CN210419589U - Novel acid wastewater recovery equipment for semiconductor factory - Google Patents
Novel acid wastewater recovery equipment for semiconductor factory Download PDFInfo
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- CN210419589U CN210419589U CN201921108056.3U CN201921108056U CN210419589U CN 210419589 U CN210419589 U CN 210419589U CN 201921108056 U CN201921108056 U CN 201921108056U CN 210419589 U CN210419589 U CN 210419589U
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- 239000002351 wastewater Substances 0.000 title claims abstract description 73
- 239000004065 semiconductor Substances 0.000 title claims abstract description 18
- 238000011084 recovery Methods 0.000 title claims abstract description 16
- 239000002253 acid Substances 0.000 title claims abstract description 15
- 238000001556 precipitation Methods 0.000 claims abstract description 40
- 238000005192 partition Methods 0.000 claims abstract description 38
- 238000011282 treatment Methods 0.000 claims abstract description 37
- 238000001125 extrusion Methods 0.000 claims abstract description 19
- 238000011221 initial treatment Methods 0.000 claims abstract description 19
- 230000007246 mechanism Effects 0.000 claims abstract description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 55
- 238000001223 reverse osmosis Methods 0.000 claims description 17
- 238000006115 defluorination reaction Methods 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 10
- 238000003756 stirring Methods 0.000 claims description 10
- 239000003814 drug Substances 0.000 claims description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract description 32
- 230000000694 effects Effects 0.000 abstract description 15
- 238000002156 mixing Methods 0.000 abstract description 9
- 239000000654 additive Substances 0.000 abstract description 6
- 230000000996 additive effect Effects 0.000 abstract description 4
- 238000004065 wastewater treatment Methods 0.000 abstract description 4
- 239000013049 sediment Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 15
- 238000000746 purification Methods 0.000 description 12
- 238000001914 filtration Methods 0.000 description 10
- 239000010865 sewage Substances 0.000 description 8
- 229910019142 PO4 Inorganic materials 0.000 description 7
- 159000000007 calcium salts Chemical class 0.000 description 7
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 7
- 239000010452 phosphate Substances 0.000 description 7
- 238000004062 sedimentation Methods 0.000 description 7
- 238000001471 micro-filtration Methods 0.000 description 6
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 239000003153 chemical reaction reagent Substances 0.000 description 4
- 239000000701 coagulant Substances 0.000 description 4
- 230000001112 coagulating effect Effects 0.000 description 4
- 159000000003 magnesium salts Chemical class 0.000 description 4
- 238000011001 backwashing Methods 0.000 description 3
- 238000009388 chemical precipitation Methods 0.000 description 3
- 150000002505 iron Chemical class 0.000 description 3
- 229960002261 magnesium phosphate Drugs 0.000 description 3
- 230000002441 reversible effect Effects 0.000 description 3
- 230000001954 sterilising effect Effects 0.000 description 3
- 238000004659 sterilization and disinfection Methods 0.000 description 3
- 238000000108 ultra-filtration Methods 0.000 description 3
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 2
- 159000000013 aluminium salts Chemical class 0.000 description 2
- 229910000329 aluminium sulfate Inorganic materials 0.000 description 2
- 229910001628 calcium chloride Inorganic materials 0.000 description 2
- 239000001110 calcium chloride Substances 0.000 description 2
- 230000015271 coagulation Effects 0.000 description 2
- 238000005345 coagulation Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- SNAAJJQQZSMGQD-UHFFFAOYSA-N aluminum magnesium Chemical compound [Mg].[Al] SNAAJJQQZSMGQD-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000013043 chemical agent Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000008394 flocculating agent Substances 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- -1 fluorine ions Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000029219 regulation of pH Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Abstract
The utility model discloses a novel acid wastewater recovery device for semiconductor factories, in particular to the technical field of wastewater treatment, which comprises a base, wherein a fixed rod is fixedly arranged at the top of the base, and a high-efficiency multi-item precipitation mechanism is arranged at the top of the fixed rod; the high-efficiency multi-item precipitation mechanism comprises a precipitation box, wherein a first partition plate is fixedly arranged inside the precipitation box, a second partition plate is arranged at the bottom of the first partition plate, a primary treatment chamber is arranged at the top of the first partition plate, a middle-stage treatment chamber is arranged between the first partition plate and the second partition plate, a tail treatment chamber is arranged at the bottom of the second partition plate, sealed sliding cylinders are arranged inside the first partition plate and the second partition plate, sliding columns are arranged inside the sealed sliding cylinders, and extrusion discs are fixedly arranged on the outer sides of the sliding columns. The utility model discloses a set up high-efficient multinomial sediment mechanism, can effectually deposit the operation to waste water multinomial in proper order, promoted the efficiency of getting rid of hydrofluoric acid, improve the mixing efficiency of additive and waste water, further promote and deposit the effect.
Description
Technical Field
The utility model relates to a waste water treatment technical field, more specifically say, the utility model relates to a novel semiconductor factory uses sour waste water recovery equipment.
Background
The photovoltaic and semiconductor industries are rapidly developed in recent years and are a sunward industry, however, the industry is also a high-energy-consumption, high-pollution and extremely high-water-consumption industry, taking a 100MW polycrystalline silicon production line as an example, the daily water consumption is about 1500 tons, the generated wastewater contains hydrofluoric acid wastewater which accounts for about 70 percent of the total amount of the wastewater, the wastewater containing hydrofluoric acid is generated in an etching process, the PH is about 2 generally, the content of fluorine ions is between 50 and 800ppm generally, and the conductance is between 2000 and 4000 us/cm.
The utility model patent of patent application publication No. CN205556320U discloses a hydrofluoric acid wastewater reuse treatment device for photovoltaic and semiconductor industries, which comprises a hydrofluoric acid wastewater collection tank and a hydrofluoric acid wastewater treatment system, wherein the hydrofluoric acid wastewater collection tank is connected with the incoming hydrofluoric acid wastewater; the hydrofluoric acid wastewater collection tank is sequentially connected with a wastewater pump, a pretreatment water tank and a raw water tank; the water outlet of the raw water tank is divided into two paths: one path of the wastewater passes through a low-pressure pump, a multi-media filter, a security filter and a first-level high-pressure pump in sequence and is connected to a raw water inlet of a first-level reverse osmosis system, the other path of the wastewater passes through a backwashing pump in sequence and is connected to a backwashing inlet of the multi-media filter, and a backwashing outlet of the multi-media filter is connected to a hydrofluoric acid wastewater treatment system; use this utility model not only can be with hydrofluoric acid waste water retrieval and utilization about 60%, the quality of water after handling moreover is superior to the quality of water of running water, can directly recycle in pure water preparation system or direct retrieval and utilization feedwater process water system, makes the waste water of retrieval and utilization recycle in the factory, reduces waste water discharge total amount, using water wisely.
However, in practical use, there still exist many disadvantages, such as that the utility cannot effectively perform multiple precipitation operations on the wastewater simultaneously during use, and the mixing is not uniform when adding corresponding additives, thereby affecting the precipitation effect.
SUMMERY OF THE UTILITY MODEL
In order to overcome the above-mentioned defect of prior art, the embodiment of the utility model provides a novel semiconductor factory is with acid waste water recovery equipment, through setting up high-efficient multinomial precipitation mechanism, can effectually deposit the operation to waste water multinomial in proper order, has promoted the efficiency of getting rid of hydrofluoric acid, improves the mixing efficiency of additive and waste water, further promotes and deposits the effect to solve the problem that proposes in the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a novel acid wastewater recovery device for a semiconductor plant comprises a base, wherein a fixed rod is fixedly arranged at the top of the base, and a high-efficiency multi-item precipitation mechanism is arranged at the top of the fixed rod;
the high-efficiency multi-item precipitation mechanism comprises a precipitation box, wherein a first partition plate is fixedly arranged in the precipitation box, a second partition plate is arranged at the bottom of the first partition plate, a primary treatment chamber is arranged at the top of the first partition plate, a middle-level treatment chamber is arranged between the first partition plate and the second partition plate, a tail treatment chamber is arranged at the bottom of the second partition plate, sealing sliding cylinders are arranged in the first partition plate and the second partition plate respectively, sliding columns are arranged in the sealing sliding cylinders, extrusion discs are fixedly arranged on the outer sides of the sliding columns, water permeable holes are formed in the surfaces of the extrusion discs, bearings are arranged at the bottoms of the extrusion discs, stirring blades are fixedly arranged on the outer sides of the bearings, three reagent tubes are arranged on one side of the precipitation box, a water inlet tube is arranged on the other side of the precipitation box, a first filter is arranged at the bottom of the water inlet tube, a second filter is arranged at the bottom of the, the output ends of the first filter and the second filter are respectively provided with a second connecting pipe, a check valve is arranged inside the second connecting pipe, the top of the sliding column is provided with a hydraulic rod, the top of the hydraulic rod is fixedly provided with a top plate, the bottom of the top plate is fixedly provided with a supporting rod, and an electromagnetic valve is arranged inside the first connecting pipe.
In a preferred embodiment, the bottom of the settling tank is provided with a water outlet pipe, one end of the water outlet pipe is provided with a reverse osmosis water purification machine, and the output end of the reverse osmosis water purification machine is provided with a conveying pipe.
In a preferred embodiment, one end of the conveying pipe is provided with a pH adjusting pool, and the output end of the pH adjusting pool is provided with a defluorination filter.
In a preferred embodiment, the settling tank is fixedly connected with a fixed rod, and the sliding column is slidably connected with the sealing sliding barrel.
In a preferred embodiment, the water permeable holes are funnel-shaped in cross section, and three of the reagent tubes extend through the settling tank and into the primary treatment chamber, the intermediate treatment chamber and the tail treatment chamber respectively.
In a preferred embodiment, two of the first connecting pipes extend through the settling tank and into the interior of the primary treatment chamber and the intermediate treatment chamber, and two of the second connecting pipes extend through the settling tank and into the interior of the intermediate treatment chamber and the rear treatment chamber.
In a preferred embodiment, the sliding column penetrates through the settling tank and extends to the outside, and the hydraulic rod output shaft is fixedly connected with the sliding column.
In a preferred embodiment, the support rod is fixedly connected with the settling tank, and the number of the water permeable holes is set to be a plurality.
The utility model discloses a technological effect and advantage:
1. through setting up the high-efficient multinomial precipitation mechanism, adopt the chemical precipitation method to filter, extrude the inside sewage, sewage and the calcium salt that adds, aluminium salt, magnesium salt and phosphate mix, waste water takes place the extrusion mixing effect when setting up as the hole of permeating water of infundibulate through the shape of cross section during the extrusion, stirring fan blade takes place the reverse effect with waste water in the lift process simultaneously, make stirring fan blade rotate, through carrying the sewage after the precipitation to the middle-level process chamber through the second connecting pipe after first filter through first connecting pipe, adopt the coagulating sedimentation method to carry out the secondary sedimentation to inside secondary waste water, later carry the waste water after the filtration to inside the second filter and carry out the secondary filtration, adopt the chemical coagulating sedimentation method to carry out the subsequent treatment to the waste water of inside, can be effectual to the waste water in proper order multinomial precipitation operation, promoted the efficiency of getting rid of hydrofluoric, the mixing efficiency of the additive and the wastewater is improved, and the precipitation effect is further improved;
2. through setting up the reverse osmosis water purification machine, PH equalizing basin and defluorination filter, waste water carries reverse osmosis water purification machine through the outlet pipe inside to carry out the micro-filtration, adsorb, the ultrafiltration, reverse osmosis, ultraviolet sterilization and super purification handle, later carry the waste water after filtering to the PH equalizing basin inside and carry out the PH debugging, later carry water to the inside final micro-filtration that carries out of defluorination filter, can further take out the hydrofluoric acid in the waste water, promote defluorination efficiency, improve the filter effect, guarantee the recycle of follow-up waste water.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic view of a partial structure of the part a in fig. 1 according to the present invention.
Fig. 3 is a schematic view of a partial structure of the part B in fig. 1 according to the present invention.
Fig. 4 is a schematic structural view of the bearing and the stirring fan blade of the present invention.
Fig. 5 is a perspective view of the extrusion plate of the present invention.
The reference signs are: the device comprises a base 1, a fixing rod 2, a high-efficiency multi-item precipitation mechanism 3, a precipitation tank 4, a first partition plate 5, a second partition plate 6, a primary treatment chamber 7, a middle-stage treatment chamber 8, a tail treatment chamber 9, a sealing sliding barrel 10, a sliding column 11, a squeezing disc 12, a water permeable hole 13, a bearing 14, a stirring fan blade 15, a chemical tube 16, a water inlet tube 17, a first filter 18, a second filter 19, a first connecting tube 20, a second connecting tube 21, a check valve 22, a hydraulic rod 23, a top plate 24, a supporting rod 25, an electromagnetic valve 26, a water outlet tube 27, a reverse osmosis water purifier 28, a delivery tube 29, a PH (potential of Hydrogen) adjusting pool 30 and a defluor.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The novel acid wastewater recovery equipment for the semiconductor factory as shown in the attached figures 1-5 comprises a base 1, wherein a fixed rod 2 is fixedly arranged at the top of the base 1, and a high-efficiency multi-item precipitation mechanism 3 is arranged at the top of the fixed rod 2;
the high-efficiency multi-item precipitation mechanism 3 comprises a precipitation box 4, a first partition plate 5 is fixedly arranged in the precipitation box 4, a second partition plate 6 is arranged at the bottom of the first partition plate 5, a primary treatment chamber 7 is arranged at the top of the first partition plate 5, a middle-stage treatment chamber 8 is arranged between the first partition plate 5 and the second partition plate 6, a tail treatment chamber 9 is arranged at the bottom of the second partition plate 6, sealing sliding cylinders 10 are arranged in the first partition plate 5 and the second partition plate 6, sliding columns 11 are arranged in the sealing sliding cylinders 10, an extrusion disc 12 is fixedly arranged on the outer sides of the sliding columns 11, water permeable holes 13 are formed in the surface of the extrusion disc 12, a bearing 14 is arranged at the bottom of the extrusion disc 12, stirring blades 15 are fixedly arranged on the outer sides of the bearing 14, three reagent pipes 16 are arranged on one side of the precipitation box 4, a water inlet pipe 17 is arranged on the other side of the precipitation box 4, a, a second filter 19 is arranged at the bottom of the first filter 18, first connecting pipes 20 are arranged at the input ends of the first filter 18 and the second filter 19, second connecting pipes 21 are arranged at the output ends of the first filter 18 and the second filter 19, check valves 22 are arranged in the second connecting pipes 21, a hydraulic rod 23 is arranged at the top of the sliding column 11, a top plate 24 is fixedly arranged at the top of the hydraulic rod 23, a supporting rod 25 is fixedly arranged at the bottom of the top plate 24, and an electromagnetic valve 26 is arranged in the first connecting pipe 20;
the settling tank 4 is fixedly connected with the fixed rod 2, and the sliding column 11 is in sliding connection with the sealing sliding barrel 10;
the cross section of the water permeable holes 13 is funnel-shaped, and three reagent pipes 16 penetrate through the settling tank 4 and respectively extend into the primary treatment chamber 7, the intermediate treatment chamber 8 and the tail treatment chamber 9;
two of the first connecting pipes 20 penetrate through the settling tank 4 and extend into the primary treatment chamber 7 and the intermediate treatment chamber 8, and two of the second connecting pipes 21 penetrate through the settling tank 4 and extend into the intermediate treatment chamber 8 and the tail treatment chamber 9;
the sliding column 11 penetrates through the settling tank 4 and extends to the outside, and an output shaft of the hydraulic rod 23 is fixedly connected with the sliding column 11;
the support rod 25 is fixedly connected with the settling tank 4, and the number of the water permeable holes 13 is set to be a plurality.
The implementation mode is specifically as follows: when in use, the waste water is conveyed to the inside of the sedimentation tank 4 through the water inlet pipe 17, the primary treatment chamber 7 is arranged, calcium salt, aluminum salt, magnesium salt, phosphate, calcium chloride and composite iron salt are used as coagulants through the chemical agent pipe 16, macromolecular PAM is used as a flocculant and conveyed to the inside of the primary treatment chamber 7, a chemical precipitation method is adopted for filtering, then the hydraulic rod 23 is opened, the hydraulic rod 23 drives the extrusion disc 12 to move up and down in the primary treatment chamber 7, the internal sewage is extruded, the sewage is mixed with the added calcium salt, aluminum salt, magnesium salt and phosphate, the extrusion mixing effect is generated when the waste water passes through the water permeable hole 13 with the funnel-shaped cross section shape during extrusion, meanwhile, the stirring fan blades 15 generate reverse action with the waste water in the lifting process, the stirring fan blades 15 rotate, then the waste water in the primary treatment chamber 7 generates the precipitation effect, carry middle-level treatment chamber 8 through second connecting pipe 21 behind first filter 18 through first connecting pipe 20 with the sewage after deposiing, later through 16 two kinds of coagulants of molysite and aluminium salt of adding to middle-level treatment chamber 8 inside of medicament pipe, adopt the coagulating sedimentation method to carry out the secondary sedimentation to inside secondary waste water, later carry the waste water after filtering to 19 inside second filters that carry out secondary filtration of second filter, later through 16 to the inside calcium salt and the phosphate of adding of tail treatment chamber 9 of medicament pipe, adopt the chemistry coagulating sedimentation method to carry out subsequent processing to inside waste water, can effectually carry out multinomial precipitation operation in proper order to waste water, the efficiency of getting rid of hydrofluoric acid has been promoted, the mixing efficiency of additive and waste water is improved, further promote the precipitation effect.
The novel acid wastewater recovery equipment for the semiconductor factory as shown in the attached figure 1 further comprises a reverse osmosis water purification machine 28, a PH regulation pool 30 and a defluorination filter 31, wherein the bottom of the settling tank 4 is provided with a water outlet pipe 27, one end of the water outlet pipe 27 is provided with the reverse osmosis water purification machine 28, and the output end of the reverse osmosis water purification machine 28 is provided with a delivery pipe 29;
a PH adjusting tank 30 is arranged at one end of the conveying pipe 29, and a defluorination filter 31 is arranged at the output end of the PH adjusting tank 30.
The implementation mode is specifically as follows: then the waste water after will handling carries reverse osmosis water purification machine 28 through outlet pipe 27 inside to carry out micro-filtration, absorption, ultrafiltration, reverse osmosis, ultraviolet sterilization and super purification and handles, later carries the waste water after filtering to the inside PH debugging that carries out of PH equalizing basin 30, later carries water to the inside final micro-filtration that carries out of defluorination filter 31, can further take out the hydrofluoric acid in the waste water, promotes defluorination efficiency, improves the filter effect, guarantees the recycle of follow-up waste water.
The utility model discloses the theory of operation:
referring to the attached drawings 1-5 of the specification, by arranging the high-efficiency multi-item precipitation mechanism 3, when in use, a waste water conveying pump is conveyed into the precipitation box 4 through a water inlet pipe 17 to be arranged inside a primary treatment chamber 7, calcium salt, aluminum salt, magnesium salt, phosphate, calcium chloride and composite iron salt are used as coagulants through a medicament pipe 16, macromolecular PAM is used as a flocculating agent to be conveyed into the primary treatment chamber 7, a chemical precipitation method is adopted for filtering, then a hydraulic rod 23 is opened, the hydraulic rod 23 drives an extrusion disc 12 to move up and down inside the primary treatment chamber 7 to extrude the sewage inside, the sewage is mixed with the added calcium salt, aluminum salt, magnesium salt and phosphate, when in extrusion, the waste water passes through a water permeable hole 13 with the cross section shape being funnel-shaped, an extrusion mixing effect is generated, and simultaneously, the stirring fan blades 15 have a reverse action with the waste, then the wastewater in the primary treatment chamber 7 is subjected to precipitation effect, then the electromagnetic valve 26 is opened, the precipitated wastewater passes through the first filter 18 through the first connecting pipe 20 and is conveyed to the intermediate treatment chamber 8 through the second connecting pipe 21, then two major coagulants, namely iron salt and aluminum salt, are added into the intermediate treatment chamber 8 through the chemical pipe 16, the secondary wastewater in the intermediate treatment chamber is subjected to secondary precipitation by adopting a coagulation precipitation method, the filtered wastewater is conveyed into the second filter 19 for secondary filtration, then calcium salt and phosphate are added into the tail treatment chamber 9 through the chemical pipe 16, and the subsequent treatment is carried out on the wastewater in the intermediate treatment chamber by adopting a chemical coagulation precipitation method, so that the sequential multiple precipitation operations of the wastewater can be effectively carried out, the removal efficiency is improved, the mixing efficiency of additives and the wastewater is improved, and the precipitation effect is further improved;
referring to the attached drawing 1 of the specification, by arranging the reverse osmosis water purification machine 28, the PH adjusting tank 30 and the defluorination filter 31, the treated wastewater is conveyed to the interior of the reverse osmosis water purification machine 28 for microfiltration, adsorption, ultrafiltration, reverse osmosis, ultraviolet sterilization and ultrapure treatment through the water outlet pipe 27, the filtered wastewater is conveyed to the interior of the PH adjusting tank 30 for PH debugging, and then the water is conveyed to the interior of the defluorination filter 31 for final microfiltration, so that hydrofluoric acid in the wastewater can be further taken out, the defluorination efficiency is improved, the filtration effect is improved, and the recycling of subsequent wastewater is ensured.
The points to be finally explained are: first, in the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounted," "connected," and "connected" should be understood broadly, and may be a mechanical connection or an electrical connection, or a communication between two elements, and may be a direct connection, and "upper," "lower," "left," and "right" are only used to indicate a relative positional relationship, and when the absolute position of the object to be described is changed, the relative positional relationship may be changed;
secondly, the method comprises the following steps: in the drawings of the disclosed embodiments of the present invention, only the structures related to the disclosed embodiments are referred to, and other structures can refer to the common design, and under the condition of no conflict, the same embodiment and different embodiments of the present invention can be combined with each other;
and finally: the above description is only for the preferred embodiment of the present invention and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. The utility model provides a novel semiconductor factory is with acid waste water recovery equipment, includes base (1), its characterized in that: a fixed rod (2) is fixedly arranged at the top of the base (1), and a high-efficiency multi-item precipitation mechanism (3) is arranged at the top of the fixed rod (2);
the high-efficiency multi-item precipitation mechanism (3) comprises a precipitation box (4), a first partition plate (5) is fixedly arranged inside the precipitation box (4), a second partition plate (6) is arranged at the bottom of the first partition plate (5), a primary treatment chamber (7) is arranged at the top of the first partition plate (5), a middle-stage treatment chamber (8) is arranged between the first partition plate (5) and the second partition plate (6), a tail treatment chamber (9) is arranged at the bottom of the second partition plate (6), sealing sliding cylinders (10) are arranged inside the first partition plate (5) and the second partition plate (6), sliding columns (11) are arranged inside the sealing sliding cylinders (10), an extrusion disc (12) is fixedly arranged on the outer side of each sliding column (11), water permeable holes (13) are formed in the surface of the extrusion disc (12), a bearing (14) is arranged at the bottom of the extrusion disc (12), and stirring fan blades (15) are fixedly arranged on the outer side of the bearing (14), settling tank (4) one side is equipped with three medicament pipe (16), settling tank (4) opposite side is equipped with inlet tube (17), inlet tube (17) bottom is equipped with first filter (18), first filter (18) bottom is equipped with second filter (19), first filter (18) and second filter (19) input all are equipped with first connecting pipe (20), first filter (18) and second filter (19) output all are equipped with second connecting pipe (21), second connecting pipe (21) inside is equipped with check valve (22), traveller (11) top is equipped with hydraulic stem (23), fixed roof (24) that are equipped with in hydraulic stem (23) top, fixed bracing piece (25) that are equipped with in roof (24) bottom, first connecting pipe (20) inside is equipped with solenoid valve (26).
2. The novel acid wastewater recovery equipment for semiconductor factories according to claim 1, characterized in that: the bottom of the settling tank (4) is provided with a water outlet pipe (27), one end of the water outlet pipe (27) is provided with a reverse osmosis water purifier (28), and the output end of the reverse osmosis water purifier (28) is provided with a conveying pipe (29).
3. The novel acid wastewater recovery equipment for semiconductor factories according to claim 2, characterized in that: a PH adjusting tank (30) is arranged at one end of the conveying pipe (29), and a defluorination filter (31) is arranged at the output end of the PH adjusting tank (30).
4. The novel acid wastewater recovery equipment for semiconductor factories according to claim 1, characterized in that: the settling tank (4) is fixedly connected with the fixing rod (2), and the sliding column (11) is slidably connected with the sealing sliding barrel (10).
5. The novel acid wastewater recovery equipment for semiconductor factories according to claim 1, characterized in that: the shape of the cross section of the water permeable hole (13) is set to be funnel-shaped, three, and the medicament tube (16) penetrates through the settling tank (4) and respectively extends to the interior of the primary treatment chamber (7), the intermediate treatment chamber (8) and the tail treatment chamber (9).
6. The novel acid wastewater recovery equipment for semiconductor factories according to claim 1, characterized in that: the two first connecting pipes (20) penetrate through the settling tank (4) and extend to the interior of the primary treatment chamber (7) and the middle-stage treatment chamber (8), and the two second connecting pipes (21) penetrate through the settling tank (4) and extend to the interior of the middle-stage treatment chamber (8) and the tail treatment chamber (9).
7. The novel acid wastewater recovery equipment for semiconductor factories according to claim 1, characterized in that: the sliding column (11) penetrates through the settling tank (4) and extends to the outside, and an output shaft of the hydraulic rod (23) is fixedly connected with the sliding column (11).
8. The novel acid wastewater recovery equipment for semiconductor factories according to claim 1, characterized in that: bracing piece (25) and setting up to a plurality ofly with setting up in case (4) fixed connection, hole (13) of permeating water quantity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921108056.3U CN210419589U (en) | 2019-07-16 | 2019-07-16 | Novel acid wastewater recovery equipment for semiconductor factory |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921108056.3U CN210419589U (en) | 2019-07-16 | 2019-07-16 | Novel acid wastewater recovery equipment for semiconductor factory |
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| Publication Number | Publication Date |
|---|---|
| CN210419589U true CN210419589U (en) | 2020-04-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921108056.3U Active CN210419589U (en) | 2019-07-16 | 2019-07-16 | Novel acid wastewater recovery equipment for semiconductor factory |
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| Country | Link |
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| CN (1) | CN210419589U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114477515A (en) * | 2021-12-16 | 2022-05-13 | 徐州沐和水处理设备有限公司 | Energy-concerving and environment-protective type waste water defluorination equipment |
-
2019
- 2019-07-16 CN CN201921108056.3U patent/CN210419589U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114477515A (en) * | 2021-12-16 | 2022-05-13 | 徐州沐和水处理设备有限公司 | Energy-concerving and environment-protective type waste water defluorination equipment |
| CN114477515B (en) * | 2021-12-16 | 2022-12-16 | 徐州沐和水处理设备有限公司 | Energy-concerving and environment-protective type waste water defluorination equipment |
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