CN209194055U - Sheet material fixture and depositing device - Google Patents
Sheet material fixture and depositing device Download PDFInfo
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- CN209194055U CN209194055U CN201821704778.0U CN201821704778U CN209194055U CN 209194055 U CN209194055 U CN 209194055U CN 201821704778 U CN201821704778 U CN 201821704778U CN 209194055 U CN209194055 U CN 209194055U
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Abstract
The utility model provides a kind of sheet material fixture and depositing device, is related to coating deposition technical field of auxiliary equipment.The sheet material fixture includes gear unit, feed member and deposition plate, and feed member is located at the top of deposition plate, and sheet material is loaded on deposition plate, and gear unit drives sheet material mobile by driving feed member movement；The sheet material fixture is by driving sheet material along deposition plate continuous moving, so that the part to be deposited of sheet material continues through the corresponding effective deposition zone of heated filament, and then realize that sheet material is changed from state to be deposited to sedimentation state, therefore use the fixture can successive sedimentation sheet area be greater than the effective range of deposition of depositing device sheet material, it is greatly improved deposition efficiency, shorten the production cycle, reduces production cost；The clamp structure is simple, easy to operate, and will not change the original structure of depositing device and component.The utility model also provides a kind of depositing device, including furnace body, and above sheet fixture is located in furnace body, and sheet material fixture is detachably fixed with furnace body to be connect.
Description
Technical field
The utility model relates to coatings to deposit technical field of auxiliary equipment, set more particularly, to a kind of sheet material fixture and deposition
It is standby.
Background technique
With the development of chemical vapour deposition diamond technology, chemical vapour deposition diamond purposes is more and more extensive.Change
Learning vapor deposition and preparing the principle of bortz powder is utilized using the difference of biggish hot expansion property between diamond and copper foil
The chemical vapor depsotition equipment depositing diamond film on copper foil, diamond thin during cooling under the conditions of 800 DEG C
Due to can naturally be split away off from copper foil by biggish thermal stress, the film fragments split away off are subjected to subsequent add
Work, can be prepared by diamond dust, and this method can also prepare the diamond dust of various doping other elements.
But it is existing during preparing bortz powder using chemical vapor deposition, it is directly to be placed on deposited samples
On the original-pack sample stage of equipment, deposited sample size limitations are larger, and deposition efficiency is not high；In addition, original-pack sample stage can not be collected
The diamond thin fragment to fall off from copper foil causes the sub- rear film loss of blow-on larger.
In view of this, special propose that the utility model is able to solve at least one of above problem.
Utility model content
The first of the utility model is designed to provide a kind of sheet material fixture, in the basic structure item for not changing depositing device
Under part, using the sheet material fixture can successive sedimentation sheet area be greater than the effective range of deposition of depositing device sheet material, greatly subtract
Lack some pilot process, be conducive to improve deposition efficiency and reduce production cost.
The second of the utility model is designed to provide a kind of depositing device, carries out deposition behaviour using above sheet fixture
Make.
In order to solve the above technical problems, the utility model spy adopts the following technical scheme that
The utility model provides a kind of sheet material fixture, including gear unit, feed member and deposition plate；
The feed member is located at the top of the deposition plate, and sheet material is loaded on the deposition plate, and the gear unit is logical
It crosses and drives the feed member movement to drive the sheet material mobile.
Further, on the basis of technical solutions of the utility model, the feed member includes idler wheel, the sheet material position
Between the idler wheel and the deposition plate, the idler wheel is able to drive the sheet material and moves along the deposition plate.
Further, on the basis of technical solutions of the utility model, the gear unit include the first driving member and
Second driving member, first driving member are able to drive the second driving member rotation, and second driving member is for driving institute
State feed member movement.
Further, on the basis of technical solutions of the utility model, first driving member includes worm screw, and described
Two driving members include worm gear, and the worm gear and the worm screw cooperate.
Further, on the basis of technical solutions of the utility model, first driving member includes driving section and snail
Bar, the driving section are sheathed on the worm screw and move synchronously with the worm screw；
Second driving member includes worm gear, and the worm gear and the worm screw cooperate.
Further, on the basis of technical solutions of the utility model, the sheet material fixture includes collection box, the receipts
Collection box is located at the deposition plate close to the side of the feed member and for collecting deposited sheet material；
And/or the sheet material fixture includes the first support, first support is located at the side of the feed member and is used for
Support the feed member；
And/or the sheet material fixture includes the second support, second support is located at the side of the deposition plate and is used for
Support the deposition plate.
Further, on the basis of technical solutions of the utility model, first driving member is copper driving member；
And/or second driving member is copper driving member.
The utility model additionally provides a kind of depositing device, including furnace body, and above sheet fixture is located at the furnace interior,
The sheet material fixture is detachably fixed with the furnace body to be connect.
Further, on the basis of technical solutions of the utility model, the furnace interior is equipped with substrate platen, described
Substrate platen be equipped with rotatable sample platform and at least two heated filament fixed frames, the heated filament fixed frame by electrode column with it is described
Substrate platen connects, and is provided with heated filament between the heated filament fixed frame, the rotatable sample platform is located at the lower section of the heated filament；
The rotatable sample platform is able to drive the gear unit movement of the sheet material fixture to drive described
Material is mobile.
Further, on the basis of technical solutions of the utility model, the rotatable sample platform and the sheet material are pressed from both sides
Using gear drive, belt transmission or chain conveyer between the gear unit of tool.
Compared with prior art, sheet material fixture and depositing device provided by the utility model have the following beneficial effects:
(1) sheet material fixture provided by the utility model, including gear unit, feed member and deposition plate, feed member are located at heavy
The top of product plate, sheet material are loaded on deposition plate, and gear unit drives sheet material mobile by driving feed member movement；The piece
Material fixture is able to drive sheet material and moves along deposition plate, so that the part to be deposited of sheet material continues through the corresponding effective deposition of heated filament
Region, and then realize that sheet material is changed from state to be deposited to sedimentation state, therefore use the fixture can successive sedimentation sheet area
Greater than the sheet material of the effective range of deposition of depositing device, very big some intermediate steps for reducing deposition process, for example, carrier sheet
Material vacuumizes, the operation such as upper silk, substantially increases deposition efficiency, shortens the production cycle, reduces production cost；
In addition, the preferred exemplary embodiment of the utility model is that close to the side of feed member, setting is collected in deposition plate
Box, the collection box is while collecting deposited sheet material, moreover it is possible to the deposit film fragments to fall off from sheet material are collected, thus
Reduce deposit loss.
The sheet material clamp structure is simple, easy to operate, and will not change the original structure of depositing device and component, is sheet material
The successive sedimentation and collection of coating provide industrial foundation.
(2) depositing device provided by the utility model, including furnace body, above sheet fixture are located in furnace body, sheet material fixture
It is detachably fixed and connect with furnace body.In view of advantage possessed by above sheet fixture, so that using the utility model sheet material fixture
Depositing device also simultaneously have above sheet fixture institute it is advantageous, can continuously be sunk to sheet material using the depositing device
Product, deposition efficiency are high, with short production cycle；
In addition, the preferred exemplary embodiment of the utility model is using the sheet material fixture with collection box, the collection box
It can be realized the collection to the deposit film fragments to fall off on sheet material and sheet material.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Attached drawing be briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be by
Regard the restriction to range as, for those of ordinary skill in the art, without creative efforts, may be used also
To obtain other relevant attached drawings according to these attached drawings.
Fig. 1 is a kind of structural representation of the sheet material fixture of embodiment provided by the utility model inside depositing device
Figure；
Fig. 2 is structural representation of the sheet material fixture of another embodiment provided by the utility model inside depositing device
Figure；
Fig. 3 is the side view of Fig. 2；
Fig. 4 is the top view of Fig. 2.
Diagram: 1- gear unit；2- feed member；3- deposition plate；4- sheet material；5- collection box；6- substrate platen；7- is rotatable
Sample stage；8- heated filament fixed frame；9- heated filament；10- electrode column；The first driving member of 11-；The second driving member of 12-；The first support of 21-；
The second support of 31-；The driving section 111-；112- worm screw.
Specific embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with attached drawing, it is clear that described
Embodiment is the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, originally
Field those of ordinary skill every other embodiment obtained without making creative work belongs to practical
Novel protected range.
In the description of the present invention, it should be noted that the orientation or position of the instructions such as term " on ", "inner", "outside"
Setting relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of describing the present invention and simplifying the description, and
It is not that the device of indication or suggestion meaning or element must have a particular orientation, be constructed and operated in a specific orientation, therefore
It should not be understood as limiting the present invention.In addition, term " first ", " second " are used for description purposes only, and cannot understand
For indication or suggestion relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
Embodiment one
Existing deposition process is that directly sheet material is placed on the original-pack sample stage of equipment, is limited to the knot of existing depositing device
Structure, the size of sheet material to be deposited are typically less than or equal to the size of the corresponding effective deposition zone of heated filament, for sheets of sizes office
Limit larger, deposition efficiency is not high.
For this purpose, the utility model embodiment provides a kind of sheet material fixture, including gear unit 1, feed member 2 and deposition plate
3；
Feed member 2 is located at the top of deposition plate 3, and sheet material 4 is loaded on deposition plate 3, and gear unit 1 is by driving feed member
2 movements are specific as shown in Figs 1-4 to drive sheet material 4 mobile.
Specifically, the sheet material 4 in the utility model indicates flaky deposited material, the type of deposited material is not limited
It is fixed.The size of sheet material 4 is not especially limited, 4 area of sheet material can be less than the effective deposition zone of depositing device, can also be with
Greater than the effective deposition zone of depositing device.It should be noted that 4 area of sheet material can not be infinitely great, it is limited to depositing device
Size, it should be ensured that sheet material 4 can be put into depositing device and be deposited.
For chemical vapour deposition diamond technology, sheet material 4 preferably copper foil, copper alloy foil or hard alloy foil,
Further preferably copper foil.Post-depositional copper foil is more soft, can carry out multilayer accumulation.
Gear unit 1 in the utility model can drive feed member 2 to move.The specific structure of gear unit 1 does not limit
It is fixed, it is the common transmission component in this field, can be the frictional drive using frictional force transmitting power and movement between parts, example
Such as, V belt translation, frictional wheel drive etc.；Alternatively, being engaged by driving link with driven member or engaging transmitting power or fortune by middleware
Dynamic engaged transmission, for example, gear drive, chain conveyer, worm drive and harmonic drive etc..
Gear unit 1 can be driven using the external world.Wherein, extraneous driving refers to that the external world can drive gear unit
Device perhaps the component such as driving motor or other rotatable parts etc. of 1 movement, are not especially limited herein.
Feed member 2 in the utility model refers to that it is able to drive the mobile component of sheet material 4, feed member 2 in gear unit 1
Specific structure be not construed as limiting, typical but non-limiting structure can be for idler wheel or conveyer belt etc..
Deposition plate 3 is mainly used for carrying sheet material 4 and realizes the deposition of sheet material 4.Deposition plate 3 is tabular, specific size root
It is determined according to depositing device and deposition region.
The sheet material fixture is able to drive sheet material and moves along deposition plate, so that the part to be deposited of sheet material continues through heated filament pair
The effective deposition zone answered, and then realize that sheet material is changed from state to be deposited to sedimentation state, therefore use the fixture can be continuous
Laid web area is greater than the sheet material of the effective range of deposition of depositing device, very big some middle spacer steps for reducing deposition process
Suddenly, it for example, loading sheet material, vacuumizing, the operation such as upper silk, substantially increases deposition efficiency, shorten the production cycle, reduce life
Produce cost.
Specifically, a kind of preferred embodiment as the utility model, feed member 2 includes idler wheel, and sheet material 4 is located at idler wheel
Between deposition plate 3, idler wheel is able to drive sheet material 4 and moves along the direction of deposition plate 3 towards collection box 5.
Gear unit 1 drives idler wheel rotation, and since there are certain frictional force between idler wheel and sheet material 4, therefore idler wheel rotates
Sheet material 4 is able to drive to move along deposition plate 3.The rotation direction of idler wheel be should be noted that it is ensured that sheet material 4 is along 3 court of deposition plate
It is mobile to the direction of collection box 5.
Gear unit 1 can be made of single part, be also possible to be made of mutually matched multiple components.
A kind of preferred implementation side when gear unit 1 is made of mutually matched multiple components, as the utility model
Formula, gear unit 1 include the first driving member 11 and the second driving member 12, and the first driving member 11 is able to drive 12 turns of the second driving member
Dynamic, the second driving member 12 is for driving feed member 2 to move.
The specific kind of drive is not construed as limiting between first driving member 11 and the second driving member 12, can be art technology
The conventional gear mode that personnel use, such as gear drive, belt transmission or chain drive.Preferably, 11 He of the first driving member
It is engaged between second driving member 12 using gear.
Gear drive refers to by gear pair passing movement and power, can transmit two parallel axes or concurrent aces or staggeredly between centers
Rotary motion and torque, transmission ratio is more accurate, high-efficient, compact-sized, reliable operation, and the service life is long.
Belt transmission is a kind of machine driving for coming passing movement and power by frictional force.Its feature is mainly manifested in:
Belt has good elasticity, can mitigate shock and vibration at work, and movement is steady noiseless.Belt is on wheel when load is excessive
It skids, thus can prevent other parts from damaging, play safeguard protection.
Chain conveyer is that the movement of the drive sprocket with special tooth profile and power are transmitted to special tooth by chain
A kind of kind of drive of the driven sprocket of shape.Its main feature is that: there is no Elastic Sliding, be able to maintain accurate average ratios, is driven
Efficiency is higher；And chain does not need big tensile force, so axis and loaded smaller, the reliable transmission of bearing, overload capacity is strong,
It can be under low-speed heave-load compared with good berth.
On the basis of the utility model above-mentioned technical proposal, the first driving member 11 includes worm screw 112, the second driving member
12 include worm gear, and worm gear and worm screw 112 cooperate.
Worm gear and 112 mechanism of worm screw are commonly used to movement and power between two alternating axis of transmitting, are usually used in that transmission ratio is big, passes
The little occasion of dynamic power.
As a kind of preferred embodiment of the utility model, the first driving member 11 includes driving section 111 and worm screw 112,
Driving section 111 is sheathed on worm screw 112 and moves synchronously with worm screw 112；
Second driving member 12 includes worm gear, and worm gear and worm screw 112 cooperate.
Driving section 111 can be rotated by the external world, the rotation of the first driving member 11 be driven, due to the first driving member 11 and the
Two driving members 12 are cooperated by worm and gear 112, to drive the movement of the second driving member 12.Aforesaid way, realize power or
The transmitting of movement.
In addition, there is also original-pack sample stage, can not to collect the deposit film that falls off from sheet material broken in the prior art
Piece causes deposit loss larger, the technical issues of being not conducive to the reduction of production costs.
To solve drawbacks described above, on the basis of the utility model above-mentioned technical proposal, in deposition plate 3 close to feed member 2
Side collection box 5 is set, the deposit which can be used for collecting deposited sheet material 4 and fall off from sheet material 4 is thin
Film fragment, to reduce deposit loss.
The specific structure of collection box 5 is not construed as limiting, as long as ensuring that sheet material 4 can be held on collection box 5 completely.It needs
Illustrate, it is suitable for the material used in the working environment of chemical vapor deposition that the material of collection box 5, which should be selected,.
Working principle based on above sheet clamp structure: feed member 2 drives 4 edge of sheet material under the driving of gear unit 1
Deposition plate 3 is mobile, and the deposition fraction of sheet material 4 is sent into collection box 5.Since deposited sheet material 4 is very soft, sheet material
4 contact with collection box 5 and can not move forward so that sheet material 4 is accumulated at collection box 5, and the non-deposition fraction of sheet material 4 continuously enters
It is deposited to the corresponding effective deposition zone of heated filament 9, to realize the successive sedimentation to biggish sized sheets.
Therefore use the sheet material fixture not only can successive sedimentation sheet area be greater than depositing device effective deposition zone sheet material,
The deposit film fragments that sheet material can also be collected and fallen off from sheet material simultaneously, later period can carry out again deposit film fragments
Processing and utilization greatly reduces deposit loss, reduces production cost.
As a kind of preferred embodiment of the utility model, fixture includes the first support 21, and the first support 21, which is located at, to be sent
The side of materials and parts 2 is simultaneously used to support feed member 2.
The specific structure of first support 21 is not construed as limiting, as long as ensuring that it can play stable support to feed member 2
Effect.First support 21 can be located at the side of feed member 2, can also be located at the two sides of feed member 2.
As a kind of preferred embodiment of the utility model, fixture includes the second support 31, and the second support 31 is located at heavy
The side of product plate 3 is simultaneously used to support deposition plate 3.
The specific structure of second support 31 is not construed as limiting, as long as ensuring that it can play stable support to deposition plate 3
Effect.The quantity of second support 31 can be one, or multiple.It is more when using multiple second supports 31
A second support 31 is located at each corner of deposition plate 3.
Second support 31 is not construed as limiting with the specific connection relationship of deposition plate 3, and deposition plate 3 can be placed directly within the second support
On 31 end face, and entire deposition process deposition plate 3 is not separated with 31 end face of the second support；Alternatively, being arranged on the second support 31
There is mounting groove, deposition plate 3 is embedded on the second support 31 by mounting groove, so that it is firm to deposition plate 3 to reach the second support 31
The purpose of support.
By sheet material fixture in use, on the electrode column 10 that the second support 31 can be sheathed on depositing device.It needs to illustrate
, at this time it is ensured that the second support 31 is insulated leg.Preferably, the second support 31 is ceramic insulation support.
Due to working environment specific in chemical vapor deposition processes, so that for each component material in the sheet material fixture
Matter also has certain restriction.
As a kind of preferred embodiment of the utility model, the first driving member 11 is copper driving member；
And/or second driving member 12 be copper driving member.
Material of the copper as the first driving member 11 and the second driving member 12 is selected, it is good can to guarantee that above-mentioned each component has
Cooling effect.
The clamp structure is simple, easy to operate, and will not change the original structure of depositing device and component, is sheet coating layer
Deposition provides industrial foundation.
Embodiment two
The present embodiment additionally provides a kind of depositing device, and the present embodiment is improvement on the basis of embodiment one, embodiment
Technical solution described in one also belongs to the present embodiment, and details are not described herein.
A kind of depositing device provided in this embodiment, including furnace body, the sheet material fixture that above-described embodiment one provides are located at furnace
Internal portion, fixture are detachably fixed with furnace body and connect.
Fixture is designed as dismountable mode, the original structure of depositing device and component will not be changed, it is only necessary to will press from both sides
Tool is installed on furnace interior corresponding position.Above-mentioned design, using the equipment of this field routine (for example, Hot Filament Chemical Vapor
Cvd furnace) aforesaid operations can be realized, it does not need separately to install standby.
The specific structure of depositing device is not particularly limited.
As a kind of preferred embodiment of the utility model, furnace interior is equipped with substrate platen 6, and substrate platen 6 is equipped with
Rotatable sample platform 7 and at least two heated filament fixed frames 8, heated filament fixed frame 8 are connect by electrode column 10 with substrate platen 6, heat
It is provided with heated filament 9 between silk fixed frame 8, rotatable sample platform 7 is located at the lower section of heated filament 9；
Rotatable sample platform 7 is able to drive the movement of gear unit 1 of fixture to drive sheet material 4 mobile.
At this point, sheet material 4 is placed on rotatable sample platform 7, and by the original rotatable sample platform 7 of depositing device as outer
Boundary's driving drives gear unit 1 and feed member 2 to move, so that sheet material 4 be driven to move along deposition plate 3.Rotatable sample platform 7
The parameters such as velocity of rotation, rotation time pass through the deposition effect for influencing the movement speed influence sheet material 4 of sheet material 4.And
Above-mentioned parameter can be adjusted by depositing device itself.
As a kind of preferred embodiment of the utility model, when the gear unit 1 of sheet material fixture includes the first driving member 11
When with the second driving member 12, the first driving member 11 can be sheathed on the electrode column 10 of depositing device, i.e. the first driving member 11 and electricity
Pole 10 is coaxial and can rotate around electrode column 10.
In addition, the second support 31 can be sheathed on another electrode column 10 of depositing device, for being realized surely to deposition plate 3
Clamped support.At this time it is ensured that the second support 31 is insulated leg.Preferably, the second support 31 is ceramic insulation support.
As a kind of preferred embodiment of the utility model, used between rotatable sample platform 7 and the gear unit 1 of fixture
Gear drive, belt transmission or chain conveyer.
When the first driving member 11 of rotatable sample platform 7 and sheet material fixture is using gear drive, rotatable sample platform 7
Peripheral side is provided with rack gear, and the first driving member 11 is gear, and the rack gear on rotatable sample platform 7 is nibbled with the first driving member 11
It closes, so that the movement of rotatable sample platform 7 is passed to the first driving member 11.
When the first driving member 11 of rotatable sample platform 7 and fixture is driven using belt, rotatable sample platform 7 and first
Driving member 11 is belt pulley, and the two is connected by belt, so that the movement of rotatable sample platform 7 is passed to the first driving member
11。
When the first driving member 11 of rotatable sample platform 7 and fixture is using chain conveyer, rotatable sample platform 7 and first is passed
Moving part 11 is the form of sprocket wheel, and the two is connected by chain, so that the movement of rotatable sample platform 7 is passed to the first transmission
Part 11.
Sheet material deposition step is specific as follows: depositing device furnace body opened, sheet material fixture is installed on to the inside of depositing device,
And sheet material 4 is placed in deposition plate 3, it is closed furnace body；
Start depositing device and adjust the revolving speed of rotatable sample platform 7 as needed, in the driving of rotatable sample platform 7
Under, gear unit 1 drives feed member 2 to move, so that sheet material 4 is along 3 continuous moving of deposition plate, so that sheet material 4 is to be deposited
Part continues through the corresponding effective deposition zone of heated filament 9, realizes that sheet material 4 is changed from state to be deposited to sedimentation state；
In addition, laid web 4 is fed in collection box 5 under the action of feed member 2, and collection box 5 is also to sheet material 4
On the deposit film fragments that fall off be collected.
In view of advantage possessed by above sheet fixture, so that the depositing device using the utility model fixture also has simultaneously
There is the institute of above-mentioned fixture advantageous, successive sedimentation, deposition efficiency height, production cycle can be carried out to sheet material using the depositing device
It is short；In addition, it is heavy to what is fallen off on sheet material and sheet material to be realized by collection box using the sheet material fixture with collection box
The collection of product object film fragments.
Finally, it should be noted that above each embodiment is only to illustrate the technical solution of the utility model, rather than to it
Limitation；Although the utility model is described in detail referring to aforementioned each embodiment, those skilled in the art
It is understood that it can still modify to technical solution documented by aforementioned each embodiment, or to part of or
Person's all technical features are equivalently replaced；And these are modified or replaceed, it does not separate the essence of the corresponding technical solution originally
The range of each embodiment technical solution of utility model.
Claims (10)
1. a kind of sheet material fixture, which is characterized in that including gear unit (1), feed member (2) and deposition plate (3)；
The feed member (2) is located at the top of the deposition plate (3), and sheet material (4) is loaded on the deposition plate (3), the biography
Moving cell (1) is by driving feed member (2) movement to drive the sheet material (4) mobile.
2. sheet material fixture according to claim 1, which is characterized in that the feed member (2) includes idler wheel, the sheet material
(4) between the idler wheel and the deposition plate (3), the idler wheel is able to drive the sheet material (4) along the deposition plate (3)
It is mobile.
3. sheet material fixture according to claim 1, which is characterized in that the gear unit (1) includes the first driving member
(11) with the second driving member (12), first driving member (11) is able to drive second driving member (12) rotation, and described the
Two driving members (12) are for driving the feed member (2) to move.
4. sheet material fixture according to claim 3, which is characterized in that first driving member (11) includes worm screw (112),
Second driving member (12) includes worm gear, and the worm gear and the worm screw (112) cooperate.
5. sheet material fixture according to claim 3, which is characterized in that first driving member (11) includes driving section
(111) and worm screw (112), the driving section (111) is sheathed on the worm screw (112) and fortune synchronous with the worm screw (112)
It is dynamic；
Second driving member (12) includes worm gear, and the worm gear and the worm screw (112) cooperate.
6. sheet material fixture described in -5 any one according to claim 1, which is characterized in that the sheet material fixture includes collection box
(5), the collection box (5) is located at the deposition plate (3) close to the side of the feed member (2) and for collecting deposited
Material (4)；
And/or the sheet material fixture includes the first support (21), first support (21) is located at the side of the feed member (2)
Face is simultaneously used to support the feed member (2)；
And/or the sheet material fixture includes the second support (31), second support (31) is located at the side of the deposition plate (3)
Face is simultaneously used to support the deposition plate (3).
7. according to sheet material fixture described in claim 3-5 any one, which is characterized in that first driving member (11) is copper
Matter driving member；
And/or second driving member (12) is copper driving member.
8. a kind of depositing device, which is characterized in that including furnace body, sheet material fixture described in claim 1-7 any one is located at
The furnace interior, the sheet material fixture is detachably fixed with the furnace body to be connect.
9. depositing device according to claim 8, which is characterized in that the furnace interior is equipped with substrate platen (6), described
Substrate platen (6) is equipped with rotatable sample platform (7) and at least two heated filament fixed frames (8), and the heated filament fixed frame (8) passes through
Electrode column (10) is connect with the substrate platen (6), is provided with heated filament (9) between the heated filament fixed frame (8), described rotatable
Sample stage (7) is located at the lower section of the heated filament (9)；
The rotatable sample platform (7) is able to drive the gear unit (1) and the feed member (2) fortune of the sheet material fixture
It moves to drive the sheet material (4) mobile.
10. depositing device according to claim 9, which is characterized in that the rotatable sample platform (7) and the sheet material press from both sides
Using gear drive, belt transmission or chain conveyer between the gear unit (1) of tool.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821704778.0U CN209194055U (en) | 2018-10-19 | 2018-10-19 | Sheet material fixture and depositing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821704778.0U CN209194055U (en) | 2018-10-19 | 2018-10-19 | Sheet material fixture and depositing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209194055U true CN209194055U (en) | 2019-08-02 |
Family
ID=67408542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821704778.0U Active CN209194055U (en) | 2018-10-19 | 2018-10-19 | Sheet material fixture and depositing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209194055U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109023308A (en) * | 2018-10-19 | 2018-12-18 | 深圳先进技术研究院 | Sheet material fixture and depositing device |
-
2018
- 2018-10-19 CN CN201821704778.0U patent/CN209194055U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109023308A (en) * | 2018-10-19 | 2018-12-18 | 深圳先进技术研究院 | Sheet material fixture and depositing device |
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