CN211713189U - High-efficient positive pole copper pipe - Google Patents

High-efficient positive pole copper pipe Download PDF

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Publication number
CN211713189U
CN211713189U CN201922389705.8U CN201922389705U CN211713189U CN 211713189 U CN211713189 U CN 211713189U CN 201922389705 U CN201922389705 U CN 201922389705U CN 211713189 U CN211713189 U CN 211713189U
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CN
China
Prior art keywords
copper pipe
positive pole
pipe body
pole copper
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201922389705.8U
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Chinese (zh)
Inventor
安建昊
唐欢欢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Pailaite Photoelectric Technology Co ltd
Original Assignee
Jiangsu Plasma Machinery Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Jiangsu Plasma Machinery Co ltd filed Critical Jiangsu Plasma Machinery Co ltd
Priority to CN201922389705.8U priority Critical patent/CN211713189U/en
Application granted granted Critical
Publication of CN211713189U publication Critical patent/CN211713189U/en
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Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a high-efficient positive pole copper pipe, including the copper pipe body, the downside is equipped with the arch along its length direction interval on the copper pipe body, and the mutual dislocation set of arch of going up the downside, copper pipe body one end have seted up the through-hole along week interval. The utility model provides a high-efficient positive pole copper pipe, the internal diameter is inconsistent, along copper pipe body length interval grow, has increased positive pole copper intraductal surface area, has enlarged the adsorbed volume of positive pole copper pipe to the electron dust.

Description

High-efficient positive pole copper pipe
Technical Field
The utility model belongs to electron source field, concretely relates to high-efficient positive pole copper pipe.
Background
The anode copper tube is commonly used in an ion source in a film plating machine and is used for absorbing electronic dust generated by the ion source.
The inner diameter of the anode copper tube in the prior art is always fixed and unchanged, so that the adsorption amount of the anode copper tube to the electronic dust is greatly limited, and the working efficiency of the ion source is reduced.
SUMMERY OF THE UTILITY MODEL
The utility model provides a not enough to prior art exists, the utility model provides a high-efficient positive pole copper pipe, the internal diameter is inconsistent, follows copper pipe body length interval grow, has increased positive pole copper intraductal surface area, has enlarged the adsorbed volume of positive pole copper pipe to the electron dust.
The utility model discloses a realize through following technical scheme: the utility model provides a high-efficient positive pole copper pipe, includes the copper pipe body, the downside is equipped with the arch along its length direction interval on the copper pipe body, goes up the downside the mutual dislocation set of arch, copper pipe body one end has seted up the through-hole along week interval.
The copper pipe body and the bulge are integrally formed.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses the internal diameter of positive pole copper pipe is inconsistent, and the internal diameter has increased positive pole copper intraductal surface area along copper pipe body length interval grow, has enlarged the adsorbed volume of positive pole copper pipe to the electron dust.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
In the drawings: 1. a copper pipe body; 2. a protrusion; 3. and a through hole.
Detailed Description
The high-efficiency anode copper tube comprises a copper tube body 1, wherein bulges 2 are arranged on the upper side and the lower side of the copper tube body 1 at intervals along the length direction of the copper tube body, the bulges 2 on the upper side and the lower side are arranged in a staggered mode, and through holes 3 are formed in one end of the copper tube body 1 at intervals along the periphery.
The copper pipe body 1 and the bulge 2 are integrally formed.
The utility model discloses the internal diameter of positive pole copper pipe is inconsistent, and the internal diameter has increased positive pole copper intraductal surface area along copper pipe body length interval grow, has enlarged the adsorbed volume of positive pole copper pipe to the electron dust.
In summary, the present invention is only a preferred embodiment, and is not intended to limit the scope of the present invention, and all equivalent changes and modifications of the shapes, structures, features and spirit described in the claims of the present invention should be included in the scope of the present invention.

Claims (2)

1. The utility model provides a high-efficient positive pole copper pipe which characterized in that: including copper pipe body (1), the side is equipped with arch (2) along its length direction interval about copper pipe body (1), and the downside goes up protruding (2) dislocation set each other, through-hole (3) have been seted up along week interval to copper pipe body (1) one end.
2. A high efficiency anode copper tube as claimed in claim 1, wherein: the copper pipe body (1) and the bulge (2) are integrally formed.
CN201922389705.8U 2019-12-26 2019-12-26 High-efficient positive pole copper pipe Active CN211713189U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201922389705.8U CN211713189U (en) 2019-12-26 2019-12-26 High-efficient positive pole copper pipe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922389705.8U CN211713189U (en) 2019-12-26 2019-12-26 High-efficient positive pole copper pipe

Publications (1)

Publication Number Publication Date
CN211713189U true CN211713189U (en) 2020-10-20

Family

ID=72818682

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201922389705.8U Active CN211713189U (en) 2019-12-26 2019-12-26 High-efficient positive pole copper pipe

Country Status (1)

Country Link
CN (1) CN211713189U (en)

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Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20220715

Address after: No3, No4, no31-2, xingchuangtiandi, No. 1449, Wenchang East Road, Xiannv Town, Jiangdu District, Yangzhou City, Jiangsu Province, 225000

Patentee after: Jiangsu pailaite Photoelectric Technology Co.,Ltd.

Address before: 225000 17 Shawan South Road, Guangling Industrial Park, Guangling District, Yangzhou City, Jiangsu Province

Patentee before: Jiangsu plasma Machinery Co.,Ltd.