CN211170799U - Heat treatment tool for target material matched with focusing ring - Google Patents
Heat treatment tool for target material matched with focusing ring Download PDFInfo
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- CN211170799U CN211170799U CN201921780601.3U CN201921780601U CN211170799U CN 211170799 U CN211170799 U CN 211170799U CN 201921780601 U CN201921780601 U CN 201921780601U CN 211170799 U CN211170799 U CN 211170799U
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Abstract
The utility model discloses a heat treatment tool of a target material matching focusing ring, which belongs to the technical field of sputtering, and comprises a clamping device and a back-up device, wherein the back-up device is back-supported inside the target material matching focusing ring, and the clamping device clamps the opening of the target material matching focusing ring; the back-up device includes: the center shaft, the center cylinder and the back-up rod; the spiral handle is inserted into a circular hole in the top of the central cylinder in a sliding manner, the central shaft connecting column and the central shaft circular truncated cone are arranged inside the central cylinder, the central shaft circular truncated cone is connected with the central cylinder through threads, and the central shaft can move up and down in the central cylinder through rotation; the clamping device fixes the inner plate and the outer plate through bolts. The tool can effectively prevent the target matching focusing ring from deforming after thermal nursing through fixing the opening of the target matching focusing ring and back-supporting the inner wall, so that the roundness of the target matching focusing ring is ensured, the roundness of the target matching focusing ring after thermal treatment is better, and the size of the target matching focusing ring meets the requirements, thereby laying a good foundation for subsequent processing.
Description
Technical Field
The utility model belongs to the technical field of sputter, especially, relate to a thermal treatment frock of supporting focus ring of target.
Background
Since the 90 s of the 20 th century, with the increasingly prominent limitations of conventional surface modification technologies such as electroplating and chemical plating, vacuum coating technologies using Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) as main processes have been developed rapidly, wherein the market demand of sputtering targets required for PVD processes is increasing. Statistically, the market demand for targets worldwide increases at a rate of 20% per year, and as a global manufacturing industry, china has a market demand for targets that increases more than 30% per year. If the precious metal target material is not counted, the total value of the target material required by each field every year is estimated to be about 100 billion yuan RMB. The development of the target material industry is showing a normal trend at high speed, and the domestic target material has higher cost performance advantage, so that the domestic sputtering target material has very wide prospect. Because the domestic target material has huge dosage, the target material is also used as a focusing ring matched with the target material.
In the production and processing process of the target material matching focusing ring, the processing procedures are multiple, the processing difficulty is high, the roundness is affected by the multiple processing procedures, a plurality of processing stresses exist after the processing is finished, and if the stress is removed by heat treatment in a natural state, the opening is deformed due to stress release in the heat treatment process because the target material matching focusing ring is a split ring, and the opening is expanded greatly, so that the original roundness of the target material matching focusing ring is lost, and the roundness is poor. Moreover, if the roundness of the target-fitted focus ring is poor, the following problems are caused:
1. there is an impact on subsequent rounding: although the hardness of the titanium ring after heat treatment is low, the opening is opened greatly and the roundness deformation is serious because of heat treatment in a natural state, so that the subsequent roundness correction work is also greatly hindered.
2. The customer is inconvenient to install and use: the target matching focusing ring subjected to heat treatment has too large roundness deformation, so that the roundness after roundness correction is still poorer on the premise of meeting the conditions, and compared with the target matching focusing ring with better roundness, the target matching focusing ring with poor roundness needs to be installed by means of larger external force in the installation and use process of a client, so that the client is inconvenient to install and use. In the use process, if the roundness of the mounted target matching focusing ring is poor, a certain stress exists in the target due to partial external force in the mounting process, when the temperature reaches 200-300 ℃, the stress is released, the target deforms in the use process, and the Pin for fixing the product mounting is loosened, so that the mounting of the target matching focusing ring is loosened, the looseness of the target matching focusing ring can cause the contact of certain parts to generate problems, the magnetic field is changed, the movement track of titanium ions is changed, and the product is scrapped.
Therefore, the roundness of the target material matched with the focusing ring plays a very important role in the use process of the target material, the poor roundness affects the service life of the target material, and the poor roundness can directly cause the rejection of products. Therefore, it is necessary to design a heat treatment tool for the target material and the focusing ring.
SUMMERY OF THE UTILITY MODEL
To the problem among the prior art, the utility model provides a supporting focus ring's of target heat treatment frock, include:
the device comprises a back-up device and a clamping device, wherein the back-up device is used for back-up supporting the inside of the target material matched focusing ring, and the clamping device is used for clamping the opening of the target material matched focusing ring;
the back-up device includes: the center shaft, the center cylinder and the back-up rod;
the central shaft comprises a spiral handle, a central shaft connecting column and a central shaft circular truncated cone, the large surfaces of the spiral handle and the central shaft circular truncated cone are fixedly connected through a central cylinder, and threads are turned on the side wall of the central shaft connecting column; the axes of the spiral handle, the central shaft connecting column and the central shaft round platform are collinear;
the central cylinder is a hollow cylinder, a round hole is formed in the center of the top of the central cylinder, four through holes are evenly formed in the circumferential direction of the side wall of the central cylinder, and threads are lathed on the inner wall of the central cylinder;
the diameter of the round hole is matched with the diameter of the round surface of the central shaft connecting column, and the diameter of the through hole is matched with the outer diameter of the back-up stay;
the two ends of the straight rod are fixedly connected with a curved plate and a back-bracing flat plate respectively, the radian of the curved plate is matched with the side surface of the circular truncated cone of the central shaft, and the back-bracing rods are slidably inserted into the four through holes on the side wall of the central cylinder, so that the curved plate and the back-bracing flat plate are positioned on the two sides outside the inner side of the central cylinder respectively;
the spiral handle is inserted into a circular hole in the top of the central cylinder in a sliding manner, the central shaft connecting column and the central shaft circular truncated cone are arranged inside the central cylinder, the central shaft circular truncated cone is connected with the central cylinder through threads, and the central shaft can move up and down in the central cylinder through rotation;
the clamping device includes: an inner plate, an outer plate and a bolt; a strip-shaped positioning boss is arranged in the middle of the outer side of the inner plate, screw holes are respectively arranged at four top angles of the inner plate and the outer plate correspondingly, and the inner plate and the outer plate are fixed through bolts.
The top end of the spiral handle is provided with a hexagonal prism-shaped handle head.
The diameter of the circular surface of the central shaft connecting column is larger than that of the large surface of the circular table of the central shaft.
The edges of the curved plate and the back-bracing flat plate of the back-bracing rod are both provided with fillets, and the distance between the two back-bracing rods which are arranged oppositely is equal to the inner diameter of the focusing ring matched with the target material.
The material of the back-up device and the clamping device is the same as that of the focusing ring matched with the target material.
The inner plate and the outer plate are arc plates, the radian of each arc plate is consistent with that of a focusing ring matched with the target material, and the edges of the arc plates are provided with fillets; the inner side of the inner plate and the outer side of the outer plate are both provided with mounting bosses which are mounted at the positions of the screw holes and are parallel to the positioning bosses.
The edge of the positioning boss is chamfered with a fillet, and the height of the positioning boss is 0.5-1 times of the thickness of the target matched focusing ring.
The beneficial effects of the utility model reside in that:
1. use the supporting focus ring circularity of target after the frock thermal treatment is difficult for changing, relevant parameter when conveniently adjusting follow-up school circle has avoided taking place great deformation because of the supporting focus ring of target in heat treatment process to can not carry out the school circle and condemned phenomenon. The target material matched with the focusing ring after heat treatment has better roundness and meets the requirement of size, thereby laying a good foundation for subsequent processing.
2. Frock easy operation, efficiency are obvious, and the workman is gone up the manual operation and is relatively easier, can relapse a lot of utilization, have improved the supporting focus ring's of target life, have improved the quality of product with shorter time.
3. One set of back-up device cooperates three sets of clamping device in the frock can heat treat the supporting focus ring of three sets of targets.
Drawings
FIG. 1 is a diagram of a heat treatment tool for a focusing ring matched with a target material according to the present invention;
FIG. 2 is a schematic cross-sectional view of the back-up device of the present invention, perpendicular to the bottom surface of the truncated cone of the central shaft;
FIG. 3 is a schematic cross-sectional view of the back-up device of the present invention, parallel to the bottom surface of the truncated cone of the central shaft;
FIG. 4 is a schematic cross-sectional view of the center shaft of the present invention perpendicular to the bottom surface of the truncated cone of the center shaft;
fig. 5 is a top view of the center shaft of the present invention;
FIG. 6 is a front view of the back stay of the present invention;
fig. 7 is a top view of the back stay of the present invention;
FIG. 8 is a schematic view of the center cartridge of the present invention;
fig. 9 is a top view of the center tube of the present invention;
fig. 10 is a schematic cross-sectional view of the clamping device of the present invention along the length of two adjacent bolts;
fig. 11 is a top view of the clamping device of the present invention;
FIG. 12 is a schematic view of the inner panel of the present invention;
fig. 13 is a top view of the inner plate of the present invention;
fig. 14 is a schematic view of the outer plate of the present invention;
fig. 15 is a top view of the outer plate of the present invention;
wherein: 1-back-bracing device, 2-clamping device, 101-central shaft, 102-central cylinder, 103-back-bracing rod, 201-inner plate, 202-outer plate, 203-bolt, 1011-rotary handle, 1012-central shaft connecting column, 1013-central shaft circular truncated cone, 2011-positioning boss and 2012-mounting boss.
Detailed Description
The invention is described in further detail below with reference to the following figures and specific examples:
as shown in fig. 1, the backing-up device 1 and the clamping device 2 are used in cooperation, the clamping device 2 is first clamped at the position of the opening of the target matching focus ring, the opening of the target matching focus ring is positioned on the positioning boss 2011 of the inner plate 201, the inner plate 201 and the outer plate 202 are fixed by the bolt 203, and the target matching focus ring is clamped. The back-up device 1 is back-up inside the target material matching focusing ring, one back-up device 1 can support three sets of target material matching focusing rings, and heat treatment can be carried out after the three sets of target material matching focusing rings are installed. The positioning boss 2011 and the inner plate 201 and the outer plate 202 are both rounded. The contact end of the back stay 103 and the focus ring matched with the target is also chamfered.
The back-supporting device 1 is mainly used for back-supporting the inside of the focusing ring matched with the target material in the heat treatment process, and correcting the roundness of the focusing ring matched with the target material in the process of releasing stress, so that the roundness is greatly improved before and after the heat treatment. The clamping device 2 mainly has the function of controlling the size of the opening of the focusing ring matched with the target material, and ensuring that the opening is not expanded due to stress release in the heat treatment process.
The material of the back-up device 1 and the material of the clamping device 2 are the same as that of the target matched focusing ring, so that the target matched focusing ring can be prevented from being polluted by diffusion in the heat treatment process; the central shaft 101 and the central cylinder 102 are connected by screw threads, the central shaft 101 can be controlled to move up and down in the central cylinder 102 as shown in fig. 8 and 9 by rotating a rotating handle 1011 of the central shaft 101, and the expansion and contraction of the back-up rod 103 can be adjusted by the up-and-down movement of the central shaft 101, so that the function of supporting the target matching focusing ring is achieved; the inner plate 203 is provided with a positioning boss 2011 for positioning the size of the opening of the target material matching focusing ring, the opening of the target material matching focusing ring is clamped at two sides of the positioning boss 2011 in the heat treatment process, and the inner plate 201 and the outer plate 202 clamp the opening of the target material matching focusing ring through the adjusting bolt 203, so that the deformation of the opening of the target material matching focusing ring is avoided, and the roundness is kept; the inboard and the planking 202 outside of inner panel 201 all set up installation boss 2012, make things convenient for the fixed of bolt 203 and adjust. When the bolt 203 is installed, a gasket is installed between the nut and the outer plate 202 to prevent the outer plate 202 from being damaged.
In the back-up device 1 shown in fig. 2 and 3, the central shaft 101 shown in fig. 4 and 5 is adjusted to the uppermost position inside the central cylinder 102 by rotating the handle 1011, and the four back-up levers 103 are in the minimum diameter state. At this time, the target matching focusing ring which has been clamped to the opening can be sleeved outside the backing device 1, then the rotating handle 1011 is adjusted to adjust the central shaft 101 downwards in the central cylinder 102, and as the central shaft truncated cone 1013 moves downwards, the diameter of the contact part between the curved plate end of the backing rod 103 and the central shaft truncated cone 1013 becomes larger and larger, so that the backing rod 103 moves outwards until the backing device 1 is tightly supported inside the target matching focusing ring, as shown in fig. 6 and 7. The reverse support rod 103 is provided with a round angle, so that the pattern of the focusing ring matched with the target material is prevented from being scratched.
As shown in fig. 10 to 15, in the clamping device 2, the inner plate 201, the outer plate 202 and the bolt 203 are used for clamping the opening of the target matching focus ring, the height of the positioning boss 2011 is 0.5 to 1 time of the thickness of the target matching focus ring, and the positioning boss 2011 is chamfered with a fillet, so that the pattern at the opening of the target matching focus ring is not damaged in the positioning process.
Example 1
During the working process of the roundness correction tool, the opening of the target matching focus ring is firstly positioned on the positioning boss 2011 of the inner plate 201, and the inner plate 201 is kept in full contact with the target matching focus ring. The outer plate 202 is attached to the outer side of the target matched focusing ring to keep full contact, the inner plate 201 and the outer plate 202 are preliminarily connected through the bolts 203, and then the opening is adjusted to ensure that the opening of the target matched focusing ring is in full contact with the positioning boss. The inner plate 201 and the outer plate 202 are then tightened with bolts to fully clamp the target to the opening of the focus ring.
Next, the back-up device 1 is adjusted to adjust the rotary handle 1011 to move the center shaft 101 to the uppermost position inside the center tube 102, the diameter of the contact position of the center shaft circular truncated cone 1013 and the back-up rod 103 is in the minimum diameter state, and the back-up rod 103 is adjusted to adjust the outer diameter of the back-up rod 103 to the lowermost position. The target matching focusing rings at the clamped opening are sleeved on the back-supporting device, at most three focusing rings can be stacked, then the rotating handle 1011 is adjusted to enable the central shaft 101 to move downwards in the central cylinder 102, the diameter of the contact position of the circular table 1013 of the central shaft and the counter stay 103 is gradually increased, the outer diameter of the counter stay 103 is gradually increased, the target matching focusing rings are gradually tightly supported, when all four counter stay 103 are fully contacted with the target matching focusing rings, the adjustment of the rotating handle 1011 is stopped, one-time installation is completed, and subsequent heat treatment can be carried out.
Claims (7)
1. The utility model provides a supporting focus ring's of target heat treatment frock which characterized in that includes: the device comprises a back-supporting device (1) and a clamping device (2), wherein the back-supporting device (1) is used for back-supporting the inside of a target material matched focusing ring, and the clamping device (2) is used for clamping the opening of the target material matched focusing ring;
the back-up device (1) comprises: a central shaft (101), a central cylinder (102) and a back-up rod (103);
the central shaft (101) comprises a spiral handle (1011), a central shaft connecting column (1012) and a central shaft circular truncated cone (1013), the large surfaces of the spiral handle (1011) and the central shaft circular truncated cone (1013) are fixedly connected through the central shaft connecting column (1012), and the side wall of the central shaft connecting column (1012) is threaded; the axes of the spiral handle (1011), the central shaft connecting column (1012) and the central shaft round table (1013) are collinear;
the central cylinder (102) is a hollow cylinder, a round hole is formed in the center of the top of the central cylinder, four through holes are evenly formed in the circumferential direction of the side wall of the central cylinder, and threads are lathed on the inner wall of the central cylinder;
the aperture of the round hole is matched with the diameter of the round surface of the central shaft connecting column (1012), and the aperture of the through hole is matched with the outer diameter of the back-stay rod (103);
the two ends of the straight rod of the back-bracing rod (103) are fixedly connected with a curved plate and a back-bracing flat plate respectively, the radian of the curved plate is matched with the side surface of the central shaft circular table (1013), and the back-bracing rod (103) is inserted into the four through holes on the side wall of the central cylinder (102) in a sliding manner, so that the curved plate and the back-bracing flat plate are respectively positioned on the inner side and the outer side of the central cylinder (102);
the spiral handle (1011) is inserted into a circular hole in the top of the central cylinder (102) in a sliding manner, the central shaft connecting column (1012) and the central shaft circular table (1013) are installed inside the central cylinder (102), the central shaft circular table (1013) is connected with the central cylinder (102) through threads, and the central shaft (101) can move up and down in the central cylinder (102) through rotation;
the clamping device (2) comprises: an inner plate (201), an outer plate (202), and a bolt (203); a strip-shaped positioning boss (2011) is arranged in the middle of the outer side of the inner plate (201), screw holes are correspondingly formed in four top angles of the inner plate (201) and the outer plate (202) respectively, and the inner plate (201) and the outer plate (202) are fixed through bolts.
2. The heat treatment tool according to claim 1, wherein a hexagonal prism-shaped handle head is arranged at the top end of the spiral handle (1011).
3. The heat treatment tool according to claim 1, wherein the diameter of the circular surface of the central shaft connecting column (1012) is larger than the diameter of the large surface of the central shaft circular platform (1013).
4. The heat treatment tool according to claim 1, wherein the edges of the curved plate and the back-bracing flat plate of the back-bracing rod (103) are rounded, and the distance between the two oppositely-arranged back-bracing rods (103) is equal to the inner diameter of the target matching focus ring.
5. The heat treatment tool according to claim 1, wherein the material of the backing device (1) and the clamping device (2) is the same as that of the focusing ring matched with the target material.
6. The heat treatment tool according to claim 1, wherein the inner plate (201) and the outer plate (202) are arc plates, the radian of each arc plate is consistent with that of a focusing ring matched with the target material, and the edges of the arc plates are rounded; the inner plate (201) is inboard and the planking (202) outside all sets up installation boss (2012), installation boss (2012) are installed in the screw position to be on a parallel with location boss (2011).
7. The heat treatment tool set forth in claim 1, wherein the positioning boss (2011) has rounded edges, and the height of the positioning boss (2011) is between 0.5 and 1 times the thickness of the target matching focus ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921780601.3U CN211170799U (en) | 2019-10-23 | 2019-10-23 | Heat treatment tool for target material matched with focusing ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921780601.3U CN211170799U (en) | 2019-10-23 | 2019-10-23 | Heat treatment tool for target material matched with focusing ring |
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| Publication Number | Publication Date |
|---|---|
| CN211170799U true CN211170799U (en) | 2020-08-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921780601.3U Active CN211170799U (en) | 2019-10-23 | 2019-10-23 | Heat treatment tool for target material matched with focusing ring |
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| CN (1) | CN211170799U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112522502A (en) * | 2020-11-11 | 2021-03-19 | 宁波江丰电子材料股份有限公司 | Treatment method for prolonging service life of ring piece |
-
2019
- 2019-10-23 CN CN201921780601.3U patent/CN211170799U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112522502A (en) * | 2020-11-11 | 2021-03-19 | 宁波江丰电子材料股份有限公司 | Treatment method for prolonging service life of ring piece |
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