CN210934130U - Clean rubber coating developing device - Google Patents
Clean rubber coating developing device Download PDFInfo
- Publication number
- CN210934130U CN210934130U CN201921579981.4U CN201921579981U CN210934130U CN 210934130 U CN210934130 U CN 210934130U CN 201921579981 U CN201921579981 U CN 201921579981U CN 210934130 U CN210934130 U CN 210934130U
- Authority
- CN
- China
- Prior art keywords
- air
- developing machine
- filter unit
- ffu
- rubber coating
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010073 coating (rubber) Methods 0.000 title abstract description 22
- 238000001914 filtration Methods 0.000 claims abstract description 5
- 238000004026 adhesive bonding Methods 0.000 claims description 20
- 238000009423 ventilation Methods 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 abstract description 4
- 239000003292 glue Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The utility model discloses a clean rubber coating developing device, including rubber coating developing machine, FFU filter unit is installed at rubber coating developing machine top, FFU filter unit is used for sending into the rubber coating developing machine after air suction, filtration in. The utility model discloses a FFU filter unit, the air is sent into the rubber coating developing machine after FFU filter unit purifies, improves the cleanliness of rubber coating developing machine inside air. The utility model discloses a FFU filter unit, the air is sent into the rubber coating developing machine after FFU filter unit purifies, sends into the air in the rubber coating developing machine once more through the return air duct and purifies FFU filter unit, forms the circulation, has ensured the cleanliness of rubber coating developing machine inside air.
Description
Technical Field
The utility model relates to a rubber coating development equipment technical field especially relates to a clean rubber coating developing device.
Background
The main function of a glue spreading developing device of semiconductor equipment is coating and developing of photoresist on the surface of a wafer, the technological performance index of the glue spreading developing device is high, various technical parameters need to be controlled in multiple aspects to realize the technical index of high performance, wherein air cleanliness in the glue spreading developing device plays a crucial role in a glue spreading developing technology and determines the coating and developing quality of the photoresist on the surface of the wafer. Therefore, there is a need to improve the quality and accuracy of photoresist coating and developing on the wafer surface by improving the internal environment of the gumming and developing apparatus.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem mentioned in the above-mentioned background art, the utility model provides a clean rubber coating developing device can purify the inside environment of rubber coating developing machine.
The utility model provides a clean rubber coating developing device, includes the rubber coating developing machine, FFU filter unit is installed at rubber coating developing machine top, FFU filter unit is used for sending into the rubber coating developing machine after inhaling, filtering with the air.
Furthermore, the FFU filter unit comprises a shell, wherein a first frame is vertically distributed in the shell, two ends of the first frame are connected with the inner wall of the shell, a second frame perpendicular to the first frame is further arranged in the shell, two ends of the second frame are connected with the inner wall of the shell, two sides of the second frame are respectively provided with an FFU fan filter unit, the FFU fan filter units are installed on the first frame through an installation plate, each FFU fan filter unit comprises a fan, and a filter is arranged below the fan; the top end of the shell is provided with a first air inlet corresponding to the position of the fan, the bottom end of the shell is provided with an air outlet corresponding to the position of the filter, and the top of the gluing developing machine is provided with a ventilation opening corresponding to the position of the air outlet.
Further, an air return port is arranged on the side wall of the gluing developing machine, and the air return port is connected and communicated with an air return pipe; the top of the shell is also provided with a second air inlet, the position of the second air inlet corresponds to any one FFU fan filter unit, and the second air inlet is connected and communicated with one end, far away from the air return inlet, of the air return pipe.
The utility model has the advantages that:
the utility model discloses a FFU filter unit, the air is sent into the rubber coating developing machine after FFU filter unit purifies, sends into the air in the rubber coating developing machine once more through the return air duct and purifies FFU filter unit, forms the circulation, has ensured the cleanliness of rubber coating developing machine inside air.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic view of the internal structure of the FFU filter unit.
The device comprises a gluing and developing machine 1, a shell 2, a first frame 3, a second frame 4, an FFU fan filter unit 5, a fan 501, a filter 502, a mounting plate 6 and a return air pipe 7.
Detailed Description
The present invention will be described in further detail below with reference to the accompanying drawings by way of specific embodiments.
The clean gluing developing device shown in the attached drawing comprises a gluing developing machine 1, wherein an FFU (fan filter unit) is installed at the top of the gluing developing machine 1 and is used for sucking and filtering air and then sending the air into the gluing developing machine 1.
The FFU filtering unit comprises a shell 2, a first frame 3 which is vertically distributed is arranged in the shell 2, two ends of the first frame 3 are connected with the inner wall of the shell 2, a second frame 4 which is perpendicular to the first frame 3 is also arranged in the shell 2, two ends of the second frame 4 are connected with the inner wall of the shell 2, two sides of the second frame 4 are respectively provided with an FFU fan filter unit 5, the FFU fan filter units 5 are arranged on the first frame 3 through mounting plates 6, each FFU fan filter unit 5 comprises a fan 501, and a filter 502 is arranged below each fan 501; a first air inlet is arranged at the position, corresponding to the position of the fan 501, of the top end of the shell 2, an air outlet is arranged at the position, corresponding to the position of the filter 502, of the bottom end of the shell 2, and a ventilation opening is arranged at the position, corresponding to the position of the air outlet, of the top of the gluing and developing machine 1.
An air return port is arranged on the side wall of the gluing developing machine 1 and is connected and communicated with an air return pipe 7; the top of the shell 2 is also provided with a second air inlet, the position of the second air inlet corresponds to any FFU fan filter unit 5, and the second air inlet is connected and communicated with one end of the return air pipe 7 far away from the return air inlet.
The utility model discloses when concrete implementation: the air is sucked by the fan 501, filtered by the filter 502 and then sent into the gluing and developing machine 1, the air in the gluing and developing machine 1 can be sent into the shell through the air return pipe 7, sucked by the fan 501 and filtered by the filter 502 and then sent into the gluing and developing machine 1, and the circulation is carried out, so that a high-cleanness environment is formed in the gluing and developing machine 1.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (3)
1. The clean gluing and developing device is characterized by comprising a gluing and developing machine, wherein an FFU (fan filter unit) is installed at the top of the gluing and developing machine and is used for sucking and filtering air and then sending the air into the gluing and developing machine.
2. The clean gumming and developing device as claimed in claim 1, wherein the FFU filter unit comprises a housing, a first frame is vertically arranged in the housing, two ends of the first frame are connected with the inner wall of the housing, a second frame perpendicular to the first frame is further arranged in the housing, two ends of the second frame are connected with the inner wall of the housing, two sides of the second frame are respectively provided with an FFU fan filter unit, the FFU fan filter units are mounted on the first frame through mounting plates, the FFU fan filter units comprise fans, and a filter is arranged below the fans; the top end of the shell is provided with a first air inlet corresponding to the position of the fan, the bottom end of the shell is provided with an air outlet corresponding to the position of the filter, and the top of the gluing developing machine is provided with a ventilation opening corresponding to the position of the air outlet.
3. The clean gluing and developing device according to claim 2, wherein an air return opening is arranged on the side wall of the gluing and developing machine, and the air return opening is connected and communicated with an air return pipe; the top of the shell is also provided with a second air inlet, the position of the second air inlet corresponds to any one FFU fan filter unit, and the second air inlet is connected and communicated with one end, far away from the air return inlet, of the air return pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921579981.4U CN210934130U (en) | 2019-09-23 | 2019-09-23 | Clean rubber coating developing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921579981.4U CN210934130U (en) | 2019-09-23 | 2019-09-23 | Clean rubber coating developing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210934130U true CN210934130U (en) | 2020-07-07 |
Family
ID=71394499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921579981.4U Expired - Fee Related CN210934130U (en) | 2019-09-23 | 2019-09-23 | Clean rubber coating developing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210934130U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117379881A (en) * | 2023-11-20 | 2024-01-12 | 合肥开悦半导体科技有限公司 | Adjustable gas filtering device and rubber coating developing machine |
-
2019
- 2019-09-23 CN CN201921579981.4U patent/CN210934130U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117379881A (en) * | 2023-11-20 | 2024-01-12 | 合肥开悦半导体科技有限公司 | Adjustable gas filtering device and rubber coating developing machine |
| CN117379881B (en) * | 2023-11-20 | 2024-08-13 | 合肥开悦半导体科技有限公司 | Adjustable gas filtering device and rubber coating developing machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200707 |