CN207913793U - High vacuum high and low temperature environment vacuum vibration-isolating platform - Google Patents

High vacuum high and low temperature environment vacuum vibration-isolating platform Download PDF

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Publication number
CN207913793U
CN207913793U CN201721898137.9U CN201721898137U CN207913793U CN 207913793 U CN207913793 U CN 207913793U CN 201721898137 U CN201721898137 U CN 201721898137U CN 207913793 U CN207913793 U CN 207913793U
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platform
vacuum
column
flange
vibration
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CN201721898137.9U
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戴建新
戴科晨
沈丽娟
王燕
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CHANGSHU YUHUA VACUUM EQUIPMENT TECHNOLOGY CO LTD
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CHANGSHU YUHUA VACUUM EQUIPMENT TECHNOLOGY CO LTD
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Abstract

The utility model discloses a kind of high vacuum high and low temperature environment vacuum vibration-isolating platforms, including vacuum experiment babinet and work piece platform, the vacuum experiment babinet is equipped with pivot flange, the work piece platform setting is supported in vacuum laboratory box body by platform column, the platform column is connect across pivot flange with vibrating isolation foundation, the platform column is fixedly connected by vibration isolation component with the pivot flange, the vibration isolation component includes bellows, the bellows upper end and the pivot flange fixed seal connection, the bellows lower end and platform column fixed seal connection.The vacuum vibration-isolating platform can effectively reduce the work piece platform caused by vacuum chamber and vibrate, and reduce the leakage heat problem of vacuum chamber.

Description

High vacuum high and low temperature environment vacuum vibration-isolating platform
Technical field
The utility model is related to a kind of isolation mounting, especially a kind of high vacuum high and low temperature environment vacuum vibration-isolating platform.
Background technology
When carrying out the work such as light path system installation in vacuum chamber, to workbench with higher vibration isolation requirement.And it is general Vacuum chamber in workbench be directly fixedly connected with vacuum experiment babinet, generally require that various drives are installed on vacuum experiment babinet Equipment is moved, in addition the pump machines such as vacuum pump are also required to be directly connected to by pipeline and vacuum experiment babinet.These equipment are at work Larger vibration will be generated, is conducted to vacuum test case by various mechanical connections or pipeline, and then conduct to workbench.
Utility model content
Defect for the above-mentioned prior art, the task of the utility model are to provide a kind of high vacuum high and low temperature environment vacuum Vibration-isolating platform solves workpiece support in vacuum chamber and is effectively isolated vacuum chamber vibration problem.
Technical solutions of the utility model are as follows:A kind of high vacuum high and low temperature environment vacuum vibration-isolating platform, including vacuum experiment Babinet and work piece platform, the vacuum experiment babinet are equipped with pivot flange, and the work piece platform is arranged in vacuum laboratory box body It is supported by platform column, the platform column is connect across pivot flange with vibrating isolation foundation, and the platform column passes through vibration isolation group Part is fixedly connected with the pivot flange, and the vibration isolation component includes bellows, the bellows upper end and the pivot flange Fixed seal connection, the bellows lower end and platform column fixed seal connection.High vacuum high and low temperature environment vacuum vibration isolation is flat Platform is vibrated by flexible effective work piece platform that completely cut off caused by vacuum experiment babinet of bellows itself.
Further, for the ease of replacing vibration isolation component, the platform column lower end passes through transitioning component and vibrating isolation foundation Connection, the transitioning component includes counter flange and lap joint flange, and the lap joint flange is set in the lower end of platform column, described The upper end of counter flange is fixedly connected with lap joint flange, and the lower end of the counter flange is fixedly connected with vibrating isolation foundation.
Further, the platform column is fixedly connected with thread bush, and the screw thread set upper side is equipped with flange, the ripple The lower end of pipe is equipped with inward flange, and sealing ring, the bellows are equipped between the flange of the thread bush and the inward flange of bellows Lower end by being connect with the flange seal of the matched nut of the thread bush and thread bush.
Further, vacuum chamber leaks heat by platform column in order to prevent, and platform column is made to be tied in vitro in vacuum laboratory box Reveal frosting, destroy vacuum indoor temperature, the vacuum experiment babinet be equipped with it is heat sink, it is described it is heat sink be equipped with column housing, it is described Platform column passes through the column housing, the top of the platform column that insulating assembly is arranged, and the insulating assembly includes card The lower surface of the first gasket set on platform column top, the second gasket is equipped with boss, and second gasket passes through the boss Be fixedly connected with the first gasket, between first gasket and the second gasket be equipped with gap, the second pad support work piece platform, The first gasket side wall is equipped with housing with column housing outer sheath.
Preferably, the housing is spaced double-layer stainless steel set.
Preferably, the platform column is hollow circular-tube.
Preferably, in order to increase platform column support strength, stablize work piece platform, fixed between the adjacent platform column It is connected with X-shaped holder.
The utility model compared with prior art the advantages of be:The platform of work piece platform will be supported to stand by vibration isolation component Column carries out vibration isolation with vacuum experiment babinet, avoids the vibration for causing work piece platform by vacuum experiment babinet.By heat-insulated Work piece platform and the direct contact area of platform column is greatly reduced in component, while reducing platform column by housing and existing The exposed area of high/low temperature vacuum environment as much as possible reduces and leaks heat by the vacuum chamber that platform column generates, avoids flat Frosting condensation trouble of the platform column outside vacuum chamber reduces maintenance work.
Description of the drawings
Fig. 1 is the structural schematic diagram of high vacuum high and low temperature environment vacuum vibration-isolating platform.
Fig. 2 is vibration isolation component partial schematic diagram at A in Fig. 1.
Fig. 3 is transitioning component partial schematic diagram at B in Fig. 1.
Fig. 4 is insulating assembly partial schematic diagram at C in Fig. 1.
Specific implementation mode
With reference to embodiment, the utility model is described in further detail, but not as the restriction to the utility model.
Shown in Fig. 1, the high vacuum high and low temperature environment vacuum vibration-isolating platform of the utility model, including vacuum laboratory box Body 1 and work piece platform 2, vacuum experiment babinet 1 is interior to be equipped with heat sink 3, by being realized in vacuum experiment babinet 1 to heat sink 3 control High and low temperature environment.Work piece platform 2 is connected and fixed in length and breadth using square tube, is arranged in the space enclosed heat sink 3 and is used to support Workpiece.The bottom of vacuum experiment babinet 1 is equipped with several pivot flanges 4, and work piece platform 2 is by insulating assembly by platform column 5 Support.Heat sink 3 are equipped with column housing 6, platform column 5 pass through column housing 6 and pivot flange 4 and by transitioning component with every The ground 7 that shakes connects.The middle part of platform column 5 is fixedly connected by vibration isolation component with pivot flange 4.Platform column 5 is open circles Pipe, in order to increase by 5 support strength of platform column, between adjacent platform column 5 being fixedly connected with X-shaped holder 8 plays stable work With.
Shown in Fig. 2 to Fig. 4, vibration isolation component includes bellows 9,9 upper end of bellows and 4 fixing seal of pivot flange Connection.Platform column 5 is fixedly connected with thread bush 10, and 10 upper end of thread bush is equipped with flange 11.The lower end of bellows 9 is equipped with convex Edge 12 is equipped with sealing ring 13 between the flange 11 of thread bush 10 and the inward flange 12 of bellows 9.The lower end of bellows 9 is sleeved on spiral shell Line set 10 on after, by tighten with 10 matched nut 14 of thread bush, so that the lower end of bellows 9 is moved up, the inward flange of bellows 9 12 are tightly connected with the flange 11 of thread bush 10.Transitioning component is arranged in 5 lower end of platform column, and transitioning component includes counter flange 15 and lap joint flange 16, lap joint flange 16 is set in the lower end of platform column 5, and the upper end of counter flange 15 and lap joint flange 16 are solid Fixed connection, the lower end of counter flange 15 is fixedly connected with vibrating isolation foundation 7.Insulating assembly is arranged at the top of platform column 5, heat-insulated Component includes the first gasket 17 and the second gasket 18 for being arranged in 5 top of platform column.The lower surface of second gasket 18 is equipped with Boss 19, the second gasket 18 are fixedly connected by boss 19 with the first gasket 17, and shape between the first gasket 17 and the second gasket 18 is made At gap, reduce contact between the two.Second gasket 18 supports work piece platform 5,17 side wall of the first gasket to be shielded with column It covers 6 outer sheaths and is equipped with the housing 20 being made of double-layer stainless steel set, column housing 6 and housing 20 are all used for heat-insulated.
When dismantling vibration isolation component, transitioning component is first dismantled, counter flange 15 is detached with the dismounting of lap joint flange 16, the same to time-division From counter flange 15 and vibrating isolation foundation 7.After removing counter flange 15, lap joint flange 16 is taken out from 5 lower end of platform column.It unclamps The nut 14 of fixed 9 lower end of bellows, and dismantle the connection of bellows 9 upper end and pivot flange 4, you can by bellows 9 from putting down 5 lower end of platform column, which is taken out, to be replaced.When need to take out platform column 5, transitioning component is first dismantled, detailed process is same as above, and is repeated no more, so The nut 14 of 9 lower end of fixed bellows is unclamped afterwards so that vibration isolation component is detached with platform column 5, and platform column 5 can pass through The column housing 6 of pivot flange 4 and heat sink 3 is extracted out into vacuum experiment babinet 1.

Claims (7)

1. a kind of high vacuum high and low temperature environment vacuum vibration-isolating platform, it is characterised in that:Including vacuum experiment babinet and work piece platform, The vacuum experiment babinet is equipped with pivot flange, and the work piece platform setting is supported in vacuum laboratory box body by platform column, The platform column is connect across pivot flange with vibrating isolation foundation, and the platform column passes through vibration isolation component and the pivot flange It is fixedly connected, the vibration isolation component includes bellows, the bellows upper end and the pivot flange fixed seal connection, described Bellows lower end and platform column fixed seal connection.
2. high vacuum high and low temperature environment vacuum vibration-isolating platform according to claim 1, which is characterized in that the platform column Lower end is connect by transitioning component with vibrating isolation foundation, and the transitioning component includes counter flange and lap joint flange, the kink method Orchid is set in the lower end of platform column, and the upper end of the counter flange is fixedly connected with lap joint flange, under the counter flange End is fixedly connected with vibrating isolation foundation.
3. high vacuum high and low temperature environment vacuum vibration-isolating platform according to claim 1, which is characterized in that the platform column It is fixedly connected with thread bush, the screw thread set upper side is equipped with flange, and the lower end of the bellows is equipped with inward flange, the thread bush Flange and the inward flange of bellows between be equipped with sealing ring, the lower end of the bellows by with the matched spiral shell of the thread bush Mother connect with the flange seal of thread bush.
4. high vacuum high and low temperature environment vacuum vibration-isolating platform according to claim 1, which is characterized in that the vacuum experiment Babinet be equipped with it is heat sink, it is described it is heat sink be equipped with column housing, the platform column passes through the column housing, the platform vertical The top setting insulating assembly of column simultaneously supports the work piece platform by insulating assembly, and the insulating assembly is including being arranged in platform The lower surface of first gasket of column top, the second gasket is equipped with boss, and second gasket is padded by the boss and first Piece is fixedly connected, and gap, the first gasket side wall and column housing outside are equipped between first gasket and the second gasket It is arranged with housing.
5. high vacuum high and low temperature environment vacuum vibration-isolating platform according to claim 4, which is characterized in that the housing is Spaced double-layer stainless steel set.
6. high vacuum high and low temperature environment vacuum vibration-isolating platform according to claim 1, which is characterized in that the platform column For hollow circular-tube.
7. high vacuum high and low temperature environment vacuum vibration-isolating platform according to claim 1, which is characterized in that described adjacent puts down X-shaped holder is fixedly connected between platform column.
CN201721898137.9U 2017-12-29 2017-12-29 High vacuum high and low temperature environment vacuum vibration-isolating platform Active CN207913793U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721898137.9U CN207913793U (en) 2017-12-29 2017-12-29 High vacuum high and low temperature environment vacuum vibration-isolating platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721898137.9U CN207913793U (en) 2017-12-29 2017-12-29 High vacuum high and low temperature environment vacuum vibration-isolating platform

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CN207913793U true CN207913793U (en) 2018-09-28

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111115530A (en) * 2018-10-30 2020-05-08 楚天科技股份有限公司 Bottle weighing device
CN112985768A (en) * 2021-03-22 2021-06-18 广州斯派克环境仪器有限公司 High-low temperature test device for optical system
CN113188764A (en) * 2021-04-16 2021-07-30 中国科学院西安光学精密机械研究所 Temperature test box with vibration isolation platform
CN113294487A (en) * 2021-06-18 2021-08-24 中国电子工程设计院有限公司 Integrally controlled vibration isolation system for large-scale precision equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111115530A (en) * 2018-10-30 2020-05-08 楚天科技股份有限公司 Bottle weighing device
CN112985768A (en) * 2021-03-22 2021-06-18 广州斯派克环境仪器有限公司 High-low temperature test device for optical system
CN112985768B (en) * 2021-03-22 2023-09-29 广州斯派克环境仪器有限公司 Optical system high-low temperature test device
CN113188764A (en) * 2021-04-16 2021-07-30 中国科学院西安光学精密机械研究所 Temperature test box with vibration isolation platform
CN113294487A (en) * 2021-06-18 2021-08-24 中国电子工程设计院有限公司 Integrally controlled vibration isolation system for large-scale precision equipment

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