CN210319079U - Damping base for semiconductor and photoelectron dust-free chamber - Google Patents

Damping base for semiconductor and photoelectron dust-free chamber Download PDF

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Publication number
CN210319079U
CN210319079U CN201921315776.7U CN201921315776U CN210319079U CN 210319079 U CN210319079 U CN 210319079U CN 201921315776 U CN201921315776 U CN 201921315776U CN 210319079 U CN210319079 U CN 210319079U
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China
Prior art keywords
damping
floor
semiconductor
damping device
support column
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Active
Application number
CN201921315776.7U
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Chinese (zh)
Inventor
商富祥
商富彬
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Jiangsu Ruixin Integrated Circuit Equipment Co Ltd
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Jiangsu Ruixin Integrated Circuit Equipment Co Ltd
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Priority to CN201921315776.7U priority Critical patent/CN210319079U/en
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Abstract

The utility model discloses a damping base for semiconductor and photoelectron dust-free chamber, which comprises a floor supporting foot seat and a damping device fixedly arranged above the floor supporting foot seat, wherein a supporting column is arranged above the damping device, a mounting platform is fixedly welded above the supporting column, a mortise is arranged at the upper end of the supporting column, a cross beam is arranged in the mortise, and a weighting plate is fixedly arranged above the floor supporting foot seat; set up through the bottom at vibration damping mount and aggravate the board and reduce vibration damping mount's focus height, and set up the crossbeam between the support column, improve vibration damping device's stability jointly, thereby improve vibration damping device's shock-absorbing strength, bottom installation rubber block through supporting the foot rest at the floor, can be further carry out further shock attenuation to the surplus vibrations after the damping spring shock attenuation, and this rubber block can also play protection floor support foot rest and ground contact segment well, make its contact segment can not cause the loss and produce the dust to ground because of the friction that vibrations produced.

Description

Damping base for semiconductor and photoelectron dust-free chamber
Technical Field
The utility model relates to a damping device correlation technique field specifically is a damping base that is used for semiconductor and optoelectronic dust free chamber.
Background
The damping base is most commonly in a mixed form of a steel structure and reinforced concrete, the damping base is formed by welding channel steel all around, and reinforced concrete is arranged in the middle. However, since the common shock absorption base cannot eliminate the shock in a hundred percent, the place where the shock absorption device is in contact with the ground is often abraded to a certain extent due to the shock, so that a little dust is generated, but the dust has a great influence on some clean rooms with higher requirements; to this end, the present invention provides a damping base for semiconductor and optoelectronic clean rooms to solve the above problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a shock attenuation base for semiconductor and photoelectron dust free chamber to solve the problem that provides among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a vibration damping mount for semiconductor and photoelectron dust free chamber, includes floor support foot stool and the damping device of fixed mounting in floor support foot stool top, the support column is installed to damping device's top, the support column is a cylinder structure, and its top fixed welding has a mounting platform, mounting platform is a disc structure, the mortise hole has been seted up to the upper end of support column, fixed mounting has the crossbeam in the mortise hole, the crossbeam is the stock that the cross-section is the rectangle, the top fixed mounting of floor support foot stool has the weight plate.
Preferably, the bottom of the floor supporting foot seat is fixedly provided with a rubber block, and the rubber block is of a cylindrical block structure.
Preferably, the weighting plate is a cuboid plate, circular notches are formed in four corners of the weighting plate, the notches are embedded with the damping devices, and the weighting plate is made of cast steel.
Preferably, damping device includes shell and damping spring, the shell is a pipe structure, and it is circular shape cavity structures to be provided with the cross-section in the middle of it, be provided with damping spring in the cavity of shell, damping spring's lower extreme fixed connection is at floor support foot rest upper surface, and its upper end fixed connection is at the lower surface of support column, and the one-third of support column total length sets up among the cavity of shell.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the bottom end of the damping base is provided with the weighting plate to reduce the height of the gravity center of the damping base, and the cross beams are arranged among the support columns to improve the stability of the damping device together, so that the damping strength of the damping device is improved;
2. through the bottom installation block rubber at floor support foot stool, can be further carry out further shock attenuation to the surplus vibrations after the damping spring shock attenuation, this block rubber can also play protection floor support foot stool and ground contact part well moreover for its contact part can not lead to the fact the loss and produce the dust to ground because the friction that vibrations produced, thereby has avoided vibrations to lead to the fact the influence to the environment between dustless.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view of the structure at A in FIG. 1;
fig. 3 is a schematic structural view of the middle damping device of the present invention.
In the figure: floor support foot seat 1, damping device 2, shell 21, damping spring 22, support column 3, mortise 31, mounting platform 4, aggravate board 5, crossbeam 6, block rubber 7.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a vibration damping mount for semiconductor and optoelectronic dust free chamber, including floor support foot stool 1 and the damping device 2 of fixed mounting in floor support foot stool 1 top, support column 3 is installed to damping device 2's top, support column 3 is a cylinder structure, its top fixed welding has mounting platform 4, mounting platform 4 is a disc structure, mortise 31 has been seted up to support column 3's upper end, fixed mounting has crossbeam 6 in the mortise 31, crossbeam 6 is the stock that the cross-section is the rectangle, floor support foot stool 1's top fixed mounting has with heavy plate 5, through set up crossbeam 6 between support column 3, can improve vibration damping mount stability at the during operation greatly.
Furthermore, the rubber block 7 is fixedly installed at the bottom of the floor supporting foot seat 1, the rubber block 7 is of a cylindrical block structure, and the rubber block 7 is arranged on the lower surface of the floor supporting foot seat 1, so that abrasion between the shock absorption base and the ground due to vibration friction caused by the fact that the shock absorption base cannot absorb shock in hundreds of percent between the shock absorption base and a ground contact point can be effectively reduced, the influence of dust generated by the abrasion on a dust-free room is avoided, and the quality of products in the dust-free room is improved;
furthermore, the weighting plate 5 is a cuboid plate, circular notches are formed in four corners of the weighting plate, the notches are embedded with the damping device 2, the weighting plate is made of cast steel, the gravity center position of the damping base can be lowered by arranging the weighting plate 5, and the stability of the damping base during working can be further improved due to the lowering of the gravity center position;
further, the damping device 2 comprises a shell 21 and a damping spring 22, the shell 21 is a circular tube structure, a cavity structure with a circular section is arranged in the middle of the shell 21, the damping spring 22 is arranged in the cavity of the shell 21, the lower end of the damping spring is fixedly connected to the upper surface of the floor supporting foot seat 1, the upper end of the damping spring is fixedly connected to the lower surface of the supporting column 3, one third of the total length of the supporting column 3 is arranged in the cavity of the shell 21, and one third of the total length of the supporting column 3 is arranged in the cavity structure of the shell 21, so that the damping device can be prevented from sliding out of the cavity of the shell 21 due to the vibration of the supporting column 3;
the working principle is as follows: during the in-service use, place shock mount in the workshop, then get the top with production facility fixed mounting at mounting platform 4, when the production facility of top starts, when producing vibrations, support column 3 can be because the vibrations of top production facility produce vibrations, but damping spring 22 is installed to the below of support column 3, so the produced vibrations of top production facility can be eliminated owing to damping spring 22's effect, even damping spring does not thoroughly give the elimination with the vibrations that the production facility produced, rubber block 7 of floor support foot stool 1 below also can not eliminate thorough surplus vibrations to damping spring 22 and carry out further vibrations elimination, can basically eliminate the produced vibrations of top production facility through damping spring 22 and the combined action of rubber block 7, thereby reach absorbing purpose.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (4)

1. The utility model provides a vibration damper for semiconductor and optoelectronic dust free chamber, includes floor supporting foot seat (1) and fixed mounting damping device (2) in floor supporting foot seat (1) top which characterized in that: support column (3) are installed to the top of damping device (2), support column (3) are a cylinder structure, and its top fixed welding has mounting platform (4), mounting platform (4) are disc structure, mortise (31) have been seted up to the upper end of support column (3), fixed mounting has crossbeam (6) in mortise (31), crossbeam (6) are the stock that the cross-section is the rectangle, the top fixed mounting of floor support foot stool (1) has weighting plate (5).
2. The vibration-damping base for semiconductor and optoelectronic clean rooms according to claim 1, characterized in that: the floor support foot stool is characterized in that a rubber block (7) is fixedly mounted at the bottom of the floor support foot stool (1), and the rubber block (7) is of a cylindrical block structure.
3. The vibration-damping base for semiconductor and optoelectronic clean rooms according to claim 1, characterized in that: the weighting plate (5) is a cuboid plate, circular notches are formed in four corners of the weighting plate, the notches are embedded with the damping devices (2), and the weighting plate is made of cast steel.
4. A vibration-damping mount for semiconductor and optoelectronic clean rooms as defined in claim 3 wherein: damping device (2) include shell (21) and damping spring (22), shell (21) are a pipe structure, and it is circular shape cavity structures to be provided with the cross-section in the middle of it, be provided with damping spring (22) in the cavity of shell (21), damping spring's lower extreme fixed connection is at floor support foot stool (1) upper surface, and its upper end fixed connection is at the lower surface of support column (3), and the third of support column (3) overall length sets up among the cavity of shell (21).
CN201921315776.7U 2019-08-14 2019-08-14 Damping base for semiconductor and photoelectron dust-free chamber Active CN210319079U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921315776.7U CN210319079U (en) 2019-08-14 2019-08-14 Damping base for semiconductor and photoelectron dust-free chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921315776.7U CN210319079U (en) 2019-08-14 2019-08-14 Damping base for semiconductor and photoelectron dust-free chamber

Publications (1)

Publication Number Publication Date
CN210319079U true CN210319079U (en) 2020-04-14

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921315776.7U Active CN210319079U (en) 2019-08-14 2019-08-14 Damping base for semiconductor and photoelectron dust-free chamber

Country Status (1)

Country Link
CN (1) CN210319079U (en)

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