CN211265430U - A wafer pick-and-place device for wafer sorting - Google Patents

Abstract

The utility model belongs to the technical field of wafer production equipment, a wafer is sorted for use tablet and is got and put device is provided, including the mounting bracket, there is first drive arrangement driven mounting panel along X axle direction slidable mounting on the mounting bracket, be equipped with on the mounting panel by the drive of second drive arrangement, and along the gliding mount pad of Z axle direction, there is third drive arrangement driven layer board along Y axle direction slidable mounting on the mount pad, the layer board end has a wafer and holds in the palm puts the portion, the wafer holds in the palm the upper surface of putting the portion and has seted up and inhale the piece hole, the inside air flue of seting up and inhaling piece hole intercommunication of layer board. The utility model discloses compare the traditional manual work and carry out the mode of sorting that the wafer was selected separately, not only sorting efficiency improves greatly, has reduced the sorting cost, has effectively avoided the emergence of sorting the mistake, and can not cause the fish tail to the wafer, has ensured that the wafer quality is not influenced, when realizing that the wafer classifies sorting, can arrange in order and place the convenient and practical to the substrate number of selecting separately the wafer.

Description

A wafer pick-and-place device for wafer sorting

technical field

The utility model relates to the technical field of wafer production equipment, in particular to a material pick-and-place device for wafer sorting.

Background technique

Wafer refers to the silicon wafer used to make silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. In the process of wafer processing, due to external factors, the type and quality of the produced wafers will be different. Usually, AOI test is carried out in an automatic optical inspection machine. The wafers are sorted differently to separate the different wafers.

At present, the sorting process of wafers is mainly carried out manually. The sorting workers need to carefully check each wafer before classifying and placing them, which not only has low sorting efficiency, high labor intensity, high sorting cost, and Manual sorting cannot sort the substrate numbers. During the sorting process, due to various subjective reasons such as inattentive operation by personnel, sorting errors are likely to be caused, and the wafers are easily scratched during sorting, which will cause the wafers to be damaged. Direct scrapping or downgrading will directly affect the production quality and product qualification rate of wafers. Therefore, the development of a wafer pick-and-place device for wafer sorting not only has urgent research value, but also has good economic benefits and industrial application potential, which is the driving force and foundation of the present invention.

SUMMARY OF THE INVENTION

In order to overcome the above-mentioned defects of the prior art, the present inventor has conducted in-depth research on this, and has completed the present utility model after a lot of creative work.

Specifically, the technical problem to be solved by the present utility model is: to provide a material pick-and-place device for wafer sorting, so as to solve the problems of low sorting efficiency, inability to sort substrate numbers, Technical issues that are prone to sorting errors and scratched wafers.

For solving the above-mentioned technical problems, the technical scheme of the present utility model is:

A material pick-and-place device for wafer sorting, comprising a mounting frame on which a mounting plate driven by a first driving device is slidably mounted along the X-axis direction, and a mounting plate driven by a second driving device is installed on the mounting plate , and a mounting seat that slides along the Z-axis direction, the mounting seat is slidably installed along the Y-axis direction with a support plate driven by a third drive device, and the end of the support plate has a wafer holding part, the wafer support A suction sheet hole is opened on the upper surface of the placing portion, and an air passage communicated with the suction sheet hole is opened inside the support plate.

As an improved technical solution, the mounting frame is provided with two first sliding rails arranged in parallel along the horizontal direction, and a first sliding block is slidably installed on the first sliding rail, and the first sliding block is connected to the first sliding block. the mounting plate is fixedly connected, and the mounting plate is slidably mounted on the mounting frame through the first sliding rail and the first sliding block;

The first drive device includes a drive motor fixedly mounted on the mounting frame, one end of the mounting frame is rotatably mounted with a driving pulley connected to the output shaft of the drive motor, and the other end of the mounting frame rotates A driven pulley corresponding to the driving pulley is installed, a transmission belt is wound between the driven pulley and the driving pulley, and the driven pulley and the driving pulley pass through the transmission belt In the transmission connection, the mounting plate is fixedly connected with one side of the transmission belt.

As an improved technical solution, the second driving device includes an electric cylinder, the electric cylinder is vertically and fixedly installed on the mounting plate, and the mounting seat is fixedly connected with the sliding plate of the electric cylinder.

As an improved technical solution, there are two supporting plates, two parallel second sliding rails are arranged on the mounting base, and second sliding blocks are slidably installed on the second sliding rails, respectively. The supporting plates are respectively fixed and installed on the second sliding block, and the two supporting plates are arranged up and down, and the wafer holding parts of the two supporting plates are correspondingly arranged in the vertical direction;

The third driving device is provided with two sets, and the two third driving devices are respectively installed on both sides of the mounting seat and are respectively drivingly connected with the second sliding block.

As an improved technical solution, the third driving device includes a magnetically coupled rodless cylinder fixedly mounted on the mounting seat, and a connecting block is fixedly mounted on the sliding magnet of the magnetically coupled rodless cylinder, and the A cam bearing follower is installed on the side of the connecting block facing the second slider, the second slider is provided with a slot matching the cam bearing follower, and the cam bearing follows The device is clamped in the slot.

As an improved technical solution, hydraulic buffers are correspondingly installed on both ends of the mounting seat, and the connecting blocks are respectively arranged between the two correspondingly arranged hydraulic buffers.

As an improved technical solution, a suction groove is formed on the upper surface of the wafer holding part, and the suction groove is connected with the suction hole.

As an improved technical solution, the end of the wafer holding portion is arc-shaped, and the suction hole is located in the middle of the suction groove.

As an improved technical solution, the mounting seat is further provided with a sensor for detecting the unloading condition of the wafers in the flower basket, and the sensor is fixedly mounted on the bottom of one end of the mounting seat away from the mounting plate.

As a further improved technical solution, the sensor is a digital laser sensor.

As an improved technical solution, a protective plate covering the first driving device is fixedly installed on the installation frame, and a protective plate covering the third driving device and the supporting plate is fixedly installed on the installation seat. protective case.

After adopting the above-mentioned technical scheme, the beneficial effects of the present utility model are:

(1) The wafer picking and placing device for the wafer sorting is provided, and the precise displacement of the pallet is realized by controlling the coordinated action of the driving motor, the electric cylinder and the magnetically coupled rodless air cylinder, and the wafer is placed through the wafer at the end of the pallet. The wafer holding part realizes the pick and place of the wafer, and the suction hole opened in the wafer holding part can realize the effective adsorption of the back of the wafer. During the process of picking and placing the wafer, the drop or position of the wafer will not occur. The offset provides a reliable guarantee for the accurate placement of the wafers; when in use, place the flower baskets to be sorted and the flower baskets sorted side by side on the sorting machine. The similar placement flower baskets are empty flower baskets, which are used to place wafers of the same type and quality. Under the control of the sorting instructions of the sorting machine, the pallet moves accurately, and the wafer blanks in the flower baskets to be sorted are taken out and placed accurately respectively. To the corresponding classification and placement flower baskets, the classification and sorting of the wafers are completed. Compared with the traditional manual sorting method, not only the sorting efficiency is greatly improved, the sorting cost is reduced, and the occurrence of sorting errors is effectively avoided. The scratches are caused to ensure that the quality of the wafers is not affected. While the wafers are sorted and sorted, the substrate numbers of the sorted wafers can be sorted and placed, which is convenient and practical.

(2) The sliding drive of the mounting seat is realized by the electric cylinder, which has high precision, and is more environmentally friendly and clean. While ensuring rigidity, it effectively reduces the pollution of the cylinder lubricating oil to the dust-free environment.

(3) There are two upper and lower pallets, and they are driven by magnetically coupled rodless cylinders, so that two wafers can be taken and placed at a time, thereby effectively improving the sorting efficiency of the device.

(4) The sliding magnet of the magnetically coupled rodless cylinder has no moving seals and no external leakage, which meets the dust-free requirements of wafer sorting, and the overall installation size of the magnetically coupled rodless cylinder is small, and the axial space is small. The coupled rodless cylinder realizes the drive of the pallet, and the magnetic coupling rodless cylinder and the upper and lower structure design of the second slide rail are connected through the connecting block and the cam bearing follower, which saves the installation space and makes the picking and placing of crystals. The round part has a compact structure and takes up little space, which facilitates the flexible pick and place of wafers. In addition, the connection with the second slider is realized through the cam bearing follower and the slot, which meets the requirements of the magnetic coupling rodless cylinder and the second slider. The installation accuracy between the slide rails is required, and the installation difficulty is greatly reduced.

(5) The hydraulic buffers provided at both ends of the stroke of the magnetically coupled rodless cylinder can realize safe buffering, reduce sliding impact, and play a protective role. The extension length is the same to achieve precise pick and place of wafers.

(6) The suction slot connected to the suction hole is provided in the wafer holding part, which increases the suction area between the wafer and the wafer, so that the wafer is more firmly sucked during the picking and placing process, which satisfies the requirement of The need for efficient wafer sorting.

(7) The sensor installed at the end of the mounting seat can detect the flower basket containing the wafer when picking and placing the wafer, and detect whether there is no material in the flower basket or whether the material is full, so as to facilitate the operator to check whether there is no material or no material. Replace the full flower basket.

(8) The protective plate is fixedly installed on the mounting frame, which can effectively protect the first driving device and avoid the pollution of the dust-free sorting environment when the first driving device is working. The protective shell is fixedly installed on the mounting seat. , realizes the effective protection of the third drive device and the pallet, and further ensures the dust-free requirement.

Description of drawings

In order to illustrate the specific embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings required for the description of the specific embodiments or the prior art. Similar elements or parts are generally identified by similar reference numerals throughout the drawings. In the drawings, each element or section is not necessarily drawn to actual scale.

Fig. 1 is the structural representation of the utility model;

Fig. 2 is another three-dimensional structure schematic diagram of the present utility model;

Fig. 3 is the structural representation of the pick-and-place sheet part of the utility model;

Fig. 4 is the bottom view structure schematic diagram of the utility model pick and place sheet part;

Fig. 5 is the structural representation of the utility model pallet;

Reference numerals: 1-installation frame; 2-first slide rail; 3-first slider; 4-installation plate; 5-drive motor; 6-drive pulley; 7-driven pulley; 8-transmission belt; 9-electric cylinder; 10-mounting seat; 11-second slide rail; 12-second slider; 1201-card slot; 13-support plate; 1301-wafer holding part; 13011-suction hole; 13012- Suction slot; 14-magnetic coupling rodless cylinder; 15-connection block; 16-cam bearing follower; 17-hydraulic buffer; 18-sensor; 19-protection plate; 20-protective shell; 21-wafer .

Detailed ways

The present utility model will be further described below in conjunction with specific embodiments. However, the purposes and purposes of these exemplary embodiments are only used to exemplify the present invention, and do not constitute any limitation to the actual protection scope of the present invention, nor do they limit the protection scope of the present invention.

As shown in FIG. 1 to FIG. 5 , the present embodiment provides a device for picking and placing wafers for wafer sorting, including a mounting frame 1 on which a mounting plate driven by a first driving device is slidably installed along the X-axis direction. 4. The mounting plate 4 is provided with a mounting seat 10 that is driven by the second driving device and slides along the Z-axis direction. The mounting seat 10 is slidably mounted along the Y-axis direction with a supporting plate 13 driven by a third driving device. The supporting plate 13 The end has a wafer holding part 1301, the upper surface of the wafer holding part 1301 is provided with a suction hole 13011, the inside of the support plate 13 is opened with an air channel that communicates with the suction hole 13011, and an air channel is opened on one side of the mounting end The air connection port of the duct is used to realize the connection with the air pipe of the air supply device.

In this embodiment, the X-axis direction is the left-right displacement direction of the pallet 13 , the Z-axis direction is the vertical up-down displacement direction of the pallet 13 , and the Y-axis direction is the front-rear displacement direction of the pallet 13 .

As shown in FIG. 2 , in order to realize the sliding installation of the mounting plate 4 , the mounting frame 1 is provided with two first slide rails 2 arranged in parallel along the horizontal direction. A sliding block 3 is fixedly connected with the mounting plate 4 , and the mounting plate 4 is slidably mounted on the mounting frame 1 through the first sliding rail 2 and the first sliding block 3 .

The first drive device includes a drive motor 5 fixedly mounted on the mounting frame 1, one end of the mounting frame 1 is rotatably mounted with a driving pulley 6 connected to the output shaft of the driving motor 5, and the other end of the mounting frame 1 is rotatably mounted with a driving pulley 6. The driven pulley 7 corresponding to the pulley 6 is provided with a drive belt 8 between the driven pulley 7 and the drive pulley 6, and the driven pulley 7 and the drive pulley 6 are connected through the drive belt 8, and the mounting plate 4 is connected to the drive belt. One side of 8 is fixedly connected; the drive motor 5 works, drives the transmission belt 8 to rotate, and drives the mounting plate 4 to slide and displace through the transmission belt 8 .

In this embodiment, Yaskawa servo motor is used as the drive motor 5, THK linear guide rail is used as the first slide rail 2, and MISUMI timing belt is used as the transmission belt 8. The repeated sliding positioning accuracy can reach ±0.03mm, and the sliding accuracy is high.

The second driving device includes an electric cylinder 9, the electric cylinder 9 is vertically and fixedly installed on the mounting plate 4, and the mounting seat 10 is fixedly connected with the sliding plate of the electric cylinder 9; Up to ±0.02mm. The sliding drive of the mounting seat 10 is realized by the electric cylinder 9, which has high precision, and is more environmentally friendly and clean. While ensuring rigidity, the pollution of the cylinder lubricating grease to the dust-free environment is effectively reduced.

As shown in FIG. 2 to FIG. 4 , in this embodiment, there are two supporting plates 13 , two second sliding rails 11 arranged in parallel on the mounting base 10 , and second sliding rails 11 are slidably installed on the second sliding rails 11 The slider 12, the two supporting plates 13 are respectively fixed and installed on the second sliding block 12, and the two supporting plates 13 are arranged up and down, and the wafer holding parts 1301 of the two supporting plates 13 are correspondingly arranged in the vertical direction; the third driving device There are two sets of third driving devices installed on both sides of the mounting seat 10 respectively, and are respectively connected with the second sliding block 12 for driving.

The third driving device includes a magnetically coupled rodless cylinder 14 fixedly mounted on the mounting base 10 , a connecting block 15 is fixedly mounted on the sliding magnet of the magnetically coupled rodless cylinder 14 , and the connecting block 15 faces the side of the second sliding block 12 The cam bearing follower 16 is installed, the second sliding block 12 is provided with a slot 1201 which is adapted to the cam bearing follower 16 , and the cam bearing follower 16 is clipped in the slot 1201 .

The pallet 13 is provided with two up and down, and they are driven by the magnetically coupled rodless cylinder 14 respectively, and two wafers 21 can be taken at a time, thereby effectively improving the sorting efficiency of the device; the sliding magnet of the magnetically coupled rodless cylinder 14 There are no moving seals and no external leakage, which meets the dust-free requirements of wafer sorting, and the magnetic coupling rodless cylinder 14 has a small overall installation size and small axial space. The upper and lower structures of the magnetic coupling rodless cylinder 14 and the second slide rail 11 are designed to be connected by the connecting block 15 and the cam bearing follower 16, which saves the installation space and makes the wafer pick-and-place part compact. Occupying a small space, it provides convenience for flexible picking and placing of wafers. In addition, the connection with the second slider 12 is realized through the cam bearing follower 16 and the slot 1201, which satisfies the magnetic coupling rodless cylinder 14 and the second slider. The installation accuracy requirements between the rails 11 are greatly reduced, and the installation difficulty is greatly reduced.

Both ends of the mounting seat 10 are correspondingly installed with hydraulic buffers 17 , and the connecting blocks 15 are respectively arranged between the two correspondingly arranged hydraulic buffers 17 ; , which can realize safety buffering, reduce sliding impact, and play a protective role, so that the operation of picking and placing wafers is stable, and it can ensure that the extension length of the support plate 13 is the same when picking and placing wafers, so as to achieve precise picking and placing of wafers 21 .

As shown in FIG. 5 , a suction groove 13012 is formed on the upper surface of the wafer holding part 1301 , and the suction groove 13012 is connected with the suction hole 13011 . In this embodiment, the end of the wafer holding part 1301 is rounded Arc-shaped, the suction hole 13011 is located in the middle of the suction groove 13012. The suction groove 13012 is opened on the upper surface of the wafer holding part 1301, which increases the suction area between the wafer 21 and the wafer 21, so that the wafer 21 is more firmly sucked during the picking and placing process, which satisfies the requirements for the height of the wafer 21. The need for efficient sorting.

As shown in FIG. 4 , the mounting seat 10 is also provided with a sensor 18 for detecting the unloading condition of the wafers in the flower basket. The sensor 18 is fixedly installed on the bottom of one end of the mounting seat 10 away from the mounting plate 4 . In this embodiment, the sensor 18 is Digital laser sensor. The sensor 18 installed at the end of the mounting seat 10 can detect the flower basket containing the wafer when picking and placing the wafer, and detect whether there is no material in the flower basket or whether the material is full, so as to facilitate the operator to check whether there is no material or material. Full flower baskets are replaced.

As shown in FIG. 1 , in this embodiment, a protective plate 19 covering the first driving device is fixedly installed on the mounting frame 1 , so as to achieve effective protection for the first driving device, and avoid the protection of the first driving device when it is working. Pollution of the dust sorting environment; a protective shell 20 covering the third driving device and the supporting plate 13 is fixedly installed on the mounting base 10, which realizes effective protection of the third driving device and the supporting plate 13, and further ensures dust-free need.

Based on the above-mentioned structure, the wafer picking and placing device for sorting wafers realizes the precise displacement of the pallet 13 by controlling the coordinated action of the driving motor 5 , the electric cylinder 9 and the magnetically coupled rodless air cylinder 14 . The round holding part 1301 realizes the pick and place of the wafer 21, and the suction hole 13011 opened in the wafer holding part 1301 can realize the effective adsorption of the back of the wafer 21. During the process of picking and placing the wafer, there is no The drop or positional deviation of the wafers provides a reliable guarantee for the accurate placement of the wafers; when in use, place the flower baskets to be sorted and the flower baskets sorted side by side on the sorting machine. The selected wafer blanks are classified and placed in the flower baskets as empty flower baskets, which are used to place wafers 2 of the same type and quality respectively. The wafer blanks are taken out and accurately placed into the corresponding classification and placement flower baskets to complete the classification and sorting of the wafers. Compared with the traditional manual sorting method, not only the sorting efficiency is greatly improved, the sorting cost is reduced, and the occurrence of sorting errors is effectively avoided. Scratching the wafers ensures that the quality of the wafers is not affected. While sorting and sorting the wafers, the wafers can be placed in order from small to large according to the wafer substrate number, which is convenient and practical.

Through the wafer sorting, the wafer picking and placing device replaces manual wafer sorting, which can work continuously for 24 hours. The sorting efficiency is about 380 pieces/hour, the sorting efficiency is greatly improved, and about two operations can be saved. Manual labor, the cost is greatly reduced.

It should be understood that the purposes of these embodiments are only used to illustrate the present invention and are not intended to limit the protection scope of the present invention. In addition, it should also be understood that after reading the technical content of the present utility model, those skilled in the art can make various changes, modifications and/or modifications to the present utility model, and all these equivalent forms also fall within the appended rights of the application. within the scope of protection defined by the request.

Claims (10)

1. The utility model provides a wafer is selected for use tablet and is put device which characterized in that: including the mounting bracket, there is first drive arrangement driven mounting panel along X axle direction slidable mounting on the mounting bracket, be equipped with on the mounting panel by the drive of second drive arrangement, and along the gliding mount pad of Z axle direction, there is third drive arrangement driven layer board along Y axle direction slidable mounting on the mount pad, the layer board end has a wafer and holds in the palm puts the portion, the wafer holds in the palm the upper surface of putting the portion and has seted up and inhale the piece hole, the layer board inside seted up with inhale the air flue that the piece hole communicates.

2. A web pick and place apparatus for sorting wafers as recited in claim 1, wherein: two first sliding rails which are arranged in parallel are arranged on the mounting frame along the horizontal direction, a first sliding block is arranged on each first sliding rail in a sliding mode, each first sliding block is fixedly connected with the mounting plate, and the mounting plate is arranged on the mounting frame in a sliding mode through the first sliding rails and the first sliding blocks;

first drive arrangement include fixed mounting in driving motor on the mounting bracket, the one end of mounting bracket rotate install with driving motor output shaft transmission connects's driving pulley, the other end of mounting bracket rotate install with driving pulley corresponds the driven pulleys who sets up, driven pulleys with it has the drive belt to erect between the driving pulley, just driven pulleys with driving pulley passes through drive belt transmission connects, the mounting panel with one side fixed connection of drive belt.

3. A web pick and place apparatus for sorting wafers as recited in claim 2, wherein: the second driving device comprises an electric cylinder, the electric cylinder is vertically and fixedly installed on the installation plate, and the installation seat is fixedly connected with a sliding plate of the electric cylinder.

4. A wafer sorting web pick and place apparatus as recited in claim 3, wherein: the mounting seat is provided with two second sliding rails which are arranged in parallel, second sliding blocks are respectively arranged on the second sliding rails in a sliding mode, the two supporting plates are respectively fixedly arranged on the second sliding blocks and are arranged up and down, and wafer supporting parts of the two supporting plates are correspondingly arranged in the vertical direction;

and two sets of third driving devices are arranged, and the two third driving devices are respectively arranged on two sides of the mounting seat and are respectively connected with the second sliding block in a driving way.

5. A wafer sorting and tablet taking and placing device as claimed in claim 4, wherein: the third driving device comprises a magnetic coupling type rodless cylinder fixedly mounted on the mounting seat, a connecting block is fixedly mounted on a sliding magnet of the magnetic coupling type rodless cylinder, a cam bearing follower is mounted on one side, facing the second sliding block, of the connecting block, a clamping groove matched with the cam bearing follower is formed in the second sliding block, and the cam bearing follower is clamped in the clamping groove.

6. A wafer sorting and tablet taking and placing device as claimed in claim 5, wherein: the hydraulic buffers are correspondingly arranged at the end parts of the two sides of the mounting seat, and the connecting blocks are respectively arranged between the two correspondingly arranged hydraulic buffers.

7. A wafer sorting and tablet taking and placing device as claimed in claim 6, wherein: and the upper surface of the wafer supporting part is provided with a wafer sucking groove, and the wafer sucking groove is connected with the wafer sucking hole.

8. The wafer-sorting sheet handling device of claim 7, wherein: the end part of the wafer supporting and placing part is arc-shaped, and the wafer sucking hole is located in the middle of the wafer sucking groove.

9. A web pick and place apparatus for wafer sorting as claimed in any one of claims 1 to 8, wherein: the mounting seat is further provided with a sensor used for detecting the wafer discharging condition in the flower basket, and the sensor is fixedly mounted at the bottom of one end, far away from the mounting plate, of the mounting seat.

10. A web pick and place apparatus for sorting wafers as recited in claim 9, wherein: the mounting bracket is fixedly provided with a protection plate for covering the first driving device, and the mounting seat is fixedly provided with a protection shell for covering the third driving device and the supporting plate.

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