CN207930444U - A kind of monocrystalline silicon piece outer edge automatic chamfering device - Google Patents

A kind of monocrystalline silicon piece outer edge automatic chamfering device Download PDF

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Publication number
CN207930444U
CN207930444U CN201820276811.8U CN201820276811U CN207930444U CN 207930444 U CN207930444 U CN 207930444U CN 201820276811 U CN201820276811 U CN 201820276811U CN 207930444 U CN207930444 U CN 207930444U
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China
Prior art keywords
casing
monocrystalline silicon
microswitch
connecting plate
cylinder
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CN201820276811.8U
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Chinese (zh)
Inventor
王全文
杨蛟
李鹭
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CHENGDU QINGYANG ELECTRONIC MATERIALS Co Ltd
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CHENGDU QINGYANG ELECTRONIC MATERIALS Co Ltd
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Abstract

The utility model discloses a kind of monocrystalline silicon piece outer edge automatic chamfering devices, it includes casing(1), the casing(1)Inside it is provided with positioning plate(2), microswitch(3)And cylinder(4), positioning plate(2)It is set to casing(1)Back plate on, microswitch(3)It is set to casing(1)Left plate on, straight slot is offered on left plate, grinding wheel is rotatably installed in straight slot(5), grinding wheel(5)Positioned at microswitch(3)Front side, cylinder(4)Piston rod on be provided with connecting plate(6), connecting plate(6)Bottom be rotatably installed with driving pulley through shaft(7)And driven pulley(8), connecting plate(6)Top be installed with motor(10), driven pulley(8)Shaft on be provided with vacuum cup(11), vacuum cup(11)Positioned at connecting plate(6)Top.The utility model has the beneficial effects that:Compact-sized, self-centering improves chamfering efficiency, high degree of automation.

Description

A kind of monocrystalline silicon piece outer edge automatic chamfering device
Technical field
The utility model is related to the technical field of monocrystalline silicon piece outer edge polishing, originate from outside especially a kind of monocrystalline silicon piece Dynamic facing attachment.
Background technology
Monocrystalline silicon has good electric property and thermal stability as a kind of important semi-conducting material, from by people It was found that and substituting other semi-conducting materials quickly after utilization.Silicon materials are because it is preferable with high temperature resistant and radiation resistance, especially Suitable for making the characteristic of high power device as a kind of most semi-conducting material of application, integrated circuit semiconductor apparatus is big Made of most silicon materials.In the good silicon single crystal method of manufacturing property, Grown by CZ Method silicon single crystal has equipment and technique It is relatively easy, easy to implement to automatically control.Pulling of crystals silicon rod needs to carry out a series of after drawing out from single crystal growing furnace Process, early period include block, the grinding of evolution, fillet and the mechanical processings such as plane lapping;Mid-term also needs to carry out silicon single crystal rod Barreling, slice, cleaning, chamfering, grinding and the works such as clean again;Silicon chip is carried out the processes such as making herbs into wool, diffusion, crystallization and sintering by the later stage It can just be manufactured into semiconductor devices or the solar battery sheet for photovoltaic generation afterwards.
Wherein, the purpose of mid-term chamfering is the outer edge using grinder buffing monocrystalline silicon piece, that is, is got rid of in slicing processes The burr of middle output.Existing chamfering method is first to lie against monocrystalline silicon piece on vacuum cup top surface, is taken out to vacuum cup Vacuum, monocrystalline silicon piece are adsorbed at the top of vacuum cup, and to fix monocrystalline silicon piece, then worker utilizes grinding wheel along monocrystalline silicon The outer rim of piece is polished to remove flash removed, and the chamfering of monocrystalline silicon piece is finally realized.However, this method needs man-hour manually hand-held sand Wheel is polished, the defect that there are labor intensity is big, chamfering efficiency is low.In addition, loading and unloading are required for frequently operating very every time Suction disk, further increases labor intensity, reduces chamfering efficiency.
Utility model content
The shortcomings that the purpose of the utility model is to overcome the prior arts provides compact-sized one kind, self-centering, raising The monocrystalline silicon piece outer edge automatic chamfering device of chamfering efficiency, high degree of automation.
The purpose of this utility model is achieved through the following technical solutions:A kind of monocrystalline silicon piece outer edge automatic chamfering dress It sets, it includes casing, positioning plate, microswitch and cylinder is provided in the casing, after the positioning plate is set to casing On plate, microswitch is set on the left plate of casing, and straight slot is offered on left plate, grinding wheel, sand are rotatably installed in straight slot Positioned at the front side of microswitch, the foreboard that cylinder runs through casing from front to back is arranged wheel, and connection is provided on the piston rod of cylinder The bottom of plate, connecting plate is rotatably installed with driving pulley and driven pulley through shaft, is installed between driving pulley and driven pulley There is belt, motor is installed at the top of connecting plate, the output shaft of motor and the shaft of driving pulley connect, driven pulley Vacuum cup is provided in shaft, vacuum cup is located above connecting plate, and the shaft of vacuum cup and driven pulley is coaxially disposed, The distance of the centre-to-centre spacing positioning plate of vacuum cup is equal to the distance of the centre-to-centre spacing microswitch of vacuum cup;The facing attachment also wraps Controller and vacuum extractor are included, vacuum extractor is connect with vacuum cup, the controller and vacuum extractor, motor, micro- Dynamic switch is connected with cylinder.
The piston rod of the connecting plate and cylinder is arranged in angle.
The casing is rectangular.
The utility model has the following advantages:The utility model is compact-sized, self-centering, improves chamfering efficiency, is automatic Change degree is high.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model;
Fig. 2 is the A direction views of Fig. 1;
In figure, 1- casings, 2- positioning plates, 3- microswitches, 4- cylinders, 5- grinding wheels, 6- connecting plates, 7- driving pulleys, 8- Driven pulley, 9- belts, 10- motors, 11- vacuum cups, 12- monocrystalline silicon pieces.
Specific implementation mode
The utility model is further described below in conjunction with the accompanying drawings, the scope of protection of the utility model be not limited to It is lower described:
As shown in Figure 1 and 2, a kind of monocrystalline silicon piece outer edge automatic chamfering device, it includes casing 1, and the casing 1 is in square Shape is provided with positioning plate 2, microswitch 3 and cylinder 4 in the casing 1, and the positioning plate 2 is set to the back plate of casing 1 On, microswitch 3 is set on the left plate of casing 1, and straight slot is offered on left plate, grinding wheel 5, sand are rotatably installed in straight slot Wheel 5 is located at the front side of microswitch 3, and the foreboard that cylinder 4 runs through casing 1 from front to back is arranged, is provided on the piston rod of cylinder 4 Connecting plate 6, connecting plate 6 and the piston rod of cylinder 4 are arranged in angle, and the bottom of connecting plate 6 is rotatably installed with main belt through shaft Wheel 7 and driven pulley 8, are equipped with belt 9, the top of connecting plate 6 is installed with electricity between driving pulley 7 and driven pulley 8 The output shaft of machine 10, motor 10 is connect with the shaft of driving pulley 7, vacuum cup 11 is provided in the shaft of driven pulley 8, very Suction disk 11 is located at 6 top of connecting plate, and vacuum cup 11 and the shaft of driven pulley 8 are coaxially disposed, the center of vacuum cup 11 Distance away from positioning plate 2 is equal to the distance of the centre-to-centre spacing microswitch 3 of vacuum cup 11;The facing attachment further include controller and Vacuum extractor, vacuum extractor are connect with vacuum cup 11, the controller and vacuum extractor, motor 10, microswitch 3 It is connected with cylinder 4.
The course of work of the utility model is as follows:Grinding wheel 5 is first set to do high speed rotary motion, then the monocrystalline silicon piece that will wait for chamfering 12 lie against 11 top of vacuum cup, and monocrystalline silicon piece 12, which is then leaned against positioning plate 2, realizes Primary Location, finally by monocrystalline silicon piece 12 lean against on microswitch 3, and microswitch 3 sends out electric signal to controller at this time after being depressed, and controller controls vacuum means Startup is set, vacuum extractor vacuumizes vacuum cup 11, and monocrystalline silicon piece 12 is sucked vacuum cup 11, realizes monocrystalline silicon piece Self-centering, i.e. monocrystalline silicon piece 12 and vacuum cup 11 be coaxial;After microswitch 3 is depressed, controller also controls motor 10 Start, at the same control cylinder 4 piston rod retract, motor 10 drive driving pulley 7 rotate, driving pulley 7 through belt 9 drive from Movable belt pulley 8 rotates, and driven pulley 8 drives vacuum cup 11 to rotate, to drive monocrystalline silicon piece 12 to rotate, and Cylinder 4 drive monocrystalline silicon piece 12 towards 5 direction of grinding wheel move, during piston rod is retracted, monocrystalline silicon piece slowly with 5 phase of grinding wheel It cuts, to realize the quick chamfering of monocrystalline silicon piece, there is no need to man-hour manually hand-held grinding wheels to polish, and greatly alleviate worker's Labor intensity improves chamfering efficiency, and the keying of vacuum extractor is controlled by microswitch 3, is not necessarily to frequent operation, further Improve chamfering efficiency.
When chamfering for a period of time after, controller control 4 piston rod of cylinder stretch out, while control control motor 10 close, During piston rod stretches out, finished product monocrystalline silicon piece pushes down microswitch 3 again, and microswitch 3 sends out electric signal to control at this time Device, controller control vacuum extractor and close, and vacuum cup 11 no longer adsorbs monocrystalline silicon piece 12, at this time can be by finished product monocrystalline silicon Piece is removed, and is prepared with the chamfering for second monocrystalline silicon piece.

Claims (3)

1. a kind of monocrystalline silicon piece outer edge automatic chamfering device, it is characterised in that:It includes casing(1), the casing(1)Inside set It is equipped with positioning plate(2), microswitch(3)And cylinder(4), the positioning plate(2)It is set to casing(1)Back plate on, fine motion is opened It closes(3)It is set to casing(1)Left plate on, straight slot is offered on left plate, grinding wheel is rotatably installed in straight slot(5), grinding wheel (5)Positioned at microswitch(3)Front side, cylinder(4)Run through casing from front to back(1)Foreboard setting, cylinder(4)Piston rod On be provided with connecting plate(6), connecting plate(6)Bottom be rotatably installed with driving pulley through shaft(7)And driven pulley(8), main Movable belt pulley(7)And driven pulley(8)Between belt is installed(9), connecting plate(6)Top be installed with motor(10), electricity Machine(10)Output shaft and driving pulley(7)Shaft connection, driven pulley(8)Shaft on be provided with vacuum cup(11), Vacuum cup(11)Positioned at connecting plate(6)Top, vacuum cup(11)With driven pulley(8)Shaft coaxial arrangement, vacuum inhale Disk(11)Centre-to-centre spacing positioning plate(2)Distance be equal to vacuum cup(11)Centre-to-centre spacing microswitch(3)Distance;The chamfering Device further includes controller and vacuum extractor, vacuum extractor and vacuum cup(11)Connection, the controller with vacuumize Device, motor(10), microswitch(3)And cylinder(4)Connection.
2. a kind of monocrystalline silicon piece outer edge automatic chamfering device according to claim 1, it is characterised in that:The connecting plate (6)With cylinder(4)Piston rod in angle be arranged.
3. a kind of monocrystalline silicon piece outer edge automatic chamfering device according to claim 1, it is characterised in that:The casing (1)It is rectangular.
CN201820276811.8U 2018-02-27 2018-02-27 A kind of monocrystalline silicon piece outer edge automatic chamfering device Active CN207930444U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820276811.8U CN207930444U (en) 2018-02-27 2018-02-27 A kind of monocrystalline silicon piece outer edge automatic chamfering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820276811.8U CN207930444U (en) 2018-02-27 2018-02-27 A kind of monocrystalline silicon piece outer edge automatic chamfering device

Publications (1)

Publication Number Publication Date
CN207930444U true CN207930444U (en) 2018-10-02

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820276811.8U Active CN207930444U (en) 2018-02-27 2018-02-27 A kind of monocrystalline silicon piece outer edge automatic chamfering device

Country Status (1)

Country Link
CN (1) CN207930444U (en)

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