CN209829752U - Ultra-clean laboratory bidirectional stable positive and negative pressure source air shower - Google Patents
Ultra-clean laboratory bidirectional stable positive and negative pressure source air shower Download PDFInfo
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- CN209829752U CN209829752U CN201920565557.8U CN201920565557U CN209829752U CN 209829752 U CN209829752 U CN 209829752U CN 201920565557 U CN201920565557 U CN 201920565557U CN 209829752 U CN209829752 U CN 209829752U
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Abstract
The utility model relates to an ultra-clean laboratory both-way stable positive negative pressure source air shower, including the air shower casing, the air shower inner wall, and be located the filtration system between air shower casing and the air shower inner wall, filtration system is used for purifying the air in the air shower, filtration system includes variable speed centrifugal fan, vacuum generator and filter, the air shower mouth is installed to one side of air shower inner wall, the inlet scoop is installed to corresponding opposite side, variable speed centrifugal fan's play tuber pipe divides two the tunnel, connect the air shower mouth all the way, vacuum generator's compressed air import is connected to another way, vacuum generator is located the inlet scoop side, the inlet scoop is connected to vacuum generator's vacuum mouth, vacuum generator's compressed air export is carried compressed air to the filter through the pipeline. The utility model discloses greatly increased the wind of wind leaching rooms drenches dust removal effect, realized the cleanliness factor management and control in ultra-clean laboratory from the source effectively, the result of use is superior to traditional mode, has better practical application and worth and spreading value.
Description
Technical Field
The utility model relates to a semiconductor manufacturing auxiliary assembly technical field, in particular to positive negative pressure source air shower of ultra-clean laboratory bidirectional stabilization.
Background
The air shower is a necessary purifying device for fine processing of medicines, vegetables and raw and cooked foods, precision instruments and electronic instrument workshops, and is usually arranged between a clean room and a non-clean room. When workers or goods are to enter a clean area, impurities such as dust, hair, dandruff and the like carried by the workers or the goods can be removed through the clean air blown out by the equipment, and then the impurities are removed through the filter, so that the dust and bacteria are effectively prevented from entering the clean area, the strict sanitary standard of a work place is met, and high-quality products are produced.
90% of the dust particles in the clean room are carried in by people or things through the air shower. Most of wind leaching rooms on the existing market are only a "raise dust function", because the wind leaching rooms blows at a high speed and drenches can raise the dust stained with on people and the box, dead angle is more in addition in the wind leaching rooms, the air current is the state of turbulent flow and vortex, hardly brings dust into dust collector or filter totally, blows when the wind leaching rooms and drenches after finishing, has in fact partial dust still to move in the wind leaching rooms, just has partial dust to spread in the clean room when opening the wind leaching rooms and going out. Therefore, when the air shower is used, if the air shower is not clean, the dust removing effect is not good, and the air shower becomes a large pollution source of a clean room.
Disclosure of Invention
The utility model discloses a solve the technical problem that exists among the well-known technique and provide a positive negative pressure source air shower of ultra-clean laboratory both-way stability, this air shower passes through the air current that forms between the positive negative pressure, and people or the surperficial dust particle of thing and biological particle can be got rid of along with stable air current, and clean effectual enlarges clean scope, and it is more thorough to remove dust.
The utility model discloses a solve the technical scheme that technical problem that exists among the well-known technique took and be:
the utility model provides an ultra-clean laboratory both-way stable positive negative pressure source air shower, includes air shower casing, air shower inner wall and is located the filtration system between air shower casing and the air shower inner wall, filtration system is used for purifying the air in the air shower, filtration system includes variable speed centrifugal fan, vacuum generator and filter, one side of air shower inner wall is installed wind and is drenched the mouth, and the inlet scoop is installed to corresponding opposite side, variable speed centrifugal fan's outlet duct divides two the tunnel, connects wind shower mouth all the way, and vacuum generator's compressed air import is connected to another way, vacuum generator is located the inlet scoop side, the inlet scoop is connected to vacuum generator's vacuum mouth, vacuum generator's compressed air export is carried compressed air to the filter through the pipeline.
In the above technical solution, preferably, the variable speed centrifugal fan and the filter are both located at the air shower side, the variable speed centrifugal fan is located at the bottom of the air shower, and the filter is located at the top of the air shower.
In the above technical solution, it is further preferable that a pipeline outlet of the compressed air outlet of the vacuum generator is directly opposite to and above the filter.
In the above technical solution, it is further preferable that a pipeline outlet of the compressed air outlet of the vacuum generator is connected to the filter.
In the above technical solution, preferably, a check valve is disposed on a pipeline at a compressed air inlet of the vacuum generator.
In the above technical scheme, it is preferred that the wind drenches the mouth and from last to installing a plurality ofly down equidistant along wind leaching rooms inner wall, and is corresponding a plurality of are installed to the inlet scoop, inlet scoop and wind drench mouthful coaxial setting and one-to-one.
In the above technical solution, it is further preferable that each of the suction ports is provided with a vacuum generator correspondingly.
In the above technical solution, it is further preferable that a check valve is disposed on a pipeline at a compressed air inlet of each of the vacuum generators.
When the variable speed centrifugal fan is started, a relatively strong air flow is formed between the positive pressure of the air shower opening and the negative pressure of the air suction opening, turbulent flow and vortex flow cannot be formed when people or objects are located between the air shower opening and the air suction opening and dust particles and biological particles on the surface can be conveyed to the filter along with the stable air flow to be discharged.
The utility model has the advantages and positive effects that:
by adopting the technical scheme, the utility model, a relatively strong air current is formed between the positive pressure of the air shower opening and the negative pressure of the air suction opening, turbulent flow and vortex flow can not be formed when people or objects are located between the air shower opening and the air suction opening, so that dust particles and biological particles on the surface of the people or objects are sucked through the vacuum opening of the vacuum generator and then are discharged after being conveyed to the filter along with stable air current through the compressed air outlet of the vacuum generator; the utility model discloses the structural design is ingenious, design science, convenient operation, greatly increased the wind of wind leaching rooms drenches dust removal effect, has realized the cleanliness factor management and control in ultra-clean laboratory from the source effectively, and the result of use is superior to traditional mode, has better practical application and worth and spreading value.
Drawings
Fig. 1 is a schematic structural diagram of a positive and negative pressure source air shower provided in the preferred embodiment of the present invention.
In the figure: 1. a wind shower housing; 2. the inner wall of the air shower chamber; 3. a variable speed centrifugal fan; 4. a vacuum generator; 5. a filter; 6. an air shower opening; 7. an air suction opening; 8. a check valve.
Detailed Description
For further understanding of the contents, features and effects of the present invention, the following embodiments are exemplified and will be described in detail with reference to the accompanying drawings:
in the description of the present invention, it is to be understood that the terms "top", "bottom", "upper", "lower", and the like refer to orientations or positional relationships based on those shown in the drawings, and are used only for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1, an embodiment of the present invention provides a bidirectional stable positive and negative pressure source air shower for an ultraclean laboratory, comprising an air shower housing 1, an air shower inner wall 2, and a filtering system located between the air shower housing 1 and the air shower inner wall 2, wherein the filtering system is used for purifying air in the air shower, the filtering system comprises a variable speed centrifugal fan 3, a vacuum generator 4 and a filter 5, an air shower opening 6 is installed on one side of the air shower inner wall 2, an air suction opening 7 is installed on the corresponding other side, an air outlet pipeline of the variable speed centrifugal fan 3 is divided into two paths, one path is connected with the air shower opening 6 through a pipeline, the negative pressure air showering device is used for maintaining a positive pressure air showering effect, the other path of the negative pressure air showering device is connected with a compressed air inlet of the vacuum generator 4 through a pipeline and serves as negative pressure generating source air pressure, the vacuum generator 4 is located on the side of the air suction opening 7, the vacuum opening of the vacuum generator 4 is connected with the air suction opening 7, and a compressed air outlet of the vacuum generator 4 conveys compressed air to the filter 5 through a pipeline.
In a preferred embodiment, the variable speed centrifugal fan 3 and the filter 5 are both located at the side of the air shower 6, the variable speed centrifugal fan 3 is located at the bottom of the air shower, and the filter 5 is located at the top of the air shower. After the variable speed centrifugal fan is started, the surrounding air is pumped away, and the gas conveyed by the compressed air outlet of the vacuum generator can be well filtered by the filter at the top.
As a further preferred embodiment, because the variable speed centrifugal fan is started to pump out the surrounding air, negative pressure is formed at the bottom, and the pipeline outlet of the compressed air outlet of the vacuum generator 4 is opposite to and above the filter 5, the dust particles and the biological particles can be conveyed to the filter along with the air flow, the particles in the dust particles and the biological particles are filtered, and the dust particles and the biological particles are recycled by the variable speed centrifugal fan. In order to convey all dust particles and biological particles to the filter for filtering, a pipeline outlet of a compressed air outlet of the vacuum generator is connected with the filter.
In a preferred embodiment, a check valve 8 is disposed in the pipeline at the compressed air inlet of the vacuum generator 4 to prevent the backflow of the dust-containing gas.
As preferred embodiment, for making the wind of whole wind leaching rooms drench the effect better, wind leaching mouth 6 is installed a plurality ofly from last equidistant down along the wind leaching rooms inner wall, and corresponding inlet scoop 7 is installed a plurality ofly, and inlet scoop 7 and wind leaching mouth 6 coaxial arrangement and one-to-one can discharge the dust granule and the biological particle in the wind leaching rooms fast.
As a further preferred embodiment, a vacuum generator 4 is correspondingly arranged at each air suction opening 7, so that the vacuum adsorption effect is better.
As a further preferred embodiment, a check valve 8 is arranged on the pipeline at the compressed air inlet of each vacuum generator 4 to prevent the dust-containing gas from flowing backwards.
During operation, the variable speed centrifugal fan is started, an air supply pipeline of the variable speed centrifugal fan is divided into two paths, one path of air is conveyed to the air sprinkling port, the other path of air is conveyed to the compressed air inlet of the vacuum generator, dust particles and biological particles on the surface of people or objects are blown away by the air blown from the air sprinkling port and are adsorbed away by the vacuum port of the vacuum generator, and the dust particles and the biological particles are conveyed to the filter through the compressed air outlet of the vacuum generator to be filtered, so that the circulation is carried out. Form a relatively stronger air current between the malleation of wind drenching the mouth and the negative pressure of inlet scoop, people or thing can not form turbulent flow and vortex when being located wind drenching between wind drenching mouth and the inlet scoop for people or thing surperficial dust particle and biological particle can be carried to the filter along with stable air current and get rid of, have realized ultra-clean laboratory cleanliness factor management and control effectively from the source, greatly increased the wind of wind drenching the dust removal effect of wind drenching the room, have better practical application and worth and spreading value.
The utility model discloses an air shower uses the unilateral to blow and drenches as the example, and it should be noted that, if need the air shower top to blow when drenching, do and adopt same principle.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any form, and all the changes and modifications equivalent to any simple modification made by the technical entity of the present invention to the above embodiments are within the scope of the technical solution of the present invention.
Claims (8)
1. The utility model provides an ultra-clean laboratory both-way stable positive negative pressure source air shower, includes air shower casing, air shower inner wall and is located the filtration system between air shower casing and the air shower inner wall, filtration system is used for purifying the air in the air shower, its characterized in that: filtration system includes variable speed centrifugal fan, vacuum generator and filter, wind drenches one side of indoor wall and installs wind and drench the mouth, and the inlet scoop is installed to corresponding opposite side, variable speed centrifugal fan's play tuber pipe way divides two tunnel, connects wind all the way and drenches the mouth, and vacuum generator's compressed air import is connected to another way, vacuum generator is located the inlet scoop side, vacuum generator's vacuum mouth connects the inlet scoop, vacuum generator's compressed air export is carried compressed air to the filter through the pipeline.
2. The ultra-clean laboratory bidirectional stable positive and negative pressure source air shower as claimed in claim 1, characterized in that: the variable-speed centrifugal fan and the filter are both located on the side of the air shower, the variable-speed centrifugal fan is located at the bottom of the air shower, and the filter is located at the top of the air shower.
3. The ultra-clean laboratory bidirectional stable positive and negative pressure source air shower as claimed in claim 2, characterized in that: the pipeline outlet of the compressed air outlet of the vacuum generator is opposite to the filter and is positioned right above the filter.
4. The ultra-clean laboratory bidirectional stable positive and negative pressure source air shower as claimed in claim 2, characterized in that: and a pipeline outlet of the compressed air outlet of the vacuum generator is connected with the filter.
5. The ultra-clean laboratory bidirectional stable positive and negative pressure source air shower as claimed in any one of claims 1 to 4, wherein: and a check valve is arranged on a pipeline at a compressed air inlet of the vacuum generator.
6. The ultra-clean laboratory bidirectional stable positive and negative pressure source air shower as claimed in claim 1, characterized in that: the wind drenches the mouth and installs a plurality ofly from last equidistant extremely down along wind leaching rooms inner wall, and is corresponding the inlet scoop is installed a plurality ofly, inlet scoop and the coaxial setting of wind drenches mouthful and one-to-one.
7. The ultra-clean laboratory bidirectional stable positive and negative pressure source air shower as claimed in claim 6, wherein: each air suction opening is correspondingly provided with a vacuum generator.
8. The ultra-clean laboratory bidirectional stable positive and negative pressure source air shower as claimed in claim 7, wherein: and a check valve is arranged on a pipeline at a compressed air inlet of each vacuum generator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920565557.8U CN209829752U (en) | 2019-04-23 | 2019-04-23 | Ultra-clean laboratory bidirectional stable positive and negative pressure source air shower |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920565557.8U CN209829752U (en) | 2019-04-23 | 2019-04-23 | Ultra-clean laboratory bidirectional stable positive and negative pressure source air shower |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209829752U true CN209829752U (en) | 2019-12-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920565557.8U Active CN209829752U (en) | 2019-04-23 | 2019-04-23 | Ultra-clean laboratory bidirectional stable positive and negative pressure source air shower |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209829752U (en) |
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2019
- 2019-04-23 CN CN201920565557.8U patent/CN209829752U/en active Active
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