CN209496844U - A kind of hundred shaping charging equipments of silicon wafer - Google Patents

A kind of hundred shaping charging equipments of silicon wafer Download PDF

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Publication number
CN209496844U
CN209496844U CN201920379226.5U CN201920379226U CN209496844U CN 209496844 U CN209496844 U CN 209496844U CN 201920379226 U CN201920379226 U CN 201920379226U CN 209496844 U CN209496844 U CN 209496844U
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China
Prior art keywords
silicon wafer
fixedly connected
mounting rack
screw rod
clamping
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CN201920379226.5U
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Chinese (zh)
Inventor
申灿
刘春宇
王兵
杨晓华
沈传军
陈大剑
唐中
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Changzhou Hua Jin Ming Intelligent Equipment Technology Research Institute Co Ltd
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Changzhou Hua Jin Ming Intelligent Equipment Technology Research Institute Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The utility model discloses a kind of hundred shaping charging equipments of silicon wafer, including equipment rack, the upper surface of the equipment rack is fixedly installed with a silicon wafer lift mechanism, a piece folder conveying microscope carrier is fixedly installed on the silicon wafer lift mechanism, the surface of described folder conveying microscope carrier is equipped with a silicon wafer and stacks reshaping device, the lower end that the silicon wafer stacks reshaping device is respectively fixedly connected with the four corners in silicon wafer lift mechanism upper surface, the silicon wafer lift mechanism includes support plate, the beneficial effects of the utility model are: a kind of the utility model hundred shaping charging equipments of silicon wafer, its structure novel, it is easy to operate, it is easy to use, pass through the input of front and back end, output, convenient, flexible hundred shapings of silicon wafer for realizing this station, piece presss from both sides station replacement charging, improve productivity, it saves artificial, reduce silicon wafer loss, improve work effect Rate and quality, and system information is synchronized and is followed, and improves the trackability of product.

Description

A kind of hundred shaping charging equipments of silicon wafer
Technical field
The utility model relates to a kind of shaping charging equipment, in particular to a kind of hundred charging equipments of thin slice silicon wafer belong to Photovoltaic equipment technical field.
Background technique
Since black silicon wafer belongs to fragile article, silicon wafer single-sheet thickness only has 0.2mm, using turnover box transportation;It is needed at feeding end Manually 100 silicon wafers to be put into upper tablet folder, upper tablet folder is re-fed into production line and carries out making herbs into wool production;Since silicon wafer has Have thin and frangible characteristic, be easy to produce in feeding process touch while, it is broken while, information tracing is poor, and the duplication of labour is big, and efficiency is not Height, Personnel Dependence are strong.
Utility model content
The technical problems to be solved in the utility model is to overcome the deficiencies of existing technologies, and is provided in a kind of hundred shapings of silicon wafer Equipment is expected, to solve the problems, such as to mention in above-mentioned background technique.
In order to solve the above-mentioned technical problem, the utility model provides the following technical solution:
A kind of the utility model hundred shaping charging equipments of silicon wafer, including equipment rack, the upper surface of the equipment rack It is fixedly installed with a silicon wafer lift mechanism, a piece folder conveying microscope carrier is fixedly installed on the silicon wafer lift mechanism, it is described The surface of piece folder conveying microscope carrier is equipped with a silicon wafer and stacks reshaping device, and the lower end that the silicon wafer stacks reshaping device is solid respectively Surely the four corners of silicon wafer lift mechanism upper surface are connected to.
As a kind of optimal technical scheme of the utility model, the silicon wafer lift mechanism includes support plate, the support Plate is fixedly connected on the upper surface of equipment rack, and the upper surface of the support plate is fixedly connected with two first straight line guide rails, and two Slidably connect the servo electric cylinders an of setting in a vertical shape on first straight line guide rail described in item, two servo electric cylinders Lower end, which is run through support plate and extended, to be extended downwardly, and the output end of two servo electric cylinders runs through the upper of first straight line guide rail An electric cylinders top plate is held and upwardly extends and be fixedly connected with, the upper surface of the support plate is about in two first straight line guide rails The position of heart line is fixedly connected with an electric cylinders mobile cylinder, and the output end of the electric cylinders mobile cylinder is fixedly connected on two and watches It takes in electric cylinders.
As a kind of optimal technical scheme of the utility model, described folder conveying microscope carrier includes bracket, and the bracket is solid Dingan County is mounted in the upper surface of equipment rack, slidably connects two pieces of limited blocks at the wherein one side edge of the rack upper surface, The position of the corresponding two pieces of limited blocks in the lower surface of the bracket is fixedly connected to a driving motor, the lower surface of the bracket It is fixedly connected at one side edge far from driving motor there are two rotating clamping cylinder, it is solid in two opposite side walls of the bracket Surely it is connected with a side and pushes away clamping cylinder, there are four upper tablets to press from both sides for the upper surface placement of the bracket, feeding described in two of them The wherein side side wall of piece folder offsets with corresponding limited block, two sides push away the output end of clamping cylinder respectively with four The correspondence side wall of upper tablet folder offsets, and upper tablet corresponding with two presss from both sides phase to the output end of two rotation clamping cylinders respectively It supports.
As a kind of optimal technical scheme of the utility model, it includes fixed frame that the silicon wafer, which stacks reshaping device, described Fixed frame is fixedly connected on the four corners of support plate upper surface, and the upper surface of the fixed frame is fixedly connected with two second straight lines Guide rail, slidably connects a mounting rack on two second straight line guide rails jointly, the side wall of the fixed frame wherein side On be fixedly connected with station cylinder switching, the upper end of the station cylinder switching is fixedly connected on the lower surface of mounting rack, described Mounting rack is wherein threaded with a front and back on the side wall of side and clamps screw rod, and the both ends that the front and back clamps screw rod are run through The correspondence side wall of mounting rack simultaneously extends outwardly, and the front and back clamps wherein one end that screw rod is located at outside mounting rack and is fixedly connected with one A front and back clamping motor, the front and back clamping motor are fixedly connected with before and after two panels far from one end that front and back clamps screw rod and clamp Plate passes through bearing between the two opposite side walls of the mounting rack and is rotatablely connected one or so clampings screw rod, the left and right clamping silk Wherein one end of bar runs through the correspondence side wall of mounting rack and extends outwardly, and the corresponding left and right in the upper surface of the mounting rack clamps screw rod Position be fixedly connected with one or so clamping motor, the output end of the left and right clamping motor is fixedly connected on left and right and clamps silk Bar is located at one end outside mounting rack, and the upper surface of the mounting rack is fixedly connected with a third linear guide, and the third is straight Two groups or so clamping plates are slidably connected on line guide rail, left and right clamping plate described in every group includes two pieces of left and right being symmetrical set Clamping plate, the left and right in the two opposite side walls of the mounting rack clamp the screw thread on screw rod bar wall about every group two pieces or so Clamping plate is arranged in symmetry shape, and four pieces of left and right clamping plates clamp screw rod to threaded connection with left and right.
The beneficial effects of the utility model are: a kind of the utility model hundred shaping charging equipments of silicon wafer, structure novel, It is easy to operate, it is easy to use, by the input of front and back end, output, convenient, flexible silicon wafer hundred shapings, pieces for realizing this station Station replacement charging is pressed from both sides, productivity is improved, saving is artificial, reduces silicon wafer loss, improves working efficiency and quality, and system information It synchronizes and follows, improve the trackability of product.
Detailed description of the invention
Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention.In the accompanying drawings:
Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention.In the accompanying drawings:
Fig. 1 is the overall structure diagram of the utility model;
Fig. 2 is the overall structure diagram of the utility model silicon wafer lift mechanism;
Fig. 3 is the overlooking structure diagram of the utility model silicon wafer lift mechanism;
Fig. 4 is the overall structure diagram of the utility model piece folder conveying microscope carrier;
Fig. 5 is the overall structure diagram that the utility model silicon wafer stacks reshaping device;
Fig. 6 is the overlooking structure diagram that the utility model silicon wafer stacks reshaping device.
In figure:
1, equipment rack;
2, silicon wafer lift mechanism;21, servo electric cylinders;22, first straight line guide rail;23, electric cylinders top plate;24, the mobile gas of electric cylinders Cylinder;25, support plate;
3, piece folder conveying microscope carrier;31, driving motor;32, side pushes away clamping cylinder;33, clamping cylinder is rotated;34, limited block; 35, bracket;36, upper tablet folder;
4, silicon wafer stacks reshaping device;41, station cylinder switching;42, second straight line guide rail;43, front and back clamping plate;44, Front and back clamping motor;45, front and back clamps screw rod;46, left and right clamping plate;47, second straight line guide rail;48, left and right clamps screw rod; 49, left and right clamping motor;410, fixed frame;411, mounting rack.
Specific embodiment
It is illustrated below in conjunction with preferred embodiment of the attached drawing to the utility model, it should be understood that described herein excellent It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.
Embodiment
As shown in figures 1 to 6, hundred shaping charging equipments of a kind of silicon wafer of the utility model, including equipment rack 1, equipment rack 1 upper surface is fixedly installed with a silicon wafer lift mechanism 2, and a piece folder conveying is fixedly installed on silicon wafer lift mechanism 2 and is carried Platform 3, the surface of piece folder conveying microscope carrier 3 are equipped with a silicon wafer and stack reshaping device 4, and silicon wafer stacks the lower end point of reshaping device 4 It is not fixedly connected on the four corners of 2 upper surface of silicon wafer lift mechanism.
Silicon wafer lift mechanism 2 includes support plate 25, and support plate 25 is fixedly connected on the upper surface of equipment rack 1, support plate 25 upper surface is fixedly connected with two first straight line guide rails 22, slidably connects one on two first straight line guide rails 22 and is in The servo electric cylinders 21 of vertical shape setting, the lower end of two servo electric cylinders 21, which is run through support plate 25 and extended, to be extended downwardly, and two The output end of servo electric cylinders 21 runs through the upper end of first straight line guide rail 22 and upwardly extends and be fixedly connected with an electric cylinders top The upper surface of plate 23, support plate 25 is fixedly connected with an electric cylinders movement about the position of two 22 center lines of first straight line guide rail Cylinder 24, the output end of electric cylinders mobile cylinder 24 are fixedly connected in two servo electric cylinders 21.
Piece folder conveying microscope carrier 3 includes bracket 35, and bracket 35 is fixedly mounted on the upper surface of equipment rack 1, table on bracket 35 Two pieces of limited blocks 34, the position of the corresponding two pieces of limited blocks 34 in the lower surface of bracket 35 are slidably connected at the wherein one side edge in face It is fixedly connected to a driving motor 31, the lower surface of bracket 35 at the one side edge of driving motor 31 far from being fixedly connected with Two rotation clamping cylinders 33 are fixedly connected to a side in two opposite side walls of bracket 35 and push away clamping cylinder 32, bracket 35 Upper surface place there are four upper tablet folder 36, in two of them the wherein side side wall of tablet folder 36 with corresponding limited block 34 offset, and the output end that two sides push away clamping cylinder 32 offsets with the corresponding side wall of four upper tablet folders 36 respectively, two rotations Upper tablet folder 36 corresponding with two offsets the output end of clamping cylinder 33 respectively.
It includes fixed frame 410 that silicon wafer, which stacks reshaping device 4, and fixed frame 410 is fixedly connected on the four of 25 upper surface of support plate At angle, the upper surface of fixed frame 410 is fixedly connected with two second straight line guide rails 42, slides jointly on two second straight line guide rails 42 Dynamic to be connected with a mounting rack 411, fixed frame 410 is wherein fixedly connected with station cylinder switching 41, station on the side wall of side The upper end of cylinder switching 41 is fixedly connected on the lower surface of mounting rack 411, and mounting rack 411 is wherein threadedly coupled on the side wall of side There is a front and back to clamp screw rod 45, the both ends that front and back clamps screw rod 45 run through the correspondence side wall of mounting rack 411 and extend outwardly, Front and back clamps screw rod 45 and is located at clamping motor 44 before and after wherein one end outside mounting rack 411 is fixedly connected with one, and front and back clamps Motor 44 is fixedly connected with two panels front and back clamping plate 43, the two opposite sides of mounting rack 411 far from one end that front and back clamps screw rod 45 One or so clamping screw rod 48 is rotatablely connected by bearing between wall, mounting rack is run through in wherein one end that left and right clamps screw rod 48 411 correspondence side wall simultaneously extends outwardly, and the position that the corresponding left and right in the upper surface of mounting rack 411 clamps screw rod 48 is fixedly connected with one A or so clamping motor 49, the output end of left and right clamping motor 49 are fixedly connected on left and right clamping screw rod 48 and are located at mounting rack 411 Outer one end, the upper surface of mounting rack 411 are fixedly connected with a third linear guide 47, are slidably connected in third linear guide There are two groups or so clamping plates 46, every group or so clamping plate 46 includes two pieces of left and right clamping plates 46 being symmetrical set, and is located at peace It is in pair that the screw thread on the left and right clamping 48 bar wall of screw rod in 411 two opposite side walls, which is shelved, about every group two pieces or so clamping plates 46 Claim shape setting, four pieces or so clamping plates 46 clamp screw rod 48 to threaded connection with left and right.
Specifically, when the utility model is used, upper tablet folder 36 is sent into piece folder conveying microscope carrier 3 by rear end equipment conveying In, the start-up operation of clamping cylinder 32 is pushed away when upper tablet folder 36 bumps against on rear side of limited block 34, upper tablet folder 36 is pushed into fix on one side, The start-up operation of clamping cylinder 33 is rotated simultaneously, upper tablet folder 36 is pushed to 34 direction of limited block, it is fixed;Upper tablet After folder 36 is fixed, silicon wafer stacks reshaping device 4 and starts, and detects each component state and returns origin, by station cylinder switching 41 Silicon wafer stacking reshaping device 4 is moved to piece and presss from both sides the first station;After silicon wafer stacks 4 first station on earth of reshaping device, silicon wafer Lift mechanism 2 starts, and detects each component state and returns origin, by electric cylinders mobile cylinder 24 that silicon wafer lift mechanism 2 is mobile The first station is pressed from both sides to piece, servo electric cylinders 21 drive electric cylinders top plate 23 to stretch out, and upper tablet is pressed from both sides the working plate in 36 and is jacked to setting Highly, which is located at silicon wafer and stacks in reshaping device 4, by setting in debugging process;It is reached in all mechanisms initial After state, one whole hundred silicon chip extracting is placed on the electric cylinders top plate 23 extended in silicon wafer stacking reshaping device 4 by feed mechanism On, later left and right clamping motor 49 by left and right clamp screw rod 48 drive left and right clamping plate 46, by the shaping of silicon wafer left and right directions, Centering;Screw rod 45 is clamped by front and back by front and back clamping motor 44 again later and drives front and back clamping plate 43, by silicon wafer front and back To shaping;Servo electric cylinders 21 drive electric cylinders top plate 23, silicon wafer to decline together after shaping, and whole hundred silicon wafer thickness completes one Secondary silicon wafer shaping;The processes such as decline are driven by continuous whole hundred silicon wafers placement, shaping, servo electric cylinders 21, are completed four times whole hundred Piece is one group of stocking process;After the first station is four whole hundred full, servo electric cylinders 21 drop to minimum, and silicon wafer lift mechanism 2 is logical Electric cylinders mobile cylinder 24 is crossed, electric cylinders and its attached electric cylinders top plate 23 are moved to upper tablet and press from both sides 36 second stations;Meanwhile silicon wafer heap Silicon wafer stacking reshaping device 4 is moved integrally supreme tablet and presss from both sides 36 second works by folded reshaping device 4 by station cylinder switching 41 Position;After silicon wafer stacks reshaping device 4 and silicon wafer lift mechanism 2 reaches second station, servo electric cylinders 21 are stretched out, by electric cylinders top plate 23 jackings to silicon wafer stacks the height set in reshaping device 4, repeats the processes such as above whole hundred silicon wafers placement, shaping, pan feeding;When After first, second station all expires four whole hundred silicon wafers, upper tablet folder 36 presss from both sides conveying microscope carrier 3 by piece and exports this shaping device, from And the process for completing silicon wafer shaping feeding.
Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention, it is not limited to this Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art For, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic It is equivalently replaced.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on, It should be included within the scope of protection of this utility model.
Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention, it is not limited to this Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art For, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic It is equivalently replaced.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on, It should be included within the scope of protection of this utility model.

Claims (4)

1. a kind of hundred shaping charging equipments of silicon wafer, which is characterized in that including equipment rack (1), the equipment rack (1) it is upper Surface is fixedly installed with a silicon wafer lift mechanism (2), and a piece folder conveying is fixedly installed on the silicon wafer lift mechanism (2) Microscope carrier (3), the surface of described folder conveying microscope carrier (3) are equipped with a silicon wafer and stack reshaping device (4), and the silicon wafer stacks whole The lower end of shape mechanism (4) is respectively fixedly connected with the four corners in silicon wafer lift mechanism (2) upper surface.
2. hundred shaping charging equipments of a kind of silicon wafer according to claim 1, which is characterized in that the silicon wafer lift mechanism It (2) include support plate (25), the support plate (25) is fixedly connected on the upper surface of equipment rack (1), the support plate (25) Upper surface be fixedly connected with two first straight line guide rails (22), slidably connected on two first straight line guide rails (22) The servo electric cylinders (21) of one setting in a vertical shape, the lower end of two servo electric cylinders (21) are run through support plate (25) and are prolonged It stretches and extends downwardly, the output end of two servo electric cylinders (21) runs through the upper end of first straight line guide rail (22) and upwardly extends And it is fixedly connected with an electric cylinders top plate (23), the upper surface of the support plate (25) is about in two first straight line guide rails (22) The position of heart line is fixedly connected with an electric cylinders mobile cylinder (24), and the output end of the electric cylinders mobile cylinder (24) is fixedly connected On two servo electric cylinders (21).
3. hundred shaping charging equipments of a kind of silicon wafer according to claim 1, which is characterized in that described folder conveys microscope carrier It (3) include bracket (35), the bracket (35) is fixedly mounted on the upper surface of equipment rack (1), bracket (35) upper surface Wherein one side edge at slidably connect two pieces of limited blocks (34), the corresponding two pieces of limited blocks in the lower surface of the bracket (35) (34) position is fixedly connected to a driving motor (31), and the lower surface of the bracket (35) is far from driving motor (31) It is fixedly connected at one side edge there are two clamping cylinder (33) are rotated, is fixedly connected in two opposite side walls of the bracket (35) There is a side to push away clamping cylinder (32), there are four upper tablet folder (36), two of them institutes for the upper surface placement of the bracket (35) The wherein side side wall for stating tablet folder (36) offsets with corresponding limited block (34), and two sides push away clamping cylinder (32) Output end offset respectively with the corresponding side walls of four upper tablets folders (36), the output ends of two rotations clamping cylinder (33) Upper tablet folder (36) corresponding with two offsets respectively.
4. hundred shaping charging equipments of a kind of silicon wafer according to claim 1, which is characterized in that the silicon wafer stacks shaping Mechanism (4) includes fixed frame (410), and the fixed frame (410) is fixedly connected on the four corners of support plate (25) upper surface, described The upper surface of fixed frame (410) is fixedly connected with two second straight line guide rails (42), on two second straight line guide rails (42) Slidably connect a mounting rack (411) jointly, the fixed frame (410) is wherein fixedly connected with station on the side wall of side and turns It takes a breath cylinder (41), the upper end of the station cylinder switching (41) is fixedly connected on the lower surface of mounting rack (411), the mounting rack (411) it is wherein threaded with a front and back on the side wall of side and clamps screw rod (45), the front and back clamps the two of screw rod (45) End runs through the correspondence side wall of mounting rack (411) and extends outwardly, and the front and back clamps screw rod (45) and is located at mounting rack (411) outside Wherein one end be fixedly connected with one front and back clamping motor (44), the front and back clamping motor (44) far from front and back clamp screw rod (45) one end is fixedly connected with clamping plate (43) before and after two panels, passes through axis between the two opposite side walls of the mounting rack (411) One or so clamping screw rod (48) of rotation connection is held, mounting rack (411) are run through in wherein one end that the left and right clamps screw rod (48) Correspondence side wall and extend outwardly, the position that the corresponding left and right in the upper surface of the mounting rack (411) clamps screw rod (48) fixed connects It is connected to one or so clamping motor (49), the output end of the left and right clamping motor (49) is fixedly connected on left and right and clamps screw rod (48) it is located at the one end of mounting rack (411) outside, the upper surface of the mounting rack (411) is fixedly connected with a third linear guide (47), two groups or so clamping plates (46) are slidably connected in the third linear guide, left and right clamping plate (46) described in every group is equal The left and right clamping plate (46) being symmetrical set including two pieces, the left and right folder being located in the two opposite side walls of the mounting rack (411) Screw thread on tight screw rod (48) bar wall is arranged about every group two pieces or so clamping plates (46) in symmetry shape, and four pieces of left and right clamp Plate (46) clamps screw rod (48) to threaded connection with left and right.
CN201920379226.5U 2019-03-25 2019-03-25 A kind of hundred shaping charging equipments of silicon wafer Active CN209496844U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920379226.5U CN209496844U (en) 2019-03-25 2019-03-25 A kind of hundred shaping charging equipments of silicon wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920379226.5U CN209496844U (en) 2019-03-25 2019-03-25 A kind of hundred shaping charging equipments of silicon wafer

Publications (1)

Publication Number Publication Date
CN209496844U true CN209496844U (en) 2019-10-15

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CN201920379226.5U Active CN209496844U (en) 2019-03-25 2019-03-25 A kind of hundred shaping charging equipments of silicon wafer

Country Status (1)

Country Link
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