CN209764048U - Film Thickness Measuring Device - Google Patents
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- CN209764048U CN209764048U CN201920571935.3U CN201920571935U CN209764048U CN 209764048 U CN209764048 U CN 209764048U CN 201920571935 U CN201920571935 U CN 201920571935U CN 209764048 U CN209764048 U CN 209764048U
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Abstract
本实用新型实施例提供一种膜厚测量装置，所述膜厚测量装置包括：探针组，包括第一伸缩探针和第二伸缩探针，所述第一伸缩探针接触薄膜上表面而产生基准压力，所述第二伸缩探针接触薄膜基板上镀有所述薄膜的一面而产生第一压力；检测单元，与所述第一伸缩探针和所述第二伸缩探针连接，用于获取所述基准压力和所述第一压力之间的第一压力差，并根据所述第一压力差计算所述薄膜的厚度，通过上述技术方案，利用两个伸缩探针和压力检测单元进行检测，将检测的压力差转换为高度差，得到薄膜厚度，避免了现有技术中的测量方法在检测过程中对薄膜造成的划伤，同时，测量不受光学折射率等参数的影响，测量结果精确度高。
The embodiment of the utility model provides a film thickness measurement device, the film thickness measurement device includes: a probe group, including a first telescopic probe and a second telescopic probe, the first telescopic probe touches the upper surface of the film and A reference pressure is generated, and the second telescopic probe contacts the side coated with the film on the film substrate to generate a first pressure; the detection unit is connected with the first telescopic probe and the second telescopic probe, and uses To obtain the first pressure difference between the reference pressure and the first pressure, and calculate the thickness of the film according to the first pressure difference, through the above technical solution, use two telescopic probes and a pressure detection unit The detection is carried out, and the detected pressure difference is converted into a height difference to obtain the thickness of the film, which avoids the scratches on the film caused by the measurement method in the prior art during the detection process, and at the same time, the measurement is not affected by parameters such as optical refractive index. The measurement results are highly accurate.
Description
技术领域technical field
本实用新型涉及显示技术领域，具体地涉及一种膜厚测量装置。The utility model relates to the field of display technology, in particular to a film thickness measuring device.
背景技术Background technique
产品膜厚测量是显示技术、半导体技术中对产品质量进行监控的一种非常重要的手段。目前普遍使用的薄膜厚度测量方法主要包括光学法和探针法两大类。光学法主要是基于光学反射率来测量膜厚，若薄膜厚度不均匀对光的反射率产生影响，则会增大测量误差。Product film thickness measurement is a very important means to monitor product quality in display technology and semiconductor technology. The commonly used film thickness measurement methods mainly include two categories: optical method and probe method. The optical method is mainly based on the optical reflectance to measure the film thickness. If the uneven thickness of the film affects the reflectance of light, the measurement error will increase.
而现有技术中探针法测量中需要使探针移动进行测量，探针移动过程中会造成产品刮伤报废，且该方法测量薄膜厚度无论是移动基板和薄膜，还是移动探针，测量过程都比较复杂。However, in the probe method measurement in the prior art, the probe needs to be moved for measurement. During the movement of the probe, the product will be scratched and scrapped, and the method for measuring film thickness, whether it is moving the substrate and film or moving the probe, the measurement process is difficult. are more complicated.
实用新型内容Utility model content
本实用新型实施例为了至少部分地解决上述技术问题，提供一种膜厚测量装置，所述膜厚测量装置包括：探针组，包括第一伸缩探针和第二伸缩探针，所述第一伸缩探针接触薄膜上表面而产生基准压力，所述第二伸缩探针接触薄膜基板上镀有所述薄膜的一面而产生第一压力；检测单元，与所述第一伸缩探针和所述第二伸缩探针连接，用于获取所述基准压力和所述第一压力之间的第一压力差，并根据所述第一压力差计算所述薄膜的厚度。In order to at least partly solve the above technical problems, embodiments of the present invention provide a film thickness measurement device, which includes: a probe set, including a first telescopic probe and a second telescopic probe, the first A telescopic probe touches the upper surface of the film to generate a reference pressure, and the second telescopic probe contacts the side of the film substrate coated with the film to generate a first pressure; the detection unit is connected with the first telescopic probe and the The second telescopic probe is connected to obtain a first pressure difference between the reference pressure and the first pressure, and calculate the thickness of the film according to the first pressure difference.
可选的，所述第二伸缩探针被调节以接触薄膜缺陷部分的上表面而产生第二压力；相应的所述检测单元还用于获取所述基准压力和所述第二压力之间的第二压力差，并根据所述第二压力差计算所述薄膜缺陷部分的高度。Optionally, the second telescopic probe is adjusted to contact the upper surface of the defective part of the film to generate a second pressure; the corresponding detection unit is also used to acquire the difference between the reference pressure and the second pressure. a second pressure difference, and calculate the height of the defective part of the film according to the second pressure difference.
可选的，所述膜厚测量装置还包括第一移动机构，所述第一移动机构与所述探针组连接，用于在竖直方向上同时移动第一伸缩探针和第二伸缩探针。Optionally, the film thickness measurement device further includes a first moving mechanism, the first moving mechanism is connected with the probe set, and is used to simultaneously move the first telescopic probe and the second telescopic probe in the vertical direction. Needle.
可选的，所述膜厚测量装置还包括旋转机构，所述旋转机构与所述探针组连接，用于在所述第一伸缩探针和所述第二伸缩探针不接触所述薄膜时旋转所述探针组。Optionally, the film thickness measurement device further includes a rotating mechanism, the rotating mechanism is connected to the probe set, and is used for when the first telescopic probe and the second telescopic probe do not touch the film. While rotating the probe set.
可选的，所述膜厚测量装置还包括第二移动机构，所述第二移动机构分别与所述第一伸缩探针和所述第二伸缩探针连接，用于在所述第一伸缩探针和所述第二伸缩探针不接触所述薄膜时在水平方向上移动所述第一伸缩探针和/或所述第二伸缩探针。Optionally, the film thickness measuring device further includes a second moving mechanism, the second moving mechanism is respectively connected with the first telescopic probe and the second telescopic probe, for The first telescoping probe and/or the second telescoping probe are moved in a horizontal direction when the probes and the second telescoping probe are not in contact with the film.
可选的，所述第二移动机构为伺服步进机构。Optionally, the second moving mechanism is a servo stepping mechanism.
可选的，所述检测单元包括压差传感器，与所述第一伸缩探针和所述第二伸缩探针连接，用于检测所述第一压力差或所述第二压力差。Optionally, the detection unit includes a differential pressure sensor connected to the first telescopic probe and the second telescopic probe for detecting the first differential pressure or the second differential pressure.
可选的，所述检测单元包括：第一压力传感器，与所述第一伸缩探针连接，用于测量所述基准压力；第二压力传感器，与所述第二伸缩探针连接，用于测量所述第一压力或所述第二压力，且所述检测单元还用于根据所述基准压力和所述第一压力计算所述第一压力差或根据所述基准压力和所述第二压力计算所述第二压力差。Optionally, the detection unit includes: a first pressure sensor connected to the first telescopic probe for measuring the reference pressure; a second pressure sensor connected to the second telescopic probe for measuring the first pressure or the second pressure, and the detection unit is also used to calculate the first pressure difference according to the reference pressure and the first pressure or to calculate the first pressure difference according to the reference pressure and the second pressure pressure to calculate the second pressure difference.
可选的，所述膜厚测量装置还包括显示装置，与所述检测单元连接，用于显示所述检测单元的检测结果。Optionally, the film thickness measurement device further includes a display device connected to the detection unit for displaying the detection result of the detection unit.
可选的，所述膜厚测量装置还包括报警装置，与所述检测单元连接，用于在所述检测单元所检测的检测结果大于相应的设定高度时进行报警。Optionally, the film thickness measurement device further includes an alarm device, connected to the detection unit, for alarming when the detection result detected by the detection unit is greater than the corresponding set height.
通过上述技术方案，本实用新型选择需要检测的薄膜或者薄膜的某个区域上的若干个点作为测量点，利用两个伸缩探针和压力检测单元进行检测，将检测的压力差转换为高度差，得到薄膜厚度，避免了现有技术中的测量方法在检测过程中对薄膜造成的划伤。同时，测量不受光学折射率等参数的影响，测量结果精确度高。Through the above technical scheme, the utility model selects the film to be detected or several points on a certain area of the film as measurement points, uses two telescopic probes and a pressure detection unit for detection, and converts the detected pressure difference into a height difference , to obtain the thickness of the film, avoiding the scratches caused to the film during the detection process by the measuring method in the prior art. At the same time, the measurement is not affected by parameters such as optical refractive index, and the measurement result is highly accurate.
本实用新型实施例的其它特征和优点将在随后的具体实施方式部分予以详细说明。Other features and advantages of the embodiments of the present invention will be described in detail in the following part of specific embodiments.
附图说明Description of drawings
附图是用来提供对本实用新型实施例的进一步理解，并且构成说明书的一部分，与下面的具体实施方式一起用于解释本实用新型实施例，但并不构成对本实用新型实施例的限制。在附图中：The accompanying drawings are used to provide a further understanding of the embodiments of the utility model, and constitute a part of the description, and are used together with the following specific embodiments to explain the embodiments of the utility model, but do not constitute a limitation to the embodiments of the utility model. In the attached picture:
图1是本实用新型实施例提供的膜厚测量装置的框图；Fig. 1 is the block diagram of the film thickness measuring device provided by the utility model embodiment;
图2是本实用新型实施例提供的膜厚测量装置的结构示意图。Fig. 2 is a schematic structural view of a film thickness measuring device provided by an embodiment of the present invention.
附图标记说明Explanation of reference signs
100、探针组 200、检测单元100, probe set 200, detection unit
1、薄膜基板 2、薄膜1. Film substrate 2. Film
3、缺陷部分 41、第一伸缩探针3. Defective part 41. The first retractable probe
42、第二伸缩探针 5、第一移动机构42. The second telescopic probe 5. The first moving mechanism
6、信号线 7、压差传感器6. Signal line 7. Differential pressure sensor
8、旋转机构 9、第二移动机构8. Rotating mechanism 9. Second moving mechanism
具体实施方式Detailed ways
以下结合附图对本实用新型实施例的具体实施方式进行详细说明。应当理解的是，此处所描述的具体实施方式仅用于说明和解释本实用新型实施例，并不用于限制本实用新型实施例。The specific implementation manners of the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation manners described here are only used to illustrate and explain the embodiments of the present utility model, and are not intended to limit the embodiments of the present utility model.
图1是本实用新型实施例提供的膜厚测量装置的框图，如图1所示，膜厚测量装置包括：探针组100，包括第一伸缩探针41和第二伸缩探针42，第一伸缩探针41接触薄膜2的上表面而产生基准压力，第二伸缩探针42接触薄膜基板1上镀有薄膜2的一面而产生第一压力；检测单元200，与第一伸缩探针41和第二伸缩探针42连接，用于获取基准压力和第一压力之间的第一压力差，并根据第一压力差计算薄膜2的厚度。Fig. 1 is a block diagram of the film thickness measuring device provided by the embodiment of the present utility model. As shown in Fig. A telescopic probe 41 contacts the upper surface of the film 2 to generate a reference pressure, and a second telescopic probe 42 contacts the side of the film substrate 1 coated with the film 2 to generate the first pressure; the detection unit 200, and the first telescopic probe 41 It is connected with the second telescoping probe 42 for obtaining the first pressure difference between the reference pressure and the first pressure, and calculating the thickness of the film 2 according to the first pressure difference.
进一步的，第二伸缩探针42被调节以接触薄膜2的缺陷部分3的上表面而产生第二压力；相应的检测单元200还用于获取基准压力和第二压力之间的第二压力差，并根据第二压力差计算薄膜2的缺陷部分3的高度。Further, the second telescopic probe 42 is adjusted to contact the upper surface of the defect portion 3 of the film 2 to generate a second pressure; the corresponding detection unit 200 is also used to obtain a second pressure difference between the reference pressure and the second pressure , and calculate the height of the defective part 3 of the film 2 according to the second pressure difference.
需要说明的是，本实用新型中，如无特别说明，薄膜2的缺陷部分的高度是指薄膜缺陷部分的未与基板接触的一面至薄膜上表面的高度。It should be noted that, in the present invention, unless otherwise specified, the height of the defective portion of the film 2 refers to the height from the side of the defective portion of the film that is not in contact with the substrate to the upper surface of the film.
以下结合图2，以本实用新型实施例提供的膜厚测量装置为例，说明膜厚测量装置的结构及工作原理。The structure and working principle of the film thickness measuring device will be described below by taking the film thickness measuring device provided by the embodiment of the present invention as an example with reference to FIG. 2 .
产品膜厚量测量在显示技术、半导体技术里一直是制程过程中不可缺少的一项重要监控方式，本实用新型克服现有技术中的测量方法测量精度不够高、容易刮伤薄膜等缺点，配合使用探针组100与检测单元200，有效快速进行膜厚测量，以使镀膜工艺的质量控制人员能够随时监控薄膜厚度是否正常，并针对薄膜整体厚度异常或薄膜有缺陷等问题及时进行工艺参数修正或缺陷修补。Product film thickness measurement has always been an indispensable and important monitoring method in the process of display technology and semiconductor technology. Use the probe set 100 and the detection unit 200 to effectively and quickly measure the film thickness, so that the quality control personnel of the coating process can monitor whether the film thickness is normal at any time, and timely correct the process parameters for problems such as abnormal overall thickness of the film or defects in the film or bug fixes.
其中，探针组100包括第一伸缩探针41和第二伸缩探针42，测量前对第一伸缩探针41及第二伸缩探针42进行量测值“归零”操作，测量过程中移动两个伸缩探针，因受测物体表面高度或粗糙度不一样，伸缩探针与其所接触的表面产生的压力会发生变化，可由检测单元200(图2中通过压差传感器体现)检测到第一伸缩探针41与其所接触的表面产生的压力和第二伸缩探针42与其所接触的表面产生的压力之间的压力差，并将所检测到的压力差转换成高度差，从而得到薄膜厚度或者薄膜缺陷部分的高度，通常，检测单元200所检测的薄膜厚度或者薄膜的缺陷部分的高度为微米级。Wherein, the probe set 100 includes a first telescopic probe 41 and a second telescopic probe 42. Before the measurement, the first telescopic probe 41 and the second telescopic probe 42 are subjected to the operation of "returning to zero" the measured value, and they are moved during the measurement process. For the two telescopic probes, because the surface height or roughness of the measured object is different, the pressure generated by the telescopic probe and the surface it contacts will change, which can be detected by the detection unit 200 (represented by the differential pressure sensor in FIG. 2 ). The pressure difference between the pressure generated by a telescopic probe 41 and the surface it is in contact with and the pressure generated by the second telescopic probe 42 and the surface it is in contact with, and the detected pressure difference is converted into a height difference, thereby obtaining a thin film The thickness or the height of the defective portion of the film, generally, the thickness of the film or the height of the defective portion of the film detected by the detection unit 200 is in the order of microns.
优选的，第一伸缩探针41和第二伸缩探针42使用两根微型探针。Preferably, two micro-probes are used for the first telescopic probe 41 and the second telescopic probe 42 .
在一个优选的实施例中，检测单元200采用压力型计量传感器，例如：压差传感器7，与第一伸缩探针41和第二伸缩探针42连接，用于检测第一伸缩探针41接触薄膜2的上表面产生的基准压力与第二伸缩探针42接触薄膜基板1上镀有薄膜2的一面产生的第一压力之间的第一压力差。进一步的，压差传感器7，与第一伸缩探针41和第二伸缩探针42连接，用于检测第二伸缩探针42接触薄膜2的缺陷部分3的上表面产生的第二压力与基准压力之间的第二压力差。In a preferred embodiment, the detection unit 200 adopts a pressure-type metering sensor, such as a differential pressure sensor 7, which is connected with the first telescopic probe 41 and the second telescopic probe 42, and is used to detect the contact of the first telescopic probe 41. The first pressure difference between the reference pressure generated on the upper surface of the film 2 and the first pressure generated by the second telescopic probe 42 contacting the side of the film substrate 1 coated with the film 2 . Further, the differential pressure sensor 7 is connected with the first telescopic probe 41 and the second telescopic probe 42, and is used to detect the second pressure generated by the second telescopic probe 42 contacting the upper surface of the defect portion 3 of the film 2 and the reference pressure. The second pressure difference between the pressures.
在另一个优选的实施例中，检测单元200可以包括：第一压力传感器(图中未示出)，与第一伸缩探针41连接，用于测量基准压力；第二压力传感器(图中未示出)，与第二伸缩探针42连接，用于测量第一压力或第二压力，且检测单元还用于根据基准压力和第一压力计算第一压力差或根据基准压力和第二压力计算第二压力差。In another preferred embodiment, the detection unit 200 may include: a first pressure sensor (not shown in the figure), connected to the first telescopic probe 41, for measuring the reference pressure; a second pressure sensor (not shown in the figure) shown), is connected with the second telescopic probe 42 for measuring the first pressure or the second pressure, and the detection unit is also used for calculating the first pressure difference according to the reference pressure and the first pressure or according to the reference pressure and the second pressure Calculate the second differential pressure.
优选的，膜厚测量装置还包括显示装置(图中未示出)，与检测单元200连接，用于显示检测单元200的检测结果。Preferably, the film thickness measurement device further includes a display device (not shown in the figure), which is connected with the detection unit 200 and used to display the detection result of the detection unit 200 .
优选的，膜厚测量装置还包括报警装置(图中未示出)，与检测单元200连接，用于在检测单元200所检测的检测结果大于相应的设定高度时进行报警。Preferably, the film thickness measurement device further includes an alarm device (not shown in the figure), which is connected to the detection unit 200 and is used to give an alarm when the detection result detected by the detection unit 200 is greater than the corresponding set height.
测量过程中对第一伸缩探针41和第二伸缩探针42的移动可以通过第一移动机构5、旋转机构8和第二移动机构9来实现。具体如下：第一移动机构5与探针组100连接，用于在竖直方向上同时移动第一伸缩探针41和第二伸缩探针42。在某些实施例中，两个伸缩探针的伸缩可通过该第一移动机构5实现。The movement of the first telescopic probe 41 and the second telescopic probe 42 during the measurement can be realized by the first moving mechanism 5 , the rotating mechanism 8 and the second moving mechanism 9 . The details are as follows: the first moving mechanism 5 is connected with the probe set 100 and is used to simultaneously move the first telescopic probe 41 and the second telescopic probe 42 in the vertical direction. In some embodiments, the telescoping of the two telescoping probes can be realized through the first moving mechanism 5 .
优选的，本实用新型选取薄膜上的若干个测量点对薄膜厚度进行检测，并检测薄膜是否存在缺陷以及测量薄膜缺陷部分的高度。测量过程中需要对第一伸缩探针41和第二伸缩探针42进行移动，进行完其中一个检测点的检测后，利用第一移动机构5将第一伸缩探针41和第二伸缩探针42移动至不与薄膜接触的位置，然后由旋转机构8和第二移动机构9对第一伸缩探针41和第二伸缩探针42进行水平方向的移动，如此可以避免划伤薄膜，减少因测量带来的薄膜报废情况。Preferably, the utility model selects several measuring points on the film to detect the thickness of the film, detects whether there is a defect in the film, and measures the height of the defective part of the film. During the measurement process, the first telescopic probe 41 and the second telescopic probe 42 need to be moved. After the detection of one of the detection points is completed, the first telescopic probe 41 and the second telescopic probe 41 are moved by the first moving mechanism 5. 42 moves to a position not in contact with the film, and then the first telescopic probe 41 and the second telescopic probe 42 are moved horizontally by the rotating mechanism 8 and the second moving mechanism 9, so as to avoid scratching the film and reduce the Measure the resulting film scrap.
旋转机构8与探针组100连接，用于在第一伸缩探针41和第二伸缩探针42不接触薄膜2时旋转探针组100。The rotating mechanism 8 is connected with the probe set 100 for rotating the probe set 100 when the first telescopic probe 41 and the second telescopic probe 42 are not in contact with the film 2 .
第二移动机构9分别与第一伸缩探针41和第二伸缩探针42连接，用于在第一伸缩探针41和第二伸缩探针42不接触薄膜2时在水平方向上移动第一伸缩探针41和/或第二伸缩探针42。The second moving mechanism 9 is respectively connected with the first telescopic probe 41 and the second telescopic probe 42, and is used to move the first telescopic probe 41 and the second telescopic probe 42 in the horizontal direction when the first telescopic probe 41 and the second telescopic probe 42 do not contact the film 2. Telescopic probe 41 and/or second telescopic probe 42 .
具体来说，第一伸缩探针41和第二伸缩探针42分别固定在第二移动机构9的一侧，结合图2中第二移动机构9两侧的箭头可知，第二移动机构9类似于一个可以在水平方向上进行伸缩动作的结构，可以同时向相反方向移动第二移动机构9，以带动第一伸缩探针41和第二伸缩探针42向相反方向移动，同时，也可以保持其中一侧不移动，而只移动另一侧，例如，保持第二移动机构9与第一伸缩探针41连接的一侧不动，而仅移动其与第二伸缩探针42连接的一侧。Specifically, the first telescopic probe 41 and the second telescopic probe 42 are respectively fixed on one side of the second moving mechanism 9. It can be seen from the arrows on both sides of the second moving mechanism 9 in FIG. 2 that the second moving mechanism 9 is similar to Based on a structure that can perform telescopic actions in the horizontal direction, the second moving mechanism 9 can be moved in the opposite direction at the same time, so as to drive the first telescopic probe 41 and the second telescopic probe 42 to move in the opposite direction. At the same time, it can also maintain Wherein one side does not move, and only moves the other side, for example, keeps the side that the second moving mechanism 9 is connected with the first telescopic probe 41 still, and only moves its side that is connected with the second telescopic probe 42 .
优选的，第二移动机构9选用伺服步进机构。Preferably, the second moving mechanism 9 is a servo stepping mechanism.
其中，两个移动机构在一些情形中控制伸缩探针不接触薄膜的目的在于避免划伤薄膜。Wherein, the purpose of the two moving mechanisms to control the telescopic probe not to touch the film in some cases is to avoid scratching the film.
具体的测量步骤为，首先通过上述第一移动机构5、旋转机构8和第二移动机构9将薄膜测量装置移动至测量位置，根据薄膜2的预设厚度，设定受测薄膜2与第一伸缩探针41之间的距离和薄膜基板1与第二伸缩探针42之间的距离，下降探针，对薄膜2的厚度进行测量。The specific measurement steps are as follows: firstly, the film measuring device is moved to the measurement position through the above-mentioned first moving mechanism 5, rotating mechanism 8 and second moving mechanism 9, and according to the preset thickness of the film 2, set the measured film 2 and the first The distance between the telescopic probes 41 and the distance between the film substrate 1 and the second telescopic probe 42 are lowered to measure the thickness of the film 2 .
需要说明的是，图1中的缺陷部分3是薄膜2存在缺陷的一种示例性表示方法。薄膜2的缺陷部分3的高度测量，其实是在不断移动第一伸缩探针41和第二伸缩探针42过程中，发现第一伸缩探针41与薄膜2的上表面接触产生的基准压力和第二伸缩探针与所接触薄膜上表面产生的压力之间的压力差超过误差设定范围，从而认为该测量点的薄膜2的缺陷部分3，并计算缺陷部分3的高度。It should be noted that the defect portion 3 in FIG. 1 is an exemplary representation method of the defect in the film 2 . The height measurement of the defect portion 3 of the film 2 is actually to find the reference pressure and The pressure difference between the pressure generated by the second telescopic probe and the upper surface of the contacted film exceeds the error setting range, so that the defective part 3 of the film 2 at the measurement point is considered, and the height of the defective part 3 is calculated.
通过上述技术方案，本实用新型选择需要检测的薄膜或者薄膜的某个区域上的若干个点作为测量点，利用两个伸缩探针和压力检测单元进行检测，将检测的压力差转换为高度差，得到薄膜厚度，避免了现有技术中的测量方法在检测过程中对薄膜造成的划伤。同时，测量不受光学折射率等参数的影响，测量结果精确度高。Through the above technical scheme, the utility model selects the film to be detected or several points on a certain area of the film as measurement points, uses two telescopic probes and a pressure detection unit for detection, and converts the detected pressure difference into a height difference , to obtain the thickness of the film, avoiding the scratches caused to the film during the detection process by the measuring method in the prior art. At the same time, the measurement is not affected by parameters such as optical refractive index, and the measurement result is highly accurate.
以上结合附图详细描述了本实用新型实施例的可选实施方式，但是，本实用新型实施例并不限于上述实施方式中的具体细节，在本实用新型实施例的技术构思范围内，可以对本实用新型实施例的技术方案进行多种简单变型，这些简单变型均属于本实用新型实施例的保护范围。The optional implementation of the embodiment of the utility model has been described in detail above in conjunction with the accompanying drawings. However, the embodiment of the utility model is not limited to the specific details in the above-mentioned implementation. Various simple modifications are made to the technical solution of the embodiment of the utility model, and these simple modifications all belong to the protection scope of the embodiment of the utility model.
另外需要说明的是，在上述具体实施方式中所描述的各个具体技术特征，在不矛盾的情况下，可以通过任何合适的方式进行组合。为了避免不必要的重复，本实用新型实施例对各种可能的组合方式不再另行说明。In addition, it should be noted that the various specific technical features described in the above specific implementation manners may be combined in any suitable manner if there is no contradiction. In order to avoid unnecessary repetition, the embodiments of the present utility model will not further describe various possible combinations.
此外，本实用新型实施例的各种不同的实施方式之间也可以进行任意组合，只要其不违背本实用新型实施例的思想，其同样应当视为本实用新型实施例所公开的内容。In addition, any combination of various implementations of the embodiments of the present invention can also be made, as long as they do not violate the idea of the embodiments of the present invention, they should also be regarded as the content disclosed by the embodiments of the present invention.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111457820A (en) * | 2020-04-15 | 2020-07-28 | 武汉博联特科技有限公司 | High accuracy height measurement system based on pressure |
| CN117146752A (en) * | 2023-10-27 | 2023-12-01 | 山东合盛铜业有限公司 | Copper foil thickness detector and detection method |
| CN117848264A (en) * | 2024-03-08 | 2024-04-09 | 江苏德励达新材料股份有限公司 | Portable spraying check out test set |
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2019
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111457820A (en) * | 2020-04-15 | 2020-07-28 | 武汉博联特科技有限公司 | High accuracy height measurement system based on pressure |
| CN117146752A (en) * | 2023-10-27 | 2023-12-01 | 山东合盛铜业有限公司 | Copper foil thickness detector and detection method |
| CN117146752B (en) * | 2023-10-27 | 2024-02-02 | 山东合盛铜业有限公司 | Copper foil thickness detection Instrument and detection method |
| CN117848264A (en) * | 2024-03-08 | 2024-04-09 | 江苏德励达新材料股份有限公司 | Portable spraying check out test set |
| CN117848264B (en) * | 2024-03-08 | 2024-05-28 | 江苏德励达新材料股份有限公司 | Portable spraying check out test set |
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