CN209324038U - A kind of toilet for semiconductor workshop - Google Patents
A kind of toilet for semiconductor workshop Download PDFInfo
- Publication number
- CN209324038U CN209324038U CN201821626296.8U CN201821626296U CN209324038U CN 209324038 U CN209324038 U CN 209324038U CN 201821626296 U CN201821626296 U CN 201821626296U CN 209324038 U CN209324038 U CN 209324038U
- Authority
- CN
- China
- Prior art keywords
- wall
- chamber body
- filter plate
- face
- shaped board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 18
- 239000000428 dust Substances 0.000 claims abstract description 43
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 20
- 238000010521 absorption reaction Methods 0.000 claims abstract description 7
- 230000001681 protective effect Effects 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 3
- 239000012535 impurity Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
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- Ventilation (AREA)
Abstract
The utility model discloses a kind of toilets for semiconductor workshop, including chamber body, filter plate, HEPA filter plate and active carbon slab, chamber body inner wall bottom is provided with hollow support seat, hollow support seat upper surface is provided with U-shaped board, U-shaped board inner wall side is provided with air intake duct, the U-shaped board inner wall other side is provided with connecting tube, and connecting tube one end is connect with air intake duct, air-breathing pipe outer wall side is provided with several dust absorption nozzles with pipe outer wall side is connect, U-shaped board inner wall top is provided with blower A, the air intake duct other end passes through chamber body and is connect by connector with air inlet pipe, the air inlet pipe other end is provided with dust removal cabinet, dust removal cabinet inner wall two sides are provided with U-shaped card plate.The utility model will not bring external dust by the settings of structures a series of, that can be dusted processing to the staff entered inside chamber body, while the dust drawn facilitates and cleared up.
Description
Technical field
The utility model relates to purification techniques field, specifically a kind of toilet for semiconductor workshop.
Background technique
Toilet is essential cleaning corollary equipment in modern workshop, it can remove the dust of cargo surfaces, simultaneously
Again to the clean area of toilet two sides and non-clean area play the role of buffering be isolated, the equipment be widely used in food, doctor
The fields such as medicine, bioengineering and precise electronic.
And existing semiconductor workshop toilet, staff do not set to what is be dusted mostly when entering internal
Standby, the dust of the garment for clean room with staff, which brings semiconductor workshop toilet into, to be polluted to internal semiconductor equipment
It damages, brings economic loss when to production, therefore, be unsatisfactory for existing use demand.
Utility model content
It is in the prior art to solve the purpose of this utility model is to provide a kind of toilet for semiconductor workshop
Problem.
To achieve the above object, the utility model provides the following technical solutions: a kind of toilet for semiconductor workshop,
Including chamber body, filter plate, HEPA filter plate and active carbon slab, chamber body inner wall bottom is provided with hollow support seat, described hollow
Support base upper surface is provided with U-shaped board, and U-shaped board inner wall side is provided with air intake duct, the setting of the U-shaped board inner wall other side
There is connecting tube, and connecting tube one end is connect with air intake duct, air-breathing pipe outer wall side is provided with pipe outer wall side is connect
Several dust absorption nozzles, U-shaped board inner wall top are provided with blower A, the air intake duct other end pass through chamber body by connector with
Air inlet pipe connection, the air inlet pipe other end are provided with dust removal cabinet, and dust removal cabinet inner wall two sides are provided with U-shaped card plate, institute
It states filter plate to connect by the U-type groove on U-shaped card plate with U-shaped card sheet separation, the HEPA filter plate passes through U-shaped on U-shaped card plate
Slot is connect with U-shaped card sheet separation, and the activity carbon slab is connect by the U-type groove on U-shaped card plate with U-shaped card sheet separation, the mistake
Filter plate is located at below HEPA filter plate, and the HEPA filter plate is located at below active carbon slab, is provided with out on the dust removal cabinet rear end face
Tracheae, the escape pipe are internally provided with blower B, are provided with LED energy-saving lamp at the top of the chamber body inner wall.
Preferably, it is provided with doorframe on the chamber body front end face, safety door, the U are provided on the doorframe front end face
Template is located on the rear end face of doorframe, is provided with safety lock on the safety door front end face.
Preferably, it is provided with cabinet door on the dust removal cabinet front end face, cabinet lock is provided on the cabinet door front end face.
Preferably, described escape pipe one end is provided with protective net.
Preferably, the chamber body is composed of shell and insulating layer, and the insulating layer is arranged on the inner wall of shell.
Compared with prior art, the utility model has the beneficial effects that by the U-shaped board being arranged inside chamber body, U-shaped board with
Doorframe rear end face connects, when safety door enters inside chamber body in staff's opening chamber body, it is necessary to by the U-shaped board side of being dusted
It can enter inside chamber body, staff first stands on hollow support seat when dedusting, work of the blower A to station on hollow support seat
Dust on personnel's garment for clean room carries out high wind and dispels, blower B is opened, by the dust absorption nozzle on air intake duct and connecting tube dispelling
Dust is drawn into dust removal cabinet and is handled, and falls large-scale impurity particle object by filter plate, is adsorbed by HEPA filter plate thin
Small dust is eliminated the unusual smell and is sterilized by active carbon slab, and dustless harmless gas is externally discharged, and passes through U-shaped card plate
Filter plate, HEPA filter plate and active carbon slab are installed, are easy to use after a period of time to filter plate, HEPA filter plate and active carbon slab one
It is disassembled and maintained after the section time, clears up the dust impurity inside dust removal cabinet.The utility model is set by a series of structures
It sets, external dust, while draw dust side will not be brought into processing can be dusted to the staff entered inside chamber body
Just it is cleared up.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the toilet for semiconductor workshop of the utility model.
Fig. 2 is a kind of main view of the toilet for semiconductor workshop of the utility model.
Fig. 3 is a kind of rearview of the toilet for semiconductor workshop of the utility model.
Fig. 4 is the structural schematic diagram of the utility model U-shaped board.
In figure: 1, chamber body；2, shell；3, insulating layer；4, blower A；5, air intake duct；6, dust absorption nozzle；7, hollow support seat；8,
Connector；9, air inlet pipe；10, filter plate；11, U-shaped card plate；12, HEPA filter plate；13, active carbon slab；14, blower B；15, outlet
Pipe；16, dust removal cabinet；17, connecting tube；18, U-shaped board；19, LED energy-saving lamp；20, doorframe；21, safety lock；22, safety door；23,
Cabinet lock；24, cabinet door；25, protective net.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Please refer to Fig. 1~4, in the utility model embodiment, a kind of toilet for semiconductor workshop, including chamber body 1,
Filter plate 10, HEPA filter plate 12 and active carbon slab 13,1 inner wall bottom of chamber body are provided with hollow support seat 7, on hollow support seat 7
Surface is provided with U-shaped board 18, and 18 inner wall side of U-shaped board is provided with air intake duct 5, and the 18 inner wall other side of U-shaped board is provided with connecting tube
17, and 17 one end of connecting tube is connect with air intake duct 5,5 outer wall side of air intake duct is provided with several with 17 outer wall side of connecting tube
A dust absorption nozzle 6,18 inner wall top of U-shaped board are provided with blower A4, and 5 other end of air intake duct passes through chamber body 1 and passes through connector 8 and air inlet pipe
9 connections, 9 other end of air inlet pipe are provided with dust removal cabinet 16, by the U-shaped board 18 being arranged inside chamber body 1, U-shaped board 18 and doorframe 20
Rear end face connects, when safety door 22 enters 1 inside of chamber body in staff's opening chamber body 1, it is necessary to be dusted by U-shaped board 18
Inside chamber body of being allowed for access 1, staff first stands on hollow support seat 7 when dedusting, and blower A4 is to station on hollow support seat 7
Staff's garment for clean room on dust carry out high wind dispel, blower B14 open, pass through the suction on air intake duct 5 and connecting tube 17
6 dusts dispelled of dirt mouth, which are drawn into dust removal cabinet 16, to be handled, and 16 inner wall two sides of dust removal cabinet are provided with U-shaped card plate 11,
Filter plate 10 is connect by the U-type groove on U-shaped card plate 11 with 11 gap of U-shaped card plate, and HEPA filter plate 12 passes through on U-shaped card plate 11
U-type groove is connect with 11 gap of U-shaped card plate, and active carbon slab 13 is connect by the U-type groove on U-shaped card plate 11 with 11 gap of U-shaped card plate,
Filter plate 10 is located at 12 lower section of HEPA filter plate, and HEPA filter plate 12 is located at active 13 lower section of carbon slab, is arranged on 16 rear end face of dust removal cabinet
There is escape pipe 15,15 one end of escape pipe is provided with protective net 25, and escape pipe 15 is internally provided with blower B14,1 inner wall of chamber body top
It is provided with LED energy-saving lamp 19, large-scale impurity particle object is filtered out by filter plate 10, tiny ash is adsorbed by HEPA filter plate 12
Dirt is eliminated the unusual smell and is sterilized by active carbon slab 13, and dustless harmless gas is externally discharged, and is pacified by U-shaped card plate 11
Filter plate 10, HEPA filter plate 12 and active carbon slab 13 are filled, is easy to use after a period of time to filter plate 10, HEPA filter plate 12 and living
Property 13 a period of time of carbon slab after disassembled and maintained, clear up the dust impurity inside dust removal cabinet 16, be arranged on 1 front end face of chamber body
There is doorframe 20, safety door 22 is provided on 20 front end face of doorframe, U-shaped board 18 is located on the rear end face of doorframe 20, before safety door 22
It is provided with safety lock 21 on end face, cabinet door 24 is provided on 16 front end face of dust removal cabinet, cabinet lock 23 is provided on 24 front end face of cabinet door,
Chamber body 1 is composed of shell 2 and insulating layer 3, and insulating layer 3 is arranged on the inner wall of shell 2.
The working principle of the utility model is: staff opens safety in chamber body 1 in use, external power supply need to be connected
When door 22 enters 1 inside of chamber body, U-shaped board 18 is connect with 20 rear end face of doorframe, it is necessary to is dusted and is allowed for access by U-shaped board 18
Staff first stands inside chamber body 1, when dedusting rotates on hollow support seat 7, and starting blower A4 is to station in hollow support
The dust on staff's garment for clean room on seat 7 carries out high wind and dispels, and blower B14 is opened, by air intake duct 5 and connecting tube 17
6 dusts dispelled of dust absorption nozzle be drawn into dust removal cabinet 16 and handled, large-scale impurity particle is filtered out by filter plate 10
Object adsorbs tiny dust by HEPA filter plate 12, is eliminated the unusual smell and is sterilized by active carbon slab 13, dustless harmless gas
It is externally discharged, filter plate 10, HEPA filter plate 12 and active carbon slab 13 is installed by U-shaped card plate 11, when being easy to use one section
Between after to filter plate 10, HEPA filter plate 12 and disassembled and maintained, cleared up in dust removal cabinet 16 after active 13 a period of time of carbon slab
The dust impurity in portion.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this is practical new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this is practical new
The range of type is indicated by the appended claims rather than the foregoing description, it is intended that containing for the equivalent requirements of the claims will be fallen in
All changes in justice and range are embraced therein.It should not treat any reference in the claims as limiting
Related claim.
Claims (5)
1. a kind of toilet for semiconductor workshop, including chamber body (1), filter plate (10), HEPA filter plate (12) and active carbon
Plate (13), which is characterized in that chamber body (1) the inner wall bottom is provided with hollow support seat (7), on the hollow support seat (7)
Surface is provided with U-shaped board (18), and U-shaped board (18) the inner wall side is provided with air intake duct (5), and U-shaped board (18) inner wall is another
Side is provided with connecting tube (17), and connecting tube (17) one end is connect with air intake duct (5), air intake duct (5) the outer wall side with
Connecting tube (17) outer wall side is provided with several dust absorption nozzles (6), and U-shaped board (18) the inner wall top is provided with blower A
(4), air intake duct (5) other end passes through chamber body (1) and is connect by connector (8) with air inlet pipe (9), and the air inlet pipe (9) is another
One end is provided with dust removal cabinet (16), and dust removal cabinet (16) the inner wall two sides are provided with U-shaped card plate (11), the filter plate (10)
It is connect by the U-type groove on U-shaped card plate (11) with U-shaped card plate (11) gap, the HEPA filter plate (12) passes through U-shaped card plate (11)
On U-type groove connect with U-shaped card plate (11) gap, the activity carbon slab (13) by U-type groove on U-shaped card plate (11) with it is U-shaped
The connection of snap-gauge (11) gap, the filter plate (10) are located at below HEPA filter plate (12), and the HEPA filter plate (12) is located at activity
Below carbon slab (13), it is provided with escape pipe (15) on dust removal cabinet (16) rear end face, the escape pipe (15) is internally provided with
Blower B (14), chamber body (1) the inner wall top are provided with LED energy-saving lamp (19).
2. a kind of toilet for semiconductor workshop according to claim 1, which is characterized in that before the chamber body (1)
It is provided with doorframe (20), is provided with safety door (22) on doorframe (20) front end face, the U-shaped board (18) is located at door on end face
On the rear end face of frame (20), safety lock (21) are provided on safety door (22) front end face.
3. a kind of toilet for semiconductor workshop according to claim 1, which is characterized in that the dust removal cabinet (16)
It is provided on front end face cabinet door (24), cabinet lock (23) is provided on cabinet door (24) front end face.
4. a kind of toilet for semiconductor workshop according to claim 1, which is characterized in that the escape pipe (15)
One end is provided with protective net (25).
5. a kind of toilet for semiconductor workshop according to claim 1, which is characterized in that the chamber body (1) by
Shell (2) and insulating layer (3) are composed, and the insulating layer (3) is arranged on the inner wall of shell (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821626296.8U CN209324038U (en) | 2018-10-08 | 2018-10-08 | A kind of toilet for semiconductor workshop |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821626296.8U CN209324038U (en) | 2018-10-08 | 2018-10-08 | A kind of toilet for semiconductor workshop |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209324038U true CN209324038U (en) | 2019-08-30 |
Family
ID=67707744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821626296.8U Expired - Fee Related CN209324038U (en) | 2018-10-08 | 2018-10-08 | A kind of toilet for semiconductor workshop |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209324038U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115532725A (en) * | 2022-09-23 | 2022-12-30 | 武汉联泰新技术有限公司 | An automatic production line of cleaning room robots based on the Internet of Things |
-
2018
- 2018-10-08 CN CN201821626296.8U patent/CN209324038U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115532725A (en) * | 2022-09-23 | 2022-12-30 | 武汉联泰新技术有限公司 | An automatic production line of cleaning room robots based on the Internet of Things |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190830 Termination date: 20211008 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |