CN210623584U - Pipeline instrument valve is used in photoresist production - Google Patents
Pipeline instrument valve is used in photoresist production Download PDFInfo
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- CN210623584U CN210623584U CN201921368594.6U CN201921368594U CN210623584U CN 210623584 U CN210623584 U CN 210623584U CN 201921368594 U CN201921368594 U CN 201921368594U CN 210623584 U CN210623584 U CN 210623584U
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- end cover
- valve
- pipeline
- valve rod
- valve body
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 238000007789 sealing Methods 0.000 claims abstract description 14
- 239000007788 liquid Substances 0.000 claims abstract description 10
- 210000004907 gland Anatomy 0.000 claims description 12
- 238000001802 infusion Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 210000001503 joint Anatomy 0.000 claims description 2
- 238000005728 strengthening Methods 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 abstract description 3
- 238000012856 packing Methods 0.000 abstract description 3
- 230000035939 shock Effects 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 abstract description 2
- 238000011161 development Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
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Abstract
The utility model provides a pipeline instrument valve for photoresist production, including valve body, valve rod, case, upper end cover and lower end cover are fixed mounting respectively at upper and lower both ends of valve body, and upper end cover and lower end cover are installed in the through-hole at upper and lower both ends of valve body relatively and are connected sealedly, and the twist grip drives the rotation of valve rod and through the rotatory lift valve rod of internal thread district to the closure and the opening of control case and disk seat prevent that liquid pressure from strikeing and leading to the not hard up of case and disk seat, and be convenient for adjust the size of flow; the packing box and the sealing box of the upper end cover are sealed in a double-layer manner to prevent liquid leakage, the output pipeline is connected with the throat pipe to enhance the shock resistance, and the inlet pipeline and the output pipeline are connected through flanges to facilitate replacement; the valve body is provided with an upper end cover and a lower end cover which are detachably mounted, so that later cleaning and maintenance are facilitated.
Description
Technical Field
The utility model relates to a photoresist production facility technical field specifically is a pipeline instrument valve is used in photoresist production.
Background
The photoresist is one of the key materials for processing fine patterns in the microelectronic technology, and particularly the development of large-scale and super-large-scale integrated circuits in recent years greatly promotes the research, development and application of the photoresist; the photoresist is also called as photoresist, and is a light-sensitive mixed liquid composed of three main components of resin, brightener and solvent.
In the production process of photoresist, pressure difference exists at two ends when an instrument valve of a pipeline works, looseness is easily generated after long-time work, the problems of inaccurate flow rate regulation, leakage and the like are caused, and regular replacement and maintenance are needed.
SUMMERY OF THE UTILITY MODEL
The utility model provides a technical problem provide a pipeline instrument valve is used in photoresist production to solve the problem that proposes in the above-mentioned background art.
The utility model provides a technical problem adopt following technical scheme to realize: a pipeline instrument valve for photoresist production comprises a valve body, a valve rod, a valve core, an upper end cover and a lower end cover, wherein the upper end cover and the lower end cover are fixedly installed at the upper end and the lower end of the valve body respectively, the upper end cover and the lower end cover are oppositely installed in through holes at the upper end and the lower end of the valve body and are in sealed connection, the valve rod penetrates through the upper end cover and is in threaded connection with the upper end cover, the upper end of the valve rod is fixedly connected with a rotating handle, the valve core is fixedly installed in the valve body, a flow channel for liquid to flow is formed in the valve body, one end of the flow channel is an inlet pipeline, the other end of the flow channel is an outlet pipeline, a valve seat corresponding to the valve core is arranged at a corresponding position between the inlet pipeline; the upper end cover is provided with an internal thread area corresponding to the thread section of the valve rod, and the thread section of the valve rod is in threaded connection in the internal thread area; the outer ends of the inlet pipeline and the outlet pipeline are provided with butted flanges, and the inlet pipeline and the outlet pipeline are butted with the pipeline through the flanges.
Preferably, a throat is fixedly connected to the flange on one side of the output pipeline, and the output pipeline is connected with the infusion pipeline through the throat.
Preferably, the throat is of a corrugated pipe structure, and two sides of the throat are provided with butted flanges.
Preferably, the lower end of the upper end cover is provided with a stuffing box corresponding to the valve rod, and the stuffing box is fixedly arranged in a sealing cavity of the upper end cover and is connected with the valve rod in a sliding and sealing manner.
Preferably, the upper end cover is located the screw area upper end and is equipped with the gland, and cavity seal installation is on the upper end cover in the gland, and screw and upper end cover fixed connection are passed through to the outer end of gland, and the gland corresponds the valve rod and is equipped with sealed letter.
Preferably, the rotating handle is of a disc structure, and the center of the rotating handle is vertically and fixedly connected with the valve rod, so that the valve rod can rotate conveniently.
Preferably, gaskets for strengthening sealing are respectively arranged between the upper end cover and the valve body, between the lower end cover and the valve body, and the gaskets are placed in corresponding ring grooves of the valve body and are extruded and sealed by the upper end cover and the lower end cover.
Compared with the prior art, the beneficial effects of the utility model are that: the rotary handle drives the valve rod to rotate and rotates the lifting valve rod through the internal thread area, so that the valve core and the valve seat are controlled to be closed and opened, the valve core and the valve seat are prevented from loosening due to liquid pressure impact, and the flow is convenient to adjust; the packing box and the sealing box of the upper end cover are sealed in a double-layer manner to prevent liquid leakage, the output pipeline is connected with the throat pipe to enhance the shock resistance, and the inlet pipeline and the output pipeline are connected through flanges to facilitate replacement; the valve body is provided with an upper end cover and a lower end cover which are detachably mounted, so that later cleaning and maintenance are facilitated.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the specific drawings.
As shown in figure 1 of the drawings, in which,
a pipeline instrument valve for photoresist production comprises a valve body 1, a valve rod 2, a valve core 3, an upper end cover 4 and a lower end cover 5, the upper end cover 4 and the lower end cover 5 are respectively and fixedly arranged at the upper end and the lower end of the valve body 1, the upper end cover 4 and the lower end cover 5 are oppositely arranged in the through holes at the upper end and the lower end of the valve body 1 and are hermetically connected, the valve rod 2 penetrates through the upper end cover 4 and is in threaded connection with the upper end cover 4, the upper end of the valve rod 2 is fixedly connected with the rotating handle 6, the valve core 3 is fixedly installed in the valve body 1 of the valve rod 2, a flow channel for liquid to flow is arranged in the valve body 1, one end of the flow channel is an inlet pipeline 7, the other end of the flow channel is an outlet pipeline 8, a valve seat 9 corresponding to the valve core 3 is arranged at a corresponding position between the inlet pipeline 7 and the outlet pipeline 8, the valve core 3 is installed at the upper end of the valve seat 9 and is moved and adjusted to be separated from the valve seat 9 through the; the upper end cover 4 is provided with an internal thread area 10 corresponding to the thread section of the valve rod 2, and the thread section of the valve rod 2 is in threaded connection in the internal thread area 10; the outer ends of the inlet pipeline 7 and the outlet pipeline 8 are provided with butted flanges, and the inlet pipeline 7 and the outlet pipeline 8 are butted with the pipelines through the flanges.
In this embodiment, a throat 11 is fixedly connected to a flange on one side of the output pipeline 8, and the output pipeline 8 is connected to the infusion pipeline through the throat 11.
In this embodiment, the throat 11 is a bellows structure, and two sides of the throat 11 are provided with flanges in butt joint.
In this embodiment, the lower end of the upper end cover 4 is provided with a stuffing box 12 corresponding to the valve rod 2, and the stuffing box 12 is fixedly installed in the sealing cavity of the upper end cover 4 and is connected with the valve rod 2 in a sliding and sealing manner.
In this embodiment, upper end cover 4 is located the threaded area 10 upper end and is equipped with gland 13, and the cavity seal installation is on upper end cover 4 in gland 13, and screw and upper end cover 4 fixed connection are passed through to gland 13's outer end, and gland 13 corresponds valve rod 2 and is equipped with sealing box 14.
In this embodiment, the rotating handle 6 is a disc structure, and the center of the rotating handle 6 is vertically and fixedly connected with the valve rod 2, so that the valve rod 2 can rotate conveniently.
In this embodiment, gaskets 15 for reinforcing sealing are respectively arranged between the upper end cover 4 and the lower end cover 5 and the valve body 1, and the gaskets 15 are placed in corresponding ring grooves of the valve body 1 and are pressed and sealed by the upper end cover 4 and the lower end cover 5.
The utility model discloses a theory of operation does: the rotary handle 6 drives the valve rod 2 to rotate and rotates the lifting valve rod 2 through the internal thread area 10, so that the valve core 3 and the valve seat 9 are controlled to be closed and opened, liquid entering the pipeline 7 enters the output pipeline 8 through a flow port in the center of the valve seat 9, the packing box 12 and the sealing box 14 of the upper end cover 4 are sealed in a double-layer mode to prevent liquid leakage, and the output pipeline 8 is connected with the throat pipe 11 to enhance the shock resistance.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (7)
1. The utility model provides a pipeline instrument valve is used in photoresist production, includes valve body, valve rod, case, upper end cover and lower end cover, its characterized in that: the upper end and the lower end of the valve body are respectively fixedly provided with an upper end cover and a lower end cover, the upper end cover and the lower end cover are oppositely arranged in through holes at the upper end and the lower end of the valve body and are in sealing connection, the valve rod penetrates through the upper end cover and is in threaded connection with the upper end cover, the upper end of the valve rod is fixedly connected with the rotary handle, the valve rod is positioned in the valve body and is fixedly provided with a valve core, a flow channel for liquid to flow is arranged in the valve body, one end of the flow channel is an inlet pipeline, the other end of the flow channel is an outlet pipeline, a valve seat corresponding to the valve core is arranged at a corresponding position between the inlet pipeline and; the upper end cover is provided with an internal thread area corresponding to the thread section of the valve rod, and the thread section of the valve rod is in threaded connection in the internal thread area; the outer ends of the inlet pipeline and the outlet pipeline are provided with butted flanges, and the inlet pipeline and the outlet pipeline are butted with the pipeline through the flanges.
2. The photoresist production is with pipeline instrument valve of claim 1, characterized in that: the flange on one side of the output pipeline is fixedly connected with a throat pipe, and the output pipeline is connected with the infusion pipeline through the throat pipe.
3. The photoresist production is with pipeline instrument valve of claim 2, characterized in that: the throat is of a corrugated pipe structure, and two sides of the throat are provided with flanges in butt joint.
4. The photoresist production is with pipeline instrument valve of claim 1, characterized in that: the lower end of the upper end cover is provided with a stuffing box corresponding to the valve rod, and the stuffing box is fixedly arranged in a sealing cavity of the upper end cover and is connected with the valve rod in a sliding and sealing manner.
5. The photoresist production is with pipeline instrument valve of claim 1, characterized in that: the upper end cover is located the screw area upper end and is equipped with the gland, and cavity seal installation is on the upper end cover in the gland, and screw and upper end cover fixed connection are passed through to the outer end of gland, and the gland corresponds the valve rod and is equipped with sealed letter.
6. The photoresist production is with pipeline instrument valve of claim 1, characterized in that: the rotary handle is of a disc structure, and the center of the rotary handle is vertically and fixedly connected with the valve rod, so that the valve rod can rotate conveniently.
7. The photoresist production is with pipeline instrument valve of claim 1, characterized in that: gaskets for strengthening sealing are respectively arranged between the upper end cover and the valve body, between the lower end cover and the valve body, and the gaskets are placed in the corresponding ring grooves of the valve body and are extruded and sealed by the upper end cover and the lower end cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921368594.6U CN210623584U (en) | 2019-08-22 | 2019-08-22 | Pipeline instrument valve is used in photoresist production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921368594.6U CN210623584U (en) | 2019-08-22 | 2019-08-22 | Pipeline instrument valve is used in photoresist production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210623584U true CN210623584U (en) | 2020-05-26 |
Family
ID=70764951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921368594.6U Active CN210623584U (en) | 2019-08-22 | 2019-08-22 | Pipeline instrument valve is used in photoresist production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210623584U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116085557A (en) * | 2023-04-11 | 2023-05-09 | 山东港源管道物流有限公司 | Pipeline ball valve for crude oil transportation and use method thereof |
-
2019
- 2019-08-22 CN CN201921368594.6U patent/CN210623584U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116085557A (en) * | 2023-04-11 | 2023-05-09 | 山东港源管道物流有限公司 | Pipeline ball valve for crude oil transportation and use method thereof |
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