CN208189544U - A kind of wet process equipment dynamic etch medical fluid uniforming device - Google Patents

A kind of wet process equipment dynamic etch medical fluid uniforming device Download PDF

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Publication number
CN208189544U
CN208189544U CN201820719174.7U CN201820719174U CN208189544U CN 208189544 U CN208189544 U CN 208189544U CN 201820719174 U CN201820719174 U CN 201820719174U CN 208189544 U CN208189544 U CN 208189544U
Authority
CN
China
Prior art keywords
web plate
spray tube
medical fluid
rolling roller
wet process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201820719174.7U
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Chinese (zh)
Inventor
简健哲
黄荣龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui Hongshi Automation Equipment Co Ltd
Original Assignee
Anhui Hongshi Automation Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anhui Hongshi Automation Equipment Co Ltd filed Critical Anhui Hongshi Automation Equipment Co Ltd
Priority to CN201820719174.7U priority Critical patent/CN208189544U/en
Application granted granted Critical
Publication of CN208189544U publication Critical patent/CN208189544U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

A kind of wet process equipment dynamic etch medical fluid uniforming device, including chemical tank cabinet, chemical tank cabinet is rectangle slot cavity body, cabinets cavity top is equipped with the spray tube being fixedly mounted, spray the nozzle that bottom of the tube is equipped with uniform rectilinear distribution, cabinets cavity bottom is equipped with rolling roller, rolling roller is horizontal and spatially vertical with spray tube, substrate is placed on rolling roller, the lower section of the spray tube, the top of substrate are equipped with web plate, and web plate is equipped with equally distributed perforation net slot, the both side ends of rolling roller are equipped with gearing shaft, and web plate bottom and gearing shaft link.There is net slot arranged in a uniform on web plate, the medical fluid that spray tube top nozzle sprays is through the product on net slot uniform etching substrate, pass through the net slot size and arranging situation of web plate during the practical processing procedure of change, realize that chemical tank cabinet flow field is more stable uniformly, when processing procedure carries out, swing by a small margin occurs for the linkage of the gearing shaft of web plate and rolling roller, further ensures that the uniformity in flow field.

Description

A kind of wet process equipment dynamic etch medical fluid uniforming device
Technical field
The utility model relates to wet process apparatus field more particularly to a kind of wet process equipment dynamic etch medical fluid are equal Homogenizer.
Background technique
Manufacture of semiconductor is carried out in ultra-clean dust free room, still the presence of some pollution sources, as coming for pollution sources Source, nothing more than influence, the chemical material of the generation of equipment material itself, field operation person or process engineers' human body itself and movement Processing procedure medicament residual or impurity level generation and processing procedure reaction generation as a result, especially processing procedure react generation one , more become the main source of process contamination, will cause the decline of yield and reliability mostly;In manufacture of semiconductor, no matter It is that each stage process requires cleaning step repeatedly after removing photoresistance, chemical gaseous phase deposition, oxidized diffusion, grinding wafer etc..
Wet process board had been mature development already in semiconductor product, but some mechanisms design, using above have maintenance difficult, The problems such as consumption liquid measure is big, uniformity is bad, leakage, and the back side is dirty equal.Wherein, semiconductor needs to carry out unhairing in production technology Side processing, conventional material resources ball blast mode can not only bring foreign matter into, and polluted product is also easy to lead to the damage of semiconductor product, Therefore medical fluid etching becomes preferred mode, and the uniformity of the sprinkling of medical fluid is more difficult to control, etches medical fluid uniformity Semiconductor is particularly important, and medical fluid transition contact semiconductor be easy to cause etching transition, and liquid volume deficiency is easy to cause etching Not exclusively, semiconducting behavior is influenced, causes semiconductor yields lower.
Utility model content
The utility model is exactly in view of the deficienciess of the prior art, provide a kind of wet process equipment dynamic etch medicine Liquid uniforming device.
To solve the above problems, technical solution adopted in the utility model is as follows:
A kind of wet process equipment dynamic etch medical fluid uniforming device, including chemical tank cabinet, chemical tank cabinet are square Shape slot cavity body, cabinets cavity top are equipped with the spray tube being fixedly mounted, and spray bottom of the tube is equipped with the nozzle of uniform rectilinear distribution, case Intracoelomic cavity bottom is equipped with rolling roller, and rolling roller is horizontal and spatially vertical with spray tube, and substrate, the spray are placed on rolling roller The lower section of pipe, the top of substrate are equipped with web plate, and web plate is equipped with equally distributed perforation net slot, and the both side ends of rolling roller are equipped with Gearing shaft, web plate bottom and gearing shaft link.
Further, chemical tank cabinet two sides are respectively equipped with bleeding point and air inlet, are equipped with blower outside cabinet, take out Port and air inlet pass through the pipeline of fans connection of peripheral hardware.
Further, the spray tube is equipped with inlet pipe and air inlet pipeline, and air inlet pipeline is connect with air inlet, inlet tube The inlet tube being equipped with above road and chemical tank cabinet is connect.
Further, the junction of the spray tube and nozzle is equipped with sealing ring.
Further, the net notch of the web plate is equipped with the groove of introversion, and the quantity of net notch, size shape and arrangement Mode needs to design according to processing procedure.
Compared with prior art, the beneficial effects of the utility model are as follows:
A kind of wet process equipment dynamic etch medical fluid uniforming device described in the utility model, in spray tube and substrate Between the web plate installed, have net slot arranged in a uniform on web plate, the medical fluid that spray tube top nozzle sprays is through net slot uniform etching base Product on plate realizes stream in chemical tank cabinet by the net slot size and arranging situation of web plate during the practical processing procedure of change Field is more stable uniformly, and when processing procedure carries out, swing by a small margin occurs for the gearing shaft linkage of web plate and rolling roller, further Ensure the uniformity in flow field.
Detailed description of the invention
Fig. 1 is a kind of wet process equipment dynamic etch medical fluid uniforming device structural representation described in the utility model Figure;
Fig. 2 is the structural schematic diagram of web plate in Fig. 1.
Specific embodiment
Illustrate the content of the utility model below in conjunction with specific embodiments.
As depicted in figs. 1 and 2, a kind of wet process equipment dynamic etch medical fluid uniforming device, including chemistry Tank body 1, chemical tank cabinet 1 are rectangle slot cavity body, and 1 inner cavity top of cabinet is equipped with the spray tube 2 being fixedly mounted, 2 bottom of spray tube Portion is equipped with the nozzle 3 of uniform rectilinear distribution, and 1 intracavity bottom of cabinet is equipped with rolling roller 4, rolling roller 4 it is horizontal and with 2 space of spray tube It is upper vertical, substrate 5 is placed on rolling roller 4, the top of the lower section of the spray tube 2, substrate 5 is equipped with web plate 6, and web plate 6 is equipped with The both side ends of equally distributed perforation net slot 7, rolling roller 4 are equipped with gearing shaft 8,6 bottom of web plate and gearing shaft 8 It is dynamic.
A kind of wet process equipment dynamic etch medical fluid uniforming device, is installed between spray tube 2 and substrate 5 Web plate 6, have net slot 7 arranged in a uniform on web plate 6, the medical fluid that spray tube 2 sprays is through the production on 7 uniform etching substrate 5 of net slot Product realize liquid flow field in chemical tank cabinet 1 by 7 size of net slot and arranging situation of web plate 6 during the practical processing procedure of change More stable uniform, when processing procedure carries out, swing by a small margin occurs for the linkage of gearing shaft 8 of web plate 6 and rolling roller 4, into one Step ensures the uniformity in flow field.
1 two sides of chemical tank cabinet are respectively equipped with bleeding point 9 and air inlet 10, and blower 11, pumping are equipped with outside cabinet 1 Mouth 9 and air inlet 10 pass through the 11 pipeline connection of blower of peripheral hardware, and the hot gas generated during wet type high warm processing procedure can pass through wind Machine 11 is extracted out from bleeding point 9, and is recycled into cabinet 1 by air inlet 10, and recycle heat utilizes, energy saving.
The spray tube 2 is equipped with inlet pipe 12 and air inlet pipeline 13, and air inlet pipeline 13 is connect with air inlet 10, inlet tube The inlet tube 14 being equipped with above road 12 and chemical tank cabinet 1 is connect, and is passed through high pressure gas by air inlet pipeline 13, high pressure gas with Medical fluid mixing in inlet pipe 12 realizes that the high-pressure uniform atomization of medical fluid sprays, further increases the uniformity of etching.
The junction of the spray tube 2 and nozzle 3 is equipped with sealing ring, while improving connection air-tightness, guarantees that medical fluid is logical The stability for entering high pressure gas atomization, prevents leakage gas leakage.
7 mouthfuls of net slot of the web plate 6 are equipped with the groove of introversion, and 7 mouthfuls of net slot of quantity, size shape and arrangement mode root It needs to design according to processing procedure, meets the etching of different size semiconductor product.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model Protection scope within.

Claims (5)

1. a kind of wet process equipment dynamic etch medical fluid uniforming device, including chemical tank cabinet (1), chemical tank cabinet (1) For rectangle slot cavity body, cabinet (1) inner cavity top is equipped with the spray tube (2) being fixedly mounted, and spray tube (2) bottom is equipped with uniform rectilinear The nozzle (3) of distribution, cabinet (1) intracavity bottom are equipped with rolling roller (4), and rolling roller (4) is horizontal and spatially hangs down with spray tube (2) Directly, substrate (5) are placed on rolling roller (4), characterized in that the top of the lower section of the spray tube (2), substrate (5) is equipped with web plate (6), web plate (6) is equipped with equally distributed perforation net slot (7), and the both side ends of rolling roller (4) are equipped with gearing shaft (8), Web plate (6) bottom and gearing shaft (8) are linked.
2. a kind of wet process equipment dynamic etch medical fluid uniforming device according to claim 1, characterized in that described Chemical tank cabinet (1) two sides are respectively equipped with bleeding point (9) and air inlet (10), are equipped with blower (11) outside cabinet, bleeding point (9) Blower (11) the pipeline connection for passing through peripheral hardware with air inlet (10).
3. a kind of wet process equipment dynamic etch medical fluid uniforming device according to claim 2, characterized in that described Spray tube (2) is equipped with inlet pipe (12) and air inlet pipeline (13), and air inlet pipeline (13) is connect with air inlet (10), inlet pipe (12) it is connect with the inlet tube (14) being equipped with above chemical tank cabinet (1).
4. a kind of wet process equipment dynamic etch medical fluid uniforming device according to claim 1, characterized in that described The junction of spray tube (2) and nozzle (3) is equipped with sealing ring.
5. a kind of wet process equipment dynamic etch medical fluid uniforming device according to claim 1, characterized in that described Net slot (7) mouth of web plate (6) is equipped with the groove of introversion, and the quantity, size shape and arrangement mode of net slot (7) mouth are according to processing procedure It needs to design.
CN201820719174.7U 2018-05-14 2018-05-14 A kind of wet process equipment dynamic etch medical fluid uniforming device Expired - Fee Related CN208189544U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820719174.7U CN208189544U (en) 2018-05-14 2018-05-14 A kind of wet process equipment dynamic etch medical fluid uniforming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820719174.7U CN208189544U (en) 2018-05-14 2018-05-14 A kind of wet process equipment dynamic etch medical fluid uniforming device

Publications (1)

Publication Number Publication Date
CN208189544U true CN208189544U (en) 2018-12-04

Family

ID=64430230

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820719174.7U Expired - Fee Related CN208189544U (en) 2018-05-14 2018-05-14 A kind of wet process equipment dynamic etch medical fluid uniforming device

Country Status (1)

Country Link
CN (1) CN208189544U (en)

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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20181204

Termination date: 20200514