CN210676003U

CN210676003U - Backlight detection/measurement stage of ULED screen substrate detection/measurement device

Info

Publication number: CN210676003U
Application number: CN201921102271.2U
Authority: CN
Inventors: 张梁; 陈焜; 李波
Original assignee: Zhongdao Optoelectronic Equipment Co ltd
Current assignee: Zhongdao Optoelectronic Equipment Co ltd
Priority date: 2019-07-15
Filing date: 2019-07-15
Publication date: 2020-06-05
Anticipated expiration: 2029-07-15

Abstract

The utility model relates to a ULED screen is shaded and is detected/measured technical field discloses a ULED screen base plate detection/measurement equipment's detection/measurement objective table in a poor light, including upper structure board and lower floor's structural slab, upper structure board and lower floor's structural slab are transparent hard material, and upper structure board is by the combination of an at least adsorption plate, and every adsorption plate divide into a plurality of adsorption zones, and every adsorption zone sets up at least one adsorption hole, and the adsorption hole runs through upper structure board, adsorption hole distribute with predetermined size and interval, and open in the middle of lower floor's structural slab has the gas groove that sinks, sink the gas groove with the adsorption hole of upper structure board communicates mutually, and the side in gas groove that sinks is perpendicular facade, and the bottom surface is the horizontal plane, and the bottom surface is polished and is handled. The utility model discloses the not unidimensional base plate's of different shapes absorption problem can be solved in the subregion control in absorption hole, and the homogeneity problem in a poor light can be solved in the special structural design of gas pocket, and both combine to be used for the not unidimensional base plate's of different shapes detection/measurement in a poor light.

Description

Backlight detection/measurement stage of ULED screen substrate detection/measurement device

Technical Field

The utility model relates to a ULED screen is shaded and is detected/measured technical field, in particular to ULED screen base plate detects/measures objective table in a poor light of measuring equipment.

Background

The ULED adopts a multi-partition independent backlight control technology, the image quality of the ULED is greatly improved, so that the ULED screen is widely applied to two fields of electronic medical display and liquid crystal television, but the ULED screen on the market at present is not fixed in shape and size due to the characteristic of customization, common shapes include a circle and a square, common sizes of the circle include 4 inches, 6 inches and 8 inches, common sizes of the square include 200 mm-300 mm x 200 mm-400 mm, the backlight detection process is one of important steps of the quality detection of the ULED screen, the objective table is an essential tool in the backlight detection process, however, the existing objective table for the backlight detection of the ULED screen cannot be compatible with ULED screens with various shapes and sizes, and the problem of backlight uniformity exists during the backlight detection.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to the problem and not enough that above-mentioned exists, provide a ULED screen base plate detection/measuring equipment's detection/measurement objective table in a poor light, can handle different shape not unidimensional base plates simultaneously and use the homogeneity problem in a poor light.

The purpose of the utility model is realized through the following technical scheme: ULED screen base plate detects/measuring equipment's detection objective table in a poor light, including upper structure board and lower floor's structure board, upper structure board and lower floor's structure board are transparent hard material, upper structure board includes an at least adsorption plate, and the adsorption plate divide into an at least adsorption zone, and every adsorption zone sets up at least one adsorption hole, the adsorption hole runs through the adsorption plate, the adsorption hole distributes with predetermined size and interval, lower floor's structure board is opened one side up has a plurality of air grooves that sink, air groove with the adsorption hole corresponds and communicates, lower floor's structure board side sets up the aspirating hole, the aspirating hole with air groove that sinks is linked together.

Preferably, the bottom surface of the gas sinking groove is polished.

Preferably, the side surface of the air sinking groove is a vertical surface, and the bottom surface is a horizontal surface.

Preferably, the upper layer structural plate and the lower layer structural plate are bonded by using a shadowless adhesive.

Preferably, the adsorption plate is divided into three adsorption zones.

Preferably, the adsorption holes are distributed in a rectangular array or a circular array.

Preferably, the adsorption holes are circular or square.

Preferably, four corners of the lower-layer structural plate are respectively provided with a mounting hole, and the mounting holes penetrate through the lower-layer structural plate.

According to the utility model discloses a another scheme, it is preferred, it has the annular seal groove to open in the sunken gas groove outside, sets up the sealing washer in the annular seal groove.

According to the utility model discloses a another scheme, it is preferred, lower floor's structural slab opens towards the upside has the air groove that sinks of two sets of symmetries, and each group is including 7 air grooves that sink, and the air groove that sinks has three kinds of different length, is long air groove that sinks, well air groove and the short air groove that sinks respectively.

The utility model has the advantages that: ULED screen base plate detects/measuring equipment's detection objective table in a poor light, including upper structure board and lower floor's structure board, upper structure board and lower floor's structure board use transparent hard material, the light transmissivity has been increased, upper structure board has adopted the combination of polylith thick plate, can leave material loading operating space for the material loading manipulator, upper structure board is opened there is the adsorption hole, the subregion setting of adsorption hole, can adsorb not unidimensional base plate, the problem that general objective table can not compatible various shapes and size has been solved, lower floor's structure board is opened has the air sink groove that communicates with the adsorption hole, the side that the adsorption hole is circular and air sink groove is perpendicular facade, the bottom surface is the horizontal plane, the polishing treatment has been carried out to the bottom surface, these special structural designs, the maximize has reduced the shading problem, the homogeneity problem in a poor light has been solved better.

Drawings

FIG. 1 is a schematic view of a stage;

FIG. 2 is an exploded view of the stage;

FIG. 3 is a schematic view of an upper deck panel;

FIG. 4 is a schematic view of a lower deck structural panel;

FIG. 5 is a sectional view of an adsorption tank A-A;

FIG. 6 is a schematic structural view of the second embodiment;

FIG. 7 is a schematic diagram of a sixth configuration of the embodiment;

FIG. 8 is a schematic view of the overall structure of a ULED screen substrate inspection/measurement device utilizing the stage of the present invention;

fig. 9 is a schematic structural diagram of a detecting device of a uldd screen substrate detecting/measuring apparatus using the objective table of the present invention;

FIG. 10 is a schematic view of the structure of the loading/unloading opening of the ULED screen substrate detecting/measuring device using the objective table of the present invention;

FIG. 11 is a schematic view of the structure of the loading/unloading port of the ULED screen substrate detecting/measuring device using the objective table of the present invention;

FIG. 12 is a schematic diagram of a side view of the loading/unloading port of the ULED screen substrate inspection/measurement device using the objective table of the present invention;

fig. 13 is an overall schematic view of a two-dimensional motion mechanism of a pre-alignment device of a uldd screen substrate inspection/measurement apparatus using the present invention;

fig. 14 is a schematic left view of a two-dimensional movement mechanism of a pre-alignment device of a uldd screen substrate inspection/measurement apparatus using the present invention;

fig. 15 is an overall schematic view of a four-dimensional motion mechanism of a ULED screen substrate inspection/measurement device utilizing the subject invention;

fig. 16 is an enlarged schematic view of a second auxiliary clamping mechanism of a uldd screen substrate inspection/measurement device employing the subject invention;

fig. 17 is a schematic front view of a ULED screen substrate inspection/measurement device with a four-dimensional power mechanism using the stage of the present invention;

fig. 18 is a schematic left view of a four-dimensional motion mechanism of a ULED screen substrate inspection/measurement device utilizing the subject invention;

fig. 19 is a schematic top view of a four-dimensional motion mechanism of a ULED screen substrate inspection/measurement device utilizing the subject invention;

fig. 20 is a schematic structural diagram of a buffering mechanism with a limit sensor of a uldd screen substrate detection/measurement device using the present invention.

Detailed Description

The technical solution of the present invention is described in further detail below with reference to the accompanying drawings, but the scope of the present invention is not limited to the following.

The first embodiment is as follows: as shown in fig. 1 to 5, the backlight inspection/measurement stage of the ULED screen substrate inspection/measurement device includes an upper structural plate 161 and a lower structural plate 162, in this embodiment, the upper-layer structural plate 161 is formed by combining two adsorption plates 1611 having the same size and shape, the two adsorption plates 1611 are symmetrically arranged, a feeding operation space is reserved for the middle feeding manipulator, each adsorption plate is divided into a plurality of adsorption regions 163, in fig. 2, each dashed frame is an adsorption region 163, each adsorption region is provided with at least one circular or square adsorption hole 164, the adsorption holes 164 are perpendicular to the upper-layer structural plate 161, and the adsorption holes 164 are arranged in a rectangular array. In the first embodiment, referring to fig. 3, the number of the adsorption regions 163 is three, and the adsorption holes 164 are distributed from inside to outside according to different sizes of the substrates, and are divided into an innermost adsorption hole, a sub-inner adsorption hole, and an outermost adsorption hole, in the first embodiment, preferably, the innermost adsorption hole has 4, the sub-inner adsorption hole has 4, each adsorption region is divided into a first adsorption region, a second adsorption region, and a third adsorption region according to the position of the adsorption hole, the first adsorption region is composed of the innermost 4 adsorption holes, the second adsorption region includes the innermost adsorption hole and the sub-inner adsorption holes, and has 8 adsorption holes in total, the third adsorption region includes all the adsorption holes, the lower structural plate 162 is a whole-block-oriented or circular thick plate, the lower structural plate 162 has a gas sink groove 1621 corresponding to the adsorption hole 164 facing upward, the gas sink grooves 1621 may correspond to the adsorption holes 164 one by one, or more, one sinking gas groove 1621 may correspond to a plurality of adsorption holes 164 of the same adsorption zone so that the adsorption holes 4 and the sinking gas groove 1621 communicate with each other. In this embodiment, the side surface of the air sinking groove 1621 is a vertical surface, the bottom surface is a horizontal surface, and the bottom surface is further polished and polished, so as to reduce the problem of shading to a greater extent, the mounting holes 165 are formed at the four corners of the lower structural plate 162, the lower structural plate 162 through which the mounting holes 165 pass can fix the objective table on the base by passing through the mounting holes 165 by screws, the side edge of the lower structural plate 162 is provided with the air pumping holes 166, and the air pumping holes 166 are communicated with the air sinking groove 1621. In this embodiment, the two absorption plates 1611 and the lower structural plate 162 are made of transparent hard material, so as to avoid the light shielding problem.

In the first embodiment, the upper structural plate and the lower structural plate are made of transparent hard materials, and the upper structural plate and the lower structural plate can be bonded together by preferably selecting the shadowless glue, the shadowless glue is converted from a liquid state to a solid state within several seconds under the irradiation of ultraviolet rays, and the shadowless glue has the characteristics of excellent low temperature resistance, high temperature resistance and high humidity resistance, so that the sealing property between the upper structural plate 161 and the lower structural plate 162 is ensured, further, the upper structural plate 161 and the lower structural plate 162 are ensured to be airtight, and finally, the adsorption capacity of the adsorption holes 164 is improved.

The using method comprises the following steps: in the first embodiment, the upper layer structure plate 161 is composed of two adsorption plates 1611, the two adsorption plates 1611 are divided into three adsorption regions 163, each adsorption region 163 is provided with at least one cylindrical or square adsorption hole 164, the adsorption holes 164 are arranged according to a predetermined interval and size, the adsorption holes 164 of the two adsorption plates 1611 are symmetrically arranged, the first adsorption region adsorbs a minimum size substrate, the second adsorption region adsorbs a sub-minimum size substrate, and the third adsorption region adsorbs a maximum size substrate, the three adsorption regions can be used for adsorbing substrates of different sizes, so as to solve the problem that a common carrier table cannot be compatible with various sizes and shapes, the lower layer structure plate 162 is a whole square or circular thick plate, the upper side of the lower layer structure plate 162 is provided with a gas sink groove 1621 corresponding to and communicating with the adsorption hole 164 on the upper layer structure plate 161, the side surface of the gas sink groove 1621 is vertical, the bottom surface is a polished surface, the homogeneity problem of being shaded has been solved better, and the subregion control of absorption hole 164 can solve the absorption problem of the not unidimensional base plate of different shapes, and the homogeneity problem of being shaded can be solved to the special structural design of absorption hole 164, and both combine to be used for the not unidimensional base plate of different shapes to detect in a poor light, have reached the utility model discloses a purpose.

Example two: the main difference between the second embodiment and the first embodiment is that, referring to fig. 6, the upper-layer structural plate 161 and the lower-layer structural plate 162 are not bonded by a shadowless adhesive, but are processed, the surfaces of the upper-layer structural plate 161 and the lower-layer structural plate 162 are very smooth, a ring-shaped sealing groove 167 is formed around each gas sinking groove 1621 in a state that the upper-layer structural plate 161 and the lower-layer structural plate 162 are close to vacuum adsorption fit, a sealing ring is arranged in the ring-shaped sealing groove 167, and a better sealing effect is achieved between the adsorption hole 164 and the gas sinking groove 1621. In addition, in order to better prevent the sliding between the upper structural plate 161 and the lower structural plate 162, the two opposite sides of the upper structural plate may be respectively provided with a limiting block to fix the upper structural plate 161 and the lower structural plate 162, so as to prevent the relative sliding between the upper structural plate 161 and the lower structural plate 162 during the operation process, thereby reducing the adsorption capacity of the adsorption hole 164.

Example three: in this embodiment, the difference from the first embodiment is that a single adsorption plate 1611 can be used as the upper layer structure plate, and then at least three circular or square adsorption holes 164 are formed in the adsorption plate 1611, so that the structure is simpler and the cost is saved.

Example four: in this embodiment, in order to save the operation time, the upper layer structure plate 161 may be overlapped by different numbers of adsorption plates 1611 in advance, and then several sets of object stages with common thickness formed by bonding the upper layer structure plate 161 and the lower layer structure plate 162 are convenient to directly take for use according to the thickness of different products to be measured.

Example five: on the basis of the first embodiment, referring to fig. 4, in this embodiment, in order to match the adsorption holes 164 of the three adsorption regions 163 in the upper-layer structural plate 161, two sets of symmetric sinking air slots 1621 are formed in the upper side of the lower-layer structural plate 162, each set includes 7 sinking air slots 1621, each sinking air slot 1621 has three different lengths, which are a long sinking air slot, a middle sinking air slot and a short sinking air slot, in this embodiment, all the sinking air slots are divided into three regions, the first region includes a long sinking air slot and a middle sinking air slot, the long sinking air slot is located above the middle sinking air slot, the third region is symmetrically arranged with the first region, the third region also includes a long sinking air slot and a middle sinking air slot, and the first region and the third region are divided into two ends located at the head and the tail of the lower-layer structural plate 162. The second region includes two long sinking air slots and one short sinking air slot, the short sinking air slot is located in the middle of the two sinking air slots, and the second region is located in the middle of the lower layer structural plate 162. In the embodiment, the short sinking gas groove is communicated with the adsorption hole of the third adsorption area, the middle sinking gas groove is communicated with the adsorption hole of the second adsorption area, and the long sinking gas groove is communicated with the adsorption hole of the first adsorption area. In addition, each of the lower air sink slots is in communication with an air extraction hole 166.

Example six: the difference between the sixth embodiment and the first embodiment is that, referring to fig. 7, only three adsorption holes 164 are formed in each adsorption region, and the three adsorption holes 164 are arranged in a circumferential array, and in the present embodiment, each adsorption hole 164 is disposed at equal intervals, so that the included angle between each adsorption hole 164 is 120 degrees.

Example seven: on the basis of the first embodiment, in order to better control the adsorption function of the adsorption holes 164, the opening and closing states of the adsorption holes 164 are controlled by adopting a pipeline branching mode, the suction holes 166 communicated with the air sink grooves corresponding to the adsorption holes 164 of each adsorption area 163 are correspondingly connected with three pipelines, each pipeline is provided with a control valve which is divided into a first control valve, a second control valve and a third control valve, the three pipelines are converged into a main pipeline, and the main pipeline is provided with a main control valve. When the minimum-size substrate is adsorbed, only the adsorption holes of the first adsorption area are acted, and the adsorption holes of the second adsorption area and the third adsorption area are all closed, so that the first control valve is opened, the other two control valves are closed, when the sub-minimum-size substrate is adsorbed, the first control valve and the second control valve are opened, the third control valve hole is closed, when the maximum-size substrate is adsorbed, the adsorption holes 164 of the three adsorption areas 1611 are all started, and all the control valves are opened, so that the opening and closing states of the adsorption holes 164 are better controlled, and different working requirements are met.

As shown in fig. 8-20, the utility model discloses an objective table is applied to ule screen substrate detection/measurement device, and this ule screen substrate detection/measurement device includes signal processing unit, installs detection device 100 on the lathe, pre-alignment device 200, manipulator 300 and two material loading and unloading mouths 400, and detection device 100, pre-alignment device 200, manipulator 300 and two material loading and unloading mouths 400 are connected with signal processing unit and are realized the signal interaction, accomplish screen substrate material loading, pre-alignment, detection, unloading overall process automatically; the upper material loading opening and the lower material loading opening 400 comprise a bottom plate 410, a plurality of at least two layers of limiting blocks 420 arranged on the bottom plate, substrate cassettes 430 with different sizes/shapes and induction sensors 440, wherein the limiting blocks 420 are arranged in a stacked mode according to the principle that the sizes/shapes of the substrate cassettes 430 are smaller than the sizes/shapes of the substrate cassettes 430, a plurality of layers of limiting spaces capable of containing the substrate cassettes 430 with different sizes/shapes are formed, the substrate cassettes 430 with each size/shape can only be placed in one layer of limiting space, and the induction sensors 440 are arranged at the positions where the limiting spaces of each layer are not overlapped with the limiting spaces of.

As shown in fig. 9, the inspection apparatus 100 includes an equipment platform 110, an electric cabinet 180, a gantry 120, an inspection head 130, an inspection platform 140, and a backlight illumination apparatus 150; the detection platform 140 is arranged on the equipment platform 110, the detection platform 140 is driven by the driving component to move on the equipment platform 110 along the X/Y axis direction, the driving component of the detection platform 140 is a linear motor moving in the X axis direction and a linear motor moving in the Y axis direction, the stator 142 of the linear motor in the X direction is arranged on the equipment platform 110 along the X axis direction, the rotor is arranged at the bottom of the detection platform 140, and the rotor drives the detection platform 140 to reciprocate on the stator; y-axis linear motor stators 143 are mounted on two side edges of the detection platform 140 along the Y-axis direction, and the rotor drives the detection platform 140 to reciprocate on the stators; the gantry support 120 is erected above the equipment platform 110, a detection head 130 is installed on a cross beam of the gantry support 120, a camera I installation port 131 and a camera II installation port 132 are arranged on the detection head 130, the detection head 130 faces the detection platform 140, and the detection head 130 is driven by a driving device to move along the X/Y axis direction; the detection platform 140 comprises a mounting base plate 141, an objective table 160, a standard sheet carrying table 170 and an air extractor, wherein a counter bore is formed in the mounting base plate 141, the standard sheet carrying table 170 is fixed in the counter bore, the objective table 160 is mounted on the mounting base plate 141, a through hole is formed in the mounting base plate 141 below the objective table 160, the size of the through hole is smaller than that of the objective table 160, the through hole is convenient for light transmission and backlight detection, the objective table 160 and the standard sheet carrying table 170 are used for placing a screen substrate during detection, the air extractor is connected with the objective table 160 and the standard sheet carrying table 170, and the screen substrate is sucked and fixed during; the backlight 150 is disposed on the side of the stage 160, and the stage 160 can accommodate various sizes/shapes of substrates, and can also accommodate standard-sized substrates, and the standard wafer stage 170 is used to accommodate standard-sized substrates.

In some embodiments, the limit blocks 420 are disposed at two corner points or any three corner points or four corner points or any two sides or three sides or four sides of the substrate cassette 430, and the limit blocks 420 may be two layers or three layers or four layers.

In some embodiments, the stopper 420 is provided with a screw hole for fixing, and the stopper 420 is fixed to the bottom plate 410 or the lower stopper 420 by a bolt.

In some embodiments, as shown in fig. 10 to 12, a notch 411 for facilitating loading and unloading of a manipulator is formed in the middle of one side of the bottom plate 410 of the loading and unloading port 400, and a material taking end is formed on one side provided with the notch 411; the inner side of the limiting block 420 is in an L-shaped clamping shape, the limiting block 420 is arranged at four corner positions of the substrate cassette 430 and symmetrically arranged at two sides along the central line of the gap 411, the induction sensor 440 is arranged near the inner side of the limiting block 420 at the diagonal position of each layer of limiting space, the induction sensor 440 is a push-down induction sensor, the switch of the push-down induction sensor protrudes out of the bottom surface of the limiting block 420, the lower end of the switch is connected with a spring, the lower end of the push-down induction sensor is fixed at the bottom of the bottom plate 410, when the substrate cassette 430 is used, the substrate cassette 430 is placed into a layer of limiting space with matched size, the switch of the push-down induction sensor protruding out of the bottom surface of the limiting block 420 is pressed down by the substrate cassette 430, the spring is compressed to trigger induction signals to be transmitted to the signal processing unit, different layers generate different induction signals to represent the sizes/shapes Shape.

In some embodiments, a mounting rack 412 is disposed at the material taking end of the bottom plate 410, a cassette substrate detector 413 for detecting whether a substrate in the substrate cassette 430 protrudes is disposed on the mounting rack, the cassette substrate detector 413 is located above the gap 411 of the bottom plate, the cassette substrate detector 413 emits a detection light, and when a substrate in the substrate cassette 430 protrudes to block the light path, a signal is sent to the signal processing unit to prompt an operator that the substrate in the substrate cassette 430 protrudes.

In some embodiments, the upper edge of the stopper 420 is chamfered inside to facilitate the substrate cassette 430 to slide into the stopper space along the slope of the chamfer.

In some embodiments, the detection device 100, the pre-alignment device 200, and the two loading and unloading ports 400 are located at four directions around the robot 300, the robot 300 is driven by a robot driving device, the robot driving device includes a Z motor and a rotating motor, and the driving device is installed at the bottom of the robot 300; the substrate can be conveyed by one 360-degree rotating manipulator without a plurality of manipulators, so that the cost is saved, and the whole volume of the equipment is reduced.

In some embodiments, the signal processing unit is an industrial computer or a PLC controller, which completes signal interaction of each part of the whole device and controls the device to operate automatically.

In some embodiments, as shown in fig. 13 to 20, the pre-alignment apparatus 200 includes a machine tool, a first mounting base 201 and a second mounting base 205 fixedly disposed on the machine tool by bolts, a loading part 202, a positioning clamping mechanism, an auxiliary clamping mechanism and a gantry type detection mechanism disposed on the first mounting base 201, and a two-dimensional movement mechanism 206 disposed on the second mounting base 205; the positioning clamping mechanism, the auxiliary clamping mechanism and the two-dimensional movement mechanism 206 are all electrically connected with the signal processing unit, and the signal processing unit controls the positioning clamping mechanism, the auxiliary clamping mechanism and the two-dimensional movement mechanism 206 to work or stop;

the gantry type detection mechanism comprises a detector mounting frame 211 fixedly mounted on the first mounting base 201 through bolts and a detector 213 fixedly mounted on the detector mounting frame 211, the detector 213 is positioned above the object carrying part 202, and a signal output end of the detector 213 is connected with a signal input end of a signal processing unit;

the first mounting seat 201 is provided with a first through hole, and the carrying part 202 comprises a supporting seat 221, a supporting plate 222 with a second through hole, a sensor mounting seat 223, 4 substrate limiting blocks 224 and 12 supporting columns 225; the supporting seat 221 is fixedly arranged on the first mounting seat 201 through bolts and located on the periphery of the first through hole, the supporting plate 222 is fixedly arranged on the top of the supporting seat 221 through bolts, the sensor mounting seat 223 and the substrate limiting block 224 are fixedly arranged on the top of the supporting plate 222 through bolts, the sensor mounting seat 223 is fixedly provided with a first sensor 226 through bolts, the signal output end of the first sensor 226 is connected with the signal input end of the PLC, 12 supporting columns 225 are vertically arranged, and the supporting columns and the first mounting seat 201 are integrally formed and located on the periphery of the supporting plate 222;

referring to fig. 15, fig. 16 and fig. 19, and referring to fig. 19, the positioning and clamping mechanism and the auxiliary clamping mechanism are both located at the periphery of the supporting column 225, the positioning and clamping mechanism includes a first positioning and clamping mechanism 231 and a second positioning and clamping mechanism 232, and the auxiliary clamping mechanism includes a first auxiliary clamping mechanism 241 and a second auxiliary clamping mechanism 242; the first positioning and clamping mechanism 231 comprises a first air cylinder 271, the base of the first air cylinder 271 is fixedly installed on the first installation base 201 through a bolt, the front end part of the first air cylinder 271 inclines towards the lower left, the rear end part of the first air cylinder 271 is close to the upper right corner of the first installation base 201, the top part of the first air cylinder 271 is provided with a sliding block 210 in sliding fit with the first air cylinder, the top part of the sliding block 210 is fixed with a Y-shaped clamping base 237, the front end part of the sliding block 210 is connected with the top part of a piston rod of the first air cylinder 271 through a connecting block, the piston rod of the first air cylinder 271 drives the sliding block 210 to do telescopic motion, the sliding block 210 drives the Y-shaped clamping base 33 to do telescopic motion, the front part of the Y-shaped clamping base 237 is V-shaped, two V-shaped strips are respectively parallel to the upper side and the right side of the first installation base 201, the front end parts of the two V-shaped, the first positioning and clamping block 234 and the second positioning and clamping block 235 are respectively used for clamping two adjacent sides of the square substrate; the second positioning and clamping mechanism 232 is driven by a second air cylinder 272, the base of the second air cylinder 272 is horizontally arranged and fixedly mounted on the first mounting seat 201 through a bolt, the rear end part of the base of the second air cylinder 272 is close to the right side edge of the first mounting seat 201, the square clamping seat 238 of the second positioning and clamping mechanism 232 is square, a third positioning and clamping block 236 is arranged on the square clamping seat 238, the second positioning and clamping block 235 and the third positioning and clamping block 236 are positioned on the same side of the square substrate, and one side of the square substrate is clamped together or used for clamping a circular substrate; the first auxiliary clamping mechanism 241 and the second auxiliary clamping mechanism 242 have the same structure, the first auxiliary clamping mechanism 241 comprises a third air cylinder 281, a slide block 210, an auxiliary clamping seat 233, a buffer mechanism and a first auxiliary clamping block 243, the first auxiliary clamping block 243 is arranged opposite to the first positioning clamping block 234, and the motion track of the first auxiliary clamping block 243 is parallel to a straight line where the second positioning clamping block 235 and the third positioning clamping block 236 are located; the second auxiliary clamping mechanism 242 comprises a fourth air cylinder 282, a sliding block 210, an auxiliary clamping seat 233, a buffer mechanism and a second auxiliary clamping block 244, the sliding block 210 is installed on the fourth air cylinder 282 and is in sliding fit with the fourth air cylinder 282, a piston rod of the fourth air cylinder 282 is connected with the sliding block 210 and drives the sliding block 210 to do linear reciprocating motion on the fourth air cylinder 282, the auxiliary clamping seat 233 is fixedly arranged on the sliding block 210, the buffer mechanism comprises a guide rail 284, a rear spring seat 285, a limit limiting block 286, a spring 287 and a front spring seat 288, the guide rail 284 is arranged at the top of the auxiliary clamping seat 233, the rear spring seat 285 is fixedly arranged at the rear end part of the guide rail 284, the front end part of the guide rail 284 is fixed through the limit limiting block 286 and the front end part of the auxiliary clamping seat 233, one end of the spring 287 is fixed with the rear spring seat 285, the other end of the spring 287 is fixedly arranged in the, the sliding blocks a and b are respectively arranged on the guide rail 284 and are in sliding fit with the guide rail 284, and the second auxiliary clamping block 244 is fixedly arranged at the top of the front spring seat 288;

the second mounting seat 205 is located right below the first mounting seat 201, and the two-dimensional movement mechanism 206 includes a working arm 261, a Z-axis movement mechanism for driving the working arm 261 to move in the Z-axis direction, and a horizontal rotation movement mechanism for driving the working arm 261 to rotate; the Z-axis movement mechanism is driven by a Z-axis cylinder 265, the Z-axis cylinder 265 is fixedly arranged on the second mounting seat 205 through a bolt, a piston rod of the Z-axis cylinder 265 is vertically arranged upwards, the top of the piston rod is connected with the horizontal rotation movement mechanism, and the Z-axis cylinder 265 drives the horizontal rotation movement mechanism to move in the Z-axis direction; the horizontal rotation movement mechanism comprises a theta motor 264 and a theta driving gear, a theta driven gear is arranged at the power input end of the working arm 261, the theta driving gear is meshed with the theta driven gear, and the theta driven gear and the working arm 261 are driven by the theta driving gear to do horizontal rotation movement; the upper end of the working arm 261 sequentially penetrates through the first through hole and the second through hole, the top end of the working arm is provided with a sucker 209, the sucker 209 is connected with the adsorption mechanism, and the PLC controller controls the sucker 209 to work or stop; the method comprises the steps that a reference comparison table for the sizes of ULED screen substrates is stored in a PLC, the reference comparison table is used for identifying the sizes/shapes of the ULED screen substrates, at least two pre-alignment programs are arranged in the PLC and used for executing pre-alignment of the ULED screen substrates with different sizes/shapes, and the corresponding pre-alignment programs are selected according to the sizes/shapes of the ULED screen substrates.

Through the arrangement, the structure is novel, the design is reasonable, the positioning clamping mechanism and the auxiliary clamping mechanism are arranged on the first mounting seat 201, and the two-dimensional movement mechanism 206 is arranged on the second mounting seat 205, so that the structure is compact, and the equipment space is reasonably used; the auxiliary clamping mechanism is provided with a buffer mechanism, and the spring 287 plays a buffer role when the substrate is pre-aligned, so that the substrate is effectively protected from being extruded and damaged; the clamping blocks of the two positioning and clamping mechanisms are matched with the clamping blocks of the two auxiliary clamping mechanisms to clamp and align the square substrate, so that the pre-alignment work of the square substrate can be completed; the two-dimensional movement mechanism 206 can complete the pre-alignment work of the circular substrate by matching with the second positioning and clamping block 235, the third positioning and clamping block 236, the second auxiliary clamping block 244 and the detector; circular and square substrates with various sizes can be pre-aligned on the pre-alignment device, so that the using amount of equipment is reduced, and the investment and production cost of the equipment are reduced; simultaneously, the pre-alignment device can be compatible with circular and square substrates of various sizes, equipment does not need to be replaced when the substrates of different sizes and shapes are pre-aligned, and the working efficiency of pre-alignment of the substrates is effectively improved.

In some embodiments, the positioning clamping block is circular or square, and the auxiliary clamping block is circular or square; a limit sensor is arranged on the buffer mechanism; as shown in fig. 8, at this time, the sliding block 210 and the auxiliary clamping seat 233 are fixed by the connecting plate 247, and the sliding block 210 drives the connecting plate 247 to move so as to drive the buffer mechanism to move; the limit sensor comprises an inductor 245 and an L-shaped induction baffle 246, the inductor 245 is fixedly arranged at the bottom of the auxiliary clamping seat 233 through a screw, one side of the induction baffle 246 is fixed on the front spring seat 288 through a screw, the induction baffle is driven by the front spring seat 288 to do horizontal reciprocating motion, the other side of the induction baffle 246 is matched with the inductor 245, when the induction baffle 246 moves to the induction range of the inductor 245 under the driving of the front spring seat 288, the inductor 245 transmits a signal to the signal processing unit, and the signal processing unit controls the cylinder corresponding to the inductor 245 to stop working; when the spring 287 is reset, the front spring seat 288 drives the sensing baffle 246 to leave the sensing range of the sensor 245, the sensor 245 transmits a signal to the signal processing unit, and the signal processing unit controls the cylinder corresponding to the sensor 245 to reset; the surfaces of the clamping blocks are all elastic, so that the clamping blocks are prevented from damaging the substrate when contacting with the substrate. By additionally arranging the limit sensor, the strokes of a plurality of cylinders/motors do not need to be set according to the size of the substrate, the alignment process is simplified, and the alignment is more accurate.

In some embodiments, an X-direction sliding rail in the X direction is disposed on the second mounting seat 205, an X-axis moving mechanism is disposed on the X-direction sliding rail, the X-axis moving mechanism includes an X-direction pulley and an X-direction motor 262, and the X-direction pulley is driven by the X-direction motor 262 to move in the X-axis direction; a Y-direction sliding rail is arranged on the X-direction pulley, and a Y-axis movement mechanism is arranged on the Y-direction sliding rail; the Y-axis movement mechanism comprises a Y-direction pulley and a Y-direction motor 263 which are arranged on the Y-direction slide rail, and the Y-direction motor 263 drives the Y-direction pulley to move in the Y-axis direction; a Z-axis movement mechanism is fixedly arranged on the Y-direction pulley through a bolt, and a four-dimensional movement mechanism is formed by the two-dimensional movement mechanism 206, the X-axis movement mechanism and the Y-axis movement mechanism; an X-axis motion mechanism and a Y-axis motion mechanism are additionally arranged on the two-dimensional motion mechanism 206 to form X, Y, Z and theta four-dimensional motion mechanisms, namely, the working arm 261 can drive the suction cup 209 and the substrate to move in the X, Y, Z axial direction or do horizontal rotation motion respectively; the four-dimensional movement mechanism is matched with the detector 213 to complete the pre-alignment of the circular substrate, and the pre-alignment of the circular substrate can be completed without the assistance of a clamping mechanism.

In some embodiments, two sensor mounting brackets 212 are fixedly mounted on the first mounting base 201 through bolts, second sensors 214 are respectively fixedly mounted on the two sensor mounting brackets 212 through bolts, the two second sensors 214 respectively detect two adjacent edges of the sensing ULED screen substrate, and signal output ends of the two second sensors 214 are both connected with signal input ends of the signal processing unit; the two second sensors 214 and the detector 213 cooperate with a four-dimensional motion mechanism to complete the pre-alignment of the square substrate.

In some embodiments, 12 support columns 225 are vertically arranged, the bottom of each support column 225 is fixed to the top of the first mounting seat 201, the top of each support column 225 is convex, every 3 support columns 225 form a group and are arranged in an L shape, and four groups of support columns 225 are respectively arranged on the periphery of four corners of the support plate 222; the first positioning clamping block 234, the second positioning clamping block 235, the third positioning clamping block 236, the first auxiliary clamping block 243 and the second auxiliary clamping block 244 have the same size and the same height, and the top of the support column 225 is higher than the bottom of the clamping blocks and lower than the top of the clamping blocks; the top of the supporting column 225 is set to be in a convex shape, so that the contact area between the loading part 202 and the substrate is further reduced, and the probability that the substrate is abraded is further reduced; the top of support column 225 is higher than the bottom of grip block and is less than the top of grip block, effectively guarantees the grip block and carries out normal centre gripping to the base plate.

In some embodiments, the first through hole and the second through hole are both larger than the outer diameter of the working arm 261, and the projections of the first through hole and the second through hole in the vertical direction coincide; the size and shape of the first through hole and the second through hole are the same, and the first through hole and the second through hole are located in the same vertical direction, so that space waste is avoided, and meanwhile, the two through holes provide reasonable and effective space for movement of the working arm 261.

In some embodiments, two of the supporting seats 221 are provided, and the cross sections of the two supporting seats 221 are L-shaped, and the two L-shaped supporting seats 221 are symmetrical about the center of the first mounting seat 201; because the working arm 261 can produce the air current when moving, this L type supporting seat 221's setting makes the motion edge of working arm 261 have sufficient air flow space, guarantees that working arm 261 does not receive the air current influence at the during operation, has strengthened the stability when equipment moves, extension equipment life simultaneously.

The use method of the ULED screen substrate detection/measurement device comprises the following steps,

(a) placing the substrate cassette 430 in a layer of limiting space which is formed by the limiting blocks 420 of the upper and lower material ports 400 and is matched with the size/shape of the substrate cassette 430, triggering the layer of induction sensor switch to generate induction signals, and transmitting the induction signals to a signal processing unit to identify the size/shape of the substrate cassette 430;

(b) the signal processing unit controls the robot 300 to transfer the substrate to be tested in the substrate cassette 430 to the pre-alignment device 200;

(c) the signal processing unit controls the pre-alignment device 200 to complete pre-alignment on the substrate to be tested;

(d) the signal processing unit controls the manipulator 300 to transport the substrate after the pre-alignment from the pre-alignment device 200 to the adsorption area 163 where the stage 160 of the detection platform 140 of the detection device 100 is matched with the size/shape of the substrate to be detected or the standard wafer stage 170, and the air extractor adsorbs and fixes the substrate to be detected;

(e) the signal processing unit controls the detection platform 140 or the detection head 130 to move, and the substrate to be detected is detected;

(f) the signal processing unit controls the robot 300 to transfer the substrate, which has been measured, back to the substrate cassette 430 of the loading/unloading port 400.

The working principle of the detection device is as follows: the limiting blocks 420 of the upper and lower material ports 400 are stacked according to the principle that the size/shape of the substrate cassettes 430 is smaller than the size/shape thereof, the limiting spaces for placing the substrate cassettes 430 with different sizes/shapes are formed, each size/shape of the substrate cassette 430 can only be placed in one limiting space, the sensing sensor 440 is arranged at the position where each limiting space does not overlap with the next limiting space, the substrate cassettes 430 with different sizes/shapes are placed in one limiting space, the sensing sensor 440 for limiting the layer is triggered to generate sensing signals and transmit the sensing signals to the signal processing unit, the signal processing unit identifies the size of the substrate cassette 430 according to the different sensing signals, the reference table is stored in the signal processing unit for identifying the size/shape of the substrate cassette 430, and the size/shape of the substrate is obtained by identifying the size of the substrate cassette 430; the detection equipment is provided with two feeding and discharging ports 400, feeding and discharging are performed alternately, the feeding and discharging efficiency is improved, the feeding and discharging time is saved, each feeding and discharging port 400 can be used for feeding and discharging, one feeding port and the other discharging port can be used for feeding, or one port can be used for feeding, the detected good products and defective products are discharged through two ports, the sorting function is provided, and an operator can set the sorting function according to the requirement; the signal processing unit controls the driving device of the manipulator 300 to drive the manipulator 300 to take out the substrate to be tested from the substrate cassette 430 of the loading and unloading port 400, and carries the substrate to the pre-alignment device 200 for pre-alignment, the signal processing unit selects a corresponding pre-alignment program according to the identified size/shape of the substrate, and if the loaded substrate is a square substrate, the step 1 or the step 2 is executed; if the loaded round substrate is the round substrate, executing the step 3 or the step 4;

1. the robot places the substrate on the support posts 225; setting that 0.1 second is needed from the detection of the first sensor 226 to the complete placement of the substrate on the support column 225, the time delay from the detection of the first sensor 226 to the substrate is 0.1 second, then transmitting a signal detected to the substrate to the signal processing unit, and after receiving the signal transmitted by the first sensor 226, the signal processing unit controls the first cylinder 271 and the second cylinder 272 to sequentially drive the first positioning and clamping mechanism 231 and the second positioning and clamping mechanism 232 to move to a predetermined position respectively through the electromagnetic valve according to the size of the substrate and then stop moving; then the signal processing unit controls the fourth cylinder 282 to drive the second auxiliary clamping mechanism 242 to approach the substrate through the electromagnetic valve, when the force applied to the second auxiliary clamping block 244 on the second auxiliary clamping mechanism 242 exceeds a certain set value, the limit sensor in the second auxiliary clamping block 244 works, the limit sensor transmits a signal to the signal processing unit, the signal processing unit receives the signal transmitted by the limit sensor and controls the fourth cylinder 282 to stop moving through the electromagnetic valve, at this time, the angle adjustment work of the substrate is completed, the signal processing unit controls the third cylinder 281 to drive the first auxiliary clamping mechanism 241 to approach the substrate through the electromagnetic valve, when the force applied to the first auxiliary clamping block 243 on the first auxiliary clamping mechanism 241 exceeds a certain set value, the limit sensor in the first auxiliary clamping block 243 works, the limit sensor transmits a signal to the signal processing unit, after receiving the signal sent by the limit sensor, the signal processing unit controls the third air cylinder 281 to stop moving through the electromagnetic valve, and at this time, the pre-alignment work is completed.

2. The manipulator places the substrate on the support column 225, the first sensor 226 transmits a signal for detecting the substrate to the signal processing unit after detecting that the substrate is delayed for 0.1 second, the signal processing unit controls the suction cup 209 to suck the substrate after receiving the signal and controls the Z-direction cylinder 265 to work at the same time, and the Z-direction cylinder 265 drives the working arm 261, the suction cup 209 and the substrate to move upwards to a preset position and then stops moving; then the signal processing unit controls to respectively control the X-direction motor 262 and the Y-direction motor 263 to work in sequence, the X-direction motor 262 drives the working arm 261, the sucker 209 and the substrate to do horizontal movement, when the substrate moves to the sensing range of one second sensor 214, the second sensor 214 transmits a signal to the signal processing unit, the signal processing unit receives the signal and controls the X-direction motor 262 to stop working, meanwhile, the signal processing unit controls the detector 213 to stop moving when the detector 213 moves horizontally to be capable of detecting a basic edge, at the moment, the detector 213 detects and stores a group of offset data of the substrate, then the Y-direction motor 263 drives the working arm 261, the sucker 209 and the substrate to do horizontal movement, when the substrate moves to the sensing range of the other second sensor 214, the second sensor 214 transmits a signal to the signal processing unit, and the signal processing unit receives the signal and controls the Y-direction motor 263 to stop working, meanwhile, the signal processing unit controls the detector 213 to move horizontally until the edge of the substrate can be detected, the detector 213 measures a second group of offset data of the substrate at the moment, and the detector 213 synthesizes the two groups of offsets to obtain the offset and the offset angle of the substrate and transmits the signal to the signal processing unit; after receiving the signal, the signal processing unit controls the X-direction motor 262, the Y-direction motor 263, the Z-direction cylinder 265 and the theta motor 264 to work according to the offset and the offset angle of the substrate, the X-direction motor 262 and the Y-direction motor 263 move to adjust the offset of the substrate, the Z-direction cylinder 265 moves to enable the substrate to return to the supporting column 225, the theta motor 264 works to adjust the offset angle of the substrate, the substrate returns to the supporting column 225 after the adjustment of the substrate is completed, and the pre-alignment process is completed.

3. The manipulator places the substrate on the supporting column 225, the first sensor 226 transmits a signal for detecting the substrate to the signal processing unit after detecting that the substrate is delayed for 0.1 second, after the signal processing unit receives the signal transmitted by the first sensor 226, the PLC controls the suction cup 209 to suck the substrate, meanwhile, the signal processing unit controls the Z-direction cylinder 265 to work, and the Z-direction cylinder 265 drives the working arm 261, the suction cup 209 and the substrate to move upwards to a preset position and stop moving; then the signal processing unit controls the detector 213 to move horizontally until the edge of the substrate can be detected, and then the signal processing unit controls the theta motor 264 to drive the working arm 261, the sucker 209 and the substrate to rotate for a circle, the theta motor 65 stops working after the substrate rotates for a circle, and the substrate offset measured by the detector 213 transmits the offset signal to the signal processing unit; the signal processing unit receives the signal and controls the suction cup 209 to stop working, controls the first positioning clamping mechanism 231 and the second positioning clamping mechanism 232 to run to a preset position through the electromagnetic valve according to the offset of the substrate and then stop moving, controls the second auxiliary clamping mechanism 242 to approach the substrate through the electromagnetic valve, when the force applied to the second auxiliary clamping block 244 on the fourth air cylinder 282 exceeds a certain set value, the limit sensor in the second auxiliary clamping block 244 works, the limit sensor transmits a signal to the signal processing unit, the signal processing unit receives the signal transmitted by the limit sensor and controls the second auxiliary clamping mechanism 242 to stop moving through the electromagnetic valve, at the moment, the signal processing unit controls the suction cup 209 to suck the substrate, then the signal processing unit controls the Z-direction air cylinder 265 to drive the working arm 261 and the suction cup 209 and the substrate to reset, so that the substrate is placed on the supporting column 225, at this point, the pre-alignment process is complete.

4. The manipulator places the substrate on the supporting column 225, the first sensor 226 transmits a signal for detecting the substrate to the signal processing unit after detecting that the substrate is delayed for 0.1 second, after the signal processing unit receives the signal transmitted by the first sensor 226, the signal processing unit controls the suction cup 209 to suck the substrate, meanwhile, the signal processing unit controls the Z-direction cylinder 265 to work, and the Z-direction cylinder 265 drives the working arm 261, the suction cup 209 and the substrate to stop moving when moving upwards to a preset position; then the signal processing unit controls the X-direction motor 262 to work again, the X-direction motor 262 drives the working arm 261, the sucker 209 and the substrate to move horizontally, when the edge of the substrate moves to the sensing range of the detector 213, the detector 213 transmits a signal to the signal processing unit once, the signal processing unit receives the signal transmitted by the detector 213 and controls the X-direction motor 262 to stop working, meanwhile, the signal processing unit controls the theta motor 264 to drive the working arm 261, the sucker 209 and the substrate to rotate for one circle, the theta motor 264 stops working after one circle of rotation, and the substrate offset measured by the detector 213 transmits the offset signal to the signal processing unit; after receiving the signal, the signal processing unit controls the X-direction motor 262, the Y-direction motor 263 and the Z-direction cylinder 265 to drive the working arm 261, the suction cup 209 and the substrate to move on the X, Y, Z axis according to the offset amount of the substrate until the substrate moves to the corrected position, and finally the signal processing unit controls the suction cup 209, the X-direction motor 262, the Y-direction motor 263 and the Z-direction cylinder 265 to stop working, and at this moment, the pre-alignment process is completed.

The signal processing unit controls the robot 300 to transfer the substrate subjected to the pre-alignment onto the stage 160 or the standard wafer stage 170 of the inspection stage 140, and if the substrate is loaded in a standard size, the substrate can be placed on the stage 160 or the standard wafer stage 170, and if the substrate is not in a standard size, the substrate is placed on the stage 160; the signal processing unit controls the air extractor on the detection platform 140 to extract air from the adsorption area matched with the size/shape of the substrate to be detected, the screen substrate to be detected placed on the adsorption area is adsorbed and fixed, after the substrate to be detected is fixed, the signal processing unit controls the driving component of the detection platform 140 to drive the detection platform 140 to move in the X/Y direction, so that the whole substrate is detected by the detection head 130, or the detection head 130 and the detection platform 140 can move simultaneously, the detection platform 140 moves in the X direction, and the detection head moves in the Y direction, and the detection efficiency of the movement is higher, and the movement mode can be selected to be a proper mode according to the size and shape of the substrate; after the inspection is completed, the robot 300 is controlled by the signal processing unit to transfer the inspected substrate from the stage 160 to the substrate cassette 430, thereby completing the inspection of one substrate.

The above embodiments are only for describing the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and various modifications and improvements made by the technical solution of the present invention by those skilled in the art are all within the scope of the present invention as defined by the claims.

Claims

A backlight inspection/measurement stage of a ULED screen substrate inspection/measurement device, characterized by: including upper structure board (161) and lower floor's structure board (162), upper structure board (161) and lower floor's structure board (162) are transparent hard material, upper structure board (161) include at least one adsorption plate (1611), and adsorption plate (1611) divide into at least one adsorption zone (163), and every adsorption zone sets up at least one adsorption hole (164), adsorption hole (164) run through adsorption plate (1611), adsorption hole (164) distribute with predetermined size and interval, lower floor's structure board (162) one side up is opened has a plurality of air grooves (1621) that sink, sink air groove (1621) down with adsorption hole (164) correspond and communicate, lower floor's structure board (162) side sets up aspirating hole (166), aspirating hole (166) with air groove (1621) that sink is linked together.
2. The backlight inspection/measurement stage of a ULED screen substrate inspection/measurement device of claim 1, wherein: and polishing the bottom surface of the sinking air groove (1621).
3. The backlight inspection/measurement stage of a ULED screen substrate inspection/measurement device of claim 1 or 2, wherein: the side surface of the sinking air groove (1621) is a vertical surface, and the bottom surface is a horizontal surface.
4. The backlight inspection/measurement stage of a ULED screen substrate inspection/measurement device of claim 1, wherein: the upper layer structural plate (161) and the lower layer structural plate (162) are bonded by shadowless glue.
5. The backlight inspection/measurement stage of a ULED screen substrate inspection/measurement device of claim 1, wherein: the adsorption plate (1611) is divided into three adsorption zones (163).
6. The backlight inspection/measurement stage of a ULED screen substrate inspection/measurement device of claim 1, wherein: the adsorption holes (164) are distributed in a rectangular array or a circular array.
7. The backlight inspection/measurement stage of a ULED screen substrate inspection/measurement device of claim 1, wherein: the adsorption holes (164) are circular or square.
8. The backlight inspection/measurement stage of a ULED screen substrate inspection/measurement device of claim 1 or 2, wherein: an annular sealing groove (167) is formed in the outer side of the sinking air groove (1621), and a sealing ring is arranged in the annular sealing groove (167).
9. The backlight inspection/measurement stage of a ULED screen substrate inspection/measurement device of claim 1, wherein: lower floor's structural slab (162) facing up side is opened there are two sets of symmetries subside air slot (1621), and each group includes 7 subside air slot (1621), subside air slot (1621) have three kinds of different length, are long subside air slot, well subside air slot and short subside air slot respectively.
10. The backlight inspection/measurement stage of a ULED screen substrate inspection/measurement device of claim 1, wherein: mounting holes (165) are formed in four corners of the lower-layer structural plate (162) respectively, and the mounting holes (165) penetrate through the lower-layer structural plate (162).