CN209515629U - A kind of device of horizontal transfer silicium wafer - Google Patents

Abstract

The utility model discloses a kind of devices of horizontal transfer silicium wafer; including cabinet; cavity is equipped in the cabinet; lower rotation in the cavity is connected with rotating bar; top of the upper end of the rotating bar in the cavity and the upper end for extending to cabinet; bottom side in the cavity is fixed with guard box; servo motor is installed on one end side wall in the guard box; the output shaft end of the servo motor is fixed with connecting rod, one end side wall that one end of the connecting rod is run through in guard box and the side for extending to guard box.The utility model passes through the improvement to horizontal transfer device, solves the problems, such as inefficiency when horizontal transfer in existing silicium wafer production process, and it can be to silicium wafer stable holding by grip block and grip block, the clamping device of different size can also be replaced by the second screw, improve production efficiency, breakage rate is reduced, cost is saved, is easy to use.

Description

A kind of device of horizontal transfer silicium wafer

Technical field

The utility model relates to the technical field of silicium wafer processing more particularly to a kind of devices of horizontal transfer silicium wafer.

Background technique

Silicon crystal, i.e. silicon wafer, the crystalline solid of silicon are divided into monocrystalline silicon and polysilicon, and monocrystalline silicon can be used to make wafer, wafer It is the base stock for manufacturing integrated circuit；And high purity polycrystalline silicon is the basic material of electronics industry and solar photovoltaic industry.It is more Crystal silicon is the direct material for producing monocrystalline silicon, is the semiconductors such as contemporary artificial intelligence, automatic control, information processing, photoelectric conversion The electronics and information infrastructure material of device, referred to as " foundation stone of Microelectronics Building ".

But inefficiency when horizontal transfer in existing silicium wafer production process, cause production work efficiency low, increases The labor intensity for having added staff increases cost, and existing horizontal transfer equipment cannot stablize silicium wafer Clamping causes breakage rate high, suitable clamping device can't be replaced according to production needs, for this purpose, it is proposed that one The device of horizontal transfer silicium wafer is planted to solve the above problems.

Utility model content

Purpose of the utility model is to solve disadvantages existing in the prior art, and a kind of horizontal transfer silicon proposed The device of chip.

To achieve the goals above, the utility model adopts the technical scheme that

A kind of device of horizontal transfer silicium wafer, including cabinet, the cabinet is interior to be equipped with cavity, the bottom in the cavity It is rotatably connected to rotating bar, the top that the upper end of the rotating bar is run through in cavity and the upper end for extending to cabinet, the cavity Interior bottom side is fixed with guard box, and servo motor, the servo motor are equipped on one end side wall in the guard box Output shaft end be fixed with connecting rod, one end side wall of the one end of the connecting rod in guard box simultaneously extends to guard box Side, one end of the connecting rod is fixed with the second angular wheel, the first angular wheel, and is fixed in the rotating bar One angular wheel and the intermeshing of the second angular wheel, the upper end of the cabinet are equipped with rotating device, the rotating device it is upper End is equipped with mechanical arm, and one end of the mechanical arm is equipped with clamping device.

Preferably, the rotating device includes the rotor plate that cabinet upper end is arranged in, and the upper end of the cabinet is equipped with circle Sliding slot, there are four arc shaped sliders for the interior installation of circle sliding slot, and the upper end of four arc shaped sliders is fixed under rotor plate jointly End, the upper end of the rotating bar are fixed on the lower end of rotor plate, and the lower end of the mechanical arm is fixed with mounting plate, the mounting plate The upper end of rotor plate is mounted on by four the first screws.

Preferably, the clamping device includes the fixed plate that mechanical arm side is arranged in, and runs through in the fixed plate and is equipped with The side of two the second screws, the mechanical arm is equipped with tapped through hole corresponding with the second screw, and one end of the second screw is prolonged It extending in tapped through hole, the side lower end of the fixed plate is fixed with connecting plate, and the side of the connecting plate is equipped with grip block, The side of the fixed plate is rotatably connected to electric telescopic rod, and one end of the electric telescopic rod is rotatably connected to grip block, institute The one end for stating grip block is rotatably connected on the side of fixed plate, and fixed plate is corresponding with grip block and connecting plate.

Preferably, the side of the grip block is equipped with rubber layer.

Preferably, the lower end quadrangle of the cabinet is respectively and fixedly provided with supporting block.

Preferably, the grip block is made of high temperature resistant silica gel.

Compared with prior art, the utility model has the beneficial effects that

1, it by servo motor, the cooperation of rotating bar, the first angular wheel, the second angular wheel and rotating device, uses Servo motor drives turn disc, solves the problems, such as inefficiency when horizontal transfer in existing silicium wafer production process, The purpose for improving and stretching production efficiency is realized, the labor intensity of staff is reduced；

2, by the cooperation of support arm, the second screw and clamping device, solving existing horizontal transfer equipment cannot be right Silicium wafer carries out the problem of stable holding, realizes the purpose for reducing breakage rate, and by the second screw, can replace difference The clamping device of specification, reduces costs, and is easy to use；

In conclusion the present apparatus solves the problems, such as inefficiency when horizontal transfer in existing silicium wafer production process, It and can be to silicium wafer stable holding by grip block and grip block, moreover it is possible to the clamping of different size is replaced by the second screw Device improves production efficiency, reduces breakage rate, saves cost, is easy to use.

Detailed description of the invention

Fig. 1 be the utility model proposes a kind of horizontal transfer silicium wafer device schematic diagram of internal structure；

Fig. 2 be the utility model proposes a kind of horizontal transfer silicium wafer device external structure schematic diagram；

Fig. 3 be the utility model proposes a kind of horizontal transfer silicium wafer device A at enlarged drawing；

Fig. 4 be the utility model proposes a kind of horizontal transfer silicium wafer device box structural schematic diagram.

In figure: 1 rotating bar, 2 cabinets, 3 arc shaped sliders, 4 rotor plates, 5 first screws, 6 mechanical arms, 7 mounting plates, 8 first Angular wheel, 9 second angular wheels, 10 guard boxs, 11 servo motors, 12 supporting blocks, 13 grip blocks, 14 connecting plates, 15 clampings Plate, 16 electric telescopic rods, 17 fixed plates, 18 second screws, 19 tapped through holes, 20 round sliding slots.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.

Referring to Fig.1-4, a kind of device of horizontal transfer silicium wafer, including cabinet 2, the lower end quadrangle of cabinet 2 are respectively and fixedly provided with Supporting block 12, cabinet 2 is interior to be equipped with cavity, and the lower rotation in cavity is connected with rotating bar 1, and cavity is run through in the upper end of rotating bar 1 Interior top and the upper end for extending to cabinet 2, the bottom side in cavity are fixed with guard box 10, play a protective role, protect Servo motor 11 is installed on one end side wall in case 10, stable power is provided, the output shaft end of servo motor 11 is fixed There is connecting rod, one end side wall that one end of connecting rod is run through in guard box 10 and the side for extending to guard box 10 pass through support Block 12 realizes and stablizes support to cabinet 2；

One end of connecting rod is fixed with the second angular wheel 9, and the first angular wheel 8, and the first cone are fixed in rotating bar 1 Shape gear 8 and the intermeshing of the second angular wheel 9, facilitate change rotation direction, and the upper end of cabinet 2 is equipped with rotating device, rotation The upper end of device is equipped with mechanical arm 6, and one end of mechanical arm 6 is equipped with clamping device, passes through the first angular wheel 8 and the second conical tooth Wheel 9 changes the direction of rotation, facilitates conveying power.

In the utility model, rotating device includes the rotor plate 4 that 2 upper end of cabinet is arranged in, and the upper end of cabinet 2 is equipped with circle Sliding slot 20, there are four arc shaped sliders 3 for the interior installation of round sliding slot 20, improve stability when rotation, reduce resistance when rotation Power, the upper end of four arc shaped sliders 3 are fixed on the lower end of rotor plate 4 jointly, and the upper end of rotating bar 1 is fixed under rotor plate 4 End, the lower end of mechanical arm 6 are fixed with mounting plate 7, and mounting plate 7 is mounted on the upper end of rotor plate 4 by four the first screws 5, made The rotation of the first angular wheel 8 is driven with servo motor 11, to drive the rotation of the second angular wheel 9, then drive, which is fixed on, turns Rotor plate 4 in lever 1 rotates, and rotor plate 4 passes through round sliding slot 20 and 3 stable rotation of arc shaped slider, and then drives mechanical arm 6 Rotation, realizes the horizontal transfer to silicium wafer, and mechanical arm 6 is safeguarded and replaced by the way that the first screw 5 is convenient, is reduced Cost.

In the utility model, clamping device includes the fixed plate 17 that 6 side of mechanical arm is arranged in, and runs through in fixed plate 17 and sets There are two the second screw 18, the side of mechanical arm 6 is equipped with tapped through hole 19 corresponding with the second screw 18, and the second screw 18 One end extends in tapped through hole 19, and easy to disassemble and replacement, the side lower end of fixed plate 17 is fixed with connecting plate 14, connecting plate 14 side is equipped with grip block 13, and grip block 13 is made of high temperature resistant silica gel, avoids the damage to silicium wafer, fixed plate 17 side is rotatably connected to electric telescopic rod 16, and one end of electric telescopic rod 16 is rotatably connected to grip block 15, grip block 15 Side rubber layer is installed, facilitate and clamped, the side of grip block 13 is extended to the lower end of silicium wafer, pass through rotation connect Connecing the electric telescopic rod 16 in 17 side of fixed plate drives grip block 15 to rotate, so that the stable holding to silicium wafer is realized, One end of grip block 15 is rotatably connected on the side of fixed plate 17, and fixed plate 17 is corresponding with grip block 13 and connecting plate 14, By clamping device, the damage of silicium wafer is reduced, the stable holding to silicium wafer is realized, reduces breakage rate.

In the utility model, when in use, mounting plate 7 is mounted on to the upper end of rotor plate 4 using the first screw 5, it is convenient Fixed plate 17, the side of mechanical arm 6 is mounted on using the second screw 18, when operating, by grip block 13 by maintenance and replacement Side extends to the lower end of silicium wafer, and the electric telescopic rod 16 by being rotatably connected on 17 side of fixed plate drives 15 turns of grip block It is dynamic, to realize the stable holding to silicium wafer, drive the first angular wheel 8 to rotate using servo motor 11, to drive The rotation of second angular wheel 9 then drives the rotor plate 4 being fixed in rotating bar 1 to rotate, and rotor plate 4 passes through round sliding slot 20 With 3 stable rotation of arc shaped slider, and then drive mechanical arm 6 rotate, realize the horizontal transfer to silicium wafer, be easy to use.

The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model Within enclosing.

Claims (6)

1. a kind of device of horizontal transfer silicium wafer, including cabinet (2), it is characterised in that: cavity is equipped in the cabinet (2), Lower rotation in the cavity is connected with rotating bar (1), top and extension of the upper end of the rotating bar (1) in cavity To the upper end of cabinet (2), the bottom side in the cavity is fixed with guard box (10), the one end in the guard box (10) It is equipped on wall servo motor (11), the output shaft end of the servo motor (11) is fixed with connecting rod, the connecting rod One end side wall of the one end in guard box (10) and the side for extending to guard box (10), one end of the connecting rod is fixed with Second angular wheel (9) is fixed with the first angular wheel (8) on the rotating bar (1), and the first angular wheel (8) and second Angular wheel (9) intermeshing, the upper end of the cabinet (2) are equipped with rotating device, and the upper end of the rotating device is equipped with machinery One end of arm (6), the mechanical arm (6) is equipped with clamping device.

2. a kind of device of horizontal transfer silicium wafer according to claim 1, which is characterized in that the rotating device includes Rotor plate (4) in cabinet (2) upper end is set, and the upper end of the cabinet (2) is equipped with round sliding slot (20), the circle sliding slot (20) there are four arc shaped slider (3) for installation in, and the upper end of four arc shaped sliders (3) is fixed on the lower end of rotor plate (4), institute jointly The upper end for stating rotating bar (1) is fixed on the lower end of rotor plate (4), and the lower end of the mechanical arm (6) is fixed with mounting plate (7), institute State the upper end that mounting plate (7) are mounted on rotor plate (4) by four the first screws (5).

3. a kind of device of horizontal transfer silicium wafer according to claim 1, which is characterized in that the clamping device includes Fixed plate (17) in mechanical arm (6) side is set, is run through there are two setting the second screw (18) on the fixed plate (17), it is described The side of mechanical arm (6) is equipped with tapped through hole (19) corresponding with the second screw (18), and one end of the second screw (18) extends In to tapped through hole (19), the side lower end of the fixed plate (17) is fixed with connecting plate (14), and the one of the connecting plate (14) Side is equipped with grip block (13), and the side of the fixed plate (17) is rotatably connected to electric telescopic rod (16), the electric expansion One end of bar (16) is rotatably connected to grip block (15), and one end of the grip block (15) is rotatably connected on the one of fixed plate (17) Side, and fixed plate (17) is corresponding with grip block (13) and connecting plate (14).

4. a kind of device of horizontal transfer silicium wafer according to claim 3, which is characterized in that the grip block (15) Side is equipped with rubber layer.

5. a kind of device of horizontal transfer silicium wafer according to claim 1, which is characterized in that under the cabinet (2) End quadrangle is respectively and fixedly provided with supporting block (12).

6. a kind of device of horizontal transfer silicium wafer according to claim 3, which is characterized in that the grip block (13) is adopted It is made of high temperature resistant silica gel.