectric sensor and the contact force of being snatched between the thing to turn into the signal of telecommunication with the contact force and send to data processing module, data processing module is according to received signal of telecommunication discernment sucking disc and the position of being snatched the thing and contacting, and then corresponds adjustment length adjuster, raises the place of contact, alleviates sucking disc and by snatching the hard contact between the thing, prevents that the sucking disc from crushing by snatching the thing.

Description

Small product grabbing device
Technical Field
The invention relates to the field of negative pressure grabbing equipment, in particular to a tiny product grabbing device.
Background
The grabbing of tiny products is always an important technical link in the industrial field represented by the microelectronic industry. By utilizing the negative pressure technology, a local negative pressure field lower than the atmospheric pressure is generated on the surface of the product, so that the lifting force can be formed on the product, the product can be sucked, and subsequent operations such as transportation can be completed.
The micro product grabbing technology develops along with the development of the microelectronic industry, and various technologies are developed to grab corresponding products, wherein the typical technologies include negative pressure grabbing, physical clamping, electrostatic absorption, electromagnetic absorption and the like, and the negative pressure grabbing is widely applied due to the advantages of wide application range, high reliability, small damage to products and the like. The requirements for negative pressure gripping technology for gripping smaller and smaller micro product sizes, especially submillimeter products, are also increasing, and the most important technical problems include: firstly, the size of the suction head is matched with the product, so that the size of the suction head, particularly the size of a suction hole on the suction head, is required to be smaller and smaller; secondly, the effective distance between the suction head and the tiny product is closer and closer because the suction holes are less and less, which requires that the parallelism between the suction head and the upper surface of the product is higher and higher when the suction head works, otherwise, the surface of the suction head deflects after long-term work due to the displacement deformation caused by temperature change, vibration and the like, thereby causing suction failure or the product crushing by the suction head. These disadvantages are difficult to overcome at one time by virtue of the initial installation of the tip product, and it is therefore a necessary option to develop an intelligent tip technique that senses and corrects the tip attitude in time during operation.
SUMMERY OF THE UTILITY MODEL
Not enough to the above among the prior art, the utility model provides a pair of small product grabbing device has solved the parallelism that current negative pressure snatchs equipment can't adjust the suction head in real time and is snatched the thing for the suction head crushes by the problem of snatching the thing easily.
In order to achieve the purpose of the invention, the utility model adopts the technical scheme that:
the tiny product gripping device comprises a data processing module, a negative pressure cavity, an orientation regulator and a suction head; the upper end of the negative pressure cavity is provided with an air extraction port and is connected with external air extraction equipment;
the azimuth adjuster comprises a hollow column, a top cover and a base, wherein the middle of the top cover is provided with a through hole; the upper end of the hollow column is connected with the inner side of the top cover, and the outer side of the upper surface of the top cover is connected with the negative pressure cavity; the lower end of the hollow column is connected with the inner side of the base, at least two length regulators are arranged between the base and the top cover, and all the length regulators are not in the same straight line with the center of the hollow column;
the suction head comprises a cavity wall connected with the outer side of the lower surface of the base, an opening is formed in the lower end of the cavity wall, a suction disc with the surface protruding out of the cavity wall is arranged at the lower end of the opening, a piezoelectric sensor is arranged on the upper surface of the opening, an insulating pressing plate is arranged on the upper surface of the piezoelectric sensor, and a pressure spring is arranged between the upper surface of the insulating pressing plate and the lower surface of the base; a first vent hole is formed in the middle of the piezoelectric sensor, and a second vent hole is formed in the middle of the insulating pressing plate;
and the data processing module is respectively connected with the piezoelectric sensor and the length adjuster.
Further, the lower surface of the sucker is provided with a gold plating layer.
Furthermore, the aperture in the sucker is more than or equal to 0.01mm and less than or equal to one half of the size of the sucked object
Furthermore, the piezoelectric sensor is a piezoelectric ceramic sensor, the whole lower surface of the piezoelectric ceramic sensor is provided with one electrode, the upper surface of the piezoelectric ceramic sensor is provided with four insulating seams from inside to outside, and the upper surface of the piezoelectric ceramic sensor is divided into four mutually independent upper electrodes; each upper electrode is connected with the data processing module.
Furthermore, a signal line interface is arranged on the top cover.
Furthermore, the top cover is provided with at least two first fixing holes, the base is provided with at least two second fixing holes, and the top cover and the base are respectively fixedly connected with the negative pressure cavity and the cavity wall of the cavity through screws penetrating through the first fixing holes and the second fixing holes.
Furthermore, two length adjusters are arranged, and the two length adjusters are respectively vertical to the connecting line of the centers of the hollow columns.
Further, the data processing module is a computer.
Furthermore, four signal line through holes corresponding to the upper electrodes are arranged on the insulating pressing plate.
Further, the length adjuster is a piezoelectric telescopic column.
The utility model has the advantages that: this device passes through the real-time perception sucking disc of piezoelectric sensor and is snatched the contact force between the thing to turn into the signal of telecommunication with the contact force and send to data processing module, data processing module discerns the sucking disc and is snatched the position that the thing contacted according to received signal of telecommunication, and then corresponds adjustment length adjuster, raises the place of contact, alleviates the sucking disc and is snatched the hard contact between the thing, prevents that the sucking disc from crushing and snatched the thing.
Drawings
FIG. 1 is a cross-sectional view of the present device;
FIG. 2 is a schematic structural diagram of a piezoelectric sensor;
FIG. 3 is a top view of the azimuth adjuster;
fig. 4 is a schematic structural view of the insulating pressing plate.
Wherein: 1. an air extraction opening; 2. a negative pressure chamber; 3. a screw; 4. a top cover; 5. a hollow column; 6. a length adjuster; 7. a base; 8. a cavity wall; 9. an insulating platen; 10. a suction cup; 11. a piezoelectric sensor; 12. a pressure spring; 13. a signal line interface; 14. insulating seams; 15. an upper electrode; 16. a first vent hole; 17. a first fixing hole; 18. a second fixing hole; 19. a signal line via hole; 20. and a second vent hole.
Detailed Description
The following description of the embodiments of the present invention is provided to facilitate the understanding of the present invention by those skilled in the art, but it should be understood that the present invention is not limited to the scope of the embodiments, and various changes will be apparent to those skilled in the art as long as they are within the spirit and scope of the present invention as defined and defined by the appended claims, and all inventions contemplated by the present invention are protected.
As shown in fig. 1, the tiny product gripping device comprises a data processing module, a negative pressure cavity 2, an orientation regulator and a suction head; the upper end of the negative pressure cavity 2 is provided with an air exhaust port 1 and is connected with external air exhaust equipment;
the azimuth adjuster comprises a hollow column 5, a top cover 4 and a base 7, wherein the middle of the top cover 4 is provided with a through hole; the upper end of the hollow column 5 is connected with the inner side of the top cover 4, and the outer side of the upper surface of the top cover 4 is connected with the negative pressure cavity 2; the lower end of the hollow column 5 is connected with the inner side of a base 7, at least two length regulators 6 are arranged between the base 7 and the top cover 4, and the centers of all the length regulators 6 and the center of the hollow column 5 are not on the same straight line, so that each length regulator 6 can control the regulation in different directions;
the suction head comprises a cavity wall 8 connected with the outer side of the lower surface of the base 7, an opening is formed in the lower end of the cavity wall 8, a suction disc 10 with the surface protruding out of the cavity wall 8 is arranged at the lower end of the opening, a piezoelectric sensor 11 is arranged on the upper surface of the opening, an insulating pressing plate 9 is arranged on the upper surface of the piezoelectric sensor 11, a pressure spring 12 is arranged between the upper surface of the insulating pressing plate 9 and the lower surface of the base 7, and the pressure spring 12 is in a compression state, so that the piezoelectric sensor 11 is ensured to be in a stress state; a first vent hole 16 is arranged in the middle of the piezoelectric sensor 11, and a second vent hole 20 is arranged in the middle of the insulating pressing plate 9;
and the data processing module is respectively connected with the piezoelectric sensor 11 and the length adjuster 6 and is used for correspondingly controlling the length adjuster 6 according to the signal of the piezoelectric sensor 11 so as to adjust the parallelism between the sucker 10 and the grabbed object.
In order to reduce the hard contact between the suction head and the object to be grasped when adjusting the distance and angle therebetween, and prevent damage to the suction head or the object to be grasped, the suction head 10 may be made of a metal material, and a gold-plated layer may be provided on the lower surface thereof, and the thickness of the gold-plated layer may be set to several micrometers to several tens micrometers. In order to ensure the grabbing effect, the aperture in the sucker 10 is more than or equal to 0.01mm and less than or equal to one half of the size of the object to be sucked.
As shown in fig. 2, in order to ensure the sensitivity of the device and enable the device to sense stress conditions in different directions, the piezoelectric sensor 11 is a piezoelectric ceramic sensor, the whole lower surface of the piezoelectric ceramic sensor is an electrode, the upper surface of the piezoelectric ceramic sensor is provided with four insulating seams 14 from inside to outside, and the upper surface of the piezoelectric ceramic sensor is divided into four upper electrodes 15 which are independent of each other; each upper electrode 15 is connected to a data processing module. As shown in fig. 4, four signal line through holes 19 corresponding to the upper electrodes 15 are provided on the insulating presser plate 9.
In the specific implementation process, a wireless transmission scheme may be adopted, a wireless transmission device is arranged in the cavity wall 8 to transmit the data of the piezoelectric sensor 11 to the data processing module, or a signal line interface 13 is arranged on the top cover 4, and the signal line of the piezoelectric sensor 11 is led out through the signal line interface 13 and connected to the data processing module.
As shown in figure 3, in order to effectively fix and facilitate the detachment of the azimuth adjuster and the suction head and the negative pressure cavity 2, at least two first fixing holes 17 are formed in the top cover 4, at least two second fixing holes 18 are formed in the base 7, and the top cover 4 and the base 7 are fixedly connected with the negative pressure cavity 2 and the cavity wall 8 through screws 3 penetrating through the first fixing holes 17 and the second fixing holes 18 respectively. Wherein, the first fixing holes 17 and the second fixing holes 18 can be arranged in 4 at equal intervals, so that the distance between two adjacent first fixing holes 17 or two adjacent second fixing holes 18 is equal.
The length adjuster 6 is provided in two, and the two length adjusters 6 are respectively perpendicular to the connecting line of the centers of the hollow columns 5. The arrangement can be adjusted by the length of the two length adjusters 6, so that the sucker 10 has four-way adjusting capability. When the data processing module receives the signal of the upper electrode 15 positioned on the left side and does not receive the signals of other upper electrodes 15, the object to be grabbed is positioned on the left side of the sucking disc 10, and at the moment, if the length adjuster 6 on the same straight line with the central points of the upper electrode 15 and the sucking disc 10 on the left side is positioned on the left side of the central point of the sucking disc 10, the length of the length adjuster 6 is only required to be contracted, and the sucking disc 10 can be prevented from continuously pressing the object to be grabbed; similarly, if the length adjuster 6 on the same straight line with the central point of the upper electrode 15 and the sucking disc 10 on the left side is located on the right side of the central point of the sucking disc 10, the length of the length adjuster 6 is only required to be lengthened, and the sucking disc 10 can be prevented from continuously pressing to the object to be grabbed.
In one embodiment of the present invention, the data processing module is a computer. In addition, the computer as the data processing module can preferably control the manipulator or other equipment for clamping the device, so that the manipulator or other equipment for clamping the device can also horizontally move according to the data of the piezoelectric sensor 11, the through hole on the suction cup 10 can be closer to the object to be grabbed, and the grabbing efficiency is further improved.
For example, a four-axis robot is used as a carrier, and the device is mounted on the fourth axis through the pumping hole 1, so that gas can enter from the hole of the suction cup 10 and sequentially pass through the piezoelectric sensor 11, the insulating pressing plate 9, the base 7, the hollow column 5, the top cover 4 and the negative pressure cavity 2 to reach the pumping hole 1. The working process of the system is as follows: utilize four-axis robot to drive this device and move, reach the upper surface of waiting to absorb the product, in this process, carry out real time monitoring to the process of snatching through piezoelectric sensor 11, on the basis of piezoelectric sensor 11 four-wire signal output signal, if sucking disc 10 with absorb the product surface depth of parallelism relatively poor, lead to taking place unusual contact signal, can directly control four-axis robot stop motion through this signal, and according to the correction strategy of setting for in advance, the flexible of control piezoelectricity flexible post, thereby adjust the contained angle of sucking disc 10 that has covered the gild layer, accomplish the direction adjustment to the suction head, thereafter piezoelectric sensor 11 feedback signal to four-axis robot, four-axis robot starts once more and snatchs the action, this process cycle is repeated, until accomplishing good absorption action. If the circulation frequency exceeds 5 times in the circulation process, the suction action can not be finished, the four-axis robot can give an alarm, and the action is stopped.
To sum up, the utility model discloses a real-time perception sucking disc 10 of piezoelectric sensor 11 and the contact force between the snatched substance to turn into the signal of telecommunication with the contact force and send to data processing module, data processing module is according to received signal of telecommunication discernment sucking disc 10 and the position that is contacted by the snatched substance, and then corresponds adjustment length adjuster 6, raises the place of contact, alleviates sucking disc 10 and by the hard contact between the snatched substance, prevents that sucking disc 10 from crushing by the snatched substance.

Claims (10)

1. A tiny product gripping device is characterized by comprising a data processing module, a negative pressure cavity (2), a direction adjuster and a suction head; the upper end of the negative pressure cavity (2) is provided with an air extraction port (1) and is connected with external air extraction equipment;
the azimuth adjuster comprises a hollow column (5), a top cover (4) and a base (7), wherein the middle of the top cover is provided with a through hole; the upper end of the hollow column (5) is connected with the inner side of the top cover (4), and the outer side of the upper surface of the top cover (4) is connected with the negative pressure cavity (2); the lower end of the hollow column (5) is connected with the inner side of the base (7), at least two length regulators (6) are arranged between the base (7) and the top cover (4), and the centers of all the length regulators (6) and the hollow column (5) are not on the same straight line;
the suction head comprises a cavity wall (8) connected with the outer side of the lower surface of the base (7), the lower end of the cavity wall (8) is provided with an opening, the lower end of the opening is provided with a suction cup (10) with the surface protruding out of the cavity wall (8), the upper surface of the opening is provided with a piezoelectric sensor (11), the upper surface of the piezoelectric sensor (11) is provided with an insulating pressing plate (9), and a pressure spring (12) is arranged between the upper surface of the insulating pressing plate (9) and the lower surface of the base (7); a first vent hole (16) is formed in the middle of the piezoelectric sensor (11), and a second vent hole (20) is formed in the middle of the insulating pressing plate (9);
and the data processing module is respectively connected with the piezoelectric sensor (11) and the length adjuster (6).
2. The tiny product gripping device according to claim 1, wherein the lower surface of the suction cup (10) is provided with a gold plating layer.
3. The device for gripping small products according to claim 1, characterized in that the aperture in the suction cup (10) is equal to or greater than 0.01mm and equal to or less than half the size of the object to be sucked.
4. The tiny product gripping device according to claim 1, wherein the piezoelectric sensor (11) is a piezoelectric ceramic sensor, the whole lower surface of the piezoelectric ceramic sensor is an electrode, the upper surface of the piezoelectric ceramic sensor is provided with four insulation seams (14) from inside to outside, and the upper surface of the piezoelectric ceramic sensor is divided into four mutually independent upper electrodes (15); each upper electrode (15) is connected with a data processing module.
5. The tiny product gripping device according to claim 1, wherein a signal line interface (13) is provided on the top cover (4).
6. The tiny product gripping device according to claim 1, wherein the top cover (4) is provided with at least two first fixing holes (17), the base (7) is provided with at least two second fixing holes (18), and the top cover (4) and the base (7) are fixedly connected with the negative pressure cavity (2) and the cavity wall (8) through screws (3) penetrating through the first fixing holes (17) and the second fixing holes (18), respectively.
7. The small product gripping device according to claim 1, wherein the length adjuster (6) is provided in two, and the two length adjusters (6) are perpendicular to each other with respect to a line connecting centers of the hollow columns (5).
8. The micro-product gripping device according to claim 1, wherein the data processing module is a computer.
9. The tiny product gripping device according to claim 4, wherein the insulating pressing plate (9) is provided with four signal line through holes (19) corresponding to the upper electrodes (15).
10. The small product gripping device according to claim 1, wherein the length adjuster (6) is a piezoelectric telescopic column.
CN202021664927.2U 2020-08-12 2020-08-12 Small product grabbing device Active CN212245293U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021664927.2U CN212245293U (en) 2020-08-12 2020-08-12 Small product grabbing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021664927.2U CN212245293U (en) 2020-08-12 2020-08-12 Small product grabbing device

Publications (1)

Publication Number Publication Date
CN212245293U true CN212245293U (en) 2020-12-29

Family

ID=73981492

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202021664927.2U Active CN212245293U (en) 2020-08-12 2020-08-12 Small product grabbing device

Country Status (1)

Country Link
CN (1) CN212245293U (en)

Similar Documents

Publication Publication Date Title
CN111977368A (en) Small product grabbing device
US10479619B2 (en) Separator suction device with rotary actuator
CN108994870A (en) End effector and manipulator for manipulator
US20200361097A1 (en) Gripping tool, gripping system, and evaluation method of gripping performance
CN212245293U (en) Small product grabbing device
CN112919140B (en) Near-field suspension and static pressure adsorption coupled suspension grabbing system
CN111823264B (en) Bipolar plate grabbing device and bipolar plate grabbing system
CN111326438B (en) Leveling device and reaction chamber
CN107283396B (en) Force application adjustable manipulator and use its robot
CN215471198U (en) Mechanical arm end effector, mechanical arm and robot
CN110405049B (en) Hole site machining device and machining process for sheet product
CN216126463U (en) Stamping manipulator suction disc frame
CN207372465U (en) The driving structure of thermocompression bonder
CN111805575A (en) Anti-fatigue manipulator material taking detection device
CN2573157Y (en) Three clamping feet gripper
CN221381182U (en) Press-fit jig for MEMS substrate
CN218498019U (en) Wafer pair pre-bonding device
CN219707428U (en) Film mounting and pressure feedback mechanism
CN117067213A (en) Automatic control manipulator
CN216760851U (en) Pressure maintaining jig
CN112687568B (en) Semiconductor process equipment and bearing device thereof
CN111141235B (en) Utensil is assisted in quick discernment punching press sheet material deformation
CN220055460U (en) Flexible screen transferring and adsorbing device
CN217225593U (en) High pile up neatly machine people of security
CN221708660U (en) Wafer paster device for chip processing

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant