CN211003280U - Jig backflow system of plasma processing equipment - Google Patents

Jig backflow system of plasma processing equipment Download PDF

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Publication number
CN211003280U
CN211003280U CN201921943648.7U CN201921943648U CN211003280U CN 211003280 U CN211003280 U CN 211003280U CN 201921943648 U CN201921943648 U CN 201921943648U CN 211003280 U CN211003280 U CN 211003280U
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China
Prior art keywords
jig
plasma processing
roller
backflow
tool
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Application number
CN201921943648.7U
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Chinese (zh)
Inventor
陈培峰
宗泽源
刘庆峰
程凡雄
汤家云
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Yangzhou Guoxing Technology Co ltd
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Yangzhou Guoxing Technology Co ltd
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Priority to CN201921943648.7U priority Critical patent/CN211003280U/en
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Abstract

The utility model discloses a plasma processing equipment's tool return-flow system, including plasma processing system to and set up front end lift platform and the rear end lift platform at plasma processing system both ends, and set up the backward flow transmission roller train that is used for transmitting the tool at the plasma processing system lower extreme, backward flow transmission roller train comprises 2 at least backward flow transmission gyro wheels that set gradually, front end lift platform and rear end lift platform reciprocate, with backward flow transmission roller train horizontal connection when the lower extreme, the opening of every group backward flow transmission gyro wheel ability independent control gyro wheel stops and transmission speed. The utility model discloses a jig backflow system of plasma processing equipment, in the plasma processing equipment of PCB, the PCB to be processed needs to be carried by the jig, and the jig flows back to the initial position after passing through the plasma processing area to achieve the purpose of cyclic utilization; meanwhile, in order to meet the requirement of completely removing the jigs in the plasma region under the abnormal condition of the equipment, a temporary storage region is designed for the jigs to be cached.

Description

Jig backflow system of plasma processing equipment
Technical Field
The utility model relates to a PCB handles technical field, in particular to plasma treatment facility's tool return-flow system.
Background
Plasma treatment is an important process in the PCB manufacturing process. The particularity of the plasma also makes it difficult for the PCB to be directly processed through the plasma region, generally requiring the PCB to be fixed to a jig first and then transporting the jig to the plasma region for processing. In order to efficiently use the jig, it is necessary to return to the initial position after the jig completes one processing cycle to re-load a new PCB, and therefore a transfer mechanism is required to return the jig to the initial position. The entire plasma processing region plus tool reflow system thus constitutes a closed loop transport structure.
For a plasma device with continuous processing, the processing of multiple PCBs can be carried out simultaneously in the device, and when the jig at the initial position stops entering the plasma processing area for some reasons, the whole transmission mechanism stops simultaneously. But the PCB being processed in the plasma region cannot be shut down. Because the PCB being processed can cause process abnormality of the product and even discard the product once the operation of the PCB or the plasma processing is stopped. Therefore, a temporary storage structure of the jig needs to be added to the whole closed-loop transmission structure, so that the jig can be completely discharged from the plasma region, and the jig does not conflict with the discharged jig.
Disclosure of Invention
In order to overcome the defects, the utility model provides a plasma treatment equipment's tool return-flow system flows back the initial position and reaches cyclic utilization's purpose after handling the region through plasma.
The utility model discloses a solve the technical scheme that its technical problem adopted and be: the utility model provides a plasma processing equipment's tool return-flow system, includes plasma processing system to and set up front end lift platform and the rear end lift platform at plasma processing system both ends, and set up the backward flow transmission roller train that is used for transmitting the tool at plasma processing system lower extreme, backward flow transmission roller train comprises 2 at least backward flow transmission gyro wheels that set gradually, front end lift platform and rear end lift platform reciprocate, at the bottom with backward flow transmission roller train horizontally connect, the start-stop and the transmission speed of every group backward flow transmission gyro wheel ability independent control gyro wheel.
As the utility model discloses a further improvement, one section backward flow transmission gyro wheel that is close to equipment rear end lift platform is tool temporary storage area, and the operational mode of this section backward flow transmission gyro wheel is: the fixture runs at a high speed and a constant speed normally, and is decelerated to a low speed and a constant speed when temporary storage is needed or started and stopped according to the rhythm of the entering of the fixture.
As the utility model discloses a further improvement, tool buffer area's backward flow transmission gyro wheel is as the bridging gyro wheel toward one section backward flow transmission gyro wheel of equipment front end direction next-door neighbour, and normal time with tool buffer area's backward flow transmission gyro wheel with fast operation, this section backward flow transmission gyro wheel out of service behind last piece tool on the backward flow transmission gyro wheel that has received tool buffer area when needing to keep in
As a further improvement, if the backflow transmission roller group is formed by the backflow transmission rollers that set gradually more than 2, the backflow transmission rollers in the direction of the front end lifting platform at the bridging roller serve as the preparatory rollers of the jig, and are used for rapidly conveying the plate for the front end lifting platform of the equipment.
As a further improvement of the present invention, the preparatory roller and the bridging roller can accommodate at least one jig.
The utility model has the advantages that: the utility model discloses a jig backflow system of plasma processing equipment, in the plasma processing equipment of PCB, the PCB to be processed needs to be carried by the jig, and the jig flows back to the initial position after passing through the plasma processing area to achieve the purpose of cyclic utilization; meanwhile, in order to meet the requirement of completely removing the jigs in the plasma region under the abnormal condition of the equipment, a temporary storage region is designed for the jigs to be cached.
Drawings
FIG. 1 is a schematic structural view of the present invention;
the following are marked in the figure: 1-a plasma processing system; 2-a front end lifting platform; 3-a rear end lifting platform; 4-refluxing and conveying roller group; 5-a temporary storage area of the jig; 6-bridging rollers; 7-preparing rollers.
Detailed Description
In order to deepen the understanding of the present invention, the present invention will be further described in detail with reference to the following embodiments and the attached drawings, and the embodiments are only used for explaining the present invention, and do not constitute the limitation to the protection scope of the present invention.
Fig. 1 shows the utility model relates to a plasma processing equipment's tool return-flow system's an embodiment, including plasma processing system 1 to and set up front end lift platform 2 and rear end lift platform 3 at plasma processing system 1 both ends, and set up the backward flow transmission roller train 4 that is used for transmitting the tool at 1 lower extreme of plasma processing system, backward flow transmission roller train 4 comprises 2 at least backward flow transmission gyro wheels that set gradually, front end lift platform 2 and rear end lift platform 3 reciprocate, at the time of the lower extreme with backward flow transmission roller train 4 horizontally connect, the start-stop and the transmission speed of every group backward flow transmission gyro wheel ability independent control gyro wheel.
One section of backward flow transmission gyro wheel that is close to equipment rear end lift platform 3 is tool temporary storage area 5, and this section of backward flow transmission gyro wheel's operational mode is: the fixture runs at a high speed and a constant speed normally, and is decelerated to a low speed and a constant speed when temporary storage is needed or started and stopped according to the rhythm of the entering of the fixture.
The backflow transmission roller of the jig cache area 5 serves as a bridging roller 6 towards a section of backflow transmission roller adjacent to the front end direction of the equipment, normally runs at the same speed as the backflow transmission roller of the cache area, and stops running after receiving the last jig on the backflow transmission roller of the cache area when temporary storage is needed
If the backflow transmission roller group 4 is composed of more than 2 backflow transmission rollers which are sequentially arranged, the backflow transmission roller in the direction from the bridging roller 6 to the front end lifting platform is used as a preparation roller 7 of the jig and is used for rapidly feeding the front end lifting platform 2 of the equipment.
The preparation roller 7 and the bridging roller 6 can accommodate at least one jig.
In the initial state of the system, the front end lifting platform 2 is at the position A, a jig to be entered into the plasma processing system 1 is arranged in the front end lifting platform, a plurality of jigs normally run in the plasma processing system 1, and the rear end lifting platform 3 is at the position C to wait for the jig to be discharged from the plasma processing system 1. A backflow No. 1 preparation roller 7 and a backflow No. 2 preparation roller 7 of the lower end backflow system are respectively provided with a standby jig, the bridging roller 6 is arranged in the air, and one jig is conveyed to the direction of the bridging roller 6 on the jig cache region 5.
After the PCB is processed, a jig is discharged from the plasma processing system 1 to the rear end lifting platform 3, the rear end lifting platform 3 descends from the position C to the position D, then the jig is sent to the jig cache region 5, and the jig originally transmitted on the jig cache region 5 is just transmitted to the bridging roller 6. And the rear end lifting platform 3 is lifted to the position C again after the jig is completely transmitted to the jig caching area 5 to wait for the next jig.
While the plasma processing system 1 discharges one jig, the jig on the front end elevating platform 2 enters the plasma processing system 1. After the jigs on the front-end lifting platform 2 completely enter the plasma processing system 1, the platform is lowered from the position A to the position B, the jigs which are positioned on the backflow No. 1 preparation roller 7 and standby are transmitted to the front-end lifting platform 2, and the jigs which are positioned in the backflow No. 2 preparation roller 7 are synchronously transmitted to the backflow No. 1 preparation roller 7. After the tool has fully entered the front end lift platform 2, the platform is raised to position a for a new PCB installation and awaits entry into the plasma processing system 1.
After no jig is on the reflow No. 2 preparation roller 7, the jig transferred from the jig buffer area 5 to the bridge roller 6 is transferred to the reflow No. 2 preparation roller 7, and stands by together with the jig on the reflow No. 1 preparation roller 7.
When the system is abnormal, the jig on the front end lifting platform can not enter the plasma processing system 1 in time, and in order to enable the PCB in the plasma processing system 1 to normally complete processing, the jig is required to be discharged from the rear end according to a normal beat. At this time, the rear-end lifting platform 3 normally receives the jigs discharged from the plasma processing system and transmits the jigs to the jig buffer area 5, but at this time, the jig buffer area 5 receives the jigs transmitted from the rear-end lifting platform 3 at a speed lower than the normal operation speed or in a clearance starting mode until all the jigs in the plasma processing system 1 are discharged and stores the jigs in a dense arrangement mode on the jig buffer area 5.
After the system resumes normal operation, the jigs temporarily stored in the jig buffer area 5 are gradually transferred to the front end lifting platform 2 in a stepping manner for use.

Claims (5)

1. The utility model provides a tool reflux system of plasma processing equipment which characterized in that: including plasma processing system (1) to and set up front end lift platform (2) and rear end lift platform (3) at plasma processing system (1) both ends, and set up backflow transmission roller train (4) that are used for transmitting the tool at plasma processing system (1) lower extreme, backflow transmission roller train (4) comprise 2 at least backflow transmission gyro wheels that set gradually, front end lift platform (2) and rear end lift platform (3) reciprocate, with backflow transmission roller train (4) horizontally connect when the lower extreme, the start-stop and the transmission speed of every group backflow transmission gyro wheel ability independent control gyro wheel.
2. The tool reflow system of claim 1, wherein: one section of backward flow transmission gyro wheel that is close to equipment rear end lift platform (3) is tool temporary storage area (5), and the operation mode of this section of backward flow transmission gyro wheel is: the fixture runs at a high speed and a constant speed normally, and is decelerated to a low speed and a constant speed when temporary storage is needed or started and stopped according to the rhythm of the entering of the fixture.
3. The tool reflow system of claim 2, wherein: the backflow transmission roller of the jig caching area (5) serves as a bridging roller (6) towards a section of backflow transmission roller adjacent to the front end direction of the equipment, normally operates at the same speed as the backflow transmission roller of the jig caching area (5), and stops operating after receiving the last jig on the backflow transmission roller of the jig caching area (5) when temporary storage is needed.
4. The tool reflow system of claim 3, wherein: if the backflow transmission roller group (4) is composed of more than 2 backflow transmission rollers which are sequentially arranged, the backflow transmission roller in the direction from the bridging roller (6) to the front end lifting platform is used as a preparation roller (7) of the jig and is used for rapidly sending plates for the front end lifting platform (2) of the equipment.
5. The tool reflow system of claim 4, wherein: the preparation roller (7) and the bridging roller (6) can at least contain one jig.
CN201921943648.7U 2019-11-12 2019-11-12 Jig backflow system of plasma processing equipment Active CN211003280U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921943648.7U CN211003280U (en) 2019-11-12 2019-11-12 Jig backflow system of plasma processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921943648.7U CN211003280U (en) 2019-11-12 2019-11-12 Jig backflow system of plasma processing equipment

Publications (1)

Publication Number Publication Date
CN211003280U true CN211003280U (en) 2020-07-14

Family

ID=71507711

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921943648.7U Active CN211003280U (en) 2019-11-12 2019-11-12 Jig backflow system of plasma processing equipment

Country Status (1)

Country Link
CN (1) CN211003280U (en)

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