CN210199722U - Embedded touch panel - Google Patents
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- CN210199722U CN210199722U CN201920992490.6U CN201920992490U CN210199722U CN 210199722 U CN210199722 U CN 210199722U CN 201920992490 U CN201920992490 U CN 201920992490U CN 210199722 U CN210199722 U CN 210199722U
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Abstract
The utility model relates to the technical field of microelectronics, in particular to an embedded touch panel, which can increase the transparency of the touch panel by respectively arranging via holes on an etching barrier layer, a passivation layer, a first flat layer and a second flat layer, so that the light transmission performance of a device is better, and the display effect of the touch panel is further improved; the touch panel designed by the scheme can set the touch circuit layer in the panel between the glass substrate and the packaging glass, and the touch module layer is arranged in the packaging glass, so that the thickness of devices can be effectively reduced, the use of various materials such as optical cement can be effectively reduced, the manufacturing cost of the panel can be reduced, the technical requirement and the process difficulty are low, and the signal interference is small.
Description
Technical Field
The utility model relates to a microelectronics technical field, in particular to embedded touch panel.
Background
With the development of display technology, various new technologies are emerging continuously, the transparent display technology is receiving more and more attention due to the characteristic of the transparent display panel and the unique application thereof, and the thin and transparent display is the trend of future display development.
Currently, the touch technologies applied In the OLED panel are mainly classified into an Out-Cell (Out-Cell) touch technology and an In-Cell (In-Cell) touch technology. The Out-cell (Out-cell) technology is mainly classified into a glass mode and a film mode, and a touch sensor is located between a cover glass and a display module.
The In-Cell embeds the touch module In the OLED panel, so that the glass cost and the laminating cost are saved, the module is light In weight and high In transmittance, and the requirement of the display panel on the quality is met. However, when the touch sensor is embedded in the pixel, a matching touch integrated circuit must be embedded therein, otherwise, an erroneous touch sensing signal or excessive noise is easily caused, and the complexity and difficulty of the manufacturing process are great. The organic layers in the OLED are coated with films by an evaporation method, so that the technical requirement is high, the difficulty is high, and the yield is low.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem that will solve is: an in-cell touch panel is provided.
In order to solve the technical problem, the utility model discloses a technical scheme be:
an embedded touch panel comprises a glass layer, wherein a touch electrode layer, a buffer layer, an active layer, a first insulating layer, a first metal layer, an etching barrier layer, a second metal layer, a passivation layer, a first flat layer, a third metal layer, a second flat layer, a third flat layer and a fourth metal layer are sequentially stacked on the surface of the glass layer;
the etching barrier layer is provided with a first via hole and at least two second via holes, a second metal layer is filled in the second via holes, the second metal layer is in contact with one side surface of the active layer, which is far away from the glass layer, the passivation layer is provided with a third via hole and a fourth via hole, the first flat layer is provided with a fifth via hole and a sixth via hole, the sixth via hole and the fourth via hole are oppositely arranged and communicated, the sixth via hole and the fourth via hole are both filled with a third metal layer, the third metal layer in the sixth via hole is in contact with one side surface of the second metal layer, which is far away from the glass layer, the second flat layer is provided with a seventh via hole and an eighth via hole, the eighth via hole is filled with a luminescent layer, the luminescent layer is in contact with one side surface of the third metal layer, which is far away from the glass layer, and the first via hole, the third via hole, the fifth via hole and the, and fourth metal layers are filled in the first through hole, the third through hole, the fifth through hole and the seventh through hole.
The beneficial effects of the utility model reside in that:
through the arrangement of the through holes in the etching barrier layer, the passivation layer, the first flat layer and the second flat layer, the transparency of the touch panel can be increased, the light transmittance of the device is better, and the display effect of the touch panel is further improved; the touch panel designed by the scheme can set the touch circuit layer in the panel between the glass substrate and the packaging glass, and the touch module layer is arranged in the packaging glass, so that the thickness of devices can be effectively reduced, the use of various materials such as optical cement can be effectively reduced, the manufacturing cost of the panel can be reduced, the technical requirement and the process difficulty are low, and the signal interference is small.
Drawings
Fig. 1 is a schematic structural view of an in-cell touch panel according to the present invention;
fig. 2 is a schematic structural diagram of a second embodiment of an in-cell touch panel according to the present invention;
description of reference numerals:
1. a glass layer; 2. a touch electrode layer; 3. a buffer layer; 4. an active layer; 5. a first insulating layer;
6. a first metal layer; 7. etching the barrier layer; 8. a second metal layer; 9. a passivation layer; 10. a first planar layer; 11. a third metal layer; 12. a second planar layer; 13. a light emitting layer; 14. a third flat layer; 15. a fourth metal layer; 16. a fifth metal layer; 17. a second insulating layer.
Detailed Description
In order to explain the technical content, the objects and the effects of the present invention in detail, the following description is made with reference to the accompanying drawings in combination with the embodiments.
The utility model discloses the most crucial design lies in: the transparency of the touch panel is increased by respectively arranging the via holes on the etching barrier layer, the passivation layer, the first flat layer and the second flat layer.
Referring to fig. 1, the present invention provides a technical solution:
an embedded touch panel comprises a glass layer, wherein a touch electrode layer, a buffer layer, an active layer, a first insulating layer, a first metal layer, an etching barrier layer, a second metal layer, a passivation layer, a first flat layer, a third metal layer, a second flat layer, a third flat layer and a fourth metal layer are sequentially stacked on the surface of the glass layer;
the etching barrier layer is provided with a first via hole and at least two second via holes, a second metal layer is filled in the second via holes, the second metal layer is in contact with one side surface of the active layer, which is far away from the glass layer, the passivation layer is provided with a third via hole and a fourth via hole, the first flat layer is provided with a fifth via hole and a sixth via hole, the sixth via hole and the fourth via hole are oppositely arranged and communicated, the sixth via hole and the fourth via hole are both filled with a third metal layer, the third metal layer in the sixth via hole is in contact with one side surface of the second metal layer, which is far away from the glass layer, the second flat layer is provided with a seventh via hole and an eighth via hole, the eighth via hole is filled with a luminescent layer, the luminescent layer is in contact with one side surface of the third metal layer, which is far away from the glass layer, and the first via hole, the third via hole, the fifth via hole and the, and fourth metal layers are filled in the first through hole, the third through hole, the fifth through hole and the seventh through hole.
From the above description, the beneficial effects of the present invention are:
through the arrangement of the through holes in the etching barrier layer, the passivation layer, the first flat layer and the second flat layer, the transparency of the touch panel can be increased, the light transmittance of the device is better, and the display effect of the touch panel is further improved; the touch panel designed by the scheme can set the touch circuit layer in the panel between the glass substrate and the packaging glass, and the touch module layer is arranged in the packaging glass, so that the thickness of devices can be effectively reduced, the use of various materials such as optical cement can be effectively reduced, the manufacturing cost of the panel can be reduced, the technical requirement and the process difficulty are low, and the signal interference is small. The structure of this scheme design is the self-alignment structure, compares current structure, because there is not the production of crossover region parasitic capacitance that can significantly reduce in the grid of this scheme and source-drain to improve thin film transistor structure's stability, optimize the base plate structure.
Further, the metal layer further comprises a fifth metal layer and a second insulating layer;
one side face of the fifth metal layer is in contact with one side face, far away from the glass layer, of the buffer layer, the other side face, opposite to one side face of the fifth metal layer, is in contact with one side face of the second insulating layer, and the other side face, opposite to one side face of the second insulating layer, is in contact with one side face, close to the glass layer, of the active layer;
be equipped with the ninth via hole on the second insulating layer, it has the fourth metal layer to fill in the ninth via hole, the fourth metal layer in the ninth via hole with a side contact that the glass layer was kept away from to the buffer layer.
As can be seen from the above description, the fifth metal layer corresponds to the first metal layer (corresponding to the top gate) as the bottom gate of the thin film transistor structure by disposing the fifth metal layer and the second insulating layer; the fifth metal layer is designed to form the thin film transistor with a double-gate structure, and the double gates can greatly improve the stability and the electron mobility of the TFT device, play a role in reducing the area of the device and optimize the thin film transistor structure.
Furthermore, in the vertical direction of the embedded touch panel, the second via hole is arranged corresponding to the active layer.
As can be seen from the above description, the second via hole is disposed corresponding to the active layer, so that the problem of over-etching when forming the second via hole on the etching barrier layer can be avoided.
Further, the first insulating layer and the first metal layer are disposed between the two second vias.
As can be seen from the above description, the first metal layer and the first insulating layer are disposed between the two via holes to reduce or prevent the generation of parasitic capacitance in the overlapping region between the gate and the source/drain, and the first insulating layer is used as the gate insulating layer, and only the other region of the film structure between the gate and the active layer is removed by etching to further increase the transmittance of the panel.
Furthermore, the fifth metal layer is a transparent metal layer.
From the above description, it can be known that, because the self-capacitance touch principle requires a double-layer circuit structure, the fifth metal layer is designed as a transparent metal layer, and the touch circuit layer is designed outside the gate, so that a light shield can be reduced, the manufacturing cost can be saved, and the self-capacitance touch function can be embedded in the OLED display panel, thereby achieving the effect of light and thin panel.
Referring to fig. 1, a first embodiment of the present invention is:
an embedded touch panel comprises a glass layer 1, wherein a touch electrode layer 2, a buffer layer 3, an active layer 4, a first insulating layer 5, a first metal layer 6, an etching barrier layer 7, a second metal layer 8, a passivation layer 9, a first flat layer 10, a third metal layer 11, a second flat layer 12, a third flat layer 14 and a fourth metal layer 15 are sequentially stacked on the surface of the glass layer 1;
the etching barrier layer 7 is provided with a first via hole and at least two second via holes, a second metal layer 8 is filled in the second via holes, the second metal layer 8 is in contact with one side face, far away from the glass layer 1, of the active layer 4, a third via hole and a fourth via hole are arranged on the passivation layer 9, a fifth via hole and a sixth via hole are arranged on the first flat layer 10, the sixth via hole and the fourth via hole are oppositely arranged and communicated, a third metal layer 11 is filled in the sixth via hole and the fourth via hole, a third metal layer 11 in the sixth via hole is in contact with one side face, far away from the glass layer, of the second metal layer 8, a seventh via hole and an eighth via hole are arranged on the second flat layer 12, a luminescent layer 13 is filled in the eighth via hole, the luminescent layer 13 is in contact with one side face, far away from the glass layer 1, of the third metal layer 11, of the first via hole, The third via hole, the fifth via hole and the seventh via hole are oppositely arranged and communicated, and fourth metal layers 15 are filled in the first via hole, the third via hole, the fifth via hole and the seventh via hole.
The touch electrode layer 2 may be made of transparent electrode materials such as Indium Tin Oxide (ITO) and nano silver wires.
The buffer layer 3 is disposed to planarize the surface of the glass layer 1 and reduce touch signal noise.
The active layer 4 may be made of amorphous silicon (α -Si), polysilicon, Indium Gallium Zinc Oxide (IGZO), and other metal oxides.
The passivation layer 9 is provided to protect the display device from external water or oxygen.
Referring to fig. 2, the second embodiment of the present invention is:
a fifth metal layer 16 and a second insulating layer 17;
one side face of the fifth metal layer 16 is in contact with one side face, far away from the glass layer 1, of the buffer layer 3, the other side face, opposite to one side face of the fifth metal layer 16, is in contact with one side face of the second insulating layer 17, and the other side face, opposite to one side face of the second insulating layer 17, is in contact with one side face, close to the glass layer 1, of the active layer 4;
be equipped with the ninth via hole on the second insulating layer 17, it has fourth metal layer 15 to fill in the ninth via hole, fourth metal layer 15 in the ninth via hole with buffer layer 3 keeps away from the side contact of glass layer 1.
In the vertical direction of the in-cell touch panel, the second via hole is disposed at a position corresponding to the active layer 4.
The first insulating layer 5 and the first metal layer 6 are disposed between the two second vias.
The fifth metal layer 16 is a transparent metal layer.
In summary, according to the embedded touch panel provided by the present invention, the transparency of the touch panel can be increased by respectively providing the via holes on the etching barrier layer, the passivation layer, the first flat layer and the second flat layer, so that the light transmittance of the device is better, and the display effect of the touch panel is further improved; the touch panel designed by the scheme can set the touch circuit layer in the panel between the glass substrate and the packaging glass, and the touch module layer is arranged in the packaging glass, so that the thickness of devices can be effectively reduced, the use of various materials such as optical cement can be effectively reduced, the manufacturing cost of the panel can be reduced, the technical requirement and the process difficulty are low, and the signal interference is small. The structure of this scheme design is the self-alignment structure, compares current structure, because there is not the production of crossover region parasitic capacitance that can significantly reduce in the grid of this scheme and source-drain to improve thin film transistor structure's stability, optimize the base plate structure.
The above mentioned is only the embodiment of the present invention, and not the limitation of the patent scope of the present invention, all the equivalent transformations made by the contents of the specification and the drawings, or the direct or indirect application in the related technical field, are included in the patent protection scope of the present invention.
Claims (5)
1. An embedded touch panel is characterized by comprising a glass layer, wherein a touch electrode layer, a buffer layer, an active layer, a first insulating layer, a first metal layer, an etching barrier layer, a second metal layer, a passivation layer, a first flat layer, a third metal layer, a second flat layer, a third flat layer and a fourth metal layer are sequentially stacked on the surface of the glass layer;
the etching barrier layer is provided with a first via hole and at least two second via holes, a second metal layer is filled in the second via holes, the second metal layer is in contact with one side surface of the active layer, which is far away from the glass layer, the passivation layer is provided with a third via hole and a fourth via hole, the first flat layer is provided with a fifth via hole and a sixth via hole, the sixth via hole and the fourth via hole are oppositely arranged and communicated, the sixth via hole and the fourth via hole are both filled with a third metal layer, the third metal layer in the sixth via hole is in contact with one side surface of the second metal layer, which is far away from the glass layer, the second flat layer is provided with a seventh via hole and an eighth via hole, the eighth via hole is filled with a luminescent layer, the luminescent layer is in contact with one side surface of the third metal layer, which is far away from the glass layer, and the first via hole, the third via hole, the fifth via hole and the, and fourth metal layers are filled in the first through hole, the third through hole, the fifth through hole and the seventh through hole.
2. The in-cell touch panel according to claim 1, further comprising a fifth metal layer and a second insulating layer;
one side face of the fifth metal layer is in contact with one side face, far away from the glass layer, of the buffer layer, the other side face, opposite to one side face of the fifth metal layer, is in contact with one side face of the second insulating layer, and the other side face, opposite to one side face of the second insulating layer, is in contact with one side face, close to the glass layer, of the active layer;
be equipped with the ninth via hole on the second insulating layer, it has the fourth metal layer to fill in the ninth via hole, the fourth metal layer in the ninth via hole with a side contact that the glass layer was kept away from to the buffer layer.
3. The in-cell touch panel of claim 1, wherein the second vias are disposed at positions corresponding to the active layers in a vertical direction of the in-cell touch panel.
4. The in-cell touch panel according to claim 1, wherein the first insulating layer and the first metal layer are disposed between the two second vias.
5. The in-cell touch panel according to claim 1, wherein the fifth metal layer is a transparent metal layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920992490.6U CN210199722U (en) | 2019-06-28 | 2019-06-28 | Embedded touch panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920992490.6U CN210199722U (en) | 2019-06-28 | 2019-06-28 | Embedded touch panel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210199722U true CN210199722U (en) | 2020-03-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920992490.6U Active CN210199722U (en) | 2019-06-28 | 2019-06-28 | Embedded touch panel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210199722U (en) |
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2019
- 2019-06-28 CN CN201920992490.6U patent/CN210199722U/en active Active
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