CN210261966U - Two-stage sealing device of magnetron sputtering cylindrical target - Google Patents
Two-stage sealing device of magnetron sputtering cylindrical target Download PDFInfo
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- CN210261966U CN210261966U CN201920911660.3U CN201920911660U CN210261966U CN 210261966 U CN210261966 U CN 210261966U CN 201920911660 U CN201920911660 U CN 201920911660U CN 210261966 U CN210261966 U CN 210261966U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a two-stage sealing device of magnetron sputtering cylinder target, include: a hollow cylindrical target material; the sealing end is used for packaging the end part of the target, one side of the sealing end is provided with a blind plug, and the other side of the sealing end is provided with a connecting column which can extend into the target; the buckle assembly is used for connecting the target material and the sealing end head into a whole; the connecting column is provided with a first sinking groove and a second sinking groove which are of annular structures at one side edge matched with the target material and one side edge close to the blind plug respectively; and the first sinking groove and the second sinking groove are respectively provided with a first sealing mechanism and a second sealing mechanism for realizing two-stage sealing. The utility model provides a two-stage sealing device of magnetron sputtering cylinder target adopts the design of double containment mechanism on sealed end, reinforcing sealing performance, and it is bad to reduce the product that the target caused because of leaking.
Description
Technical Field
The utility model relates to a device that uses under solar cell membrane production condition. More specifically, the utility model relates to a two-stage sealing device of magnetron sputtering cylinder target under the condition of magnetron sputtering production solar cell membrane.
Background
In the production process of the solar battery roll, a magnetron sputtering device is generally required to perform a film coating operation on the solar battery roll so as to enable the solar battery roll to have a predetermined functionality, in the sputtering process of the cylindrical rotating target material, ions continuously bombard the surface of the target material to escape target atoms and deposit the ions on the substrate, in the process, the temperature of the target material is continuously increased, if the temperature exceeds the bearing range of the target material, the target material can be cracked and damaged, therefore, the interior of the cylindrical target needs to be cooled by the cooling water in the process cooling water system PCW in the sputtering process, the cylindrical target material is usually sealed by a single O-ring, the sealing is carried out by a conical extrusion and tight fitting mode, and the phenomenon of untight sealing and water leakage often occurs in the using process of single sealing, so that the deposition of a sputtering film layer is directly influenced, and the product is poor.
SUMMERY OF THE UTILITY MODEL
An object of the present invention is to solve at least the above problems and/or disadvantages and to provide at least the advantages which will be described later.
The utility model also aims at providing a two-stage sealing device of magnetron sputtering cylinder target, through the design of dual sealing mechanism on the rotatory target of cylinder, design first sealing mechanism on the circular post of end of seal head is on the surface promptly, carry out first sealing with closely attached target inner wall behind end portion embedding target, again in the circular post of end and another second sealing mechanism of closing cap cross section design, seal through the mode of the inseparable laminating of extrusion with the target end, thereby fixed target and seal head by the buckle subassembly again has realized the dual seal effect, the risk that the target leaked has been reduced.
To achieve these objects and other advantages in accordance with the purpose of the invention, there is provided a two-stage sealing device for a magnetron sputtering cylindrical target, including:
a hollow cylindrical target material;
the sealing end is used for packaging the end part of the target, one side of the sealing end is provided with a blind plug, and the other side of the sealing end is provided with a connecting column which can extend into the target;
the buckle assembly is used for connecting the target material and the sealing end head into a whole;
the connecting column is provided with a first sinking groove and a second sinking groove which are of annular structures at one side edge matched with the target material and one side edge close to the blind plug respectively;
and the first sinking groove and the second sinking groove are respectively provided with a first sealing mechanism and a second sealing mechanism for realizing two-stage sealing.
Preferably, the outer side walls of the two side end parts of the target material are respectively provided with a third sinking groove with an annular structure;
a first conical transition surface is arranged on one side of the connecting column facing the blind plug;
the snap assembly is configured to include:
the inner diameter of one end, matched with the target material, of each buckle is smaller than that of the other end of each buckle;
the inner side wall of one end, matched with the target material, of each buckle is provided with a convex edge matched with the third sinking groove, and the inner side wall of one end, matched with the connecting column, of each buckle is provided with a second conical transition surface which is inwards contracted and matched with the first conical transition surface;
the end part of each buckle is provided with a matched screw hole to realize the closed connection of the buckles through bolts.
Preferably, the connecting column is provided with an annular boss which limits the target mounting position at the position matched with the second conical transition surface.
Preferably, a step-shaped limiting portion for limiting the mounting positions of the target and the sealing end is arranged between the convex rib and the second conical transition surface.
Preferably, the first sealing mechanism and the second sealing mechanism are respectively configured as rubber or silicone sealing rings in annular structures.
Preferably, the outer diameter of the first sealing mechanism is configured to be 0.1-0.2 mm larger than the inner diameter of the target;
the outer diameter of the second sealing mechanism is configured to be 0.5-0.6 mm larger than the inner diameter of the target.
Preferably, the sealing tip and the snap assembly are configured to be made of 304 stainless steel.
Preferably, the step-shaped limiting part is provided with a hollow silica gel fixing layer matched with the step-shaped limiting part;
wherein the compressed thickness of the silica gel fixing layer is set to 0.05-0.15 mm.
Preferably, a fourth sinking groove and a fifth sinking groove which are matched with the first sealing mechanism and the second sealing mechanism are arranged on the inner side wall of the target material;
the groove depth of the fourth sinking handle groove and the fifth sinking groove is 1/3 of the first sinking groove and the second sinking groove.
The utility model discloses at least, include following beneficial effect: one of the two-way fastener comprises a sealing end and a fastener component in the shape of a double crescent. The O-ring is designed at the sealing end on the surface of the circular end column, the O-ring is tightly attached to the inner wall of the target material after being embedded into the target material to perform first sealing, the O-ring is designed at the intersection of the circular end column and the conical sealing cover to be tightly attached to the target material end through conical extrusion to perform sealing, and the target material and the sealing end are fixed through the double crescent buckles, so that the double sealing effect is realized, the sealing performance is enhanced, the quality influence on a product caused by the abnormal water leakage of PCW cooling water in the target material in the production process is prevented, and the product defect caused by the water leakage of the target material is reduced.
And secondly, the utility model discloses a cooperation of buckle subassembly and sealed end, target adopts spacing and the design of morse's tapering of recess, connects more firmly, and the leakproofness is better, and overall structure is simple, the implementation of being convenient for.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
Fig. 1 is an exploded schematic view of a two-stage sealing device of a magnetron sputtering cylindrical target according to an embodiment of the present invention;
fig. 2 is a schematic view of a material explosion structure of the sealing plug and the buckle assembly according to an embodiment of the present invention;
fig. 3 is a schematic cross-sectional view of a two-stage sealing device according to an embodiment of the present invention;
fig. 4 is a schematic view of a connection structure of a two-stage sealing device according to an embodiment of the present invention;
FIG. 5 is a schematic view of a buckle of the buckle assembly according to another embodiment of the present invention;
fig. 6 is a schematic structural view of another buckle in the buckle assembly according to another embodiment of the present invention.
Detailed Description
The present invention is further described in detail below with reference to the drawings so that those skilled in the art can implement the invention with reference to the description.
It will be understood that terms such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
Fig. 1-2 show a two-stage sealing device implementation form of a magnetron sputtering cylindrical target according to the present invention, which includes:
a hollow cylindrical target 1 used as a base material for coating to produce an under film raw material during a sputtering operation;
the sealing end 2 is used for packaging the end part of the target, one side of the sealing end is provided with a blind plug 3, the other side of the sealing end is provided with a connecting column 4 which can extend into the target, the blind plugs are respectively arranged at two ends of the end with a cylindrical structure so as to seal cooling water in the target, and meanwhile, the connection between the sealing end and the target is realized through the cylindrical connecting column which is matched with the inner side wall of the target;
the clamping component 5 is used for connecting the target material and the sealing end into a whole and further connecting the target material by the sealing end in a clamping manner so as to ensure the stability of combination of the target material and the sealing end in work;
the connecting column is provided with a first sinking groove 6 and a second sinking groove 7 which are of annular structures at one side edge matched with the target material and one side edge close to the blind plug respectively, and the positions of the first sealing mechanism and the second sealing mechanism are limited by arranging the sinking grooves at different positions on the connecting column, so that the stability of the connecting column in the installation process is further ensured, and the connecting column is not deviated;
the first sunken groove and the second sunken groove are respectively provided with a first sealing mechanism 8 and a second sealing mechanism 9 for realizing two-stage sealing, and the double sealing mechanisms are arranged at the joint of the connecting column and the target material to realize two-stage sealing, so that the sealing performance is enhanced, and the defective products of the target material caused by water leakage are reduced.
As shown in fig. 1-6, in another example, the outer side walls of the two side end portions of the target are respectively provided with a third sinking groove 10 of an annular structure, which is used for enabling the surface of the target to have a limit position matched with the fastening component through the setting of the third sinking groove, thereby ensuring the stability when the two are combined;
a first conical transition surface 11 is arranged on one side of the connecting column facing the blind plug and is used for forming a conical sealing cover surface of the sealing end head on the connecting column;
the snap assembly is configured to include:
the two buckles 12 which are mutually matched and are in a semicircular structure can be regarded as crescent buckles, the inner diameter of one end, matched with the target, of each buckle is smaller than that of the other end of each buckle, the buckles are respectively matched with the outer structures of the connecting column and the sealing end, and meanwhile, through arrangement of different diameters, a height difference can be formed in the buckles, so that mutual interference can be realized in the limiting process, and the combination stability of the buckles can be guaranteed;
the inner side wall of one end, matched with the target, of each buckle is provided with a convex edge 13 matched with a third sunken groove, the inner side wall of one end, matched with the connecting column, of each buckle is provided with a second conical transition surface 14 which is inwards contracted and matched with the first conical transition surface and is used for forming a conical block matched with the conical sealing cover, the buckle assembly is connected by clamping the convex edges into the third sunken groove to realize the positioning connection of the buckle and the surface of the target, the connection part of the buckle and the sealing end, the first conical transition surface and the second conical transition surface matched with each other are designed by adopting Morse conicity, and the conical sealing cover surface of the sealing end is wrapped by the conical block formed on the double crescent buckle to form seamless connection;
the end of each fastener is provided with a matched screw hole 15 to realize fastener closed connection through a bolt (not shown), and the double-crescent fasteners are fixed through 4 matched threaded through holes and matched bolts to complete connection and fastening of the sealing device and the target.
As shown in fig. 2, in another example, an annular boss 16 for limiting the target mounting position is arranged at a position of the connecting column, which is matched with the second conical transition surface, and the mounting position of the target can be limited by the design of the boss, and meanwhile, a conical block formed by the second conical transition surface on the sealing end is expanded, so that the interference and stability of the fastening component in the connecting and fixing process are ensured.
In another example, as shown in fig. 4, a step-shaped defining portion 17 is disposed between the protruding rib and the second tapered transition surface, and defines the mounting positions of the target and the sealing tip, and the positions of the target and the sealing tip are respectively defined differently by a step-shaped structural design, so as to ensure the connection stability.
In another example, the first sealing mechanism and the second sealing mechanism are respectively configured as rubber or silicone sealing rings with annular structures, and the materials of the sealing rings are limited so that the sealing rings have higher elasticity, so that the assembly process is easier and the combination tightness is better.
In another example, the outer diameter of the first sealing mechanism is configured to be 0.1-0.2 mm larger than the inner diameter of the target, and after the connecting column is embedded into the target, the first O-ring is in close contact with the inner wall of the target to form a first seal;
the outer diameter of the second sealing mechanism is configured to be 0.5-0.6 mm larger than the inner diameter of the target, after the connecting column is embedded into the target, part of the second sealing mechanism is embedded into the inner wall of the target through the O-ring of the second O-ring, and part of the second sealing mechanism is tightly attached to the end face of the target and extruded to form a second seal.
In another example, the sealing end head and the buckle assembly are configured to be made of 304 stainless steel, and besides the O-ring material is rubber, the sealing end head and the buckle assembly are configured to be made of 304 stainless steel, so that corrosion of cooling water to the device in the long-term use process is prevented, and the service life and the working stability of the device are further ensured.
In another example, the step-shaped limiting part is provided with a hollow silica gel fixing layer (not shown) matched with the step-shaped limiting part, and the hollow silica gel fixing layer is used for increasing the friction coefficient between the components, ensuring the stability of combination of the components and preventing the components from being damaged by hard contact in the process of inserting and connecting the components;
the compressed thickness of the silica gel fixing layer is configured to be 0.05-0.15mm, and the silica gel fixing layer is designed through a hollow structure and combined with the limitation of the thickness of the silica gel fixing layer, so that a certain stretching allowance is ensured in the inserting and connecting process, the connection operation is facilitated, and meanwhile, the combined position is not affected.
In another example, a fourth sinking groove (not shown) matched with the first sealing mechanism and the second sealing mechanism is arranged on the inner side wall of the target, and a fifth sinking groove (not shown) is arranged on the inner side wall of the target to limit the position of the target, so that the position of the sealing mechanism is prevented from being deviated due to a small gap at a joint in the installation process, and the sealing effect of the sealing mechanism is further influenced;
the groove depths of the fourth sinking handle groove and the fifth sinking groove are 1/3 of the first sinking groove and the second sinking groove, and the groove depths of the fourth sinking handle groove and the fifth sinking groove are limited while the limiting grooves are provided so as to ensure the sealing effect of the fourth sinking handle groove and the fifth sinking groove on the inner side wall of the connecting column and the target material.
The above embodiments are merely illustrative of a preferred embodiment, but not limiting. When the utility model is implemented, the proper replacement and/or modification can be carried out according to the requirements of users.
The invention will be further illustrated with reference to the schematic drawings of fig. 1 to 6:
a magnetron sputtering cylindrical rotating target double O-ring sealing device comprises a sealing end 2, a crescent fastener 5 and a target material 1, wherein the clamping groove is limited.
The sealing end head comprises a conical sealing cover, the left end of the sealing cover is a blind plug 3, the right end of the sealing cover is a positioning circular column 4 embedded into the target, a groove (a first sinking groove) 6 is designed on the surface of the circular column and is embedded with O-ring, the outer diameter of the O-ring is 0.1-0.2 mm larger than the inner diameter of the target, after the sealing device is embedded into the target, the O-ring is tightly contacted with the inner wall of the target to form a first seal, a groove (a first sinking groove) 7 is designed at the intersection of the circular column and the sealing cover and is embedded with the O-ring, the outer diameter of the O-ring is 0.5mm larger than the inner diameter of the target, after the sealing device is embedded into the target, the O-ring is partially embedded into the inner wall of the target, and. Except that the O-ring material is rubber, the material of the sealing end head is 304 stainless steel, so that the cooling water corrosion is prevented. The double crescent buckles are connected with the sealing end, the Morse taper design is adopted, and the conical sealing cover of the sealing end is wrapped by the double crescent buckle taper blocks to form seamless connection. The double-crescent fastener is connected with the end of the target material and is embedded into the third groove 10 of the end of the target material by an annular column for positioning connection. The double-crescent fastener is designed through 4 threaded through holes 15, and bolts are additionally arranged to fix the double-crescent fastener to complete connection and fastening of the sealing device and the target material. The material of the crescent fastener is 304 stainless steel.
The invention designs an annular groove on the surface of an end circular column of an original sealing device, and is additionally provided with an O-ring, the O-ring is tightly attached to the inner wall of a target after being embedded into the target along with the circular column to form a first seal, and then the O-ring is matched with the O-ring at the crossed groove of the original end circular column and a sealing cover to carry out conical extrusion pressing and tight adhesion to form double O-ring seals.
The sealing end and the target are fixedly connected through a crescent-shaped buckle matched screw fastening design, the buckle is limited by a groove at the target end, a Morse taper sealing cover is designed at the sealing end for connection, the buckle connection mode is stable and reliable, and good sealing performance can be effectively guaranteed.
The number of apparatuses and the scale of the process described here are intended to simplify the description of the present invention. Applications, modifications and variations of the two-stage sealing arrangement of the magnetron sputtering cylindrical target of the present invention will be apparent to those skilled in the art.
While embodiments of the invention have been disclosed above, it is not intended to be limited to the applications listed in the specification and the examples. It can be applicable to various and be fit for the utility model discloses a field completely. Additional modifications will readily occur to those skilled in the art. The invention is therefore not to be limited to the specific details and illustrations shown and described herein, without departing from the general concept defined by the claims and their equivalents.
Claims (9)
1. A two-stage sealing device of a magnetron sputtering cylindrical target is characterized by comprising:
a hollow cylindrical target material;
the sealing end is used for packaging the end part of the target, one side of the sealing end is provided with a blind plug, and the other side of the sealing end is provided with a connecting column which can extend into the target;
the buckle assembly is used for connecting the target material and the sealing end head into a whole;
the connecting column is provided with a first sinking groove and a second sinking groove which are of annular structures at one side edge matched with the target material and one side edge close to the blind plug respectively;
and the first sinking groove and the second sinking groove are respectively provided with a first sealing mechanism and a second sealing mechanism for realizing two-stage sealing.
2. The two-stage sealing device of the magnetron sputtering cylindrical target according to claim 1, wherein the outer side walls of the two side end portions of the target are respectively provided with a third sinking groove of an annular structure;
a first conical transition surface is arranged on one side of the connecting column facing the blind plug;
the snap assembly is configured to include:
the inner diameter of one end, matched with the target material, of each buckle is smaller than that of the other end of each buckle;
the inner side wall of one end, matched with the target material, of each buckle is provided with a convex edge matched with the third sinking groove, and the inner side wall of one end, matched with the connecting column, of each buckle is provided with a second conical transition surface which is inwards contracted and matched with the first conical transition surface;
the end part of each buckle is provided with a matched screw hole to realize the closed connection of the buckles through bolts.
3. The two-stage sealing device for the magnetron sputtering cylindrical target according to claim 2, wherein the connecting column is provided with an annular boss defining a target mounting position at a position where the connecting column is fitted with the second conical transition surface.
4. The two-stage sealing device for the magnetron sputtering cylindrical target according to claim 2, wherein a step-shaped limiting portion for limiting the mounting positions of the target and the sealing end is arranged between the convex rib and the second conical transition surface.
5. The two-stage sealing arrangement for a magnetron sputtering cylindrical target of claim 1, wherein the first sealing mechanism and the second sealing mechanism are respectively configured as rubber or silicone sealing rings in an annular structure.
6. The two-stage sealing device for the magnetron sputtering cylindrical target according to claim 4, wherein an outer diameter of the first sealing mechanism is configured to be larger than an inner diameter of the target by 0.1 to 0.2 mm;
the outer diameter of the second sealing mechanism is configured to be 0.5-0.6 mm larger than the inner diameter of the target.
7. The two-stage seal arrangement for a magnetron sputtering cylindrical target as claimed in claim 1 wherein the seal head and snap assembly are configured to be made of 304 stainless steel.
8. The two-stage sealing device of magnetron sputtering cylindrical target according to claim 4, wherein the step-shaped limiting part is provided with a hollow silica gel fixing layer matched with the step-shaped limiting part;
wherein the compressed thickness of the silica gel fixing layer is set to 0.05-0.15 mm.
9. The two-stage sealing device of the magnetron sputtering cylindrical target according to claim 1, wherein a fourth sinking groove and a fifth sinking groove matched with the first sealing mechanism and the second sealing mechanism are formed in the inner side wall of the target;
the groove depth of the fourth sinking handle groove and the fifth sinking groove is 1/3 of the first sinking groove and the second sinking groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920911660.3U CN210261966U (en) | 2019-06-17 | 2019-06-17 | Two-stage sealing device of magnetron sputtering cylindrical target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920911660.3U CN210261966U (en) | 2019-06-17 | 2019-06-17 | Two-stage sealing device of magnetron sputtering cylindrical target |
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| Publication Number | Publication Date |
|---|---|
| CN210261966U true CN210261966U (en) | 2020-04-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920911660.3U Active CN210261966U (en) | 2019-06-17 | 2019-06-17 | Two-stage sealing device of magnetron sputtering cylindrical target |
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| CN (1) | CN210261966U (en) |
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- 2019-06-17 CN CN201920911660.3U patent/CN210261966U/en active Active
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Address after: No. 8 Fenghuang Middle Road, Fucheng District, Mianyang City, Sichuan Province 621000 Patentee after: Mianyang Haohua Photoelectric Technology Co.,Ltd. Address before: No. 8 Fenghuang Middle Road, Fucheng District, Mianyang City, Sichuan Province 621000 Patentee before: Mianyang Jinneng Mobile Energy Co.,Ltd. |
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