CN208562509U - A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment - Google Patents
A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment Download PDFInfo
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- CN208562509U CN208562509U CN201820989246.XU CN201820989246U CN208562509U CN 208562509 U CN208562509 U CN 208562509U CN 201820989246 U CN201820989246 U CN 201820989246U CN 208562509 U CN208562509 U CN 208562509U
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- umbrella stand
- support rod
- angle
- driving device
- adjustable
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Abstract
The utility model relates to technical field of vacuum plating, especially a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment, it is characterized by: the umbrella stand mechanism includes several support rods, the workpiece plate for carrying workpiece is separately installed between the adjacent support rod；It is constituted between the support rod and the driving device hingedly, the support rod can be rotated around its hinge joint between the driving device to adjust the angle of the workpiece plate.The utility model has the advantages that: in same equipment realize different substrate, different technology conditions require high quality, bulk production requirement；It realizes the exchange between spherical surface umbrella stand and planetary mechanism, improves the using flexible of equipment；In the case where being changed without umbrella stand disk, realize that the variation of spherical surface umbrella stand segmentation number is enhanced production capacities under the premise of meeting substrate size requirement；It is simple and reasonable, it is convenient for disassembly and assembly, it is suitable for promoting.
Description
Technical field
The utility model relates to technical field of vacuum plating, especially a kind of to be applied to that angle is adjusted in vacuum coating equipment
The umbrella stand mechanism of degree.
Background technique
Currently, often selection passes through a plating in vacuum coating equipment in order to improve the film thickness homogeneity of workpiece to be coated
Film umbrella stand carries workpiece, which is provided centrally with center steering mechanism, plate under the driving of center steering mechanism
Film umbrella stand rotates about, to realize the uniform coated of each workpiece in umbrella stand mechanism.Since film-plating umbrella stand is revolving body, in order to mention
Its high structural stability when rotated, film-plating umbrella stand are generally overall structure, can not seperated disassembly it is very heavy, for not
With size and Product Process the condition requirement of workpiece to be coated, generally requires integrally to remove film-plating umbrella stand, then install
Another corresponding film-plating umbrella stand carries out plated film again, so undoubtedly increases plated film time, reduces production capacity, while also increasing
Production cost, a kind of product just need a kind of corresponding film-plating umbrella stand.Generally speaking, the adaptability pole of current film-plating umbrella stand
Difference is unable to satisfy the needs of increasing various coated products at all.
Summary of the invention
The purpose of this utility model is provided a kind of applied to vacuum coating equipment according to above-mentioned the deficiencies in the prior art
The umbrella stand mechanism of middle adjustable-angle adjusts angle of the workpiece plate compared to coating source by carrying out to support rod and then angle adjusts
Degree, to realize different substrate, the high quality of different technology conditions requirement, bulk production in same equipment.
The utility model aim realization is completed by following technical scheme:
A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment, the umbrella stand mechanism is driven by driving device
Dynamic rotation, it is characterised in that: the umbrella stand mechanism includes several support rods, is separately installed with use between the adjacent support rod
In the workpiece plate of carrying workpiece；It is constituted hingedly between the support rod and the driving device, the support rod can be around itself and institute
The hinge joint rotation between driving device is stated to adjust the angle of the workpiece plate.
The driving device is connected with umbrella stand disk, the support rod respectively with the driving device and the umbrella stand disk structure
At hinged；The corresponding ferry-boat block of post position is provided on the umbrella stand disk.
Boom is arranged on the umbrella stand disk in hingedly passing through between the support rod and the umbrella stand disk, described to hang
There is slidable sliding block, the sliding block and one end of a connecting rod are hinged, the other end of the connecting rod and the branch on arm
Strut is hinged.
There is guide rail, the sliding block is slidably matched with the guide rail, is provided with fixation on the slide block on the boom
Part, the fixing piece is for being fixed position of the sliding block on the guide rail；It is provided in the side of the boom
Adjustment part, the adjustment part is for being adjusted position of the sliding block on the guide rail.
The umbrella stand disk is adapted with plated film planetary mechanism.
The driving device is connected with a conversion block, constitutes detachable company between the conversion block and the umbrella stand disk
Fixation is connect, one end of the support rod and the conversion block are hinged.
The utility model has the advantages that: it is high-quality to realize that different substrate, different technology conditions require in same equipment
It measures, the requirement of bulk production；It realizes the exchange between spherical surface umbrella stand and planetary mechanism, improves the using flexible of equipment；?
In the case where being changed without umbrella stand disk, the variation of spherical surface umbrella stand segmentation number is realized, under the premise of meeting substrate size requirement, expand
Production capacity；It is simple and reasonable, it is convenient for disassembly and assembly, it is suitable for promoting.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the top view of the utility model；
Fig. 3 is the main view of the utility model；
Fig. 4 is the present invention looks up structural representation of the utility model.
Specific embodiment
The utility model feature and other correlated characteristics are described in further detail by embodiment below in conjunction with attached drawing,
In order to the understanding of technical staff of the same trade:
As shown in Figure 1-3, figure label 1-14 is respectively indicated are as follows: center fixing piece 1, umbrella stand disk 2, workpiece plate 3, support rod
4, connecting rod 5, sliding block 6, boom 7, ferry-boat block 8, film-coating workpiece 9, conversion block 10, guide rail 11, adjustment screw 12, fixed screw
13, supporting rib 14.
Embodiment: as shown in Figure 1, it is applied to the umbrella stand mechanism of adjustable-angle in vacuum coating equipment in the present embodiment,
It is driven by driving device (not shown) rotates, and the output end of driving device is center fixing piece 1, and center fixing piece 1 is solid
It is scheduled on the center of umbrella stand mechanism, driving device can drive umbrella stand to rotate integrally by center fixing piece 1.
As shown in Figure 1, center fixing piece 1 and umbrella stand disk 2 are installed by flange and fixed, umbrella stand disk 2 is used to support below
Structure.As shown in Fig. 2, umbrella stand mechanism include four support rods 4, four support rods 4 along the circumferencial direction of umbrella stand disk 2 it is uniform between
Every arrangement, circumferencial direction is divided into four parts, i.e., four segmentations.Workpiece is fixedly installed between two adjacent support rods 4
Disk 3, workpiece plate 3 is for carrying film-coating workpiece 9.Workpiece plate 3 rotates under the drive of the drive, is carried on workpiece to realize
The uniform coated of film-coating workpiece 9 on disk 3.
In conjunction with shown in Fig. 1 and Fig. 3, conversion block 10 is installed in the lower section of umbrella stand disk 2, between conversion block 10 and umbrella stand disk 2
Constitute detachable be connected and fixed.Conversion block 10 with the one end of each support rod 4 for being connected.It is equipped on conversion block 10
Connection position corresponding with the quantity of support rod 4 is convenient to conversion block 10 according to the difference of 4 quantity of support rod from umbrella stand disk
It is removed on 2 and changes another conversion block 10 corresponding with 4 quantity of support rod, thus under the premise of being changed without umbrella stand disk 2, it is real
The variation of existing umbrella stand segmentation number, and then improve the adaptability and switch speed of umbrella stand.
In order to make umbrella stand disk 2 cope with the variation of umbrella stand segmentation number, ferry-boat block 8 is provided on umbrella stand disk 2, ferry-boat block 8 is right
It should be in the installation site of several support rods 4.Taking the example shown in figure 1, the original state of umbrella stand disk 2 is six segmentations, circumferencial direction
Support rod can be fixedly mounted on every supporting rib 14 in the six roots of sensation supporting rib 14 being evenly arranged.But umbrella stand disk 2 is changed to four segmentations
When, two support rods among four support rods 4 can not be completed to be fixedly mounted by existing supporting rib 14, at this time this two
Installation ferry-boat block 8 cooperates simultaneously to realize that the installation of support rod 4 is fixed on 2 position of umbrella stand disk corresponding to root support rod 4
Conversion block 10 can realize the variation of umbrella stand segmentation number under the premise of being changed without umbrella stand disk 2.
For example, when using four support rods 4 shown in FIG. 1, i.e., when four segmentations, set that there are four be used on conversion block 10
The connection position connecting with four support rods 4, four support rods 4 can be connected to one by one in four connection positions of conversion block 10.When answering
When to different coated products, according to the needs of its technique and yield, umbrella stand is if desired switched to six segmentations, then will have four
The conversion block 10 of a connection position is removed from center fixing piece 1, and changing tool, there are six the conversion blocks of connection position, later in each connection
Difference connection support bar 4 at position, and each support rod 4 one-to-one correspondence is fixed on supporting rib 14, it can be changed without
Under the premise of umbrella stand disk 2, realize that umbrella stand is become the variation of six segmentations by four segmentations.
In conjunction with shown in Fig. 1 and Fig. 3, one end of each support rod 4 is respectively that hinge is connect between conversion block 10.Each support
The top of bar 4 is separately provided for the regulating mechanism of adjustment 4 angle of support rod.Specifically, the company of being provided with above support rod 4
Extension bar 5, one end of connecting rod 5 are connect with the body of rod hinge of support rod 4.The other end of connecting rod 5 is connect with 6 hinge of sliding block, sliding
Block 6 is arranged on guide rail 11 set on boom 7, and boom 7 is fixedly mounted under lower section or the ferry-boat block 8 of supporting rib 14
Side, the extending direction of the extending direction and support rod 4 of boom 7 are consistent.Sliding block 6 can slide on the guide rail 11 of boom 7, with
The sliding of sliding block 6, connecting rod 5 support rod 4 can be driven to rotate upwardly and downwardly around support rod 4 and the hinge joint of conversion block 10, thus complete
It is adjusted at the angle of support rod 4, and then realizes that the workpiece plate 3 being arranged between support rod 4 is adjusted compared to the angle of coating source.
So, different film-coating workpieces, the high quality that different technology conditions require, bulk production can be achieved in same equipment
Requirement；Meanwhile under the premise of meeting substrate size requirement, enhance production capacities.
As shown in figure 3, being provided with adjustment screw 12 in the side of boom 7, adjustment screw 12 can be threaded through on guide rail 11,
End face tightening is in a side surface of sliding block 6；It can be made to carry out inside pushing tow to sliding block 6 by tightening adjustment screw 12, to make
The slid inward on guide rail 11 of sliding block 6, to adjust the angle of support rod 4.As shown in figure 3, being provided with fixed screw on sliding block 6
13, the position of sliding block 6 can be fixed by fixed screw 13, to guarantee entire umbrella stand mechanism in coating process
Stable structure avoids shaking.
The present embodiment is in the specific implementation: umbrella stand disk 2 is adapted with plated film planetary mechanism, realizes spherical surface umbrella stand and planet machine
Exchange between structure improves the using flexible of equipment, widens its use scope.
Although above embodiments are elaborated referring to conception and embodiment of the attached drawing to the utility model aim,
But those skilled in the art will realize that still may be used in the case where no disengaging claim limits the precondition of range
To make various modifications and variations to the utility model, therefore will not repeat them here.
Claims (6)
1. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment, the umbrella stand mechanism are driven by driving device
Rotation, it is characterised in that: the umbrella stand mechanism includes several support rods, is separately installed with and is used between the adjacent support rod
Carry the workpiece plate of workpiece；Constituted between the support rod and the driving device it is hinged, the support rod can around its with it is described
Hinge joint between driving device is rotated to adjust the angle of the workpiece plate.
2. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 1, feature
Be: the driving device is connected with umbrella stand disk, and the support rod is constituted with the driving device and the umbrella stand disk respectively
Hingedly；The corresponding ferry-boat block of post position is provided on the umbrella stand disk.
3. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 2, feature
Be: hingedly passing through between the support rod and the umbrella stand disk is arranged boom on the umbrella stand disk, on the boom
With slidable sliding block, the sliding block and one end of a connecting rod are hinged, the other end of the connecting rod and the support rod
Hingedly.
4. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 3, feature
It is: there is guide rail on the boom, the sliding block is slidably matched with the guide rail, it is provided with fixing piece on the slide block,
The fixing piece is for being fixed position of the sliding block on the guide rail；The side of the boom is provided with adjustment
Part, the adjustment part is for being adjusted position of the sliding block on the guide rail.
5. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 2, feature
Be: the umbrella stand disk is adapted with plated film planetary mechanism.
6. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 2, feature
Be: the driving device is connected with a conversion block, constitutes detachable connection between the conversion block and the umbrella stand disk
Fixed, one end of the support rod and the conversion block are hinged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820989246.XU CN208562509U (en) | 2018-06-26 | 2018-06-26 | A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820989246.XU CN208562509U (en) | 2018-06-26 | 2018-06-26 | A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208562509U true CN208562509U (en) | 2019-03-01 |
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ID=65488159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820989246.XU Active CN208562509U (en) | 2018-06-26 | 2018-06-26 | A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment |
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| CN (1) | CN208562509U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108505013A (en) * | 2018-06-26 | 2018-09-07 | 光驰科技(上海)有限公司 | A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment |
| CN110230034A (en) * | 2019-05-20 | 2019-09-13 | 江苏光腾光学有限公司 | Optical coating multi-angle umbrella stand and coating machine comprising the umbrella stand |
-
2018
- 2018-06-26 CN CN201820989246.XU patent/CN208562509U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108505013A (en) * | 2018-06-26 | 2018-09-07 | 光驰科技(上海)有限公司 | A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment |
| CN108505013B (en) * | 2018-06-26 | 2024-08-20 | 光驰科技(上海)有限公司 | Angle-adjustable umbrella stand mechanism applied to vacuum coating equipment |
| CN110230034A (en) * | 2019-05-20 | 2019-09-13 | 江苏光腾光学有限公司 | Optical coating multi-angle umbrella stand and coating machine comprising the umbrella stand |
| CN110230034B (en) * | 2019-05-20 | 2024-04-16 | 江苏光腾光学有限公司 | Optical film-plating multi-angle umbrella stand and film plating machine comprising same |
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