CN211927204U - Rotary target tip leak detection device - Google Patents
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- CN211927204U CN211927204U CN202020760798.0U CN202020760798U CN211927204U CN 211927204 U CN211927204 U CN 211927204U CN 202020760798 U CN202020760798 U CN 202020760798U CN 211927204 U CN211927204 U CN 211927204U
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- 238000001514 detection method Methods 0.000 title claims description 46
- 239000012530 fluid Substances 0.000 claims abstract description 80
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 14
- 230000005611 electricity Effects 0.000 claims abstract description 7
- 238000007789 sealing Methods 0.000 claims abstract description 3
- 238000003032 molecular docking Methods 0.000 claims description 41
- 238000002347 injection Methods 0.000 claims description 24
- 239000007924 injection Substances 0.000 claims description 24
- 238000009434 installation Methods 0.000 claims description 10
- 210000001503 joint Anatomy 0.000 abstract description 12
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
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Abstract
Description
技术领域technical field
本实用新型涉及检具设备领域,尤其涉及一种旋转靶端头快速检漏装置。The utility model relates to the field of inspection tools, in particular to a rapid leak detection device for a rotating target end.
背景技术Background technique
现有的镀膜线在工作时,旋转靶需要旋转并通电工作,由于通电会产生热量故需要往旋转靶内注水进行冷却。目前的旋转靶大都由合金制成的端头所支撑,在镀膜线换靶期间一般会将经保养维护后的新端头去更换下在使用的旧端头,新端头安装后还需与旋转靶在真空环境下进行实机检验,以检测新端头是否存在泄漏的情况,如果发现新端头有泄漏或有故障,轻则会影响到真空度,需要停用旋转靶材,重则会造成镀膜设备的损坏。但目前的新端头检漏过程操作繁复,而且新端头在测试时出现泄漏和故障,还必须卸下新端头,耗时耗力。When the existing coating line is in operation, the rotating target needs to be rotated and energized to work. Since the electrification will generate heat, water needs to be injected into the rotating target for cooling. At present, most of the rotating targets are supported by the ends made of alloy. During the target change of the coating line, the new end that has been maintained and maintained is generally replaced with the old end in use. After the new end is installed, it needs to be The rotating target is tested on a real machine in a vacuum environment to detect whether the new end has leakage. If the new end is found to be leaking or faulty, it will affect the degree of vacuum in the light, and the rotating target needs to be stopped. It will cause damage to the coating equipment. However, the current leak detection process of the new end is complicated, and when the new end leaks and fails during testing, the new end must be removed, which is time-consuming and labor-intensive.
因此,亟需要一种检测便捷且成本低的旋转靶端头检漏装置快速来克服上述缺陷。Therefore, there is an urgent need for a rotary target tip leak detection device with convenient detection and low cost to quickly overcome the above-mentioned defects.
实用新型内容Utility model content
本实用新型的目的在于提供一种检测快速便捷的旋转靶端头检漏装置。The purpose of the utility model is to provide a leak detection device for a rotating target end that is fast and convenient for detection.
为实现上述目的,本实用新型的旋转靶端头检漏装置,适与端头配装使用,所述端头具有一供旋转靶材安装的安装端和一供水电基座安装的装配端,所述端头的安装端和装配端各对应设有一水电出入口和水电对接口,所述旋转靶端头检漏装置包括对接件、承接座和测压仪,所述对接件具有流体接入腔,所述流体接入腔贯穿所述对接件的两端,所述承接座上设有一可选择性启闭的流体注入口,所述测压仪连通于流体接入腔,所述对接件的第一端与所述端头的安装端可拆卸地密封连接,所述对接件的第二端安装于所述承接座上,所述流体注入口连通于所述对接件的流体接入腔,所述对接件在安装到所述端头的安装端后所述流体接入腔连通于所述端头的水电出入口。In order to achieve the above-mentioned purpose, the rotary target end leak detection device of the present invention is suitable for the use of the end head, and the end head has a mounting end for the installation of the rotating target material and an assembly end for the installation of a water supply base, The mounting end and the assembling end of the end head are respectively provided with a hydroelectric inlet and outlet and a hydroelectric docking port. The leak detection device for the rotating target end includes a docking piece, a receiving seat and a pressure gauge, and the docking piece has a fluid access cavity. , the fluid access cavity runs through both ends of the docking piece, the receiving seat is provided with a fluid injection port that can be selectively opened and closed, the pressure gauge is connected to the fluid entry cavity, and the docking piece is The first end is detachably and sealedly connected to the mounting end of the end head, the second end of the docking piece is mounted on the receiving seat, the fluid injection port is communicated with the fluid access cavity of the docking piece, After the docking piece is installed on the mounting end of the end head, the fluid access cavity is communicated with the hydroelectric inlet and outlet of the end head.
较佳地,所述对接件为一管状件。Preferably, the abutting member is a tubular member.
较佳地,所述对接件的第一端螺接于所述端头的安装端。Preferably, the first end of the abutting member is screwed to the mounting end of the end head.
较佳地,所述对接件在安装到所述端头的安装端后呈水平布置。Preferably, the abutting member is arranged horizontally after being mounted on the mounting end of the end head.
较佳地,所述承接座内设有一流体通道,所述承接座包括呈竖直布置的安装板及水平凸伸于所述安装板的凸柱,所述流体通道的第一端贯穿于所述安装板并连通于所述对接件的流体接入腔,所述流体通道的第二端贯穿于所述凸柱,所述流体注入口设置所述凸柱的端部处。Preferably, a fluid channel is provided in the receiving seat, the receiving seat includes a vertically arranged mounting plate and a protruding column horizontally protruding from the mounting plate, and the first end of the fluid channel penetrates through the mounting plate. The mounting plate is communicated with the fluid access cavity of the docking piece, the second end of the fluid channel penetrates through the protruding post, and the fluid injection port is provided at the end of the protruding post.
较佳地,本实用新型的旋转靶端头检漏装置还包括一水平布置输入管,所述输入管安装于所述凸柱上,所述输入管的第一端连通于所述流体输入口,所述输入管上安装有一开关阀。Preferably, the rotary target end leak detection device of the present invention further comprises a horizontally arranged input pipe, the input pipe is installed on the convex column, and the first end of the input pipe is connected to the fluid input port. , an on-off valve is installed on the input pipe.
较佳地,所述测压仪安装于所述输入管上并设于所述凸柱与所述开关阀之间。Preferably, the pressure measuring instrument is installed on the input pipe and arranged between the convex column and the on-off valve.
较佳地,所述对接件为一圆筒件,所述对接件的第一端的外缘上设有螺纹。Preferably, the abutting member is a cylindrical member, and a thread is provided on the outer edge of the first end of the abutting member.
较佳地,所述对接件的轴线与所述安装板呈相互垂直布置。Preferably, the axis of the abutting member and the mounting plate are arranged perpendicular to each other.
较佳地,所述测压仪为一压力表。Preferably, the pressure measuring instrument is a pressure gauge.
与现有技术相比,本实用新型的旋转靶端头检漏装置包括对接件、承接座和测压仪,对接件具有流体接入腔,流体接入腔贯穿对接件的两端,承接座上设有一可选择性启闭的流体注入口,测压仪连通于流体接入腔,对接件的第一端与端头的安装端可拆卸地密封连接,对接件的第二端安装于承接座上,流体注入口连通于对接件的流体接入腔,对接件在安装到端头的安装端后流体接入腔连通于端头的水电出入口。在端头保养好后,将对接件安装到端头的安装端后,打开流体注入口往流体接入腔内注入一定压力和体积的流体,后随即关闭流体注入口,静置旋转靶端头检漏装置一定时间后观察测压仪的数值,如果测压仪显示的数值明显小于初始注入流体的压力时说明端头存在泄露的情况,需要对端头进行重新维护。由于对端头的检漏不需与旋转靶相安装,也不需要在真空环境下进行测试,在常规环境下直接将旋转靶端头检漏装置安装到端头后,注入一定量带有压力的流体便能对端头进行检漏,故检漏操作过程便捷且成本低。Compared with the prior art, the leak detection device for the rotating target end of the present invention includes a docking piece, a receiving seat and a pressure measuring instrument. There is a fluid injection port that can be selectively opened and closed, the pressure gauge is connected to the fluid access cavity, the first end of the docking piece is detachably sealed with the mounting end of the end, and the second end of the docking piece is installed in the receiving cavity. On the seat, the fluid injection port is connected to the fluid access cavity of the docking piece, and the fluid entry cavity of the docking piece is connected to the hydroelectric inlet and outlet of the terminal after the docking piece is installed on the mounting end of the terminal. After the end is maintained, install the docking piece on the mounting end of the end, open the fluid injection port and inject a certain pressure and volume of fluid into the fluid access cavity, then close the fluid injection port and rotate the target end. After a certain period of time, the leak detection device should observe the value of the pressure gauge. If the value displayed by the pressure gauge is significantly lower than the pressure of the initial injected fluid, it means that the end is leaking, and the end needs to be re-maintained. Since the leak detection of the end head does not need to be installed with the rotating target, and it does not need to be tested in a vacuum environment, in the conventional environment, directly install the rotating target end leak detection device to the end head, inject a certain amount with pressure The fluid can be used for leak detection at the end, so the leak detection operation process is convenient and the cost is low.
附图说明Description of drawings
图1是本实用新型旋转靶端头检漏装置对端头进行检漏测试时的立体结构示意图。FIG. 1 is a schematic three-dimensional structure diagram of the leak detection device of the rotating target tip of the present invention when the tip is tested for leak detection.
图2是隐藏图1中供水电基座后,端头分离于旋转靶端头检漏装置时的立体结构示意图。FIG. 2 is a schematic three-dimensional structure diagram when the water supply and power base in FIG. 1 is hidden and the tip is separated from the leak detection device of the rotating target tip.
图3是本实用新型旋转靶端头检漏装置的立体结构示意图。FIG. 3 is a schematic three-dimensional structure diagram of the leak detection device of the rotating target end according to the present invention.
图4是图3中旋转靶端头检漏装置另一角度的立体结构示意图。FIG. 4 is a schematic three-dimensional structural diagram of another angle of the leak detection device of the rotating target end shown in FIG. 3 .
具体实施方式Detailed ways
为了详细说明本实用新型的技术内容、构造特征,以下结合实施方式并配合附图作进一步说明。In order to describe the technical content and structural features of the present utility model in detail, further description is given below with reference to the embodiments and the accompanying drawings.
如图1至图4所示,本实用新型的旋转靶端头检漏装置100,适与端头200配装使用,端头200具有一供旋转靶材安装的安装端201和一供水电基座300安装的装配端202,端头200的安装端201和装配端202各对应设有一水电出入口203和水电对接口204,旋转靶端头检漏装置100包括对接件10、承接座20和测压仪30,对接件10具有流体接入腔101,流体接入腔101贯穿对接件10的两端,承接座20上设有一可选择性启闭的流体注入口,测压仪30连通于流体接入腔101,对接件10的第一端与端头200的安装端201可拆卸地密封连接,对接件10的第二端安装于承接座20上,流体注入口连通于对接件10的流体接入腔101,对接件10在安装到端头200的安装端201后流体接入腔101连通于端头200的水电出入口203。在端头200保养好后,将对接件10安装到端头200的安装端201后,打开流体注入口往流体接入腔101内注入一定压力和体积的流体,后随即关闭流体注入口,静置旋转靶端头检漏装置100一定时间后观察测压仪30的数值,如果测压仪30显示的数值明显小于初始注入流体的压力时说明端头200存在泄露的情况,需要对端头200进行重新维护。由于对端头200的检漏不需与旋转靶相安装,也不需要在真空环境下进行测试,在常规环境下直接将旋转靶端头检漏装置100安装到端头200后,注入一定量带有压力的流体便能对端头200进行检漏,故检漏操作过程便捷且成本低。举例而言,往流体接入腔101中注入的流体为空气,当然根据实际需要,往流体接入腔101中也可注入液体,如水等,故不限于此。需要说明的是,水电基座300已为本领域技术人员所熟知,如水电基座300上安装有进水管301、出水管302和接电端303,故在此不再赘述。优选的是,端头200的结构已为本领域技术人员所熟知,其中端头200的安装端201和装配端202呈正交布置,但不限于此。As shown in FIGS. 1 to 4 , the rotary target tip
如图2至图4所示,对接件10为一管状件。优选的是,对接件10为一圆筒件,对接件10的第一端的外缘上设有螺纹102,对应地,端头200的安装端201处也对应设有与对接件10的螺纹102相配合的螺纹结构。具体地,对接件10的第一端螺接于端头200的安装端201,以保证对接件100和端头200相连接的密封效果,且利于对接件10和端头200的拆装,当然根据实际需要,对接件10与端头200之间还可通过诸如卡接等方式进行连接,故不以此为限。更具体地,对接件10在安装到端头200的安装端201上后呈水平布置,以使对接件100和端头200在检漏时更平稳。As shown in FIG. 2 to FIG. 4 , the
如图2至图4所示,承接座20内设有一流体通道(图中未示),承接座20包括呈竖直布置的安装板21及水平凸伸于安装板21的凸柱22,流体通道的第一端贯穿于安装板21并连通于对接件10的流体接入腔101,流体通道的第二端贯穿于凸柱22,流体注入口设于凸柱22的端部处,在安装板21的支撑下对接件10能平稳地与端头200进行安装。优选的是,对接件10的轴线与安装板21呈相互垂直布置,对接件10与安装板21之间不易产生应力,保证对接件10与安装板21之间的结构稳定性。具体地,本实用新型的旋转靶端头检漏装置100还包括一水平布置的输入管40,输入管40安装于凸柱22上,输入管40的第一端连通于流体输入口,输入管40上安装有一开关阀50,通过操控开关阀50便能方便地控制流体注入口的打开或关闭,由于凸柱22和输入管40均呈水平的,因此操作时能便捷顺手地操作开关阀50的开闭。优选的是,测压仪30安装于输入管40上并设于凸柱22与开关阀50之间,这样的布置有利于简化测压仪30的安装。举例而言,测压仪30为一压力表,如气压表或液压表,但不限于此。As shown in FIG. 2 to FIG. 4 , a fluid channel (not shown in the figure) is provided in the receiving
结合附图1至4,对本实用新型的旋转靶端头检漏装置100的工作原理进行说明:端头端头200保养好后,将对接件10安装到端头200的安装端201,打开流体注入口往流体接入腔101内注入大约6公斤的压缩空气,后随即关闭开关阀50,静置旋转靶端头检漏装置100一定时间后观察气压表的气压值,如果气压表显示的数值明显小于初始注入流体的压力时说明端头200存在泄露的情况,需要对端头200进行重新维护,工作原理如上所述。With reference to Figures 1 to 4, the working principle of the rotating target tip
与现有技术相比,本实用新型的旋转靶端头检漏装置100包括对接件10、承接座20和测压仪30,对接件10具有流体接入腔101,流体接入腔101贯穿对接件10的两端,承接座20上设有一可选择性启闭的流体注入口,测压仪30连通于流体接入腔101,对接件10的第一端与端头200的安装端201可拆卸地密封连接,对接件10的第二端安装于承接座20上,流体注入口连通于对接件10的流体接入腔101,对接件10在安装到端头200的安装端201后流体接入腔101连通于端头200的水电出入口203。在端头200保养好后,将对接件10安装到端头200的安装端201后,打开流体注入口往流体接入腔101内注入一定压力和体积的流体,后随即关闭流体注入口,静置旋转靶端头检漏装置100一定时间后观察测压仪30的数值,如果测压仪30显示的数值明显小于初始注入流体的压力时说明端头200存在泄露的情况,需要对端头200进行重新维护。由于对端头200的检漏不需与旋转靶相安装,也不需要在真空环境下进行测试,在常规环境下直接将旋转靶端头检漏装置100安装到端头200后,注入一定量带有压力的流体便能对端头200进行检漏,故检漏操作过程便捷且成本低。Compared with the prior art, the rotary target end
以上所揭露的仅为本实用新型的较佳实例而已,不能以此来限定本实用新型之权利范围,因此依本实用新型权利要求所作的等同变化,均属于本实用新型所涵盖的范围。The above disclosures are only preferred examples of the present invention, and cannot limit the scope of the rights of the present invention. Therefore, the equivalent changes made according to the claims of the present invention all belong to the scope covered by the present invention.
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