CN209010596U - A kind of metallo-organic compound feed control system - Google Patents
A kind of metallo-organic compound feed control system Download PDFInfo
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- CN209010596U CN209010596U CN201821835207.0U CN201821835207U CN209010596U CN 209010596 U CN209010596 U CN 209010596U CN 201821835207 U CN201821835207 U CN 201821835207U CN 209010596 U CN209010596 U CN 209010596U
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- China
- Prior art keywords
- carrier gas
- pneumatic operated
- operated valve
- organic compound
- metallo
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- 239000012159 carrier gas Substances 0.000 claims abstract description 70
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 42
- 239000001301 oxygen Substances 0.000 claims abstract description 42
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 42
- 239000002245 particle Substances 0.000 claims abstract description 25
- 238000006243 chemical reaction Methods 0.000 claims abstract description 10
- 238000000746 purification Methods 0.000 claims abstract description 8
- 238000001514 detection method Methods 0.000 claims description 18
- 239000007789 gas Substances 0.000 claims description 7
- 150000002894 organic compounds Chemical class 0.000 claims description 4
- 238000001914 filtration Methods 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000008187 granular material Substances 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 19
- 239000012535 impurity Substances 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002902 organometallic compounds Chemical class 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- ILXWFJOFKUNZJA-UHFFFAOYSA-N ethyltellanylethane Chemical group CC[Te]CC ILXWFJOFKUNZJA-UHFFFAOYSA-N 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- -1 metals organic compound Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 1
- PORFVJURJXKREL-UHFFFAOYSA-N trimethylstibine Chemical compound C[Sb](C)C PORFVJURJXKREL-UHFFFAOYSA-N 0.000 description 1
Abstract
The utility model relates to technical field of manufacturing semiconductors, specially a kind of metallo-organic compound is fed control system, including metallo-organic compound storage tank, it is characterized in that being connected to simultaneously with carrier gas channel with output channel at the top of the metallo-organic compound storage tank, air inlet hand-operated valve, one way stop peturn valve, No.1 threeway pneumatic operated valve and No. two threeway pneumatic operated valves, electric press adjuster, carrier gas purification system and carrier gas particle filter system are successively set outward on carrier gas channel；No. two three-way pipelines are also connect with vacuum pipe simultaneously；Outlet hand-operated valve, No. three threeway pneumatic operated valves, pneumatic operated valve and reaction chamber are successively set outward on output channel；No. three threeway pneumatic operated valves and No.1 threeway pneumatic operated valve are interconnected.System solves the problem carrier gas to carry line clogging and handicraft product quality problems caused by granule foreign, steam and oxygen etc..
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, especially relate to the heavy process control system of Metal Organic Chemical Vapor.
Background technique
Metallo-organic compound is to prepare highlighted Organic Light Emitting Diode (OLED), semiconductor laser, high-efficiency solar
Battery etc., the important source material in semicon industry, most metals organic compound are all inflammable and explosive chemicals, room temperature
Spontaneous combustion, with the easy generation vigorous reaction such as water and oxygen.Processing technology and control are required high.Especially OLED manufacturing field,
In process, it is ensured that whether the metal-organic flow into reaction chamber is stable, and cannot be containing to production
The influential exogenous impurity ingredient of quality.
And now most of metallo-organic compound imports reaction chamber and carries out product manufacturing, side as presoma
Method mainly passes through carrier gas and enters metallo-organic compound container, then carry out metallo-organic compound enter reaction chamber into
Row product manufacturing.Existing technique controls the flow direction of carrier gas simply by the combination of pneumatic operated valve and hand-operated valve substantially, does not examine
Consider the impurity and contain the factors such as non-process gas that contain in carrier gas or pipeline generates；And pressure is mainly by metal
Organic compound container carries out constant temperature, can only guarantee the pressure for exporting mixed gas, but not can guarantee the perseverance of the flow of reaction gas
It is fixed.So there is a problem of following three it is fatal:
1) most enterprises carrier gas generally passes through pipeline, and it is included that long-time service can carry residual or carrier gas in pipeline
Impurity enter precursor storage tank, block gas circuit, impurity enters the mass defect that reaction chamber will cause product；
2) degree of purity of carrier gas is not high, especially exceeded containing steam and oxygen, will lead to and reacts drop with presoma
Low forerunner's weight to cause product quality defect, or leads to dangerous generation；
3) after carrier gas enters precursor storage tank, since carrier gas is the uniformity that free diffusing is unable to control mixing, thus
The outflow content constant of presoma is not can guarantee.With the entrance of carrier gas, since the partial pressure of each ingredient is inconsistent, the stream of presoma
There is non-constant or even decline in output, leads to finished product rate decline and quality.
Summary of the invention
In order to solve the above technical problems, the present invention provides a kind of metallo-organic compounds to be fed control system.
A kind of metallo-organic compound feed control system, including metallo-organic compound storage tank, it is characterised in that should
It is connected to simultaneously with carrier gas channel with output channel at the top of metallo-organic compound storage tank, in which: carrier gas channel extends to organic
Compound stores above pot bottom, and successively setting air inlet hand-operated valve, one way stop peturn valve, No.1 threeway are pneumatic outward on carrier gas channel
Valve and No. two threeway pneumatic operated valves, electric press adjuster, carrier gas purification system and carrier gas particle filter system；No. two three-way pipelines
It is also connect simultaneously with vacuum pipe, pneumatic operated valve is provided on vacuum pipe；On output channel successively outward setting outlet hand-operated valve,
No. three threeway pneumatic operated valves, pneumatic operated valve and reaction chamber；No. three threeway pneumatic operated valves and No.1 threeway pneumatic operated valve are interconnected；No. three
Output channel between threeway pneumatic operated valve and pneumatic operated valve is equipped with mass flowmenter.
Specifically, the carrier gas purification system is gone by steam detector, steam removal device, oxygen detection instrument, oxygen
Except device and pneumatic operated valve form: steam detector and oxygen detection instrument are connected on carrier gas channel, steam detector and oxygen
It is additionally provided with indirect pipeline between detector, steam removal device is set on indirect pipeline；Oxygen detection instrument and electric press are adjusted
It is additionally provided with indirect pipeline between device, oxygen removal device is set on indirect pipeline；The steam detector, oxygen detection instrument with
And pneumatic operated valve is provided between electric press adjuster, the inlet end and outlet side of steam removal device and oxygen removal device are all provided with
It is equipped with pneumatic operated valve.
When carrier gas passes through, steam detector just will detect that the moisture content of carrier gas is no and meet technique requirement, work as load
When the moisture content of gas meets technique requirement, the pneumatic operated valve on the carrier gas channel between steam detector and oxygen detection instrument is opened,
Pneumatic operated valve on the inlet end and outlet side of steam removal device is closed, and carrier gas is fed directly to rear end equipment；When the water of carrier gas
When vapour content does not meet technique requirement, the pneumatic operated valve on the carrier gas channel between steam detector and oxygen detection instrument is closed, steam
Pneumatic operated valve on the inlet end and outlet side of removal device is opened, and carrier gas enters steam removal device, defeated after steam removes
It send to rear end equipment.Similarly, when carrier gas passes through, oxygen detection instrument just will detect that the oxygen content of carrier gas is no and meet technique
It is required that when the oxygen content of carrier gas meets technique requirement, on the carrier gas channel between oxygen detection instrument and electric press adjuster
Pneumatic operated valve open, the pneumatic operated valve on the inlet end and outlet side of oxygen removal device is closed；When the oxygen content of carrier gas is not inconsistent
When closing technique requirement, the pneumatic operated valve on the carrier gas channel between oxygen detection instrument and electric press adjuster is closed, oxygen removal dress
Pneumatic operated valve on the inlet end and outlet side set is opened, and carrier gas enters oxygen removal device, after being delivered to after oxygen removes
End equipment.
Specifically, the carrier gas particle filter system is by laser particle counter instrument, particulate filter and pneumatic valve group
At: laser particle counter instrument is connected on carrier gas channel, is taken between being additionally provided between laser particle counter instrument and steam detector
Particulate filter is arranged on indirect pipeline in road；It is provided with pneumatic operated valve between the laser particle counter instrument and steam detector,
The inlet end of grain filter and outlet side are provided with pneumatic operated valve.
When carrier gas passes through, laser particle counter instrument just will detect that whether the granularity in carrier gas meets technique requirement.
It is pneumatic on the carrier gas channel between laser particle counter instrument and steam detector when the granule content of carrier gas, which meets technique, to be required
Valve is opened, and the pneumatic operated valve on the inlet end and outlet side of particulate filter is closed, and carrier gas is fed directly to rear end equipment；Work as carrier gas
Granule content when not meeting technique and requiring, the pneumatic operated valve on the carrier gas channel between laser particle counter instrument and steam detector closes
It closes, the pneumatic operated valve on the inlet end and outlet side of particulate filter is opened, and carrier gas enters particulate filter, after particle removes
It is delivered to rear end equipment.
Electric press adjuster is passed through for the feedback according to mass flowmenter to metallo-organic compound outlet content
The opening-closing size of control valve, it is real real to adjust carrier gas supply pressure, with gold needed for guaranteeing the technique contained in storage tank outlet
The content for belonging to organic compound is enough；No.1 Pneumatic three-way valve, No. two Pneumatic three-way valves, No. three Pneumatic three-way valves are according to technique
It is required that adjusting the communication direction of pneumatic operated valve, by pneumatic control to meet the gas flow of technique requirement；One way stop peturn valve is anti-
Stop metallo-organic compound reflux, reduces the danger of leakage；Vacuum pipe effect opens vacuum tube when being to stop operation
Pneumatic operated valve and No.1 Pneumatic three-way valve, No. two Pneumatic three-way valves, No. three Pneumatic three-way valves on road close air inlet hand-operated valve
With outlet hand-operated valve, remaining metallo-organic compound in pipeline can be removed by vacuum suction.
Wherein, the metallo-organic compound is trimethyl aluminium, triethyl aluminum, trimethyl indium, trimethyl gallium, triethyl group
Gallium, trimethylantimony, antimony triethyl, di-t-butyl tellurium, tellurium diethyl, two luxuriant magnesium etc.；The carrier gas be nitrogen, hydrogen, argon gas,
Helium etc., do not react the inert gas also not reacted with handicraft product with metallo-organic compound.
A kind of metallo-organic compound of the invention is fed control system, solve carrier gas carry granule foreign, steam and
Line clogging caused by oxygen etc. and handicraft product quality problems, while passing through mass flowmenter and electric press adjuster
Linkage solves technique caused by causing metallo-organic compound rate of discharge non-constant with the delay of carrier gas entry time and produces
Quality problem.Remaining metallo-organic compound is effectively gone in the duct when the control system can also be to non-process
It removes, and prevents metallo-organic compound from flowing back, reduce the danger of leakage.
Detailed description of the invention
Fig. 1 is that a kind of metallo-organic compound of the invention is fed control system architecture schematic diagram.
In figure, metallo-organic compound storage tank 1, carrier gas channel 2, output channel 3, air inlet hand-operated valve 4, one way stop peturn valve
5,6, No. two threeway pneumatic operated valves 7, electric press adjuster 8, carrier gas purification system 9, carrier gas particle filterings of No.1 threeway pneumatic operated valve
System 10, vacuum pipe 11, outlet hand-operated valve 12, No. three threeway pneumatic operated valves 13, reaction chamber 14, mass flowmenters 15, steam
Detector 9-1, steam removal device 9-2, oxygen detection instrument 9-3, oxygen removal device 9-4, laser particle counter instrument 10-1,
Grain filter 10-2.
Specific embodiment
Embodiment 1: being described with reference to the accompanying drawings, and metallo-organic compound of the invention is fed control system, including metal
Organic compound storage tank 1, it is characterised in that 1 top of the metallo-organic compound storage tank simultaneously with carrier gas channel 2 and output
Pipeline 3 is connected to, in which: carrier gas channel 2 extends to above 1 bottom of organic compound storage tank, the successively setting outward of carrier gas channel 2
Air inlet hand-operated valve 4, one way stop peturn valve 5, No.1 threeway pneumatic operated valve 6 and No. two threeway pneumatic operated valves 7, electric press adjuster 8, carrier gas
Purification system 9 and carrier gas particle filter system 10；No. two three-way pipelines are also connect with vacuum pipe 11 simultaneously, on vacuum pipe 11
It is provided with pneumatic operated valve；On output channel 3 successively outward setting 12, No. three threeway pneumatic operated valves 13 of outlet hand-operated valve, pneumatic operated valve and
Reaction chamber 14；No. three threeway pneumatic operated valves 13 and No.1 threeway pneumatic operated valve 6 are interconnected；No. three threeway pneumatic operated valves 13 and pneumatic operated valve
Between output channel 3 be equipped with mass flowmenter 15.
The carrier gas purification system 9 is by steam detector 9-1, steam removal device 9-2, oxygen detection instrument 9-3, oxygen
Removal device 9-4 and pneumatic operated valve composition: steam detector 9-1 and oxygen detection instrument 9-3 are connected on carrier gas channel 2, steam
It is additionally provided with indirect pipeline between detector 9-1 and oxygen detection instrument 9-3, steam removal device 9-2 is set on indirect pipeline；Oxygen
It is additionally provided with indirect pipeline between detector 9-3 and electric press adjuster 8, oxygen removal device 9-4 is set on indirect pipeline；Institute
Pneumatic operated valve, steam removal device are provided between steam detector 9-1, oxygen detection instrument 9-3 and the electric press adjuster 8 stated
The inlet end and outlet side of 9-2 and oxygen removal device 9-4 are provided with pneumatic operated valve.
The carrier gas particle filter system 10 is by laser particle counter instrument 10-1, particulate filter 10-2 and pneumatic operated valve
Composition: laser particle counter instrument 10-1 is connected on carrier gas channel 2, between laser particle counter instrument 10-1 and steam detector 9-1
It is additionally provided with indirect pipeline, particulate filter 10-2 is set on indirect pipeline；The laser particle counter instrument 10-1 and steam
Pneumatic operated valve is provided between detector 9-1, the inlet end of particulate filter 10-2 and outlet side are provided with pneumatic operated valve.
Claims (4)
1. a kind of metallo-organic compound is fed control system, including metallo-organic compound storage tank (1), it is characterised in that should
It is connected to simultaneously with carrier gas channel (2) with output channel (3) at the top of metallo-organic compound storage tank (1), in which: carrier gas channel
(2) it extends to above organic compound storage tank (1) bottom, carrier gas channel (2) successively setting air inlet hand-operated valve (4), list outward
To check-valves (5), No.1 threeway pneumatic operated valve (6) and No. two threeway pneumatic operated valves (7), electric press adjuster (8), carrier gas purification system
System (9) and carrier gas particle filter system (10)；No. two three-way pipelines are also connect with vacuum pipe (11) simultaneously, vacuum pipe (11)
On be provided with pneumatic operated valve；Outlet hand-operated valve (12), No. three threeway pneumatic operated valves (13), gas are successively set outward on output channel (3)
Dynamic valve and reaction chamber (14)；No. three threeway pneumatic operated valves (13) and No.1 threeway pneumatic operated valve (6) are interconnected.
2. a kind of metallo-organic compound as described in claim 1 is fed control system, it is characterised in that carrier gas purification system
(9) by steam detector (9-1), steam removal device (9-2), oxygen detection instrument (9-3), oxygen removal device (9-4) and
Pneumatic operated valve composition: steam detector (9-1) and oxygen detection instrument (9-3) are connected on carrier gas channel (2), steam detector (9-
1) it is additionally provided with indirect pipeline between oxygen detection instrument (9-3), steam removal device (9-2) is set on indirect pipeline；Oxygen inspection
It surveys between instrument (9-3) and electric press adjuster (8) and is additionally provided with indirect pipeline, oxygen removal device (9- is set on indirect pipeline
4)；It is provided with pneumatic operated valve between the steam detector (9-1), oxygen detection instrument (9-3) and electric press adjuster (8),
The inlet end and outlet side of steam removal device (9-2) and oxygen removal device (9-4) are provided with pneumatic operated valve.
3. a kind of metallo-organic compound as described in claim 1 is fed control system, it is characterised in that carrier gas particle filtering
System (10) is made of laser particle counter instrument (10-1), particulate filter (10-2) and pneumatic operated valve: laser particle counter instrument
(10-1) is connected on carrier gas channel (2), is additionally provided between laser particle counter instrument (10-1) and steam detector (9-1) indirectly
Particulate filter (10-2) is arranged on indirect pipeline in pipeline；The laser particle counter instrument (10-1) and steam detector (9-
1) pneumatic operated valve is provided between, the inlet end of particulate filter (10-2) and outlet side are provided with pneumatic operated valve.
4. a kind of metallo-organic compound as described in claim 1 is fed control system, it is characterised in that No. three threeways are pneumatic
Output channel (3) between valve (13) and pneumatic operated valve is equipped with mass flowmenter (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821835207.0U CN209010596U (en) | 2018-11-08 | 2018-11-08 | A kind of metallo-organic compound feed control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821835207.0U CN209010596U (en) | 2018-11-08 | 2018-11-08 | A kind of metallo-organic compound feed control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209010596U true CN209010596U (en) | 2019-06-21 |
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ID=66841812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821835207.0U Expired - Fee Related CN209010596U (en) | 2018-11-08 | 2018-11-08 | A kind of metallo-organic compound feed control system |
Country Status (1)
| Country | Link |
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| CN (1) | CN209010596U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109457233A (en) * | 2018-11-08 | 2019-03-12 | 云南北方奥雷德光电科技股份有限公司 | A kind of metallo-organic compound feed control system |
-
2018
- 2018-11-08 CN CN201821835207.0U patent/CN209010596U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109457233A (en) * | 2018-11-08 | 2019-03-12 | 云南北方奥雷德光电科技股份有限公司 | A kind of metallo-organic compound feed control system |
| CN109457233B (en) * | 2018-11-08 | 2024-01-09 | 云南北方奥雷德光电科技股份有限公司 | Metal organic compound feed control system |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20190621 |